1. A thin film piezoelectric vibrator comprising a resonance part including at least a pair of vibration units, a connection part that connects the pair of vibration units, a vibration node at a center of each of the pair of vibration units, and a supporter that supports the resonance part,
wherein the pair of vibration units are symmetrical with respect to a plane, and the supporter is configured to hold the resonance part at each of the vibration nodes, and is connected to an insulating substrate at each of the vibration nodes of the resonance part; and
wherein the vibration units each comprise a multilayer structure including:
a piezoelectric thin film,
a first metal electrode film, and
a second metal electrode film, wherein
at least a part of the piezoelectric thin film is configured to be interposed between the first and second metal electrodes, and
the piezoelectric thin film is polarized in a direction perpendicular to a film surface, and vibrates in a radial extension mode.
2. The thin film piezoelectric vibrator according to claim 1, wherein a width of the connection part is one-fourth or less of a width of each of the vibration units.
3. A thin film piezoelectric vibrator comprising a resonance part including at least pair of vibration units, a connection part that connects the pair of vibration units, a vibration node at center of each of the pair of vibration units, a supporter that supports the resonance part and an inputoutput terminal,
wherein the supporter is connected onto an insulating substrate at each of the vibration nodes of the pair of vibration units,
the pair of vibration units that are symmetrical with respect to a plane, and
the supporter and the inputoutput terminals are connected at each of the vibration nodes; and
wherein each of the vibration units has a multilayer structure comprising:
a piezoelectric thin film;
a first metal electrode film; and
a second metal electrode film, wherein at least a part of the piezoelectric thin film is interposed between the first and second metal electrodes, and
the piezoelectric thin film is polarized in a direction perpendicular to a film surface and vibrates in radial extension mode.
4. A thin film piezoelectric vibrator comprising a resonance part including a plurality of vibration units, at least one connection part that connects the plurality of vibration units, a vibration node at center of each of the plurality of vibration units, a supporter that supports the resonance part and an inputoutput terminal,
wherein the supporter is connected onto an insulating substrate at the vibration nodes of each of the plurality of vibration units, and
the plurality of vibration units and the at least one connection part are formed on the insulating substrate as films;
wherein each of the plurality of vibration units has a multilayer structure comprising:
a piezoelectric thin film,
a first metal electrode film, and
a second metal electrode film, wherein at least a part of the piezoelectric thin film is interposed between the first and second metal electrodes,
the piezoelectric thin film is polarized in a direction perpendicular to a film surface and vibrates in radial extension mode; and
wherein at least two of the plurality of vibration units connected to each other via the connection part are symmetrical with respect to a plane,
the supporter is configured to hold the resonance part at least at a center of the second metal electrode film of each of the two vibration units,
at least a part of the supporter is elastically connected to the insulating substrate,
an elastic insulating layer is provided in at least a part between the two vibration units and the insulating substrate,
the supporter serves as an electrical drawing line,
the connection part has a multilayer structure including the first metal electrode film and the piezoelectric thin film,
the elastic insulating layer is interposed between the connection part and the insulating substrate,
the first metal electrode films of the two vibration units are electrically connected in direct current to each other via the connection part,
the second metal electrode films of the two vibration units are electrically isolated in direct current from each other,
the piezoelectric thin films of the two vibration units are elastically connected to each other via the connection part,
the piezoelectric thin films of the two vibration units are polarized in a direction perpendicular to a film surface,
the first metal electrode films of the two vibration units are electrically isolated in direct current from the other vibration units or the inputoutput terminals, and
a width of the connection part is one-fourth or less of a width of the two vibration units.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An electro-optical device, comprising:
a matrix of pixel elements;
a matrix of pixel drivers, each of which corresponds to one of the pixel elements; and
a matrix of element processors, each of which corresponds to one of the pixel drivers executing grayscale calculation for transforming the grayscale resolution of the pixel data into another grayscale resolution, which is intrinsic in the couple of the pixel element and the driver, with reference to error distributed from the adjacent element processors in order to supply the result of the calculation to the corresponding pixel driver, and also to distribute the error of the grayscale calculation to the adjacent pixel element processors,
superior layers of a matrix of element processors providing the element processors with pixel data, which is fed to each of the element processors of the matrix, and
element processors on an edge of the matrix using constant values in substitute for error distributed from the adjacent processors.
2. The electro-optical device according to claim 1, each element processor being implemented as an asynchronous circuit without clocking and being connected to the adjacent element processors by using a handshaking protocol.
3. The electro-optical device according to claim 2, each element processor being configured to be able to evaluate complex expression written in reverse polish notation (RPN).
4. The electro-optical device according to claim 1 further comprising:
a color measuring system that consists of a color measuring means and a control circuit for feeding back error in color space to the element processors that is connected to the element drivers.
5. The electro-optical device according to claim 4 further comprising a locating means for locating the color measuring means on arbitrary position in the matrix of pixels.
6. An electronic device comprising the electro-optical device according to claim 1.
7. A display structure into which the electro-optical device according to claim 1.
8. An electro-optical device, comprising:
a matrix of pixel elements;
a matrix of pixel drivers, each of which corresponds to one of the pixel elements;
a first layer of a matrix of the element processors, each of which corresponds to one of the pixel driver executing grayscale calculation for transforming the grayscale resolution of the pixel data into another grayscale resolution, which is intrinsic in the couple of the pixel element and the driver, with reference to error distributed from the adjacent element processors in order to supply the result of the calculation to the corresponding pixel driver, and also to distribute the error of the grayscale calculation to the adjacent pixel element processors; and
a second layer of a matrix of element processors, each of which is mapped to either one or more element processors of the first layer matrix, providing the element processors of the first layer matrix with pixel data, element processors on the edge of the first layer matrix using constant values in substitute for error distributed from the adjacent processors.
9. The electro-optical device according to claim 8, each element processor of the second layer matrix being mapped to either one or more element processors in the first layer matrix and collaborating in transforming the source image data in logical space into the pixel data in physical space that is supplied to the first element processors.
10. The electro-optical device according to claim 9, element processors of the second layer matrix collaborating in performing operations of interpolation and extrapolation upon the pixel data in logical space to generate the pixel data in physical space.