1. A server system comprising:
a service processor;
a plurality of system boards; and
a plurality of crossbar boards connecting the system boards, wherein
the service processor comprises a first notifier that notifies each of the crossbar boards of a crossbar board subjected to maintenance,
the crossbar boards each comprise a first transmitter that, when notified by the service processor that the crossbar board subjected to maintenance is another crossbar board, generates a suspension packet for suspending packet transmission to the another crossbar board and transmits the suspension packet to each of the system boards, and
the system boards each comprise a suspender that, when receiving the suspension packet from the crossbar board, suspends packet transmission to the crossbar board subjected to maintenance.
2. The server system according to claim 1, wherein
the first notifier notifies, when maintenance of the crossbar board subjected to maintenance is completed, the crossbar board subjected to maintenance that the maintenance is completed,
the crossbar boards each further comprise a second transmitter that, when notified that the maintenance of own crossbar board is completed, generates a resumption packet for resuming packet transmission to the own crossbar board and transmits the resumption packet to all system boards connected to the own crossbar board, and
the system boards each further comprise a resumer that, when receiving the resumption packet, resumes packet transmission to the crossbar board for which the maintenance is completed.
3. The server system according to claim 1, wherein the suspender changes, when receiving the suspension packet, a packet transmission path for the crossbar board subjected to maintenance to a crossbar board not subjected to maintenance and suspends packet transmission to the crossbar board subjected to maintenance.
4. The server system according to claim 3, wherein the resumer determines, when receiving the resumption packet, whether a packet having the transmission path changed exists and, when determining that the packet having the transmission path changed exists, changes the transmission path for the packet having the transmission path changed to the crossbar board for which the maintenance is completed and resumes transmission.
5. The server system according to claim 1, wherein
the crossbar boards each further comprise:
a determiner that monitors, when notice that the crossbar board subjected to maintenance is own crossbar board is received from the service processor, packets in the own crossbar board and determines whether all of the packets are transmitted; and
a second notifier that notifies, when the determiner determines that all of the packets are transmitted, the service processor that no more packets exist in the own crossbar board.
6. The server system according to claim 1, wherein the first notifier notifies, when notice that no more packets exist in the crossbar board subjected to maintenance is received, that the crossbar board subjected to maintenance and each of the system boards are to be disconnected.
7. The server system according to claim 6, wherein the first notifier notifies, when the maintenance of the crossbar board subjected to maintenance is completed, that the crossbar board for which the maintenance is completed and each of the system boards are to be reconnected.
8. A dynamic maintenance method for crossbar boards suitable for a server system that comprises a service processor; a plurality of system boards; and a plurality of crossbar boards connecting the system boards, the dynamic maintenance method comprising:
notifying, by the service processor, each of the crossbar boards of a crossbar board subjected to maintenance;
generating, by the crossbar boards, a suspension packet for suspending packet transmission to another crossbar board, when notice that the crossbar board subjected to maintenance is the another crossbar board is received from the service processor;
transmitting, by the crossbar boards, the suspension packet to each of the system boards;
monitoring, by the crossbar boards, packets in own crossbar board, when notice that the crossbar board subjected to maintenance is the own crossbar board is received from the service processor;
determining, by the crossbar boards, whether all of the packets are transmitted;
notifying, by the crossbar boards, the service processor that no more packets exist in the crossbar board subjected to maintenance, when all of the packets are determined to be transmitted; and
suspending, by the system boards, packet transmission to the crossbar board subjected to maintenance, when the suspension packet is received from the crossbar board.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An imprint apparatus that forms an imprint material supplied on a shot region of a substrate by using a mold, comprising:
a detection unit configured to detect each of a plurality of marks provided to the shot region and each of a plurality of marks provided to the mold; and
a control unit configured to perform alignment between the mold and the substrate based on a detection result by the detection unit,
wherein the control unit obtains a predicted value of a position of a mark provided to the shot region by using information about deformation of the shot region, determines, as an abnormal mark, a mark for which a difference between the detection result and the predicted value does not fall within an allowable range, out of the plurality of marks provided to the shot region, and performs the alignment without using the detection result for the abnormal mark.
2. The apparatus according to claim 1, wherein the control unit performs the alignment based on the detection result for a mark other than the abnormal mark, out of the plurality of marks provided to the shot region.
3. The apparatus according to claim 1, wherein
a plurality of shot regions including a first shot region having the abnormal mark, and a second shot region having undergone an imprint process before the first shot region are formed on the substrate, and
the control unit performs the alignment in the first shot region by using, instead of the detection result for the abnormal mark, the detection result for a mark that is provided to the second shot region and arranged at the same position in the shot region as a position of the abnormal mark.
4. The apparatus according to claim 1, wherein the control unit performs the alignment in a shot region having the abnormal mark by using, instead of the detection result for the abnormal mark, the detection result for a mark that is provided to a substrate having undergone an imprint process before a substrate on which the shot region having the abnormal mark is formed, and is arranged at the same position on the substrate as a position of the abnormal mark.
5. The apparatus according to claim 1, wherein
in a case where the abnormal mark is determined, the control unit performs the alignment for a shot region having the abnormal mark in accordance with a mode selected from a plurality of modes, and
the plurality of modes include at least one of a first mode in which the alignment is controlled based on the detection result for a mark other than the abnormal mark, a second mode in which the alignment is controlled by using, instead of the detection result for the abnormal mark, the detection result for a mark provided to a shot region having undergone an imprint process before the shot region having the abnormal mark, and a third mode in which the alignment is controlled by using, instead of the detection result for the abnormal mark, the detection result for a mark provided to a substrate having undergone the imprint process before a substrate on which the shot region having the abnormal mark is formed.
6. The apparatus according to claim 1, wherein the information includes at least one of a deformation amount of the shot region generated when forming a mark on the substrate, a deformation amount of the shot region upon a temperature change of the substrate, and a deformation amount of the shot region by holding the substrate.
7. The apparatus according to claim 1, wherein the control unit obtains the predicted value for each mark provided to the shot region.
8. The apparatus according to claim 1, wherein the control unit uses the predicted value commonly for a plurality of substrates.
9. A method of manufacturing an article, the method comprising steps of:
forming a pattern on a substrate using an imprint apparatus;
processing the substrate, on which the pattern has been formed, to manufacture the article;
wherein the imprint apparatus forms an imprint material supplied on a shot region of the substrate by using a mold, and includes:
a detection unit configured to detect each of a plurality of marks provided to the shot region and each of a plurality of marks provided to the mold; and
a control unit configured to perform alignment between the mold and the substrate based on a detection result by the detection unit,
wherein the control unit obtains a predicted value of a position of a mark provided to the shot region by using information about deformation of the shot region, determines, as an abnormal mark, a mark for which a difference between the detection result and the predicted value does not fall within an allowable range, out of the plurality of marks provided to the shot region, and performs the alignment without using the detection result for the abnormal mark.
10. An imprint method of forming an imprint material supplied on a shot region of a substrate by using a mold, comprising steps of:
detecting each of a plurality of marks provided to the shot region and each of a plurality of marks provided to the mold;
obtaining a predicted value of a position of a mark provided to the shot region by using information about deformation of the shot region;
determining, as an abnormal mark, a mark for which a difference between a detection result in the detecting and the predicted value obtained in the obtaining does not fall within an allowable range, out of the plurality of marks provided to the shot region; and
controlling alignment between the mold and the substrate without using the detection result for the mark determined in the determining.