1. An inductor comprising:
an inductor metal having a first portion and a second portion; and
an isolation film disposed one of in, on, and adjacent to at least one of the first portion and the second portion of the inductor metal,
wherein the isolation film includes a magnetic material.
2. The inductor according to claim 1, wherein the isolation film interposes the first portion and the second portion of the inductor metal.
3. The inductor according to claim 1, wherein the isolation film is one of in, on, and adjacent to a sidewall of the at least one of the first portion and the second portion of the inductor metal.
4. The inductor according to claim 1, wherein the magnetic material is a magnetic film.
5. The inductor according to claim 1, wherein the magnetic material is a shape anisotropic magnetic film.
6. The inductor according to claim 1, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
7. The inductor according to claim 1, wherein the inductor is a serpent type inductor.
8. The inductor according to claim 1, wherein the inductor is a circular type inductor.
9. The inductor according to claim 1, further comprising:
a top metal or bottom metal coupled to the inductor metal.
10. The inductor according to claim 1, further comprising:
a circuit coupled to the inductor metal.
11. The inductor according to claim 1 integrated in at least one semiconductor die.
12. The inductor according to claim 1, further comprising an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
13. An inductor comprising:
a substrate;
an inductor metal having a plurality of turns formed on the substrate; and
a magnetic material one of in, on, and adjacent to a portion of the inductor metal.
14. The inductor according to claim 13, wherein the magnetic material is disposed between adjacent portions of the plurality of turns of the inductor metal.
15. The inductor according to claim 13, wherein the isolation film is one of in, on, and adjacent to a sidewall of the at least one of the first portion and the second portion of the inductor metal.
16. The inductor according to claim 13, wherein the magnetic material is a magnetic film.
17. The inductor according to claim 13, wherein the magnetic material is a shape anisotropic magnetic film.
18. The inductor according to claim 13, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
19. The inductor according to claim 13, wherein the inductor is a serpent type inductor.
20. The inductor according to claim 13, wherein the inductor is a circular type inductor.
21. The inductor according to claim 13, further comprising:
a top metal or a bottom metal coupled to the inductor metal.
22. The inductor according to claim 13, further comprising:
a circuit coupled to the inductor metal.
23. The inductor according to claim 13 integrated in at least one semiconductor die.
24. The inductor according to claim 13, further comprising an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
25. A method of forming an inductor, the method comprising:
depositing and patterning an inductor metal having a first portion and a second portion; and
depositing and patterning a magnetic material one of in, on, and adjacent to at least one of the first portion and the second portion of the inductor metal.
26. The method according to claim 25, wherein the magnetic material is deposited and patterned between the first portion and the second portion of the inductor metal.
27. The method according to claim 25, wherein the magnetic material is deposited and patterned one of in, on, and adjacent to a sidewall of the at least one of the first portion and the second portion of the inductor metal.
28. The method according to claim 25, wherein the magnetic material is a magnetic film.
29. The method according to claim 25, wherein the magnetic material is a shape anisotropic magnetic film.
30. The method according to claim 25, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
31. The method according to claim 25, further comprising:
performing a magnetic anneal process to align a magnetic field axis of the inductor along an easy axis of the magnetic material.
32. The method according to claim 25, further comprising:
depositing a cap layer on the inductor metal as a hardmask to self-align the magnetic material between the first portion and the second portion of the inductor metal.
33. The method according to claim 25, further comprising:
forming a bottom metal that is coupled to the inductor metal; and
forming a top metal that is coupled to the inductor metal
34. The method according to claim 25, wherein the inductor is applied in an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
35. A method of forming an inductor, the method comprising:
depositing and patterning a bottom metal using a metal depositphotoetching process;
depositing a first inter layer dielectric (ILD) on the first metal and performing a chemical mechanical planarization (CMP) process on the inter layer dielectric;
depositing a bottom cap film on the first inter layer dielectric (ILD);
depositing an inductor metal on the bottom cap film and patterning the inductor metal using a photoetching process;
depositing a top cap film above the inductor metal and performing a chemical mechanical planarization (CMP) process on the top cap film;
performing a photoetching process to the top cap film to form a hole one of in, on, and adjacent to a first portion of the inductor metal;
depositing a magnetic material over the top cap film and the hole and etching the magnetic material back to a top of the top cap film such that the magnetic material is one of in, on, and adjacent to the first portion of the inductor metal;
depositing a second inter layer dielectric (ILD) above the magnetic material and performing a chemical mechanical planarization (CMP) process on the second inter layer dielectric (ILD); and
performing a vertical magnetic anneal to align a magnetic field axis of the inductor along an easy axis of the magnetic material.
