1. Apparatus for measuring and controlling the temperature of a heatable object used to warm or cook food, comprising:
a LWMC transmitter operably connected to the heatable object, for receiving and transmitting information concerning one or more parameters describing the heatable object; and
a LWMC receiver associated with a heater, the LWMC transmitter communicating information concerning one or more of the heatable object parameters to the LWMC receiver, and the LWMC receiver communicating controls to the heater based on the one or more heatable object parameters.
2. The apparatus of claim 1, wherein the heater comprises an induction heater which transmits magnetic waves to the heatable object, and wherein the transmitter is powered by a magnetic field generated by the induction heater.
3. The apparatus of claim 1, wherein the heater comprises a direct heater.
4. The apparatus of claim 1, wherein the LWMC transmitter is magnetically coupled to and detachable from the heatable object.
5. The apparatus of claim 2, further comprising a trivet in contact with the heatable object, the trivet resting on a countertop and acting as an insulator to limit the amount of heat transferring from the heatable object through the trivet to the countertop.
6. The apparatus of claim 5, wherein the heater is located below the countertop, and the apparatus indicating to the user when the cookware is properly located over the induction heater, and also to indicate whether the induction heater is currently heating the heatable object.
7. The apparatus of claim 1, wherein the heatable object comprises a vessel used to warm or cook food.
8. The apparatus of claim 7, wherein the vessel includes one or more of the following: a cookware item such as but not limited to a pot, pan or other cooking dish; a buffet warming tray; a pellet; or a pizza warming box.
9. The apparatus of claim 4, further comprising a magnetic detachable coupler carrying the LWMC transmitter, the coupler being removably attached to the heatable object.
10. The apparatus of claim 9, wherein the magnetic coupler comprises a housing in which the transmitter is located, and a tongue portion having a temperature sensor.
11. The apparatus of claim 10, wherein the tongue portion is in abutting contact with the heatable object when the magnetic coupler is magnetically coupled to the heatable object.
12. The apparatus of claim 5, wherein the LWMC transmitter and associated electronic circuitry is located within channels or cavities on the trivet.
13. The apparatus of claim 4, further comprising an antenna associated with the heater and facilitating communication between the LWMC transmitter and the LWMC receiver, and wherein a housing of the magnetic detachable coupler has a length sufficient to allow positioning of the transmitter within the housing at a location which is within a reception area of the antenna.
15. The apparatus of claim 4, further comprising adhesive means attached to the coupler, permitting the LWMC transmitter to be attached to non-metal heatable objects.
16. The apparatus of claim 5, wherein heater comprises an induction heating unit, and wherein the trivet includes indicating means showing a user when the trivet is properly positioned within a magnetic field of the induction heating unit.
17. The apparatus of claim 16, wherein the indicating means also displays whether the induction heating unit is currently heating the heatable object.
18. The apparatus of claim 1, wherein the LWMC transmitter has an electronic memory capable of storing electronic information pertaining to the heating history previously experienced by the heatable object, the LWMC transmitter being operable to transmit the information when interrogated by the LWMC receiver, and the transmitter also being operable to store updated information received by the transmitter.
19. The apparatus of claim 1, wherein one or more of the parameters of the heatable object is temperature, and further comprising a temperature-sensitive switch.
20. Apparatus for measuring and controlling the temperature of a heatable object used to warm or cook food, comprising:
a magnetic induction heater including a magnetic field generator for generating a magnetic field, the heater having a LWMC receiver associated with it;
the heatable object including a LWMC transmitter; and
the heater having a microprocessor operably connected with the LWMC receiver for initiating the heating of the object only upon placement of the object proximal to the heater and in a position for LWMC communication between the transmitter and the receiver, and for controlling operation of the heater in response to information received from the LWMC transmitter.
21. The apparatus of claim 20, wherein the heatable object includes a food-holding container and an induction heating element.
22. The apparatus of claim 21, wherein the induction heating element comprises a pellet.
23. The apparatus of claim 20, wherein the microprocessor is operable to initiate different heater operation sequences in response to the information received from the LWMC transmitter.
24. A method of heating an object containing food, comprising the steps of:
providing a magnetic induction heater including a magnetic field generator for generating a magnetic field, the heater having an LWMC receiver associated therewith;
providing an object to be magnetically heated, including an induction heatable element and an LWMC transmitter;
placing the object proximal to the heater in a location for magnetic induction heating of the element and in a position for LWMC communication between the transmitter and the receiver; and
initiating the heating of the object and controlling the operation of the heater in response to the placement of the object and receipt of information from the LWMC transmitter.
25. The method of claim 24, wherein the initiating and controlling step is carried out by a microprocessor programmed to initiate different heater operation sequences in response to information received from the transmitter.
26. A food delivery system, comprising:
a food-holding container including an induction heatable element;
a magnetic induction heater including a magnetic field generator for generating a magnetic field;
the heater being operable to heat the element while the element is magnetically coupled with the magnetic field and the element remains within the container; and
a temperature controller operable to control the temperature of the element during the course of heating of the element, including a detector operable to detect an induction heater circuit parameter whose magnitude is dependent upon the impedance presented by the heating element when the element is magnetically coupled with the magnetic field, and control circuitry operable to alter the magnetic field strength of the magnetic field in response to the magnitude, or rate of change of the magnitude, of the detected parameter, during the course of heating;
wherein the temperature controller communicates with the heater using LWMC magnetic communication.
