1. A system for cleaning a wafer after chemical mechanical polish comprising:
a brush module having at least two brushes arranged adjacent to each other for placing the wafer in between;
a dummy roller for contacting an edge of the wafer and following a rotation of the wafer; and
wherein when the wafer is rotated, the brushes clean both sides of the wafer, and the dummy roller detects a rotation speed and a rotation direction of the wafer for further adjusting the rotation of the wafer.
2. The system of claim 1, further comprising a set of roller caps coupled to and rotated by a roller motor via a timing belt.
3. The system of claim 2, further comprising a rotation-controller for controlling the roller motor.
4. The system of claim 3, wherein each roller cap further includes a trench for securing the wafer therein.
5. The system of claim 4, wherein a width of the trench is about a thickness of the wafer with an additional predetermined space for rotating the wafer.
6. The system of claim 5, wherein the width of the trench is about 0.8mm.
7. The system of claim 1, wherein the dummy roller further includes an optical encoder for detecting the rotation speed and rotation direction of the wafer.
8. The system of claim 7, wherein the optical encoder further includes:
at least a first optical sensor for transmitting and receiving a first light and a second optical sensor for transmitting and receiving a second light;
a light interdict plate placed close to the first and the second optical sensors having a set of trenches thereon; and
wherein the rotation direction and rotation speed of the wafer are detected by receiving the first and the second lights bouncing off the light interdict plate when the set of trenches are sensed during a rotation of the light interdict plate.
9. The system of claim 8, wherein the first and the second optical sensors are 90 degrees out of phase.
10. The system of claim 1, wherein the brush module and the wafer are arranged in a vertical orientation, wherein the dummy roller is placed in the lower right corner of the brush module.
11. The system of claim 1, wherein the brush module and the wafer are arranged in a horizontal orientation, wherein the dummy roller is placed between two of the roller caps.
12. The system of claim 11, wherein the rotation-controller is pre-programmed with an algorithm to control the step motor based on the rotation speed and rotation direction of the wafer.
13. A system for cleaning a wafer after chemical mechanical polish comprising:
a set of roller caps having trenches for securing an edge of the wafer;
a motor coupled to the roller caps for controlling a rotation of the wafer;
a brush module having at least two brushes placed adjacent to each other for having the wafer in between;
a dummy roller for contacting the edge of the wafer and following a rotation of the wafer; and
wherein the dummy roller has an optical encoder for detecting a rotation speed and a rotation direction of the wafer, thereby adjusting the rotation of the wafer controlled by the motor by a rotation-controller.
14. The system of claim 13, wherein a width of the trench is about a thickness of the wafer with an additional predetermined space for rotating the wafer.
15. The system of claim 13, wherein the optical encoder further includes:
at least a first optical sensor for transmitting and receiving a first light and a second optical sensor for transmitting and receiving a second light;
a light interdict plate placed close to the first and the second optical sensors having a set of trenches thereon,; and
wherein the rotation direction and rotation speed of the wafer are detected by receiving the first and the second lights bouncing off the light interdict plate when the set of trenches are sensed during a rotation of the light interdict plate.
16. The system of claim 15, wherein the first and the second optical sensors are 90 degrees out of phase.
17. A system for cleaning a wafer after chemical mechanical polish comprising:
means for securing an edge of the wafer;
means for directing a rotation of the wafer;
means for cleaning the wafer;
means for detecting the rotation of the wafer placed in contact with the edge of the wafer and following the rotation of the wafer; and
wherein the means for detecting the rotation has an optical encoder for detecting a rotation speed and a rotation direction of the wafer, thereby adjusting the rotation of the wafer.
18. The system of claim 17, wherein the means for securing has a set of roller caps with a trench having a width of about a thickness of the wafer plus an additional predetermined space for rotating the wafer.
19. The system of claim 18, wherein the means for detecting further includes:
means for transmitting a first light and means for receiving the first light bounced from a predetermined surface having at least one trench thereon that follows a rotation of the dummy roller;
means for transmitting a second light and means for receiving the second light bounced from the predetermined surface; and
wherein a rotation direction and a rotation speed of the wafer are detected by the received first and second lights when the trench is sensed repetitively during a rotation of the predetermined surface.
20. The system of claim 19, wherein the means for receiving the first and the second lights are 90 degrees out of phase for detecting different rotation directions.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A liquid-tight connector for terminating one end of an elongate electrical conduit comprising:
a connector body having a rearward conduit receiving end, an opposed forward end and a central bore therethrough;
a gland nut for movable securement to said rearward conduit receiving end of said body for securing said one end of said conduit thereto, said gland nut including an internal frusto-conical surface; and
a sealing ring interposed between said rearward conduit receiving end of said body and said gland nut and supported within a receiving chamber defined therebetween, said sealing ring having a generally O-shaped cross section and being formed of resiliently deformable material, wherein said internal frusto-conical surface of said gland nut simultaneously urges said sealing ring radially inward toward said conduit and forward toward said rearward conduit receiving end of said body so as to deformably fill the receiving chamber upon said movable securement of said gland nut onto said body.
