1. A vehicle control system comprising:
a first control link operatively coupled between at least one control input device and at least one control output device, the first control link being configured to transmit control inputs for a vehicle between the at least one control input device and the at least one control output device during normal operation, the first control link including an elongated flexible input transmission member; and
a second control link, at least one portion of which is changeable from a disengaged state to an engaged state in response to a structural change in the elongated flexible input transmission member, the at least one portion being inactive when in the disengaged state, the at least one portion being operatively coupled between the at least one control input device and the at least one control output device to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state.
2. The control system of claim 1, further comprising a detection system operatively coupled to the first control link to detect at least one failure in the first control link.
3. The control system of claim 1, further comprising:
a detection system operatively coupled to the first control link to detect at least one failure in the first control link; and
an engagement link operatively coupled to the detection system, the engagement link being configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects the at least one failure in the first control link.
4. The control system of claim 1 wherein the control system further comprises a detection system operatively coupled to the first control link, the detection system being configured to detect a change of tension in the elongated flexible input transmission member.
5. The control system of claim 1, further comprising:
a detection system operatively coupled to the first control link, the detection system being configured to detect a tension in the elongated flexible input transmission member; and
an engagement link configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects the tension in the elongated flexible input transmission member of the first control link has decreased below a threshold value.
6. The control system of claim 1 wherein the first control link includes a coupler configured to operatively engage the elongated flexible input transmission member, and wherein the control system further comprises:
a detection system configured to detect a tension of the elongated flexible input transmission member; and
an engagement link configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects the tension in the elongated flexible input transmission member of the first control link less than a threshold value.
7. The control system of claim 1 wherein the first control link includes:
a cable member configured to transmit control inputs between a first portion of the first control link and a second portion of the first control link; and
a pulley system configured to operatively engage the cable member, the pulley system including two pulley portions pivotally coupled to each other, at least one of the pulley portions being movable relative to the other between a first position and a second position, the at least one portion being in the first position when the cable member is under a first amount of tension, the at least one portion being in the second position when the cable member is under a second amount of tension different than the first amount of tension, the second amount of tension being associated with at least one failure in the first control link, and wherein the control system further comprises:
a detection system configured to detect movement of the at least one pulley portion between the first and the second positions; and
an engagement link configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the at least one pulley portion is in the second position.
8. The control system of claim 1 wherein at least a portion of the first control link includes a cable member having a diameter of less than \u215b inch and being configured to transmit control inputs between a first portion of the first control link and a second portion of the first control link.
9. The control system of claim 1 wherein at least a portion of the second control link includes a cable member having a diameter of less than \u215b inch and being configured to transmit control inputs between a first portion of the second control link and a second portion of the second control link.
10. The control system of claim 1, further comprising an actuation control coupled to the second control link and configured to allow an operator to selectively engage, disengage, or both engage and disengage the second control link to actively transmit control inputs between the at least one control input device and the at least one control output device.
11. The control system of claim 1, further comprising:
at least one detection system operatively coupled to at least one portion of the first and second control links; and
an annunciation system operatively coupled to the at least one detection system configured to provide at least one indication of the status of the at least one portion.
12. The control system of claim 1 wherein the second control link is configured to be engaged and transmit control inputs simultaneously with the first control link.
13. The control system of claim 1, further comprising:
a detection system operatively coupled to the first control link and configured to detect a motion limitation of at least one portion of the first control link; and
an engagement link configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects the motion limitation.
14. The control system of claim 1, further comprising the vehicle, and wherein the vehicle includes an aircraft, the at least one control input device includes a pilot input control and the at least one control output device includes a flight control surface.
15. The control system of claim 1 wherein the at least one control input device includes a first control input device, and wherein the control system further comprises a second control input device coupled to the first control link.
16. A vehicle control system comprising:
a first control link operatively coupled between at least one control input device and at least one control output device, the first control link being configured to transmit control inputs between the at least one control input device and the at least one control output device, the first control link including an elongated flexible input transmission member positioned to transmit control inputs between a first portion of the first control link and a second portion of the first control link while under tension;
a detection system operatively coupled to the first control link to detect a tension of the elongated flexible input transmission member;
a second control link, at least one portion of which is changeable from a disengaged state to an engaged state, the at least one portion being inactive when in the disengaged state and being operatively coupled between the at least one control input device and the at least one control output device to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state; and
an engagement link operatively coupled to the detection system, the engagement link being configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects a level of tension corresponding to a failure of the first control link.