27. Apparatus for measuring and controlling the temperature of an object to be heated used to warm or cook food, comprising:
an LWMC transmitter operably connected to the heatable object;
an LWMC receiver associated with a heater,
a transmitting coil for receiving a sine wave modulated signal and for transmitting the signal over a magnetic field;
a receiving coil for receiving the sine wave modulated signal transmitted by the transmitting coil;
electronic circuitry for demodulating the signal received by the receiving coil; and
a processor for extracting the temperature of the heatable object from the pulse width of the demodulated signal;
wherein the transmitter and the receiver communicate using LWMC.
28. A detachable apparatus for measuring the temperature of an object to be heated, providing for closed-loop heating control, comprising:
an item of cookware to be heated, the cookware item having a LWMC transmitter associated with it, the transmitter being capable of communication with a LWMC receiver in communication with heating controls; and
a magnetic detachable coupler carrying the transmitter, the coupler permitting removable attachment of the coupler to the heatable object.
29. The detachable apparatus of claim 28, wherein the heating control employs magnetic induction heating.
30. The apparatus of claim 1, further comprising a distribution system of gain and filtering comprising a capacitor in parallel with an antenna coil which tunes the antenna as a L-C parallel resonant circuit at the LWMC frequency, enabling selection of desired induction field signals for an induction heater associated with the LWMC transmitter and the LWMC receiver, and enabling rejection of induction field signals associated with adjacent induction heater units.
31. The apparatus of claim 1, further comprising a transmission modulation and demodulation system for enabling the LWMC receiver to sufficiently differentiate the LWMC transmitter from transmitters associated with adjacent heater units, whereby the system envelope-detects a received signal using a peak detector that follows the temperature modulation, but filters out the LWMC carrier frequency associated with transmitters of the adjacent heater units.
32. The apparatus of claim 2, further comprising a protection circuit designed to avoid damaging the LWMC transmitter in the event that the induction heater is connected to a power source greater than the heater is designed for, the protection circuit comprising a power-deriving coil, a rectifier, and a voltage pre-regulator.
33. Apparatus for measuring and controlling the temperature of a heatable object used to warm or cook food, comprising:
a LWMC transmitter operably connected to the heatable object, for receiving and transmitting information concerning one or more parameters describing the heatable object; and
a LWMC receiver associated with an induction heater, the LWMC transmitter communicating information concerning one or more of the heatable object parameters to the LWMC receiver, and the LWMC receiver communicating controls based on the one or more heatable object parameters to the heater;
an induction heater generating an induction field, and a power pickup coil receiving energy from the induction field and powering a temperature sensor coupled to a low frequency oscillator and an amplifier, the oscillator generated a modulated signal amplified by the amplifier and used to drive a low frequency magnetic field transducer coil for generating long wave magnetic communication.
34. The apparatus of claim 33, wherein the transducer coil includes a ferrite core.
35. The apparatus of claim 33, further comprising an induction unit including the induction heater and a receiving coil for receiving and transmitting induction heating-related data to an induction unit control processor.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of manufacturing a metal silicide electrode for a semiconductor device, comprising:
co-depositing by physical vapor deposition, a homogeneous mixture consisting of germanium atoms and transition metal atoms to form a metal-germanium alloy layer on a semiconductor substrate; and
reacting said metal-germanium alloy layer and said semiconductor substrate to form a metal silicide electrode.
2. The method as recited in claim 1, wherein said transition metal atoms comprise nickel.
3. The method as recited in claim 1, wherein physical vapor depositing comprises sputtering from a nickel germanium alloy target.
4. The method as recited in claim 3, wherein said nickel germanium alloy target comprises less than about 10 atom percent germanium.
5. The method as recited in claim 3, wherein said nickel germanium alloy target comprises less than about 5 atom percent germanium.
6. The method as recited in claim 3, wherein said nickel germanium alloy target comprises between about 0.1 and about 5 atom percent germanium.
7. The method as recited in claim 3, wherein said metal-germanium alloy layer has substantially the same nickel and germanium concentration as said nickel germanium alloy target.
8. The method as recited in claim 3, wherein sputtering includes a direct current power of about 600 Watts a sputtering chamber vapor pressure of about 5 Torr.
9. The method as recited in claim 1, wherein reacting comprises heating said metal-germanium alloy layer and said semiconductor substrate to between about 250\xb0 C. and about 550\xb0 C. for at least about 0.1 second.
10. The method as recited in claim 1, wherein reacting comprises heating said metal-germanium alloy layer and said semiconductor substrate to between about 250\xb0 C. and about 350\xb0 C. for at least about 0.1 second.
11. The method as recited in claim 1, wherein said metal silicide electrode comprises nickel silicide.
12. The method as recited in claim 1, wherein said metal silicide electrode comprises sourcedrain electrodes in a MOS transistor.
13. The method as recited in claim 1, wherein said metal silicide electrode comprises sourcedrain electrodes in a pMOS transistor.
14. The method as recited in claim 1, wherein an interface between said metal silicide electrode and said semiconductor substrate has an average roughness of less than about 40 percent.
15. The method as recited in claim 1, wherein said metal silicide electrode has an average thickness that is between about 1 time and 3 times a thickness of said alloy layer.
16. The method as recited in claim 1, wherein said metal silicide electrode has a thickness of between about 10 nanometers and about 60 nanometers.