1. A bis(phenyl)fluorene-backbone polymer represented by Formula A:
wherein:
the fluorene group is unsubstituted or substituted,
m is at least 1 and is less than about 750,
n is at least 1 and is less than about 750,
R1 is methylene or includes a non-fluorene-containing aryl linking group,
R2 is oxygen or an alkoxy group having from 1 to about 7 carbons in which the alkoxy oxygen is bonded to the hydrogen H or the group G, and
G is vinyl or allyl.
2. The polymer as claimed in claim 1, wherein the fluorene group is substituted, such that Formula A is represented by Formula 1:
wherein:
R3 is a hydroxyl, a hydrocarbon of about 10 carbons or less, or a halogen.
3. The polymer as claimed in claim 2, wherein:
R3 is the hydrocarbon of about 10 carbons or less, and
the hydrocarbon of about 10 carbons or less includes a C1-C10 alkyl group, a C6-C10 aryl group, or an allyl group.
4. The polymer as claimed in claim 1, wherein R1 is:
5. The polymer as claimed in claim 1, wherein the polymer has a weight average molecular weight of about 1,000 to about 30,000.
6. A naphthalene-backbone polymer represented by Formula B:
wherein:
the naphthalene group is unsubstituted or substituted,
m is at least 1 and is less than about 750,
n is at least 1 and is less than about 750,
R1 is methylene or includes a non-naphthalene-containing aryl linking group,
R2 is oxygen or an alkoxy group having from 1 to about 7 carbons in which the alkoxy oxygen is bonded to the hydrogen H or the group G, and
G is vinyl or allyl.
7. The polymer as claimed in claim 6, wherein the naphthalene group is substituted, such that Formula A is represented by Formula 2:
wherein:
R3, R4, and R5 are each independently a hydrogen, a hydroxyl, a hydrocarbon of about 10 carbons or less, or a halogen, and
at least one of R3, R4, and R5 is not hydrogen.
8. The polymer as claimed in claim 7, wherein:
at least one of R3, R4, and R5 is the hydrocarbon of about 10 carbons or less, and
the hydrocarbon of about 10 carbons or less includes a C1-C10 alkyl group, a C6-C10 aryl group, or an allyl group.
9. The polymer as claimed in claim 6, wherein R1 is:
10. The polymer as claimed in claim 6, wherein the polymer has a weight average molecular weight of about 1,000 to about 30,000.
11. A pyrene-backbone polymer represented by Formula C:
wherein:
the pyrene group is unsubstituted or substituted,
m is at least 1 and is less than about 750,
n is at least 1 and is less than about 750,
R1 is methylene or includes a non-pyrene-containing aryl linking group,
R2 is oxygen or an alkoxy group having from 1 to about 7 carbons in which the alkoxy oxygen is bonded to the hydrogen H or the group G, and
G is vinyl or allyl.
12. The polymer as claimed in claim 11, wherein the pyrene group is substituted, such that Formula C is represented by Formula 3:
wherein:
R3, R4, R5, R6, and R7 are each independently a hydrogen, a hydroxyl, a hydrocarbon of about 10 carbons or less, or a halogen, and
at least one of R3, R4, R5, R6, and R7 is not hydrogen.
13. The polymer as claimed in claim 12, wherein:
at least one of R3, R4, R5, R6, and R7 is the hydrocarbon of about 10 carbons or less, and
the hydrocarbon of about 10 carbons or less includes a C1-C10 alkyl group, a C6-C10 aryl group, or an allyl group.
14. The polymer as claimed in claim 11, wherein R1 is:
15. The polymer as claimed in claim 11, wherein the polymer has a weight average molecular weight of about 1,000 to about 30,000.