36. The method according to claim 35, wherein the photoetching process forms the hole between the first portion of the inductor metal and a second portion of the inductor metal, and
wherein the magnetic material is deposited over the top cap film and the hole and etched back to the top of the top cap film such that the magnetic material is between the first portion and the second portion of the inductor metal.
37. The method according to claim 35, wherein the photoetching process forms a plurality of holes one of in, on, and adjacent to the first portion of the inductor metal, and
wherein the magnetic material is deposited over the top cap film and the plurality of holes and etched back to the top of the top cap film.
38. The method according to claim 35, wherein the photoetching process forms a plurality of holes between the first portion of the inductor metal and a second portion of the inductor metal, and
wherein the magnetic material is deposited over the top cap film and the plurality of holes and etched back to the top of the top cap film such that the magnetic material is between the first portion and the second portion of the inductor metal.
39. The method according to claim 35, further comprising:
patterning a first via opening in the first inter layer dielectric (ILD) using a photoetching process and filling the first via opening with a metal to form a bottom via interconnect that couples the inductor metal to the bottom metal.
40. The method according to claim 35, further comprising:
depositing and patterning a top metal above the second inter layer dielectric (ILD) using a metal depositphotoetching process; and
patterning a second via opening in the second inter layer dielectric (ILD) using a photoetching process and filling the second via opening with a metal to form a top via interconnect that couples the inductor metal to the top metal.
41. The method according to claim 35, wherein the magnetic material is a magnetic film.
42. The method according to claim 35, wherein the magnetic material is a shape anisotropic magnetic film.
43. The method according to claim 35, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
44. The method according to claim 35, wherein the inductor is applied in an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
45. A method of forming an integrated magnetic film enhanced inductor, the method comprising:
depositing and patterning a bottom metal using a dual damascene process;
depositing a first inter layer dielectric (ILD) on the first metal;
depositing a bottom cap film on the first inter layer dielectric (ILD);
depositing a second inter layer dielectric (ILD) on the bottom cap film;
forming a trench in the second inter layer dielectric (ILD) using photolithography and etching techniques;
plating a copper layer over at least the trench and polishing the copper layer down to the surface of the second inter layer dielectric (ILD) to form an inductor metal;
depositing a top cap film above the second inter layer dielectric (ILD) and the inductor metal and polishing the top cap film;
forming a hole in the top cap film and the second inter layer dielectric (ILD) using photolithography and etching techniques;
depositing a magnetic material layer over at least the hole;
depositing a third inter layer dielectric (ILD) above the magnetic material and performing a chemical mechanical planarization (CMP) process on the third inter layer dielectric (ILD); and
performing a magnetic anneal to align a magnetic field axis of the inductor along an easy axis of the magnetic material.
46. The method according to claim 45, comprising:
forming a plurality of trenches in the second inter layer dielectric (ILD) using the photolithography and etching techniques;
plating the copper layer over at least the plurality of trenches and polishing the copper layer down to the surface of the second inter layer dielectric (ILD) to form the inductor metal;
forming a plurality of holes in the top cap film and the second inter layer dielectric (ILD) using the photolithography and etching techniques;
depositing the magnetic material layer over at least the plurality of holes.
47. The method according to claim 45, further comprising:
patterning a first via opening in the first inter layer dielectric (ILD) using a photoetching process and filling the first via opening with a metal to form a bottom via interconnect that couples the inductor metal to the bottom metal by a dual damascene process.
48. The method according to claim 45, further comprising:
plating and patterning a top metal above the third inter layer dielectric (ILD) using a dual damascene process; and
patterning a second via opening in the third inter layer dielectric (ILD) using a photoetching process and filling the second via opening with a metal to form a top via interconnect that couples the inductor metal to the top metal.
49. The method according to claim 45, wherein the magnetic material is a magnetic film.
50. The method according to claim 45, wherein the magnetic material is a shape anisotropic magnetic film.
51. The method according to claim 45, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
52. The method according to claim 45, wherein the inductor is applied in an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
53. An inductor comprising:
inductive means for generating a magnetic field, the inductive means having a first portion and a second portion; and
isolating means for magnetically isolating at least one of the first portion and the second portion of the inductive means, the isolating means disposed one of in, on, and adjacent to the at least one of the first portion and the second portion of the inductive means,
wherein the isolation means includes a magnetic material.
