1. A flexural plate wave sensor comprising:
a flexural plate having a length and a width; and
a comb pattern over the flexural plate with drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.
2. The flexure plate wave sensor of claim 1 further including sense teeth disposed across the entire length of the flexure plate interleaved with the drive teeth.
3. The flexure plate wave sensor of claim 2 in which the sense teeth face in one direction and the drive teeth face in an opposite direction.
4. The flexure plate wave sensor of claim 1 wherein the comb pattern is aligned with all the eigenmodes of the flexural plate thereby exciting one eigenmode in the plate.
5. The flexure plate wave sensor of claim 1 wherein the comb pattern allows the sensor to output a single pronounced peak thereby improving the performance of the sensor.
6. The flexure plate wave sensor of claim 1 in which the comb pattern reduces a transfer function of the sensor to a single peak, or a peak much larger than any other peak.
7. The flexure plate wave sensor of claim 1 in which the drive teeth are aligned with the eigenmodes excited in the flexural plate.
8. The flexure plate wave sensor of claim 2 in which the sense teeth are aligned with the eigenmodes excited in the flexural plate.
9. The flexure plate wave sensor of claim 1 in which the comb pattern provides for establishing electric fields which interact with piezoelectric properties of the flexural plate to excite motion.
10. The flexure plate wave sensor of claim 1 in which the comb pattern is made of copper.
11. The flexure plate wave sensor of claim 1 in which the comb pattern is made of a material chosen from the group consisting of copper, titanium-platinum-gold (TiPtAu) metal, titanium-platinum (TiPt) and aluminum.
12. The flexure plate wave sensor of claim 1 in which the comb pattern is made of aluminum.
13. The flexure plate wave sensor of claim 1 in which the comb pattern is approximately 0.1 \u03bcm thick.
14. The flexure plate wave sensor of claim 1 in which the comb pattern includes wire bond pad areas and ground contacts.
15. The flexure plate wave sensor of claim 1 in which the drive teeth are on the flexural plate.
16. The flexure plate wave sensor of claim 2 in which the sense teeth are on the flexural plate.
17. The flexure plate wave sensor of claim 1 in which the drive teeth span across an entirety of the width of the flexural plate.
18. The flexure plate wave sensor of claim 2 in which the sense teeth span across an entirety of the width of the flexural plate.
19. The flexure plate wave sensor of claim 1 further including a base substrate, an etch stop layer disposed over said base substrate, a membrane layer disposed over said etch stop layer, a cavity disposed in said base substrate and said etch stop layer, thereby exposing a portion of said membrane layer, said cavity having substantially parallel interior walls, a piezoelectric layer disposed over said membrane layer and said comb pattern disposed over said piezoelectric layer.
20. The flexure plate wave sensor of claim 19 wherein said piezoelectric layer is formed from a material selected from the group consisting of aluminum nitrite, zinc oxide and lead zirconium titanate.
21. The flexure plate wave sensor of claim 19 wherein said etch stop layer is formed from silicon dioxide.
22. The flexure plate wave sensor of claim 19 wherein said membrane layer is formed from silicon.
23. The flexure plate wave sensor of claim 19 wherein said base substrate is formed from silicon.
24. The flexure plate wave sensor of claim 23 wherein base substrate includes a silicon-on-insolator (SOI) wafer.
25. The flexure plate wave sensor of claim 24 in which the silicon-on-insulator wafer includes an upper surface of epitaxial silicon forming the membrane layer bonded to an etch stop layer.
26. The flexure plate wave sensor of claim 25 wherein the piezoelectric transducer is deposited over the upper surface of the epitaxial silicon.
27. The flexure plate wave sensor of claim 25 wherein grounding contacts to the epitaxial silicon are provided by etching an opening into the piezoelectric transducer.
28. The flexure plate wave sensor of claim 27 wherein the comb pattern comprises titanium-platinum-gold (TiPtAu) metal, said comb pattern including interdigital metal electrodes, wire bond pad areas, and ground contacts.
29. The flexure plate wave sensor of claim 24 wherein said base substrate is approximately 380 \u03bcm thick.
30. The flexure plate wave sensor of claim 25 wherein said upper epitaxial surface is approximately 2 \u03bcm thick.
31. The flexure plate wave sensor of claim 25 wherein said layer of SiO2 is approximately 1 \u03bcm thick.
32. The flexure plate wave sensor of claim 28 wherein said comb pattern is approximately 0.1 \u03bcm thick.
33. The flexure plate wave sensor of claim 1 wherein the drive teeth are approximately 300 to 2000 \u03bcm in length and the spacing between the drive teeth is approximately 25 to 50 \u03bcm.
34. The flexure plate wave sensor of claim 1 wherein the sense teeth are approximately 300 to 2000 \u03bcm in length and the spacing between the sense teeth is approximately 25 to 50 \u03bcm.
35. A flexural plate wave sensor comprising:
a flexural plate having a length and a width; and
a comb pattern over the flexural plate with drive and sense teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.
