1. A toolbox comprising:
a receiving seat including two sidewalls, an upper wall, and a lower wall spaced from the upper wall in a vertical direction, with the receiving seat being annular and defining a first receiving space, with each of the two sidewalls including a first guiding groove and a pivot;
a pivotal seat received in the first receiving space and including a tool receiving portion, with the tool receiving portion adapted for receiving tools, with the pivotal seat further including two sides, with each of the two sides of the pivotal seat including an axle received in the first guiding groove of one of the two sidewalls of the receiving seat, with each of the two sides of the pivotal seat further including a pivot coupling portion coupled with the pivot of one of the two sidewalls of the receiving seat;
a pressing seat mounted to an outer side of the receiving seat and movable relative to the receiving seat in the vertical direction, with the pressing seat including two vertical portions respectively mounted to outer sides of the two sidewalls of the receiving seat, with the pressing seat further including a top portion connected between upper ends of the two vertical portions, with each of the two vertical portions including a second guiding groove extending in a transverse direction perpendicular to the vertical direction and having a wall face, with each axle of the pivotal seat received in the second guiding groove of one of the two vertical portions of the pressing seat; and
an elastic element for returning the pressing seat,
wherein when the pressing seat is not pressed, the pivotal seat is in a storage position received in the first receiving space of the receiving seat, and
wherein when the pressing seat is pressed, the wall face of each second guiding groove of the pressing seat presses against and moves one of the axles of the pivotal seat to move along one of the first guiding grooves, the pivot coupling portions of the pivotal seat couple with the pivots of the receiving seat, and the pivotal seat pivots to an exposed position permitting access to the tools.
2. The toolbox as claimed in claim 1, with the each first guiding groove of the receiving seat inclining downwards, with each first guiding groove including an upper, vertical, rectilinear section in an intermediate portion of one of the two sidewalls, with each first guiding groove further including an arcuate section below the upper, vertical, rectilinear section, with each of the two sides of the pivotal seat including a groove having an opening in a bottom end of the groove, with each pivot of the receiving seat received in one of the grooves of the pivotal seat, and with each pivot coupling portion of the pivotal seat located in a top end of one of the grooves of the pivotal seat.
3. The toolbox as claimed in claim 2, with each first guiding groove of the receiving seat including an end having an opening in communication with the arcuate section, and with the opening of each first guiding groove permitting one of the axles of the receiving seat to be easily inserted into one of the first guiding grooves.
4. The toolbox as claimed in claim 2, with each of the two sidewalls of the receiving seat including an outer side having a vertical groove and two vertical ridges on two sides of the vertical groove, and with each of the two vertical portions of the pressing seat having a rail slideably received in one of the vertical grooves of the receiving seat.
5. The toolbox as claimed in claim 2, with the upper wall of the receiving seat including a positioning plate, with the positioning plate including an outer side having an engagement member, with the top portion of the pressing seat including a front wall, a rear wall, and a top wall, with the front wall, the rear wall, and the top wall defining a second receiving space, with the top wall including a positioning groove, and with the positioning plate releasably engaged with the positioning groove, wherein the positioning plate disengages from the positioning groove when the pressing seat is not pressed, and wherein the positioning plate engages with the positioning groove when the pressing seat is pressed.
6. The toolbox as claimed in claim 5, with the engagement member including an outer surface having a first slant guiding face, with the engagement member further including a bottom having an engagement edge, with the positioning groove of the pressing seat defined in the top wall and an upper end of the front wall of the pressing seat, with the front wall including an inner face having a second slant guiding face, and with the second slant guiding face sliding along and pressing against the first slant guiding face when the pressing seat is pressed, with the engagement member extending through the positioning groove, and with the engagement edge engaged with and positioned at an edge of the positioning groove.
7. The toolbox as claimed in claim 5, with the upper wall of the receiving seat, including a top face having a first attachment portion, with the top wall of the pressing seat including an inner face with a second attachment portion, and with the elastic element being a compression spring and having two ends respectively attached to the first attachment portion and the second attachment portion.
8. The toolbox as claimed in claim 1, with the pressing seat further including a guiding portion below each second guiding groove, with each guiding portion including a recessed portion receiving an end of one of the axles of the pivotal seat, and with each guiding portion further including a partitioning protrusion formed between a top end of the recessed portion and the second guiding groove.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for fabricating an interconnection structure, comprising:
providing a substrate having a first conductive layer thereon;
forming an ultra low-k material layer on the substrate;
removing a portion of the ultra low-k material layer, so as to form an opening to expose the first conductive layer; and
performing a dry-cleaning process by using a gas, so as to clean a surface of the first conductive layer exposed by the opening, the dry-cleaning process being performed at a temperature in a range from the room temperature to 100\xb0 C.
2. The method for fabricating an interconnection structure as claimed in claim 1, wherein the gas comprises hydrogen gas.
3. The method for fabricating an interconnection structure as claimed in claim 2, wherein the gas comprises the hydrogen gas in an amount by weight of 20% to 50%.
4. The method for fabricating an interconnection structure as claimed in claim 2, wherein the gas further comprises inert gas.
5. The method for fabricating an interconnection structure as claimed in claim 4, wherein the inert gas comprises helium gas.
6. The method for fabricating an interconnection structure as claimed in claim 5, wherein a ratio of the hydrogen gas to the helium gas is from 1:2 to 1:4.
7. The method for fabricating an interconnection structure as claimed in claim 6, wherein in the gas, a flow rate of the hydrogen gas is 200 sccm, and a flow rate of the helium gas is 800 sccm.
8. The method for fabricating an interconnection structure as claimed in claim 1, wherein the dry-cleaning process is performed at the temperature in the range from the room temperature to 60\xb0 C.
9. The method for fabricating an interconnection structure as claimed in claim 8, wherein the dry-cleaning process is performed at 50\xb0 C.
10. The method for fabricating an interconnection structure as claimed in claim 1, further comprising forming a barrier layer to cover the first conductive layer on the substrate before forming the ultra low k material layer, and after removing the portion of the ultra low-k material layer, a portion of the barrier layer being further removed, so as to form the opening to expose the portion of the first conductive layer.
11. The method for fabricating an interconnection structure as claimed in claim 11, before removing the portion of the ultra low k material layer, further comprising:
forming a hard mask on the ultra low-k material layer; and
removing a portion of the hard mask, so as to expose the portion of the ultra low-k material layer for forming the opening.
12. The method for fabricating an interconnection structure as claimed in claim 11, wherein the method of forming the opening comprise:
removing a first portion of the ultra low-k material layer to form a trench; and
removing a second portion of the ultra low-k material layer located within the trench to form a via hole construct the opening with the trench.
13. The method for fabricating an interconnection structure as claimed in claim 11, further comprising filling a second conductive layer in the opening, so as to make the second conductive layer electrically connect to the first conductive layer.
14. The method for fabricating an interconnection structure as claimed in claim 13, before filling the second conductive layer in the trench and the opening, further comprising forming a second barrier layer to cover sidewalls of the opening.
15. The method for fabricating an interconnection structure as claimed in claim 1, wherein a dielectric coefficient of the ultra low-k material layer is in a range from 1.9 to 2.5.
16. The method for fabricating an interconnection structure as claimed in claim 15, wherein the dielectric coefficient of the ultra low-k material layer is 2.0.