1. A device comprising:
a dispenser configured to release a chemical toward an edge bead of a substrate; and
a splash controller concentrically positioned at least partially around said dispenser and physically unattached from the edge bead, the splash controller being configured to draw the chemical from at least one surface of the substrate and toward said splash controller, wherein said splash controller is configured to generate a gas pressure around the edge bead that is lower than an ambient gas pressure, and wherein said splash controller is configured to physically intercept the chemical.
2. The device in claim 1, wherein the splash controller is around the edge bead.
3. The device of claim 1, wherein the splash controller completely surrounds said dispenser.
4. The device of claim 1, wherein the dispenser has a diameter smaller than a diameter of the splash controller.
5. The device of claim 1, wherein said dispenser is configured to release a chemical on a first side of a wafer and a second side of the wafer toward an edge bead, wherein the splash controller completely surrounds said dispenser.
6. A device comprising:
a dispenser configured to release a chemical toward an edge bead on a semiconductor substrate; and
a splash controller including a vacuum port, wherein the vacuum port is concentrically positioned about the dispenser, wherein the vacuum port is configured to generate a gas pressure around the edge bead and the dispenser, the generated gas pressure being sufficiently lower than an ambient gas pressure to draw the chemical from at least one surface of the substrate and toward the splash controller, wherein the dispenser has a smaller diameter than the vacuum port, and wherein the splash controller is configured to physically intercept the chemical.
7. The device of claim 6, wherein said dispenser is to release a chemical on a first side of a semiconductor substrate.
8. The device of claim 7, wherein said dispenser is to release a chemical on a second side of a semiconductor substrate.
9. The device of claim 8, wherein said dispenser is to release a solvent.
10. The device of claim 7, wherein said dispenser is to release a photoresist solvent.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An internal combustion engine, comprising:
a block defining at least one combustion cylinder;
an intake manifold fluidly coupled with at least one said combustion cylinder;
an exhaust manifold fluidly coupled with at least one said combustion cylinder;
a turbocharger including a turbine fluidly coupled with said exhaust manifold, and a compressor fluidly coupled with said intake manifold;
an EGR valve fluidly coupled between said exhaust manifold and said intake manifold, said EGR valve including a valve stem, a shield surrounding said valve stem, a purge air inlet associated with said valve stem, said purge air inlet being in fluid communication with said compressor, and a purge air chamber defined by said shield, said purge air chamber in communication with said purge air inlet.
2. The internal combustion engine of claim 1, wherein said EGR valve includes a purge air port terminating at said purge air inlet.
3. The internal combustion engine of claim 1, wherein said EGR valve is fluidly interconnected between an EGR cooler and said intake manifold.
4. The internal combustion engine of claim 1, including an aftercooler interconnected between said compressor and said intake manifold, said purge air inlet being in fluid communication with said compressor upstream from said aftercooler.
5. The internal combustion engine of claim 1, wherein said EGR valve includes an open frame defining each of said purge air inlet and said purge air chamber.
6. The internal combustion engine of claim 5, wherein said valve stem has a longitudinal axis, and said purge air inlet and said purge air chamber define a cross flow direction transverse to said longitudinal axis.
7. An exhaust gas recirculation system for an internal combustion engine, the internal combustion engine including an intake manifold, an exhaust manifold, and a turbocharger compressor coupled with the intake manifold, said exhaust gas recirculation system comprising: an EGR valve fluidly coupled between said exhaust manifold and said intake manifold, said EGR valve including a valve stem, a shield surrounding said valve stem, a purge air inlet associated with said valve stem, said purge air inlet being in fluid communication with said compressor, and a purge air chamber defined by said shield, said purge air chamber in communication with said purge air inlet.
8. The exhaust gas recirculation system of claim 7, wherein said EGR valve includes a purge air port terminating at said purge air inlet.
9. The exhaust gas recirculation system of claim 7, wherein said EGR valve includes an open frame defining each of said purge air inlet and said purge air chamber.
10. The exhaust gas recirculation system of claim 9, wherein said valve stem has a longitudinal axis, and said purge air inlet and said purge air chamber define a cross flow direction transverse to said longitudinal axis.
11. An EGR valve for use in an exhaust gas recirculation system of an internal combustion engine, said EGR valve comprising:
a valve body;
a valve stem carried by said valve body;
a shield surrounding said valve stem;
a valve disk attached to said valve stem;
a purge air chamber defined by said shield;
a purge air inlet in communication with said purge air chamber for receiving combustion air; and
an EGR inlet for receiving exhaust gas.
12. The EGR valve of claim 11, wherein said EGR valve includes a purge air port terminating at said purge air inlet.
13. The EGR valve of claim 11, wherein said valve body includes an open frame defining each of said purge air inlet and said purge air chamber.
14. The EGR valve of claim 13, wherein said valve stem has a longitudinal axis, and said purge air inlet and said purge air chamber define a cross flow direction transverse to said longitudinal axis.