1. A plasma enhanced atomic layer deposition process for producing a metal containing thin film on a substrate comprising alternately and sequentially contacting the substrate with vapor phase pulses of at least one volatile metal containing cyclopentadienyl compound, and a second reactant at a temperature that is low enough to prevent decomposition of the metal containing cyclopentadienyl compound and the second reactant, wherein the metal comprises zirconium, and wherein the metal containing cyclopentadienyl compound does not contain a metal directly bonded to a halide or oxygen atom, and wherein the metal containing cyclopentadienyl compound comprises at least one cyclopentadienyl bonded to the metal and at least one ligand that is separately bonded to the metal via nitrogen.
2. The process of claim 1, wherein the metal containing cyclopentadienyl compound has the formula: (R1R2R3R4R5Cp)x-MR0z\u2014(NR1 R2)y
wherein M is zirconium;
wherein each R1, R2, R3, R4, R5, and R0is independently selected from:
(i) hydrogen;
(ii) linear and branched C1-C20 alkyl, alkenyl and alkynyl groups, which are independently substituted or unsubstituted;
(iii) carbocyclic groups, such as aryl, phenyl, cyclopentadienyl, alkylaryl, and halogenated carbocyclic groups; and
(iv) heterocyclic groups; and
wherein both x and y are \u22671 and z \u22670.
3. The process of claim 2, wherein each of the R1 and R2 is independently selected from methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, t-butyl, n-amyl, isoamyl, n-pentyl, isopentyl, n-hexyl, isohexyl, and 2,3-dimethyl-2-butyl.
4. The process of claim 2, wherein each of the R1 and R2 is independently selected from linear and branched C1-C4 alkyl, alkenyl, and alkynyl groups, which are independently substituted or unsubstituted.
5. The process of claim 4, wherein each of the R1 and R2 is independently selected from linear and branched C1-C4 alkyl, which are independently substituted or unsubstituted.
6. The process of claim 2, wherein z is 0.
7. The process of claim 6, wherein y is 3.
8. The process of claim 1, wherein the metal containing cyclopentadienyl compound does not comprise halide or oxygen atoms.
9. The process of claim 1, wherein the metal containing thin film comprises an insulator material.
10. The process of claim 1, wherein the temperature is 200\xb0 C. to 400\xb0 C.
11. An atomic layer deposition process for producing a metal containing thin film on a substrate comprising sequentially:
contacting the substrate with a vapor pulse of a first reactant, wherein the first reactant comprises a metal containing cyclopentadienyl compound, wherein the metal containing cyclopentadienyl compound does not contain a metal directly bonded to a halide or oxygen atom, and wherein the metal containing cyclopentadienyl compound has the formula: (R 1R2R3R4R5Cp)x\u2014MR0z\u2014(NR1R2)y
wherein M is zirconium;
wherein each Rl, R2, R3, R4, R5, and R is independently selected from:
(i) hydrogen,
(ii) linear and branched C1-C20 alkyl, alkenyl and alkynyl groups, which are independently substituted or unsubstituted, and
wherein both x and y are \u22671 and z \u22670; and
contacting the substrate with a second reactant.
12. The process of claim 11, wherein an inert gas serves as a carrier gas for the first reactant.
13. The process of claim 11, wherein the atomic layer deposition process comprises a plasma enhanced atomic layer deposition process.
14. The process of claim 11, wherein each of the R1 and R2 is independently selected from linear and branched C1-C4 alkyl, alkenyl, and alkynyl groups, which are independently substituted or unsubstituted.
15. The process of claim 14, wherein each of the R1 and R2 is independently selected from linear and branched C1-C4 alkyl, which are independently substituted or unsubstituted.
16. The process of claim 15, wherein each of the R1 and R2 is independently selected from methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, and t-butyl.
17. The process of claim 11, wherein z is 0.
18. The process of claim 17, wherein y is 3.
19. The process of claim 11, wherein the metal containing cyclopentadienyl compound does not comprise halide or oxygen atoms.
20. The process of claim 11, wherein the metal containing cyclopentadienyl compound comprises a modified cyclopentadienyl group.