2. A connector as defined in of claim 1, wherein said sealing ring is formed from a pliable elastomer.
3. A connector as defined in claim 1, further including a ground cone insertably received within said central bore at said rearward conduit receiving end of said connector body and engageable with said conduit for establishing a ground connection between said conduit and said connector body.
4. A connector as defined in claim 1, wherein said connector body further includes an annular chamfered surface formed at said rearward conduit receiving end surrounding said central bore, said chamfered surface defining a sealing ring compression space in communication with said receiving chamber, wherein said sealing ring is urged into said compression space upon said movable securement of said gland nut onto said body.
5. A connector as defined in claim 4, further including a ground cone insertably received within said central bore and engageable with said conduit for establishing a ground connection between said conduit and said connector body, said ground cone including a lip received in said sealing ring compression space defined by said chamfered surface of said connector body.
6. A connector as defined in claim 5, wherein said sealing ring presses said lip against said chamfered surface to secure said cone within said connector body upon said movable securement of said gland nut onto said body.
7. A connector as defined in claim 5, wherein said lip of said cone provides a biasing force against said sealing ring to enhance the seal against said conduit upon said movable securement of said gland nut onto said body.
8. A connector as defined in claim 5, wherein said ground cone further comprises a forward base portion, an elongated tubular extension extending rearward from said base portion and an annular sleeve portion extending rearward from said base portion, said annular sleeve portion disposed radially outward from said tubular extension and terminating at said lip.
9. A connector as defined in claim 8, wherein said cone base portion abuts against an internal shelf formed inside said connector body when said cone is inserted within said rearward end of said body.
10. A connector as defined in claim 8, wherein said lip is a radially outwardly bent portion of said annular sleeve portion.
11. A connector as defined in claim 1, further comprising an electrically insulative throat insertably received within said central bore at said opposed forward end of said connector body for protecting electrical conductors extending outwardly from said conduit.
12. A connector as defined in claim 11, wherein said insulative throat includes a radially outwardly extending circumferential lip at a forward end thereof for abutting against said opposed forward end of said connector body.
13. A connector as defined in claim 1, further comprising a locking ring for movable securement to said opposed forward end of said connector body for securing said connector to a panel and a panel sealing ring interposed between said locking ring and said connector body for effecting a seal between said connector body and the panel.
14. A connector as defined in claim 1, wherein said rearward conduit receiving end of said connector body and said gland nut include cooperating screw threads for providing said movable securement therebetween.
15. A connector as defined in claim 1, wherein said connector body further includes a shoulder portion disposed between said rearward conduit receiving end and said opposed forward end for engagement with an installation tool.
16. A method for terminating an end of an electrical conduit within a connector in a liquid-tight manner comprising the steps of:
placing a sealing ring around the end of the electrical conduit, said sealing ring having a generally O-shaped cross section and being formed of resiliently deformable material;
forwardly inserting the end of the electrical conduit into a connector body having a rearward conduit receiving end, an opposed forward end and a central bore therethrough for receiving the conduit; and
movably securing a gland nut to said rearward conduit receiving end of said body for securing the end of the conduit thereto, said gland nut including an internal frusto-conical surface, wherein said internal frusto-conical surface of said gland nut simultaneously urges said sealing ring radially inward toward said conduit and forward toward said rearward conduit receiving end of said body so as to deformably fill a receiving chamber defined between said rearward conduit receiving end of said connector body and said gland nut upon said movable securement of said gland nut onto said body.
17. A method as defined in claim 16, wherein said connector body further includes an annular chamfered surface formed at said rearward conduit receiving end surrounding said central bore, said chamfered surface defining a sealing ring compression space in communication with said receiving chamber, and wherein said sealing ring is urged into said compression space upon said movable securement of said gland nut onto said body.
18. A method as defined in claim 17, wherein said conduit insertion step comprises the step of forwardly inserting the end of the electrical conduit into a ground cone insertably received within said central bore and engageable with said conduit for establishing a ground connection between said conduit and said connector body, said ground cone including a lip received in said sealing ring compression space defined by said chamfered surface of said connector body.
19. A method as defined in claim 18, wherein said sealing ring presses said lip against said chamfered surface to secure said cone within said connector body upon said movable securement of said gland nut onto said body.
20. A method as defined in claim 18, wherein said lip of said cone provides a biasing force against said sealing ring to enhance the seal against said conduit upon said movable securement of said gland nut onto said body.