36. A flexural plate wave sensor comprising:
a flexural plate having a length and a width; and
a comb pattern over the flexural plate with first and second sets of drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplify the operation and design of the flexural plate wave sensor.
37. The flexural plate wave sensor of claim 36 further including first and second sets of sense teeth disposed across the entire length of the flexural plate.
38. The flexural plate wave sensor of claim 36 in which the first and second sets of drive teeth face in opposite directions.
39. The flexural plate wave sensor of claim 36 in which the first and second sets of sense teeth face in opposite directions.
40. The flexural plate wave sensor of claim 38 in which the first and second sets of drive teeth are interleaved.
41. The flexural plate wave sensor of claim 39 in which the first and second sets of sense teeth are interleaved.
42. The flexural plate wave sensor of claim 40 in which the first and second sets of interleaved drive teeth span approximately fifty percent of the width of the flexural plate.
43. The flexural plate wave sensor of claim 41 in which the first and second sets of interleaved sense teeth span approximately fifty percent of the width of the flexural plate.
44. The flexural plate wave sensor of claim 36 in which the first and second sets of drive teeth face in the same direction.
45. The flexural plate wave sensor of claim 37 in which the first and second sets of sense teeth face in the same direction.
46. The flexural plate wave sensor of claim 45 in which the first set of drive teeth is interleaved with the first set of sense teeth.
47. The flexural plate wave sensor of claim 46 in which the first set of drive teeth interleaved with the second set of sense teeth together span approximately fifty percent of the width of the flexural plate.
48. The flexural plate wave sensor of claim 45 in which the second set of drive teeth is interleaved with the second set of sense teeth.
49. The flexural plate wave sensor of claim 48 in which the second set of drive teeth interleaved with the first set of sense teeth together span approximately fifty percent of the width of the flexural wave plate.
50. A flexural wave plate sensor comprising:
a flexural plate having a length and a width; and
a comb pattern over the flexural plate with first and second sets of drive teeth disposed over the flexural plate, the first set of drive teeth spanning approximately seventy-five percent of the length of the flexural plate and the second set of drive teeth spanning approximately twenty-five percent of the length of the flexural plate, the comb pattern for reducing the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexural plate wave sensor.
51. The flexural plate wave sensor of claim 50 further including first and second sets of sense teeth disposed over the flexural plate, the first set of sense teeth spanning approximately seventy-five percent of the length of the flexural plate and the second set of sense teeth spanning approximately twenty-five percent of the length of the flexural plate, the first and second sets of sense teeth interleaved with the first and second sets of drive teeth.
52. The flexural plate wave sensor of claim 50 in which the first and second sets of drive teeth face one direction and the first and second sense teeth face in an opposite direction.
53. A flexural plate wave sensor comprising:
a flexural plate having a length, width, and a center; and
a comb pattern over the flexural plate with first and second sets of drive teeth disposed across approximately fifty percent of the length of the flexural plate, each said set of drive teeth spanning approximately an entirety of the width of the flexural plate at one end and curving toward the center of the flexural plate at approximately the center of the plate, the comb pattern for reducing the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexural plate wave sensor.
54. The flexural plate wave sensor of claim 53 further including first and second sets of sense teeth disposed across approximately fifty percent of the length of the flexural plate, each said set of sense teeth spanning approximately an entirety of the width of the flexural plate at one end and curving toward the center of the flexural plate at approximately the center of the plate.
55. A flexural wave plate sensor comprising:
a flexural plate having a length and a width; and
a comb pattern over the flexural plate, the comb pattern including drive teeth and sense teeth, the drive teeth and the sense teeth disposed over the flexural plate, the drive teeth spanning approximately fifty percent of the length of the flexural plate, the sense teeth spanning approximately fifty percent of the length of the flexural plate, the comb pattern for reducing the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexural plate wave sensor.
56. A flexural wave plate sensor comprising:
a flexural plate having a length and a width; and
a comb pattern over the flexural plate, the comb pattern including a set of drive teeth and a set of sense teeth, the set of drive teeth and the set of sense teeth disposed over the flexural plate, the set of drive teeth spanning approximately fifty percent of the length of the flexural plate, the set of sense teeth spanning approximately fifty percent of the length of the flexural plate, the comb pattern for reducing the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexural plate wave sensor.
57. A method for manufacturing a flexural plate wave sensor, the method comprising the steps of:
depositing an etch-stop layer over a substrate;
depositing a membrane layer over said etch stop layer;
depositing a piezoelectric layer over said membrane layer;
forming a comb pattern with drive teeth which span across an entire length of the piezoelectric layer on said piezoelectric layer;
etching a cavity through the substrate, the cavity having substantially parallel interior walls; and
removing a portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.
58. The method of claim 57 further comprising the steps of etching a hole in the piezoelectric and forming a ground contact on the silicon membrane layer.
