1. A polymer useful in negative resist compositions, comprising:
a first monomer having a polar functional group that is attached as a tertiary ether linkage, a tertiary ester linkage, or an acetal linkage, wherein the first monomer provides an acid catalyzed polarity switch upon elimination of the polar functional group; and
a second monomer having a fluoroalcohol moiety, wherein the second monomer provides aqueous dissolution,
wherein the first monomer has the structure of formula (I):
wherein:
R1 is a polymerizable group selected from the group consisting of acrylate, methacrylate, cyclic olefin, and vinyl moieties;
R2 is an alkyl, or a substituted alkyl;
R3 is an alkyl, with at least one hydrogen at the C1 position, or is taken together with R2 to form an alicyclic moiety; and
4 is \u2014OXR5 , or
wherein X is a straight or branched alkyl group and R5 is selected from the group consisting of carboxylic acids and fluoroalcohol moieties.
2. The polymer of claim 1, wherein the polar functional group is a moiety selected from alcohol, carboxylic acid, and fluoroalcohol moieties.
3. The polymer of claims 1, 8, and 13, further comprising a third monomer that imparts at least one characteristic selected from crosslinkable functionality, etch resistance, and solubility modulation.
4. The polymer of claim 3, wherein the third monomer has a primary alcohol moiety.
5. (canceled)
6. The polymer of claim 1, wherein R2 is a lower alkyl; and R3 is a lower alkyl.
7. The polymer of claim 6, wherein the first monomer is selected from the group consisting of
wherein:
R is hydrogen or CH3.
8. The polymer useful in negative resist compositions, comprising:
a first monomer having a polar functional group that is attached as a tertiary ether linkage, a tertiary ester linkage, or an acetal linkage, wherein the first monomer provides an acid catalyzed polarity switch upon elimination of the polar functional group; and
a second monomer having a fluoroalcohol moiety wherein the second monomer provides aqueous dissolution,
wherein the first monomer has the structure of formula (II):
wherein:
R6 is a polymerizable group selected from the group consisting of acrylate, methacrylate, cyclic olefin, and vinyl moieties;
R7 is selected from the group consisting of hydrogen, alkyls, and substituted alkyls;
R8 is selected from the group consisting of hydrogen, alkyls, fluoroalcohol moieties, and carboxylic acids;
X is a straight or branched alkyl group, or is taken together with R7 to form an alicyclic moiety; and
R9 is selected from the group consisting of hydrogen, alkyls, fluoroalcohol moieties, carboxylic acids, provided that one of R8 or R9 is a fluoroalcohol moiety or carboxylic acid.
9. The polymer of claim 8, wherein R6 is a methacrylate or cyclic olefin moiety; R7 is a lower alkyl; R8 is hydrogen; X is a straight alkyl, or is taken together with R7 to form an alicyclic moiety; and R9 is a fluoroalcohol moiety or carboxylic acid.
10. The polymer of claim 9, wherein the first monomer is selected from the group consisting of
wherein:
R is hydrogen or CH3.
11. The polymer of claim 8, wherein the first monomer of formula (II) has the structure of formula (II\u2032):
wherein R6, R7, X, R8, and R9 are defined as for formula (II).
12. The polymer of claim 11, wherein the first monomer is:
13. A polymer useful in negative resist compositions, comprising:
a first monomer having a polar functional group that is attached as a tertiary ether linkage, a tertiary ester linkage, or an acetal linkage wherein the first monomer provides an acid catalyzed polarity switch upon elimination of the polar functional group; and
a second monomer having a fluoroalcohol moiety, wherein the second monomer provides aqueous dissolution,
wherein the first monomer has the structure of formula (III):
wherein:
R10 is a polymerizable group selected from the group consisting of acrylate, methacrylate, cyclic olefin, and vinyl moieties;
R11 is an alkyl;
R12 is an alkyl with at least one hydrogen at the C1 position, or is taken together with R11 to form an alicyclic moiety; and
R13 is a fluoroalcohol moiety or carboxylic acid.
14. The polymer of claim 13, wherein R10 is a cyclic olefin or vinyl moiety.
15. The polymer of claim 14, wherein the first monomer is selected from the group consisting of
16. The polymer of claims 1, 8, and 13, wherein the second monomer is selected from the group consisting of
wherein:
R is hydrogen or CH3.
