1. Method for forming a strained Si layer comprising:
forming an epitaxial SiGe layer on a monocrystalline Si surface layer of a substrate, the substrate including a support layer and a buried silicon dioxide layer, the monocrystalline Si surface layer residing on the buried silicon dioxide layer;
ion implanting said Si surface layer and said epitaxial SiGe layer to transform said Si surface layer into an amorphous Si layer and a portion of said epitaxial SiGe layer into an amorphous SiGe layer, a further portion of said epitaxial SiGe layer being a remaining monocrystalline SiGe layer;
said amorphous Si layer, said amorphous SiGe layer and said remaining monocrystalline SiGe layer forming a layer stack on said buried silicon dioxide layer;
depositing a silicon dioxide capping layer on said remaining monocrystalline SiGe layer;
bonding the silicon dioxide capping layer to a silicon dioxide surface layer of a second substrate and thereafter removing said support layer and said buried silicon dioxide layer by etching.
2. Method according to claim 1, further comprising patterning of said layer stack for forming active parts of a MOSFET structure.
3. Method according to claim 1, further comprising:
re-crystallizing of said amorphous Si layer and said amorphous SiGe layer by a solid phase epitaxy regrowth process at an interface between said remaining monocrystalline SiGe layer and said amorphous SiGe layer,
said amorphous Si layer being transformed into an epitaxial strained Si layer and said amorphous SiGe layer being transformed into a re-grown crystalline SiGe layer.
4. Method according to claim 1, characterized in that said strained Si layer is a gate channel in a MOSFET structure.
5. Method according to claim 3, characterized in that an annealing temperature during said solid phase epitaxy regrowth process is substantially below 600\xb0 C.
6. Method according to claim 1, characterized in that said Si surface layer has a thickness of less than 10 nm.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. An electronic device comprising:
a device main body whose use is permitted by inserting an authentic user identification card on which personal information of a holder is recorded;
card control means for detecting removalinsertion of the user identification card frominto said device main body during a power-off state; and
device control means for displaying a warning representing removalinsertion of the card on the basis of a detection result of said card control means in power-on operation.
2. A device according to claim 1, wherein
said device further comprises memory means for storing card removalinsertion information of the user identification card, and
said card control means always monitors whether the user identification card is inserted in said device main body, and when removalinsertion of the card is detected, writes card removalinsertion information in said memory means.
3. A device according to claim 2, wherein said device control means displays a warning on the basis of the card removalinsertion information written in said memory means.
4. A device according to claim 2, wherein every time removalinsertion of the user identification card is detected, said card control means sequentially writes card insertionremoval information in the memory means, and creates a log of the card insertionremoval information.
5. A device according to claim 2, wherein said device main body includes a portable telephone which communicates with a base station by radio.
6. A device according to claim 5, wherein the card removalinsertion information includes at least one information selected from the group consisting of removal time of the user identification card, position information of the portable telephone, a removal location of the user identification card, and a reception field strength from the base station when the user identification card was removed.
7. A device according to claim 1, wherein said card control means periodically transmits a confirmation signal to the user identification card, and when said card control means does not receive any response to the confirmation signal, detects removalinsertion of the card.
8. A device according to claim 1, wherein said card control means always confirms a physical connection state to the user identification card, and when said card control means cannot confirm physical connection to the user identification card, detects removalinsertion of the card.
9. An electronic device which permits use when a user identification card on which personal information of a holder is recorded is inserted, comprising:
detection means for detecting whether the user identification card was removed and inserted; and
control means for displaying a warning including at least removal time of the user identification card when said detection means detects insertionremoval of the user identification card.
10. A unique information management method for an electronic device, comprising the steps of:
permitting use of a device main body when an authentic user identification card on which personal information of a holder is recorded is inserted;
detecting removalinsertion of the user identification card fromto the device main body during a power-off state; and
displaying a warning representing removalinsertion of the card on the basis of a detection result in power-on operation.
11. A method according to claim 10, further comprising the steps of:
always monitoring whether the user identification card is inserted in the device main body; and
storing card removalinsertion information when removalinsertion of the card is detected.
12. A method according to claim 11, wherein the step of displaying a warning comprises the step of displaying a warning on the basis of the stored card removalinsertion information.
13. A method according to claim 11, wherein the storing step comprises the step of sequentially writing card insertionremoval information, and creating a log of the card insertionremoval information every time removalinsertion of the user identification card is detected.
14. A method according to claim 10, wherein the device main body includes a portable telephone which communicates with a base station by radio.
15. A method according to claim 14, wherein the card removalinsertion information includes at least one information selected from the group consisting of removal time of the user identification card, position information of the portable telephone, a removal location of the user identification card, and a reception field strength from the base station when the user identification card was removed.
16. A method according to claim 10, wherein the detecting step comprises the step of periodically transmitting a confirmation signal to the user identification card, and when no response to the confirmation signal is received, detecting removalinsertion of the card.
17. A method according to claim 10, wherein the detecting step comprises the step of always confirming a physical connection state to the user identification card, and when physical connection to the user identification card cannot be confirmed, detecting removalinsertion of the card.