54. The inductor according to claim 53, wherein the isolating means interposes the first portion and the second portion of the inductive means.
55. The inductor according to claim 53, wherein the isolating means is one of in, on, and adjacent to a sidewall of the at least one of the first portion and the second portion of the indcutive means.
56. The inductor according to claim 53, wherein the magnetic material is a magnetic film.
57. The inductor according to claim 53, wherein the magnetic material is a shape anisotropic magnetic film.
58. The inductor according to claim 53, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
59. The inductor according to claim 53, wherein the inductor is a serpent type inductor.
60. The inductor according to claim 53, wherein the inductor is a circular type inductor.
61. The inductor according to claim 53, further comprising:
first and second electrode means for electrically connecting the inductor coupled to the inductive means.
62. The inductor according to claim 53 integrated in at least one semiconductor die.
63. The inductor according to claim 53, further comprising an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
64. A method of forming an inductor, the method comprising:
step for forming an inductor metal having a first portion and a second portion; and
step for forming a magnetic material one of in, on, and adjacent to at least one of the first portion and the second portion of the inductor metal.
65. The method according to claim 64, wherein the magnetic material is deposited and patterned between the first portion and the second portion of the inductor metal.
66. The method according to claim 64, wherein the magnetic material is deposited and patterned one of in, on, and adjacent to a sidewall of the at least one of the first portion and the second portion of the inductor metal.
67. The method according to claim 64, wherein the magnetic material is a magnetic film.
68. The method according to claim 64, wherein the magnetic material is a shape anisotropic magnetic film.
69. The method according to claim 64, wherein a thickness of the magnetic material is selected to reduce an eddy current and a skin effect inside the magnetic material to reduce magnetic field loss.
70. The method according to claim 64, further comprising:
performing a magnetic anneal process to align a magnetic field axis of the inductor along an easy axis of the magnetic material.
71. The method according to claim 64, further comprising:
step for depositing a cap layer on the inductor metal as a hardmask to self-align the magnetic material between the first portion and the second portion of the inductor metal.
72. The method according to claim 64, further comprising:
step for forming a bottom metal that is coupled to the inductor metal; and
step for forming a top metal that is coupled to the inductor metal
73. The method according to claim 64, wherein the inductor is applied in an electronic device, selected from the group consisting of a set top box, music player, video player, entertainment unit, navigation device, communications device, personal digital assistant (PDA), fixed location data unit, and a computer, into which the inductor is integrated.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A computer implemented method comprising:
detecting a plurality of changes to one of a database format and database content between a first version of a database and a second version of the database; and
transmitting change information associated with the plurality of changes to a receiving entity; and
causing a display of a single visual element that is associated with the plurality of changes in at least one of a row-wise collective format, a column-wise collective format, a field-wise collective format, or a record-wise collective format and that indicates a coded summary of multiple non-identical changes in a single row, a single column, a single field within a group of records, or a group of records within the database, respectively.
2. The method of claim 1, wherein the detecting of the plurality of changes does not include detecting a transition in the database content from an element that is empty to an element that is non-empty.
3. The method of claim 1, further comprising:
storing the database in a spreadsheet file format.
4. The method of claim 1, further comprising:
transmitting timeline information to the receiving entity to cause a display of a timeline that includes the first version and the second version.
5. The method of claim 1, wherein the display of the single visual element that is associated with of the plurality of changes in the at least one of a row-wise collective format, a column-wise collective format, a field-wise collective format, or a record- e collective format comprises:
a display of a change indicator along with a deleted row or a deleted column representing elements in the database with revised visibility.
6. The method of claim 1, wherein the display of the single visual element that is associated with of the plurality of changes in the at least one of a row-wise collective format, a column-wise collective format, a field-wise collective format, or a record- wise collective format comprises:
a display of a first change indicator comprising at least one of a color or a graphic shape to indicate a change type associated with the database content for a row, a column, a field, or a group of records representing elements in the database.
7. The method of claim further comprising:
receiving user selection input associated with the first change indicator; and
transmitting element display information to the receiving entity to to cause a display of element changes for each element in the row or the column.
8. The method of claim 7 wherein the display of the element changes further comprises:
continuing to display the element changes for a determinable period of time, or until user selection input associated with a second change indicator is detected.
9. The method of claim 7, wherein the display of the element changes comprises:
a display of an identification of a user associated with the element changes, and a time the element changes were made.
