1. A method for fabricating an NAND type non-volatile ferroelectric memory cell, comprising the steps of:
(1) forming capacitor first electrodes in surfaces of a first conduction type semiconductor substrate at fixed intervals;
(2) forming wordlines on the first electrodes with a ferroelectric film disposed inbetween such that the first electrodes are aligned to edge portions of the wordlines, and forming a WEC electrode on one side of a last wordline;
(3) using the wordlines and the WEC electrode as masks in implanting second conduction type impurity ions, and conducting annealing to form source and drain regions; and,
(4) forming bitlines so as to be electrically connected to a first and a last regions of the source and drain regions.
2. A method as claimed in claim 1, wherein the capacitor first electrodes are formed by impurity ion implanting.
3. A method as claimed in claim 2, wherein the step (1) includes the steps of;
(14-1) coating photoresist on the first conduction type semiconductor substrate;
(14-2) patterning the photoresist to expose the substrate at fixed intervals;
(14-3) using the patterned photoresist in implanting impurity ions, and conducting annealing, to form first electrodes in surfaces of the substrate at fixed intervals.
4. A method as claimed in claim 1, wherein the step (2) includes the steps of;
forming a ferroelectric film on the substrate having the first electrodes formed thereon,
forming a wordline material layer on the ferroelectric film,
patterning the wordline material layer such that the first electrodes are aligned to edge portions thereof, to form the wordlines and the WEC electrode.
5. A method as claimed in claim 3, further including the step of forming a diffusion barrier for preventing diffusion of the ferroelectric film into the substrate before formation of the ferroelectric film.
6. A method as claimed in claim 3, further including the step of forming a diffusion barrier for preventing diffusion of the ferroelectric film into the wordline material layer after formation of the ferroelectric film.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A movable console device, having a rack-mount configuration, comprising:
a console section including a keyboard and a display;
a mount section for mounting said console section onto a rack structure in a manner movable between a retracted position and a drawn-out position; and
a drive section for automatically moving said console section with respect to the rack structure between said retracted position and said drawn-out position;
wherein said drive section includes a detecting section for detecting an existence of an obstruction to a movement of said console section and generating an obstruction detection signal, during a driving operation for moving said console section between said retracted position and said drawn-out position, and a control section for controlling said movement of said console section based on said obstruction detection signal.
2. A movable console device as set forth in claim 1, wherein said mount section mounts said keyboard and said display in said console section onto the rack structure in a manner individually movable between said retracted position and said drawn-out position; and wherein said drive section automatically moves at least one of said keyboard and said display between said retracted position and said drawn-out position.
3. A movable console device as set forth in claim 1, further comprising an operating section for giving a drive command to said drive section, said operating section being provided in said console section.
4. A movable console device as set forth in claim 1, wherein said console section includes a display support mechanism for supporting said display in a manner displaceable between a non-operating position and an operating position; and wherein said movable console device further comprises a second drive section for automatically displacing said display between said non-operating position and said operating position.
5. A movable console device as set forth in claim 4, wherein said second drive section obtains a driving force for displacing said display between said non-operating position and said operating position, depending on said movement of said console section from said retracted position to said drawn-out position.
6. A movable console device as set forth in claim 4, wherein said second drive section acts to adjust said operating position of said display.
7. A movable console device as set forth in claim 6, wherein said second drive section includes a storage section for storing said operating position of said display as adjusted, and a control section for reproducing said operating position as stored.
8. A movable console device as set forth in claim 4, wherein said second drive section includes a detecting section for detecting obstruction to a displacement of said display and generating a detection signal, during a driving operation for displacing said display between said non-operating position and said operating position, and a control section for controlling said displacement of said display based on said detection signal.
9. A movable console device as set forth in claim 4, further comprising an operating section for giving a drive command to said second drive section, said operating section being provided in said console section.
10. A movable console device as set forth in claim 4, wherein said display support mechanism is configured to support said display located at said operating position in a manner rotatable in a direction different from a displacement direction between said non-operating position and said operating position; and wherein said movable console device further comprises a third drive section for automatically rotating said display at said operating position.
11. A movable console device as set forth in claim 10, wherein said third drive section includes a detecting section for detecting obstruction to a rotation of said display and generating a detection signal, during a driving operation for rotating said display at said operating position, and a control section for controlling said rotation of said display based on said detection signal.
12. A movable console device as set forth in claim 10, further comprising an operating section for giving a drive command to said third drive section, said operating section being provided in said console section.
13. A movable console device, having a rack-mount configuration, comprising:
a console section including a display;
a mount section for mounting said console section onto a rack structure in a manner movable between a retracted position and a drawn-out position;
a display support mechanism provided in said console section for supporting said display in a manner displaceable between a non-operating position and an operating position; and
a drive section for automatically displacing said display between said non-operating position and said operating position;
wherein said drive section includes a detecting section for detecting an existence of an obstruction to a displacement of said display and generating an obstruction detection signal, during a driving operation for displacing said display between said non-operating position and said operating position, and a control section for controlling said displacement of said display based on said obstruction detection signal.
14. A movable console device, having a rack-mount configuration, comprising:
a console section including a display;
a mount section for mounting said console section onto a rack structure in a manner movable between a retracted position and a drawn-out position;
a display support mechanism provided in said console section for supporting said display in a manner displaceable between a non-operating position and an operating position and supporting said display located at said operating position in a manner rotatable in a direction different from a displacement direction between said non-operating position and said operating position; and
a drive section for automatically rotating said display at said operating position.