1. A plasma process detecting sensor comprising:
a substrate;
a first electrode selectively formed over the substrate in a state of being insulated from the substrate;
an insulating film deposited over the first electrode;
a second electrode selectively formed over a surface of the insulating film and exposed to a plasma during plasma etching;
an opening formed in the second electrode;
a contact hole defined in the insulating film and having a depth at which the first electrode is exposed with a diameter larger than the opening; and
a measuring device for measuring a difference in potential between the first and second electrodes.
2. A plasma process detecting sensor comprising:
a substrate;
a first electrode selectively formed over the substrate in a state of being insulated from the substrate;
a first insulating film formed over the first electrode;
a second insulating film deposited over the first insulating film;
a second electrode selectively formed over a surface of the second insulating film and exposed to a plasma during plasma etching;
a first opening formed in the second electrode;
a contact hole defined in the second insulating film and having a depth that extends from the first opening to a surface of the first insulating film with a diameter larger than the first opening;
a second opening formed in the first insulating film located below the contact hole and having a diameter smaller than the diameter of the first opening; and
a measuring device for measuring a difference in potential between the first and second electrodes during the plasma etching.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for extracting material and mechanical properties of a cylinder subject to expansion cause by an explosion so as to better understand the evolution of damage, the method comprising the steps of:
providing a plurality of cylinders, each of the plurality of cylinders have the same physical dimensions;
providing a plurality of charges, each of the plurality of charges having a different explosive force;
providing a fluid having a shock impedance less than a shock impedance of any of the plurality of charges; and
placing one of the plurality of charges in a respective one of the plurality of cylinders, and filling the respective one of the plurality of cylinders with the fluid, wherein the one of a plurality of charges is detonated and the physical characteristic of the respective one of the plurality of cylinders is measured, wherein each of the successive charges has a greater explosive force than its predecessor.
2. The method set forth in claim I wherein the fluid is water.
3. The method as set forth in claim 1, further including the step of performing an analysis of each of the plurality of cylinders after a charge is detonated therein, wherein the analysis is configured to obtain the material and mechanical changes of a respective cylinder after a charge is detonated therein.
4. The method as set forth in claim 3, wherein the analysis detecting the electrical conductivity, electromagnetism, hardness, yield strength of a respective cylinder.
5. The method as set forth in claim 3, further including the step of sectioning the cylinder so as to generate a plurality of sections, and performing the analysis on at least one of the sections in the plurality of sections.
6. The method as set forth in claim 5, further including the step of polishing at least one of the plurality of sections, and performing an analysis on the polished section.
7. The method as set forth in claim 1, wherein the cylinder is formed of a metallic material.
8. The method as set forth in claim 1, wherein the metallic material consists of one selected from the group comprising copper, aluminum, tantalum, or steel.