1. At a light-weight storage node server of a computerized environment that includes one or more production servers and a centralized backup server configured to administer backup solutions of data at the one or more production servers, a method of backing up data of at least one of the one or more production servers in accordance with instructions received from the centralized backup server, comprising the acts of:
receiving control settings from a centralized backup server, the control settings configured to instruct an assigned set of one or more production servers in accordance with a protection intent;
communicating the protection intent to the assigned one or more production servers;
receiving an application-consistent snapshot of a data set from the production server, wherein the application-consistent snapshot represents a first point-in-time;
receiving an application-consistent snapshot of an update to the data set from the production server, wherein the application-consistent snapshot represents a second point-in-time of the data set; and
storing at least the first point-in-time and the second point-in-time snapshots of the data set from the production server in a storage volume.
2. The method as recited in claim 1, further comprising an act of, upon request from a remote storage node, sending the first point-in-time backup to the remote storage node located at a remote data center.
3. The method as recited in claim 2, wherein the light-weight storage node is collocated with the assigned one or more production servers at a branch office, and wherein the centralized backup server and the remote storage node are located in a geographically remote location.
4. The method as recited in claim 2, further comprising an act of sending the second point-in-time update to the remote storage node.
5. The method as recited in claim 2, further comprising an act of receiving a set of new control settings from the centralized backup server, the new control settings changing the assignment of production servers to include one or more different production servers, wherein the new control settings further include a different protection intent to be used with the different one or more production servers.
6. The method as recited in claim 5, further comprising an act of communicating the different protection intent to the different one or more production servers.
7. The method as recited in claim 6, further comprising an act of receiving from the remote storage node a different point-in-time backup for the different one or more production servers.
8. The method as recited in claim 6, further comprising an act of connecting to a different storage volume on which is stored the different point-in-time backup for the different one or more production servers.
9. The method as recited in claim 8, further comprising the acts of:
receiving a different point-in-time update from the different one or more production servers; and
passing the different point-in-time update to the connected different storage volume, such that the different storage volume stores at least two point-in-time snapshots of data on the different one or more production servers.
10. The method as recited in claim 8, wherein the different storage volume is one of:
(i) a removable storage drive, wherein the removable storage drive is removed from a different storage node previously servicing the different one or more storage nodes and attached to the light-weight storage node; or
(ii) a storage volume hosted by any of the different storage node or a storage server, and accessed through a network connection.
11. At a centralized backup server of a computerized environment that includes one or more production servers and one or more light-weight storage nodes configured to administer backup solutions of data at the one or more production servers, a method of administering one or more backup policies at the one or more production servers through the one or more light-weight storage nodes, the method comprising the acts:
identifying a first set of one or more production servers having data to be protected;
identifying one or more light-weight storage nodes, wherein the light-weight storage nodes require control settings to implement a backup policy with a production server;
determining control settings having a protection intent for each of the one or more light-weight storage nodes, wherein the control settings include an assignment of at least one of the one or more light-weight storage nodes to backup at least one of the one or more production servers in accordance with the protection intent; and
sending the determined control settings to the one or more light-weight storage nodes.
12. The method as recited in claim 11, further comprising the acts of generating a set of new control settings for a second storage node of the one or more light-weight storage nodes, the new control settings indicating that a second storage node is to provide backup services to the first set of one or more production servers; and
sending the set of new control settings to the second storage node.
13. The method as recited in claim 12, wherein the new set of control settings are generated in response to identifying that a first storage node of the one or more light-weight storage nodes that is assigned to a first set of one or more production servers has failed.
14. The method as recited in claim 12, wherein the new set of control settings are generated in response to input received through a user interface to assign the second storage node to the first set of one or more production servers.
15. The method as recited in claim 11, further comprising an act of querying each of the one or more production servers and one or more light-weight storage nodes to determine available resources.
16. The method as recited in claim 15, further comprising an act of automatically determining a proposed assignment of light-weight storage nodes and production servers, such that at least one of the one or more light-weight storage nodes is collocated with at least one of the one or more production servers at a branch office.
17. The method as recited in claim 16, further comprising an act of determining the proposed assignment based on a load balancing concern for a plurality of the light-weight storage nodes.
18. The method as recited in claim 11, further comprising an act of sending all control settings for each of the one or more light-weight storage nodes, and any corresponding state and metadata to a remote storage node that is collocated with the centralized backup server.