16. An antireflective hardmask composition, comprising:
an organic solvent;
an initiator; and
at least one polymer represented by Formulae A, B, or C:
wherein:
in Formula A, the fluorene group is unsubstituted or substituted,
in Formula B, the naphthalene group is unsubstituted or substituted,
in Formula C, the pyrene group is unsubstituted or substituted,
m is at least 1 and is less than about 750,
n is at least 1 and is less than about 750,
R1 is methylene or includes an aryl linking group,
R2 is oxygen or an alkoxy group having from 1 to about 7 carbons in which the alkoxy oxygen is bonded to the hydrogen H or the group G, and
G is vinyl or allyl.
17. The composition as claimed in claim 16, wherein the composition includes about 1 part to about 30 parts by weight of the at least one polymer, based on 100 parts by weight of the organic solvent.
18. The composition as claimed in claim 16, further comprising a crosslinker and a catalyst, wherein:
about 1% to about 20% of the weight of the composition is the at least one polymer,
about 0.001% to about 5% of the weight of the composition is the initiator,
about 75% to about 98.8% of the weight of the composition is the organic solvent,
about 0.1% to about 5% of the weight of the composition is the crosslinker, and
about 0.001% to about 0.05% of the weight of the composition is the catalyst.
19. The composition as claimed in claim 16, further comprising a crosslinker, wherein the crosslinker includes one or more of an etherified amino resin, an N-methoxymethyl-melamine resin, an N-butoxymethyl-melamine resin, a methylated urea resin, a butylated urea resin, a glycoluril derivative, a 2,6-bis(hydroxymethyl)-p-cresol compound, or a bisepoxy compound.
20. A process of patterning a material layer, the process comprising:
forming a hardmask layer on the material layer using the composition according to claim 16;
forming a radiation-sensitive imaging layer on the hardmask layer;
patternwise exposing the imaging layer to radiation to form a pattern of radiation-exposed regions in the imaging layer;
selectively removing portions of the imaging layer and the hardmask layer to expose portions of the material layer; and
etching the portions of the material layer that are exposed through openings in the hardmask layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
That which is claimed:
1. An isolated nucleic acid molecule selected from the group consisting of:
a) a nucleic acid molecule comprising a nucleotide sequence which is at least 60% identical to the nucleotide sequence of SEQ ID NO:1, SEQ ID NO:3, or the nucleotide sequence of the cDNA insert of the plasmid deposited with ATCC as Accession Number PTA-2014, wherein said nucleotide sequence encodes a polypeptide having biological activity;
b) a nucleic acid molecule comprising a fragment of at least 20 nucleotides of the nucleotide sequence of SEQ ID NO:1, SEQ ID NO:3, or the nucleotide sequence of the cDNA insert of the plasmid deposited with ATCC as Accession Number PTA-2014;
c) a nucleic acid molecule which encodes a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014;
d) a nucleic acid molecule which encodes a fragment of a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, wherein the fragment comprises at least 15 contiguous amino acids of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014;
e) a nucleic acid molecule which encodes a naturally occurring allelic variant of a biologically active polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, wherein the nucleic acid molecule hybridizes to a nucleic acid molecule comprising the complement of SEQ ID NO:1 or SEQ ID NO:3 under stringent conditions; and,
f) a nucleic acid molecule comprising the complement of a), b), c), d), or e).
2. The isolated nucleic acid molecule of claim 1, which is selected from the group consisting of:
a) a nucleic acid comprising the nucleotide sequence of SEQ ID NO:1, SEQ IDNO:3, the nucleotide sequence of the cDNA insert of the plasmid deposited with ATCC as Accession Number PTA-2014, or a complement thereof; and,
b) a nucleic acid molecule which encodes a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, or a complement thereof.
