1. In a substrate treatment bath comprised of a vessel for containing a process liquid and having a megasonic transducer radiating ultrasonic energy into said bath, the improvement comprising:
means for reflecting and dispersing said ultrasonic energy within said vessel, said means including at least one convex curved surface disposed in said vessel and oriented to reflect incident ultrasonic energy from said transducer.
2. The improved substrate treatment bath of claim 1, wherein said at least one convex curved surface is oriented to receive the ultrasonic energy emanating from said transducer at an angle less than the critical angle for the material that forms said convex curved surface.
3. The improved substrate treatment bath of claim 1, wherein said at least one convex curved surface includes a pair of convex curved wall portions, said wall portions being integrally formed in wall surfaces of said vessel.
4. The improved substrate treatment bath of claim 3, wherein said pair of convex curved wall portions are disposed in opposed, enantiomorphic relationship.
5. The improved substrate treatment bath of claim 4, wherein said vessel includes opposed, spaced apart side walls, and said convex curved wall portions are each incorporated in one of said side walls of said vessel.
6. The improved substrate treatment bath of claim 5, wherein said vessel includes a bottom wall extending between said side walls, and said convex curved wall portions each extend curvilinearly from said bottom wall to a respective side wall of said vessel.
7. The improved substrate treatment bath of claim 6, wherein transducer is acoustically coupled to said bottom wall of said vessel, and said convex curved wall portions are disposed to receive ultrasonic energy substantially directly radiated from said bottom wall.
8. The improved substrate treatment bath of claim 7, wherein said convex curved wall portions are oriented to received said direct radiated ultrasonic energy at an angle less than the critical angle for the material that comprises said convex curved wall portions.
9. The improved substrate treatment bath of claim 1, further including a substrate cassette for supporting a plurality of substrates in said bath.
10. The improved substrate treatment bath of claim 9, wherein said vessel includes a first wall, and said transducer is acoustically coupled to said first wall.
11. The improved substrate treatment bath of claim 10, wherein said cassette includes structural components interposed between said said first wall and said substrates that acoustically shadow portions of substrates supported in said cassette, and said at least one convex curved surface is disposed to direct reflected ultrasonic energy from said first wall to illuminate at least some of the shadowed portions of the substrates.
12. A method for a megasonic treatment bath, including the steps of:
providing a vessel containing a process liquid;
directing a transducer to radiate ultrasonic energy into said process liquid;
immersing at least one substrate in said process liquid for treatment;
providing a reflecting surface in said vessel to receive directly the ultrasonic energy and to disperse the reflected ultrasonic energy toward the at least one substrate, whereby acoustic shadows formed by energy directly from said transducer are illuminated by the dispersed ultrasonic energy.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of generating a reproducible encryption key for encrypting data associated with a data item for transmission to a remote communication device, comprising:
applying a deterministic algorithm to at least a portion of the data item to generate a first hash, the data item exceeding a selected batch size,
using the first hash as an encryption key to encrypt a first batch of the data associated with the data item,
transmitting the encrypted first batch of the data associated with the data item to the remote communication device,
applying the deterministic algorithm to at least a portion of the data item to generate a further hash whereby the further hash is identical to the first hash,
using the further hash as an encryption key to encrypt a further batch of the data associated with the data item, and
transmitting the encrypted further batch of the data associated with the data item to the remote communication device.
2. The method of claim 1 wherein the deterministic algorithm comprises a hash algorithm.
3. The method of claim 1 wherein the deterministic algorithm comprises a key derivation function.
4. The method of claim 1 further comprising concatenating the portion of the data item with additional data prior to applying the deterministic algorithm.
5. The method of claim 4 wherein the additional data is from a source external to the data item.
6. The method of claim 1 further comprising, after using the first hash as an encryption key to encrypt the first batch of the data associated with the data item,
encrypting the encryption key using a public key to generate an encrypted encryption key and transmitting the encrypted encryption key to the remote communication device.
7. The method of claim 1 further comprising repeating the applying of the deterministic algorithm to generate the further hash, using the further hash as an encryption key to encrypt a further batch of the data and transmitting the encrypted further batch of the data, for all further batches of the data associated with the data item.
8. The method of claim 1 further comprising, after transmitting the encrypted first batch of the data, receiving a request for additional data associated with the data item from the remote communication device.
9. The method of claim 1 where the encryption key is a session key.
10. A system for generating a reproducible encryption key for encrypting data in a data item for transmission to a remote communication device, comprising a data processing device in communication with at least one memory storing the data item and comprising a processor configured to apply a deterministic algorithm to at least a portion of the data item to generate a first hash for use as an encryption key associated with the data item for transmission of a first batch of data to the communication device, the data item exceeding a selected batch size, the processor further configured to encrypt a plurality of batches of data with a further encryption key generated by re-applying the deterministic algorithm to at least a portion of the data item to thereby reproduce the further encryption key and to encrypt each of the plurality of batches of data with the further encryption key, and to transmit each of the encrypted plurality of batches of data to a remote communication device whereby the encryption key is identical to the further encryption key.
11. The system of claim 10 wherein the deterministic algorithm comprises a hash algorithm.
12. The system of claim 10 wherein the deterministic algorithm comprises a key derivation function.
13. The system of claim 10 wherein the processor further concatenates the portion of the data item with additional data prior to applying the deterministic algorithm.
14. The system of claim 13 wherein the additional data is from a source external to the data item.
15. The system of claim 10 wherein the processor further encrypts the encryption key using a public key to generate an encrypted encryption key.
16. A computer program product for use with a computer, the computer program product comprising a non-transitory computer usable medium having computer readable program code means embodied in said medium for generating a reproducible encryption key for encrypting message data, said computer program product having:
computer readable program code means for applying a deterministic algorithm to at least a portion of the data item to generate a first hash for use as a encryption key to encrypt a first batch of the data associated with the data item; and
computer readable program code means for transmitting the encrypted first batch of the data associated with the data item to the communication device,
and if the data item exceeds a selected batch size, a plurality of batches of data are encrypted with a further encryption key generated by re-applying the deterministic algorithm to at least a portion of the data item to thereby reproduce the further encryption key and encrypting each of the plurality of batches of data with the further encryption key, and transmitted to the remote communication device whereby the encryption key is identical to the further encryption key.
17. The computer program product of claim 16 wherein the deterministic algorithm comprises a hash algorithm.
18. The computer program product of claim 16 wherein the deterministic algorithm comprises a key derivation function.
19. The computer program product of claim 16, further comprising computer readable program code means for concatenating the portion of the data item with additional data prior to applying the deterministic algorithm.
20. The computer program product of claim 19 wherein the additional data is from a source external to the data item.
21. The computer program product of claim 16, further comprising computer readable program code means for encrypting the encryption key using a public key to generate an encrypted encryption key.