59. A method for manufacturing a flexural plate wave sensor, the method comprising the steps of:
depositing an etch-stop layer over a substrate;
depositing a membrane layer over said etch stop layer;
depositing a piezoelectric layer over said membrane layer;
forming a comb pattern on said piezoelectric layer, said comb pattern including drive and sense teeth which span an entire length of the membrane layer;
forming a second transducer on said piezoelectric layer, spaced from said first transducer;
etching a cavity through the substrate, the cavity having substantially parallel interior walls;
removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer; and
depositing an absorptive coating on the exposed portion of the membrane layer.
60. The method of claim 59 further comprising the steps of etching a hole in the piezoelectric and forming a ground contact on the silicon membrane layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A computer-implemented method comprising:
identifying a loop iterating over a plurality of continuous streams of memory in a stride-one fashion;
generating a data reorganization graph from the loop, wherein the data reorganization graph includes one or more stream shift operations that adjust alignment of one or more of the plurality of continuous streams of memory;
identifying a particular stream from the plurality of continuous streams of memory, wherein the particular stream contains values of a datatype having a length that is different than a length of datatype contained within at least one other stream in the plurality of continuous streams of memory;
in response to identifying the particular stream, interposing a data-length conversion operation into the data reorganization graph; and
generating object code from the data reorganization graph.
2. The method of claim 1, wherein the data-length conversion operation is a pack operation.
3. The method of claim 1, wherein the data-length conversion operation is an unpack operation.
4. The method of claim 1, further comprising:
prepending a number of values to the particular stream to obtain a modified particular stream, such that the modified particular stream begins at a memory location that is at a zero memory offset.
5. The method of claim 4, further comprising:
truncating the prepended values from a computational result prior to storing the result in memory.
6. The method of claim 1, further comprising:
normalizing the data reorganization graph such that each of the one or more stream shift operations performs a left shift.
7. The method of claim 6, wherein the normalizing further comprises:
prepending values to one of the one or more continuous streams of memory to convert a right shift operation into a left shift operation.
8. A computer program product in a computer-readable medium comprising: means for identifying a loop iterating over a plurality of continuous streams of memory in a stride-one fashion;
means for generating a data reorganization graph from the loop, wherein the data reorganization graph includes one or more stream shift operations that adjust alignment of one or more of the plurality of continuous streams of memory;
means for identifying a particular stream from the plurality of continuous streams of memory, wherein the particular stream contains values of a datatype having a length that is different than a length of datatype contained within at least one other stream in the plurality of continuous streams of memory;
means, responsive to identifying the particular stream, for interposing a data-length conversion operation into the data reorganization graph; and
means for generating object code from the data reorganization graph.
9. The computer program product of claim 8, wherein the data-length conversion operation is a pack operation.
10. The computer program product of claim 8, wherein the data-length conversion operation is an unpack operation.
11. The computer program product of claim 8, further comprising:
means for prepending a number of values to the particular stream to obtain a modified particular stream, such that the modified particular stream begins at a memory location that is at a zero memory offset.
12. The computer program product of claim 11, further comprising:
means for truncating the prepended values from a computational result prior to storing the result in memory.
13. The computer program product of claim 8, further comprising:
normalizing means for normalizing the data reorganization graph such that each of the one or more stream shift operations performs a left shift.
14. The computer program product of claim 13, wherein the normalizing means further comprises:
means for prepending values to one of the one or more continuous streams of memory to convert a right shift operation into a left shift operation.
15. An information handling system comprising:
at least one processor;
one or more data storage units accessible by the at least one processor; and
functional descriptive material contained within the data storage units that, when executed by the at least one processor, directs the at least one processor to perform actions of:
identifying a loop iterating over a plurality of continuous streams of memory in a stride-one fashion;
generating a data reorganization graph from the loop, wherein the data reorganization graph includes one or more stream shift operations that adjust alignment of one or more of the plurality of continuous streams of memory;
identifying a particular stream from the plurality of continuous streams of memory, wherein the particular stream contains values of a datatype having a length that is different than a length of datatype contained within at least one other stream in the plurality of continuous streams of memory;
in response to identifying the particular stream, interposing a data-length conversion operation into the data reorganization graph; and
generating object code from the data reorganization graph.
16. The information handling system of claim 15, wherein the data-length conversion operation is a pack operation.
17. The information handling system of claim 15, wherein the data-length conversion operation is an unpack operation.
18. The information handling system of claim 15, comprising additional functional descriptive material that, when executed by the at least one processor, directs the at least one processor to perform actions of:
prepending a number of values to the particular stream to obtain a modified particular stream, such that the modified particular stream begins at a memory location that is at a zero memory offset.
19. The information handling system of claim 18, comprising additional functional descriptive material that, when executed by the at least one processor, directs the at least one processor to perform actions of:
truncating the prepended values from a computational result prior to storing the result in memory.
20. The information handling system of claim 15, comprising additional functional descriptive material that, when executed by the at least one processor, directs the at least one processor to perform actions of:
normalizing the data reorganization graph such that each of the one or more stream shift operations performs a left shift.