17. The polymer of claim 16, wherein the second monomer has the following structure:
18. The polymer of claims 1, 8, and 13, wherein the polymer is a block copolymer.
19. The polymer of claims 1, 8, and 13, wherein the polymer is a random copolymer.
20. The polymer of claim 3, wherein the polymer is a block copolymer.
21. The polymer of claim 3, wherein the polymer is a random copolymer.
22. A polymer useful in negative resist compositions, comprising:
a first monomer having a polar functional group selected from the group consisting of fluoroalcohol moieties and carboxylic acids, wherein the first monomer is attached as a tertiary ether linkage, a tertiary ester linkage, or an acetal linkage and provides an acid catalyzed polarity switch upon elimination of the polar functional group; and
a second monomer, wherein the second monomer provides aqueous dissolution,
wherein the first monomer has the structure of formula (I):
wherein:
R1 is a polymerizable group selected from the group consisting of acrylate, methacrylate, cyclic olefin, and vinyl moieties;
R2 is an alkyl, or a substituted alkyl;
R3 is an alkyl with at least one hydrogen at the C1 position, or is taken together with R2to form an alicyclic moiety; and
R4 is \u2014OXR5 or
wherein X is a straight or branched alkyl group and R5 is selected from the group consisting of carboxylic acids and fluoroalcohol moieties.
23. The polymer of claims 22, 26, and 27, further comprising a third monomer that imparts at least one characteristic selected from crosslinkable functionality, etch resistance, and solubility modulation.
24. The polymer of claim 23, wherein the third monomer has a primary alcohol moiety.
25. (canceled)
26. A polymer useful in negative resist compositions, comprising:
a first monomer having a polar functional group selected from the group consisting of fluoroalcohol moieties and carboxylic acids, wherein the first monomer is attached as a tertiary ether linkage, a tertiary ester linkage, or an acetal linkage and provides an acid catalyzed polarity switch upon elimination of the polar functional group; and
a second monomer, wherein the second monomer provides aqueous dissolution,
wherein the first monomer has the structure of formula (II):
wherein:
R6 is a polymerizable group selected from the group consisting of acrylate, methacrylate, cyclic olefin, and vinyl moieties;
R7 is selected from the group consisting of hydrogen, alkyls, and substituted alkyls;
R8 is selected from the group consisting of hydrogen, alkyls, fluoroalcohol moieties, and carboxylic acids;
X is a straight or branched alkyl group, or is taken together with R7 to form an alicyclic moiety; and
R9 is selected from the group consisting of hydrogen, alkyls, fluoroalcohol moieties, carboxylic acids, provided that one of R8 or R9 is a fluoroalcohol moiety or carboxylic acid.
27. A polymer useful in negative resist compositions, comprising:
a first monomer having a polar functional group selected from the group consisting of fluoroalcohol moieties and carboxylic acids, wherein the first monomer is attached as a tertiary ether linkage, a tertiary ester linkage, or an acetal linkage and provides an acid catalyzed polarity switch upon elimination of the polar functional group; and
a second monomer, wherein the second monomer provides aqueous dissolution,
wherein the first monomer has the structure of formula (III):
wherein:
R10 is a polymerizable group selected from the group consisting of acrylate, methacrylate, cyclic olefin, and vinyl moieties;
R11 is an alkyl
R12 is an alkyl with at least one hydrogen at the C1 position, or is taken together with R11 to form an alicyclic moiety; and
R13 is a fluoroalcohol moiety or carboxylic acid.
28. The polymer of claims 22, 26, and 27, wherein the second monomer has a moiety selected from the group consisting of fluoroalcohol, carboxylic acid, lactone, sulfonamide and anhydride moieties.
29. The polymer of claim 28, wherein the second monomer is selected from the group consisting of
wherein:
R is hydrogen or CH3.
30-45. (canceled)
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. Method for preventing airplanes from impermissibly approaching
defendable ground objects, with the momentary flight position being recorded in a satellite-based way and used for manual and automatic flight corrections,
comprising the following features:
a defendable ground object is assigned a virtual prohibited zone spatially surrounding it, the outer boundary of which has a sufficient horizontal minimum distance from the ground object and a vertical minimum distance determining a given minimum crossing altitude;
the prohibited zone is assigned a virtual correction zone laterally surrounding it, the outer boundary of which has a horizontal minimum distance from the outer boundary of the prohibited zone in any case sufficient for distance deviation corrections and an altitude equal to that of the prohibited zone;
the correction zone is assigned a virtual alarm zone spatially surrounding it, the outer boundary of which has a horizontal minimum distance from the outer boundary of the correction zone in any case sufficient for manual deviation corrections;
the geographical data of the outer boundaries of at least the alarm and the correction zone are recorded and, together with the vertical minimum distance or the minimum crossing altitude, digitally stored and kept in every airplane with access protection provided as well as displayed in the cockpit;
the momentary flight position is continuously recorded in a satellite-based way and the momentary flight altitude established and such instantaneous data are compared with the geographical data of the outer boundaries of the alarm zone and the correction zone;
in the event of an airplane’s penetration into the alarm zone detected upon comparison of the aforesaid position data, a warning signal is transmitted until the airplane’s withdrawal from the alarm zone, and the airplane is at the same time allowed to be steered manually for the purposes of leaving the alarm zone;
in the event of an airplane’s lateral penetration into the correction zone detected upon comparison of the aforesaid position data, the airplane’s manual steerability is temporarily inhibited and replaced by autopilot control to the right or left forcing withdrawal from the correction zone at least until the airplane reaches the alarm zone again; and
in the event that the vertical minimum distance determining the given minimum crossing altitude is approached in descent above the prohibited zone and the correction zone, a descent limitation to at minimum the minimum crossing altitude is forced; and
wherein the prohibited, correction and alarm zones each being defined by a predetermined radii.