17. A vehicle control system comprising:
a first control link operatively coupled between at least one control input device and at least one control output device, the first control link being configured to transmit control inputs between the at least one control input device and the at least one control output device, the first control link including an elongated flexible input transmission member positioned to transmit control inputs between a first portion of the first control link and a second portion of the first control link while under tension, the first control link including a coupler configured to operatively engage the elongated flexible input transmission member;
a detection system operatively coupled to the first control link to detect a tension of the elongated flexible input transmission member, the detection system being operatively associated with the coupler;
a second control link, at least one portion of which is changeable from a disengaged state to an engaged state, the at least one portion being inactive when in the disengaged state and being operatively coupled between the at least one control input device and the at least one control output device to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state; and
an engagement link operatively coupled to the detection system, the engagement link being configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects a level of tension corresponding to a failure of the first control link.
18. A vehicle control system comprising:
a first control link operatively coupled between at least one control input device and at least one control output device, the first control link being configured to transmit control inputs between the at least one control input device and the at least one control output device, the first control link including an elongated flexible input transmission member positioned to transmit control inputs between a first portion of the first control link and a second portion of the first control link while under tension, the elongated flexible input transmission member including a cable member, the first control link further including a pulley system configured to operatively engage the cable member, the pulley system including two pulley portions pivotally coupled to each other, at least one of the pulley portions being movable relative to the other between a first position and a second position, the at least one portion being in the first position when the cable member is under a first amount of tension, the at least one portion being in the second position when the cable member is under a second amount of tension different than the first amount of tension, the second amount of tension being associated with at least one failure in the first control link, the detection system being configured to detect movement of the at least one pulley portion between the first and the second positions;
a detection system operatively coupled to the first control link to detect a tension of the elongated flexible input transmission member;
a second control link, at least one portion of which is changeable from a disengaged state to an engaged state, the at least one portion being inactive when in the disengaged state and being operatively coupled between the at least one control input device and the at least one control output device to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state; and
an engagement link operatively coupled to the detection system, the engagement link being configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects movement of the at least one pulley portion between the first and the second positions.
19. An aircraft flight control system comprising:
an aircraft;
at least one pilot input control;
at least one flight control surface;
a first control link operatively coupled between the at least one pilot input control and the at least one flight control surface, the first control link being configured to transmit control inputs between the at least one pilot input control and the at least one flight control surface during normal operation, wherein the first control link includes a cable member configured to transmit control inputs between a first portion of the first control link and a second portion of the first control link;
a detection system operatively coupled to the cable member to detect a tension level in the cable member;
a second control link, at least one portion of which is changeable from a disengaged state to an engaged state, the at least one portion being inactive when in the disengaged state and operatively coupled between the at least one pilot input control and the at least one flight control surface to transmit control inputs between the at least one pilot input control and the at least one flight control surface when in the engaged state; and
an engagement link configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects a tension below a threshold tension level.
20. The aircraft flight control system of claim 19 wherein the first control link includes:
a pulley system configured to operatively engage the cable member, the pulley system including two pulley portions pivotally coupled to each other, at least one of the pulley portions being movable relative to the other between a first position and a second position, the at least one portion being in the first position when the cable member is under a first amount of tension, the at least one portion being in the second position when the cable member is under a second amount of tension different than the first amount of tension, and wherein;
the detection system is configured to detect movement of the at least one pulley portion between the first and the second positions, and further wherein;
the engagement link is configured to automatically couple the second control link between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection system detects movement of the at least one pulley portion between the first and the second positions.
21. A vehicle control system comprising:
first control link means for operatively coupling at least one control input device and at least one control output device, the first control link means being configured to transmit control inputs between the at least one control input device and the at least one control output device during normal operation, the first control link means including an elongated flexible input transmission member; and
second control link means for operatively coupling the at least one control input device and the at least one control output device, at least one portion of the second control link means being changeable from a disengaged state to an engaged state in response to a structural chance in the elongated flexible input transmission member, the at least one portion being configured to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state, the at least one portion being inactive when in the disengaged state.
22. The control system of claim 21, further comprising detection means for detecting at least one failure in the first control link means.
23. The control system of claim 21, further comprising detection means for detecting an amount of tension in a portion of the first control link means, the amount of tension being associated with at least one failure of the first control link means.
24. The control system of claim 21, further comprising:
detection means for detecting at least one failure in the first control link means; and
engagement link means for automatically coupling the second control link means between the at least one control input device and the at least one control output device to actively transmit control inputs when the detection means detects the at least one failure in the first control link means.
25. The control system of claim 21 wherein the at least one control input device includes at least one pilot input control and the at least one control output device includes at least one flight control surface.
26. An aircraft flight control system comprising:
first control link means for actively transmitting control inputs between at least one control input device and at least one control output device during normal operation, the control link means including an elongated flexible input transmission member, the first control link means further including coupler means operatively coupled to the elongated flexible input transmission member, the coupler means having a first state and a second state, the first state associated with a first amount of tension in the elongated flexible input transmission member and the second state associated with a second amount of tension in the elongated flexible input transmission member, the second amount of tension associated with the at least one failure in the first control link;
detection means configured to detect a transition between the first state and the second state;
second control link means for operatively coupling the at least one control input device and the at least one control output device, at least a portion of the second control link means being changeable from an engaged state to a disengaged state, the at least one portion being configured to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state, the at least one portion being inactive when in the disengaged state; and
engagement means for automatically engaging the second control link means to actively transmit control inputs between the at least one control input device and the at least one control output device when the detection means detects the transition between the first state and the second state.