21. The process of claim 20, wherein the modified cyclopentadienyl group is selected from the group consisting of Me5Cp, MeCp, EtCp, and Me3SiCp.
22. The process of claim 11, wherein the metal containing thin film comprises an insulating thin film.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An elongate medical device comprising:
a shaft comprising a distal segment and proximal segment and defining a longitudinal axis;
at least one proximal segment deflection wire adapted to deflect said proximal segment;
at least one distal segment deflection wire adapted to deflect said distal segment independent of said proximal segment; and
a handle portion comprising a first manual actuation mechanism coupled to said at least one distal segment deflection wire and a second manual actuation mechanism coupled to said at least one proximal segment deflection wire;
wherein actuation of said first manual actuation mechanism imparts a tensile force on said distal segment deflection wire thereby causing said distal segment to deflect and actuation of said second manual actuation mechanism imparts a tensile force on said proximal segment thereby causing said proximal segment to deflect;
further wherein at least one of said first manual actuation mechanism and said second manual actuation mechanism comprises an adjusting knob configured to impart a tensile force on the deflection wire with which it is coupled by rotating about the longitudinal axis of said shaft.
2. The elongate medical device of claim 1, wherein said first manual actuation mechanism comprises a first adjusting knob configured to impart a tensile force on said first deflection wire by rotating about the longitudinal axis of said shaft and said second manual actuation mechanism comprises a second adjusting knob configured to impart a tensile force on said second deflection wire by rotating about the longitudinal axis of said shaft.
3. The elongate medical device of claim 1, wherein said at least one distal segment deflection wire comprises two distal segment deflection wires.
4. The elongate medical device of claim 3, wherein actuation of said first manual actuation mechanism in a first actuation direction imparts a tensile force on a first of said two distal segment deflection wires, thereby causing said distal segment to deflect in a first deflection direction, further wherein actuation of said first manual actuation mechanism in a second actuation direction imparts a tensile force on a second of said two distal segment deflection wires, thereby causing said distal segment to deflect in a second deflection direction.
5. The elongate medical device of claim 4, wherein said first deflection direction is substantially opposed to said second deflection direction.
6. The elongate medical device of claim 1, wherein said at least one proximal segment deflection wire comprises two proximal segment deflection wires.
7. The elongate medical device of claim 6, wherein actuation of said second manual actuation mechanism in a first actuation direction imparts a tensile force on a first of said two proximal segment deflection wires, thereby causing said proximal segment to deflect in a first deflection direction, further wherein actuation of said second manual actuation mechanism in a second actuation direction imparts a tensile force on a second of said two proximal segment deflection wires, thereby causing said proximal segment to deflect in a second deflection direction.
8. The elongate medical device of claim 7, wherein said first deflection direction is substantially opposed to said second deflection direction.
9. An elongate medical device comprising:
a shaft comprising a unitary wall comprising a distal segment and a proximal segment;
a distal segment steering mechanism embedded in said wall distal segment;
a proximal segment steering mechanism embedded in said wall proximal segment;
a distal segment deflection member, coupled to said distal segment steering mechanism, configured to deflect said distal segment independent of said proximal segment, said distal segment deflection member having a distal end coupled with said shaft distal segment and a proximal end;
a proximal segment deflection member, coupled to said proximal segment steering mechanism, configured to deflect said proximal segment, said proximal segment deflection member having a distal end coupled with said shaft proximal segment and a proximal end; and
a handle, coupled to said proximal segment deflection member proximal end and said distal segment deflection member proximal end, and configured to control the deflection of said shaft proximal segment and said shaft distal segment.
10. The elongate medical device of claim 9, said proximal segment deflection member extends through said wall.
11. The elongate medical device of claim 9, wherein said shaft proximal segment defines a lumen and said distal segment deflection member extends through said lumen.
12. The elongate medical device of claim 9, wherein at least one of said distal segment steering mechanism and said proximal segment steering mechanism comprises a pull ring.
13. The elongate medical device of claim 12, wherein said distal segment steering mechanism comprises a distal pull ring and said proximal segment steering mechanism comprises a proximal pull ring.