2. Method in accordance with claim No. 1, wherein circular prohibited, correction and alarm zones are used in the horizontal section.
3. Method in accordance with claim No. 1 or 2, wherein autopilot control within the correction zone is performed in connection with superordinate anticollision control.
4. Method in accordance with claim 1 or 2, wherein autopilot control is triggered by a vector-oriented control program.
5. Method in accordance with claim 1 or 2, wherein autopilot control is subject to the angle of approach to the correction zone, always performed in an obtuse angle to the right or left.
6. Method in accordance with claim 1 or 2, wherein the limitation of the airplane’s descent above the prohibited zone and the correction zone is effected in connection with superordinate anticollision control.
7. Method in accordance with claim 1 or 2, whereinupon penetration into the correction zone and in case the airplane is below a given safety altitude, for example a safety altitude determined by geographic conditions such as mountains, the autopilot control forces an optimal climb until the safety altitude is reached.
8. A facility for applying the method in accordance with claim 1 or 2, with a satellite-based navigational system receiver, a computer provided with a memory, an autopilot system for airplanes, an anticollision system for airplanes, an altimeter and display and signaling means in the airplanc’s cockpit,
wherein:
the geographical data of the outer boundaries of an alarm zone and a correction zone surrounding a central prohibited zone, a vertical minimum distance determining an object-related minimum crossing altitude and an environment-related safety altitude are stored in the memory of the computer as safety variables;
the computer continuously compares the data from the navigational system receiver and the altimeter with the stored safety variables and subject to this triggers the transmission of a warning signal andor forced autopilot control with superordinate priority of the anticollision system upon occurrence of particular comparison results;
the display means in the cockpit are designed to display the stored safety variables and the relative momentary position of the airplane as well as any resulting comparative values; and
the computer with its memory and the navigational system receiver are arranged in an access-protected control box.
9. A facility in accordance with claim 8, wherein the control box is equipped with a safety device responding in the case of any unauthorized intervention and designed to trigger a warning signal clement in the cockpit, andor with a function inhibition for take-off.
10. A facility in accordance with claim 9, characterized by the fact that the safety device of the control box is equipped with an independent power supply in the control box and a radio set responding in the event of any unauthorized intervention and triggering the safety function.
11. A method for preventing airplanes from impermissibly approaching defendable ground objects, with the momentary flight position being recorded in a satellite-based way and used for manual and automatic flight corrections, comprising the following features:
a defendable pound object is assigned a virtual prohibited zone spatially surrounding it, the outer boundary of which has a sufficient horizontal minimum distance from the ground object and a vertical minimum distance determining a given minimum crossing altitude;
the prohibited zone is assigned a virtual correction zone laterally surrounding it, the outer boundary of which has a horizontal minimum distance from the outer boundary of the prohibited zone in any ease sufficient for forced deviation corrections and an altitude equal to that of the prohibited zone;
the correction zone is assigned a virtual alarm zone spatially surrounding it, the outer boundary of which has a horizontal minimum distance from the outer boundary of the correction zone in any case sufficient for manual deviation corrections;
the geographical data of the outer boundaries of at least the alarm and the correction zone are recorded and, together with the vertical minimum distance or the minimum crossing altitude, digitally stored and kept in every airplane with access protection provided as well as displayed in the cockpit;
the momentary flight position is continuously recorded in a satellite-based way and the momentary flight altitude established and such instantaneous data are compared with the geographical data of the outer boundaries of the alarm zone and the correction zone;
in the event of an airplane’s penetration into the alarm zone detected upon comparison of the aforesaid position data, a warning signal is transmitted until the airplane’s withdrawal from the alarm zone, and the airplane is at the same time allowed to be steered manually for the purposes of leaving the alarm zone;
automatically replacing manual steerability of an airplane with autopilot control if comparison of said position data indicates that said airplane laterally penetrates said correction zone, said autopilot steering said airplane to the right or left for forcing withdrawal from said correction zone, and automatically restoring manual steerability of said airplane when said airplane reaches the alarm zone; and
in the event that the vertical minimum distance determining the given minimum crossing altitude is approached in descent above the prohibited zone and the correction zone, a descent limitation to at minimum the minimum crossing altitude is forced; and
wherein the prohibited, correction and alarm zones each being defined by a respective predetermined radius.
12. The method of claim 1, wherein each predetermined radius of said prohibited, correction and alarm zones is a constant radius defining a respective cylindrically shaped zone.
13. The method of claim 11, wherein each predetermined radius of said prohibited, correction and alarm zones is a constant radius defining a respective cylindrically shaped zone.