1. A drive apparatus, comprising:
a movable member;
an electromechanical transducer which is secured to the movable member at a first end thereof;
a drive friction member which is connected on a second end of the electromechanical transducer and is supported by the movable member movably in an expansion-contraction direction of the electromechanical transducer;
a pair of plate springs which extend to form two walls of a channel-like shape in the expansion-contraction direction of the electromechanical transducer, the walls of the plate springs slidably sandwiching the drive friction member with pressure to permit the movable member to move in the expansion-contraction direction of the electromechanical transducer;
a base member which holds the plate springs in a cantilever manner in a direction of shorter sides of the plate springs and
auxiliary springs, which are each arranged outside the plate springs and apply elastic force to the walls of the plate springs such that the applied elastic force is larger at end portions of the plate springs than at central portions of the plate springs so that the pressure applied by the plate springs against the drive friction member remains constant as the moveable member moves between opposite end portions of the plate springs,
wherein the movable member is movable in the expansion-contraction direction.
2. The drive apparatus of claim 1, wherein a distal free edge of each of the plate springs is bent outwardly so that pressure applied by the plate springs against the drive friction member remains constant as the moveable member moves between opposite end portions of the plate springs.
3. A drive apparatus, comprising:
a movable member;
an electromechanical transducer which is secured to the movable member at a first end thereof;
a drive friction member which is connected on a second end of the electromechanical transducer and is supported by the movable member movably in an expansion-contraction direction of the electromechanical transducer;
a pair of plate springs which extend to form two walls of a channel-like shape in the expansion-contraction direction of the electromechanical transducer, and configured to slidably sandwich the drive friction member with pressure to permit the movable member to move in the expansion-contraction direction of the electromechanical transducer, wherein a distal free edge of each plate spring is bent outwardly so that pressure applied by the plate springs against the drive friction member remains constant as the moveable member moves between opposite end portions of the plate springs.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A heater-equipped pusher for pushing a terminal of an electronic component to be tested in an electronic component handling apparatus into a contact portion of a test head, comprising:
a pusher main body which is capable of direct contact with the electronic component to be tested;
a heat absorbing and radiating body provided on said pusher main body;
a heater provided on said pusher main body to enable direct or indirect contact with the electronic component to be tested; and
a thermal insulating material provided between said pusher main body and said heater.
2. An electronic component handling apparatus which, in order to test an electronic component, is capable of pushing a terminal of an electronic component to be tested into a contact portion of a test head, comprising the heater-equipped pusher according to claim 1.
3. A temperature control method for controlling the temperature of an electronic component to be tested during the testing of the electronic component in an electronic component handling apparatus, comprising:
cooling of the electronic component to be tested is performed by cooling a heat absorbing and radiating body to which the heat of the electronic component is transferred; and
heating of the electronic component to be tested is performed by a heater which is provided such that thermal resistance with said body increases.