3. The nucleic acid molecule of claim 1 further comprising vector nucleic acid sequences.
4. The nucleic acid molecule of claim 1 further comprising nucleic acid sequences encoding a heterologous polypeptide.
5. A host cell which contains the nucleic acid molecule of claim 1.
6. The host cell of claim 5 which is a mammalian host cell.
7. A non-human mammalian host cell containing the nucleic acid molecule of claim 1.
8. An isolated polypeptide selected from the group consisting of:
a) a biologically active polypeptide which is encoded by a nucleic acid molecule comprising a nucleotide sequence which is at least 60% identical to a nucleic acid comprising the nucleotide sequence of SEQ ID NO:1, SEQ ID NO:3, or the nucleotide sequence of the cDNA insert of the plasmid deposited with ATCC as Accession Number PTA-2014,
b) a naturally occurring allelic variant of a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, wherein the polypeptide is encoded by a nucleic acid molecule which hybridizes to a nucleic acid molecule comprising the complement of SEQ ID NO:1 or SEQ ID NO:3 under stringent conditions; and,
c) a fragment of a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, wherein the fragment comprises at least 15 contiguous amino acids of SEQ ID NO:2; and
d) a polypeptide having at least 60% sequence identity to the amino acid sequence SEQ ID NO:2, wherein the polypeptide has biological activity.
9. The isolated polypeptide of claim 8 comprising the amino acid sequence of SEQ ID NO:2.
10. The polypeptide of claim 8 further comprising heterologous amino acid sequences.
11. An antibody which selectively binds to a polypeptide of claim 8.
12. A method for producing a polypeptide selected from the group consisting of:
a) a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014;
b) a polypeptide comprising a fragment of the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, wherein the fragment comprises at least 15 contiguous amino acids of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014;
c) a biologically active naturally occurring allelic variant of a polypeptide comprising the amino acid sequence of SEQ ID NO:2, or the amino acid sequence encoded by the cDNA insert of the plasmid deposited with the ATCC as Accession Number PTA-2014, wherein the polypeptide is encoded by a nucleic acid molecule which hybridizes to a nucleic acid molecule comprising the complement of SEQ ID NO:1 or SEQ ID NO:3;
d) a polypeptide having at least 60% sequence identity to the amino acid sequence of SEQ ID NO:2, wherein said polypeptide has biological activity; comprising culturing the host cell of claim 5 under conditions in which the nucleic acid molecule is expressed.
13. A method for detecting the presence of a polypeptide of claim 8 in a sample, comprising:
a) contacting the sample with a compound which selectively binds to a polypeptide of claim 8; and
b) determining whether the compound binds to the polypeptide in the sample.
14. The method of claim 13, wherein the compound which binds to the polypeptide is an antibody.
15. A kit comprising a compound which selectively binds to a polypeptide of claim 8 and instructions for use.
16. A method for detecting the presence of a nucleic acid molecule of claim 1 in a sample, comprising the steps of:
a) contacting the sample with a nucleic acid probe or primer which selectively hybridizes to the nucleic acid molecule; and
b) determining whether the nucleic acid probe or primer binds to a nucleic acid molecule in the sample.
17. The method of claim 16, wherein the sample comprises mRNA molecules and is contacted with a nucleic acid probe.
18. A kit comprising a compound which selectively hybridizes to a nucleic acid molecule of claim 1 and instructions for use.
19. A method for identifying a compound which binds to a polypeptide of claim 8 comprising the steps of:
a) contacting a polypeptide, or a cell expressing a polypeptide of claim 8 with a test compound; and
b) determining whether the polypeptide binds to the test compound.
20. The method of claim 19, wherein the binding of the test compound to the polypeptide is detected by a method selected from the group consisting of:
a) detection of binding by direct detecting of test compoundpolypeptide binding;
b) detection of binding using a competition binding assay;
c) detection of binding using an assay for 40322-like activity.
21. A method for modulating the activity of a polypeptide of claim 8 comprising contacting a polypeptide or a cell expressing a polypeptide of claim 8 with a compound which binds to the polypeptide in a sufficient concentration to modulate the activity of the polypeptide.
22. A method for identifying a compound which modulates the activity of a polypeptide of claim 8, comprising:
a) contacting a polypeptide of claim 8 with a test compound; and
b) determining the effect of the test compound on the activity of the polypeptide to thereby identify a compound that modulates the activity of the polypeptide.