10. A computer implemented method comprising:
accessing a first version of a database selected from a displayed time line;
accessing a second version of the database selected from the displayed time line and transmitting change information associated with the plurality of changes to a receiving entity; and
causing a display of a single visual element that is associated with a plurality of changes to one of a database format and database content between the first version and the second version in at least one of a row-wise collective format, a column-wise collective format, a field-wise collective format, or a record-wise collective format, and that indicates a summary of non-identical change types to individual elements for each row, column, field, andor record representation of the individual elements in the database.
11. The method of claim 10, further comprising:
transmitting indicator information to the receiving entity to cause a display of a colored indicator for each one of a group of users on the time line, wherein a color of the colored indicator corresponds to an identity of a user in the group that saved a corresponding version of the database.
12. The method of claim 10, wherein the display of the single visual element that is associated with the plurality of changes comprises:
a display of a first change indicator comprising a first color to indicate addition of an element to a first row or a column representing first elements in the database; and
a display of a second change indicator comprising a second color to indicate deletion of an element from a second row or column representing second elements in the database.
13. The method of claim 10, wherein the display of the single visual element that is associated with the plurality of changes comprises:
a display of a shape in a first orientation to indicate addition of an element to a first row or a column representing first elements in the database; and
a display of the shape in a second orientation to indicate deletion of an element from a second row or column representing second elements in the database.
14. The method of claim 10, wherein the display of the a single visual element that is associated with the plurality of changes comprises:
a display of a change indicator comprising at least two of a first color to indicate addition of a first element to a row or a column representing elements in the database, a second color to indicate deletion of a second element from the row or column, or a third color to indicate changing a third element in the row or column.
15. The method of claim 10, further comprising:
transmitting element change information to the receiving entity to to cause a display of element changes for each element in a row or a column representation of the database responsive to receiving an indication of user selection input associated with a change indicator associated with the row or the column.
16. The method of claim 15, wherein the display of the single visual element that is associated with the element changes comprises:
a display of the element changes in conjunction with one of a value reuse indicator, an element deletion indicator, or an element reinstatement indicator.
17. The method of claim 10, wherein the display of the single visual element that is associated with the plurality of changes comprises:
a display of element changes in a header row representation of the database content in the row-wise collective format.
18. The method of claim 10, further comprising:
transmitting additional information about the plurality of changes, including changes to at least one of a formula, content type, style, or format applied to a plurality of database elements associated with a columnar representation of the database to the receiving entity, responsive to detecting cursor hover activity associated with a change indicator included in the column-wise collective format.
19. The method of claim 10, further comprising:
transmitting additional information about the plurality of changes, including changes to a. title applied to the database, to the receiving entity.
20. A system, comprising:
a display;
a change tracking module to detect a plurality of changes to one of a database format and database content between a first version of a database and a second version of the database; and
a rendering module to cause the display of a single visual element that is associated with the plurality of changes in at least one of a row-wise collective format, a column-wise collective format, a field-wise collective format, or a record-wise collective format and that indicates a coded summary of multiple non-identical changes in a single row, a single column, a single field. within a group of records, or a group of records within the database, respectively, as part of a graphical user interface on the display.
21. The system of claim 20, further comprising:
a user input device to select a change indicator comprising at least one of a color or a shape, wherein selection of the change indicator results in the rendering module causing the display of all changes to the database content for a row, a column, a field, or a group of records in the database.
22. The system of claim 20, wherein the rendering module comprises a spreadsheet application program, the system further comprising:
a processor to execute the spreadsheet application program to display the database content as a spreadsheet along with a history of multiple, independently-selectable versions of the database on a time line, including the first version and the second version, via the graphical user interface.
23. A machine-readable medium having instructions stored therein, wherein the instructions, when executed, cause the machine to perform operations, comprising:
detecting a plurality of changes to one of a database format and database content between a first version of a database and a second version of the database; and
transmitting change information associated with the plurality of changes to a receiving entity; and
causing a display of a single visual element that is associated with the plurality of changes in at least one of a row-wise collective format, a column-wise collective format, a field-wise collective format, or a record-wise collective format and that indicates a coded summary of multiple non-identical changes in a single row, a single column, a single field within a group of records, or a group of records within the database, respectively.
24. The medium of claim 23, wherein the method further comprises:
transmitting element change information and indicator information to the receiving entity to cause the display of element changes to each element in a row or a column representation of the database, wherein each of the element changes are shown in a separate window, and displaying an indicator within the separate window to permit one of deleting added information, or reinstating deleted information.
25. The medium of claim 24, wherein the display of the indicator comprises:
a display of the indicator only if cursor activity associated with the separate window is detected.