1. A process for treating a wafer-shaped article, comprising:
positioning a wafer-shaped article on a spin chuck in a predetermined orientation wherein a lower surface of the wafer-shaped article is downwardly-facing and spaced a predetermined distance from an upper surface of the spin chuck thereby defining a gap between the lower surface of the wafer-shaped article and the upper surface of the spin chuck;
dispensing a treatment liquid onto the lower surface of the wafer-shaped article while rotating the wafer-shaped article; and
dispensing a gas at least to an annular region of the gap defined by the lower surface of the wafer-shaped article and the upper surface of the spin chuck.
2. The process according to claim 1, wherein the steps of dispensing a treatment liquid and dispensing a gas are at least partly performed concurrently.
3. The process according to claim 1, wherein the treatment liquid is an etching liquid.
4. The process according to claim 2, wherein the etching liquid is dilute hydrogen fluoride.
5. The process according to claim 3, further comprising:
dispensing a rinsing liquid onto the lower surface of the wafer-shaped article while rotating the wafer-shaped article; and
dispensing a gas into the gap defined by the lower surface of the wafer-shaped article and the upper surface of the spin chuck.
6. The process according to claim 5,
wherein the steps of dispensing a rinsing liquid and dispensing a gas are at least partly performed concurrently.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of depositing a filament tow into a stationary can, comprising the steps of:
conveying the filament tow in a conveyance direction and depositing the filament tow into the stationary can by a driven conveyance means; and
guiding the filament tow such that the deposition position of the filament tow in the stationary can changes constantly;
wherein for guiding the filament tow, the conveyance means performs a first oscillating motion transverse to the conveyance direction and a superimposed second oscillating motion transverse to the conveyance direction, the direction of the first oscillating motion being oriented transverse to the direction of the second oscillating motion; and
wherein the filament tow is guided by the conveyance means formed by two driven reels which cooperate with one another for conveying the filament tow.
2. The method of claim 1, wherein the first and second oscillating motions of the conveyance means are performed by oscillating swivel motions.
3. The method of claim 1, wherein the first oscillating motion of the conveyance means is performed by oscillating swivel motions and the second oscillating motion of the conveyance means is performed by oscillating linear motions.
4. The method of claim 1 wherein the first and second oscillating motions of the conveyance means are carried out simultaneously at different speeds.
5. The method of claim 1 wherein the speeds of the first and second oscillating motions of the conveyance means are changed and controlled independently of one another.