27. A method for manufacturing an aircraft flight control system comprising:
coupling a first control link between at least one control input device and at least one control output device, the first control link being configured to transmit control inputs between the at least one control input device and the at least one control output device during normal operation, the first control link including an elongated flexible input transmission member; and
coupling a second control link between the at least one control input device and the at least one control output device, with at least one portion of the second control link being changeable from a disengaged state to an engaged state in response to a structural change in the elongated flexible input transmission member, the at least one portion being inactive when in the disengaged state, the at least one portion being operatively coupled between the at least one control input device and the at least one control output device to transmit control inputs between the at least one control input device and the at least one control output device when in the engaged state.
28. The method of claim 27 wherein the method further comprises:
coupling a detection system to the first control link, the detection system being positioned to detect at least one failure of the first control link associated with an amount of tension in the elongated flexible input transmission member; and
connecting an engagement link between the first and second control links, the engagement link being positioned to automatically engage the second control link to transmit control inputs between the at least one control input device and the at least one control output device when the detection system detects a tension in the elongated flexible input transmission member below a threshold value.
29. The method of claim 27 wherein the method further comprises: coupling a detection system to the first control link, the detection system being positioned to detect at least one failure of the first control link associated with an amount of tension in the elongated flexible input transmission member;
connecting an annunciation system to the detection system to indicate the at least one failure to an operator; and
connecting an actuation control to the second control link, the actuation control being positioned to allow the operator to engage the second control link.
30. A method for controlling a control output device of an aircraft flight control system comprising:
transmitting a control input between at least one control input device and at least one control output device via a first control link during normal operation without transmitting the control input to the at least one control output device via a second control link, at least a portion of the second control link between the at least one control input device and the at least one control output device being disengaged, the first control link including an elongated flexible input transmission member; and
engaging the second control link to actively transmit control inputs between the at least one control input device and the at least one control output device in response to a structural change in the elongated flexible input transmission member.
31. The method of claim 30 wherein the method further comprises:
detecting at least one failure in the first control link, the at least one failure being associated with an amount of tension in the elongated flexible input transmission member;
indicating the at least one failure to an operator; and
engaging the second control link based on input received from the operator.
32. The method of claim 30 wherein the method further comprises:
detecting at least one failure in the first control link, the at least one failure associated with the amount of tension in the elongated flexible input transmission member; and
automatically engaging the second control link.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A semiconductor device comprising:
a semiconductor substrate; and
an MIM capacitor, the MIM capacitor comprising:
a first insulation film provided on the semiconductor substrate;
a first conductive film made of a material of which a polishing rate is lower than the polishing rate of the first insulation film and embedded in a predetermined region of the first insulation film;
a plurality of grooves which penetrate through the first conductive film and reach the first insulation film;
metallic wirings embedded in the respective grooves so as to be in contact with the first conductive film;
a dielectric film provided on the metallic wirings and the first conductive film; and
a second conductive film provided on the dielectric film, wherein
the metallic wirings and the first conductive film constitute a lower electrode of the MIM capacitor,
the dielectric film constitutes a dielectric layer of the MIM capacitor, and
the second conductive film constitutes an upper electrode of the MIM capacitor.
2. The semiconductor device as claimed in claim 1, wherein
a surface of the first conductive film and a surface of the metallic wirings are flush with a plane extended from a surface of the first insulation film.
3. The semiconductor device as claimed in claim 1, wherein
the first conductive film is made of a material of which an etching selection ratio is higher than the etching selection ratio of the first insulation film.
4. The semiconductor device as claimed in claim 1, wherein
the first insulation film comprises a lower insulation film and an upper insulation film,
the first conductive film is provided on the predetermined region of the lower insulation film, and
the upper insulation film is provided on a region other than the predetermined region of the lower insulation film.
5. The semiconductor device as claimed in claim 1, wherein
a second insulation film is further provided on the first insulation film and the first conductive film,
the second insulation film has an opening above the metallic wirings, and
the dielectric film and the second conductive film are provided in the opening.
6. The semiconductor device as claimed in claim 5, wherein
the second insulation film is made of silicon nitride or silicon nitride-oxide.
7. The semiconductor device as claimed in claim 1, wherein
the dielectric film is made of silicon nitride or tantalum oxide.
8. The semiconductor device as claimed in claim 1, wherein
the first conductive film is made of metal nitride including TaN or TiN.
9. The semiconductor device as claimed in claim 1, wherein
the metallic wirings include copper or copper alloy as a main constituent thereof.