19. The method as recited in claim 18, further comprising the acts of:
recovering the control settings, and any corresponding state and metadata from the remote storage node; and
reconciling a current state for each of the light-weight storage nodes with the control settings, and any corresponding state and metadata recovered from the remote storage node.
20. At a centralized backup server of a computerized environment that includes one or more production servers and one or more light-weight storage nodes configured to administer backup solutions of data at the one or more production servers, a computer program product having computer-executable code stored thereon that, when executed, causes one or more processors at the centralized backup server to perform a method of administering one or more backup policies at the one or more production servers through the one or more light-weight storage nodes, the method comprising the following:
identifying a first set of one or more production servers having data to be protected;
identifying one or more light-weight storage nodes, wherein the light-weight storage nodes require control settings to implement a backup policy with a production server;
determining control settings having a protection intent for each of the one or more light-weight storage nodes, wherein the control settings include an assignment of at least one of the one or more light-weight storage nodes to backup at least one of the one or more production servers in accordance with the protection intent; and
sending the determined control settings to the one or more light-weight storage nodes.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of forming an electronic device, comprising:
(a) providing a semiconductor substrate comprising one or more layers to be patterned;
(b) applying a first layer of a photosensitive composition over the one or more layers to be patterned, wherein the first photosensitive composition comprises a first resin component and a photoactive component;
(c) exposing the first layer to activating radiation through a patterned photomask;
(d) developing the exposed first layer to form a resist pattern;
(e) heat treating the resist pattern in a hardbake process;
(f) treating the hardbaked resist pattern with a material effective to make alkaline a surface of the resist pattern;
(g) applying a second layer of a thermally sensitive composition in contact with the alkaline surface of the resist pattern, the second composition comprising a second resin component and a thermal acid generator;
(h) heating the second layer of the thermally sensitive composition to a temperature effective for the thermal acid generator to generate an acid; and
(i) developing the heated second layer.
2. The method of claim 1, further comprising removing the resist pattern after the steps of heating and developing the second layer.
3. The method of claim 1, wherein the heat treating the resist pattern is conducted at a temperature of about 150\xb0 C. or higher.
4. The method of claim 1, wherein treating the resist pattern with the material effective to make alkaline a surface of the resist pattern comprises treating the resist pattern with an alkaline material and a surfactant which is different from the alkaline material.
5. The method of claim 1, wherein treating the resist pattern with the material effective to make alkaline a surface of the resist pattern comprises treating the resist pattern with a primary or secondary amine.
6. The method of claim 5, wherein treating the resist pattern with the material effective to make alkaline a surface of the resist pattern comprises sequentially treating the resist pattern with a quaternary ammonium hydroxide solution followed by treating the resist pattern with the primary or secondary amine.
7. The method of claim 5, wherein the amine is a compound of the following formula (I):
wherein R is chosen from optionally substituted C1-C6 alkyl groups.
8. The method of claim 7, wherein R is a C2 alkyl group.
9. The method of claim 1, wherein the amine is chosen from compounds of the following formulae (III), (IV) and (V):
wherein R1 and R2 are each independently a hydrogen atom or a C1-C10 alkyl group; and n is an integer from 1 to 10.
10. A coated semiconductor substrate, comprising:
a semiconductor substrate comprising one or more layers to be patterned;
a resist pattern over the one or more layers to be patterned, the resist pattern having an alkaline surface; and
a layer of a thermally sensitive composition in contact with the alkaline surface of the resist pattern, the second composition comprising a second resin component and a thermal acid generator.
11. The method of claim 1, wherein the hardbaked first resist pattern is treated with the material effective to make alkaline a surface of the first resist pattern in a spin coating process.
12. The method of claim 1, wherein the material effective to make alkaline a surface of the resist pattern comprises an aqueous base developer.
13. The method of claim 10, wherein the aqueous base developer is a quaternary ammonium hydroxide solution.
14. The method of claim 11, wherein the quaternary ammonium hydroxide solution is a tetramethylammonium hydroxide solution.
15. The method of claim 1, wherein the second layer is positive-acting.
16. The method of claim 1, wherein the second layer is negative-acting.
17. The method of claim 1, wherein steps (a) to (i) are conducted in sequence.