1. A multi-axis micromachined accelerometer, comprising: a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis.
2. The accelerometer of claim 1 wherein the first and second axes are perpendicular to each other.
3. The accelerometer of claim 1 wherein the first detection electrode is suspended above the substrate by a flexible beam which extends in a direction perpendicular to the first axis, and the second detection electrode is suspended above the substrate by a flexible beam which extends in a direction perpendicular to the second axis.
4. The accelerometer of claim 1 wherein the proof mass is connected to the first detection electrode by a coupling link which is rigid along the first axis and flexible along the second axis, and the proof mass is connected to the second detection electrode by a coupling link which is rigid along the second axis and flexible along the first.
5. The accelerometer of claim 1 wherein the proof mass is connected to detection electrodes by levers which apply amplified movement of the proof mass to the electrodes.
6. The accelerometer of claim 5 wherein the levers are perpendicular to the axes of movement and are connected to the proof mass and to the detection electrodes by coupling links which are rigid along the axes and flexible laterally.
7. The accelerometer of claim 1 wherein the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis.
8. The accelerometer of claim 7 wherein the proof mass is mounted on a frame which is suspended above the substrate for movement along the first and second axes, with the proof mass being mounted asymmetrically on the frame for rotational movement about an axis parallel to the substrate.
9. A micromachined accelerometer for detecting acceleration along first and second mutually perpendicular input axes, comprising: a substrate, first and second detectors having input electrodes interleaved between fixed electrodes, flexible beams perpendicular to the first axis mounting the input electrodes of the first detector for movement only along the first axis, flexible beams perpendicular to the second axis mounting the input electrodes of the second detector for movement only along the second axis, a proof mass, coupling links which are rigid along the first axis and flexible along the second axis interconnecting the proof mass and the movable electrodes of the first detector, and coupling links which are rigid along the second axis and flexible along the first axis interconnecting the proof mass and the movable electrodes of the second detector.
10. A multi-axis micromachined accelerometer, comprising: a proof mass suspended above a substrate for movement in response to acceleration along first axis parallel to the substrate and second axes perpendicular to the substrate, a first detection electrode connected to the proof mass and constrained for movement only along the first axis for detecting acceleration along the first axis, and a second detection electrode mounted on the substrate beneath the proof mass for detecting acceleration along the second axis.
11. The accelerometer of claim 10 wherein the proof mass is constrained for linear movement in response to acceleration along the first axis.
12. The accelerometer of claim 10 wherein the proof mass is constrained for torsional movement in response to acceleration along the first axis.
13. The accelerometer of claim 10 wherein the proof mass is constrained for rotational movement about an axis parallel to the substrate in response to acceleration along the second axis.
14. A multi-axis micromachined accelerometer, comprising: a substrate, first and second detectors having input electrodes interleaved between fixed electrodes, flexible beams perpendicular to a first axis mounting the input electrodes of the first detector for movement only along the first axis, flexible beams perpendicular to a second axis mounting the input electrodes of the second detector for movement only along the second axis, a gimbal frame, coupling links which are rigid along the first axis and flexible along the second axis interconnecting the gimbal frame and the movable electrodes of the first detector, coupling links which are rigid along the second axis and flexible along the first axis interconnecting the gimbal frame and the movable electrodes of the second detector, a proof mass mounted on the gimbal frame for rotational movement about an axis parallel to the substrate in response to acceleration along an axis perpendicular to the substrate, and a detection electrode mounted on the substrate beneath the proof mass for detecting the rotational movement of the proof mass.
15. The accelerometer of claim 14 wherein the first and second axes are parallel to the substrate and perpendicular to each other.
16. A micromachined accelerometer for detecting acceleration along first and second mutually perpendicular axes, comprising: a substrate, first and second generally planar proof masses mounted side-by-side above the substrate and connected together along adjacent edge portions thereof for torsional movement about axes perpendicular to the substrate in response to acceleration along the first axis and for rotational movement about axes parallel to the substrate in response to acceleration along the second axis, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting the rotational movement of the proof masses.
17. The accelerometer of claim 16 wherein the proof masses are mounted in gimbals for rotational movement about the axes parallel to the substrate, and the gimbals are mounted for torsional movement about the axes perpendicular to the substrate.
18. The accelerometer of claim 16 wherein the proof masses are mounted on inner frames for rotational movement about the axes parallel to the substrate, and the inner frames are mounted for torsional movement about the axes perpendicular to the substrate.
19. A micromachined accelerometer for detecting acceleration along first, and second axes, comprising: a substrate, a pair of gimbals, flexures mounting the gimbals on the substrate for torsional movement about axes perpendicular to the substrate in response to acceleration along the first axis, a pair of proof masses rotatively mounted on the gimbals for rotational movement about axes parallel to the substrate in response to acceleration along the second axis, a detector having movable input electrodes connected to the proof masses and constrained for movement only along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting the rotational movement of the proof masses.
20. The accelerometer of claim 19 wherein the proof masses are connected together for movement in opposite directions.
21. The accelerometer of claim 19 wherein the gimbals are connected together for movement in opposite directions.
22. A multi-axis micromachined accelerometer, comprising: a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode constrained for movement only along the first axis, a second detection electrode constrained for movement only along the second axis, a first lever extending in a direction perpendicular to the first axis for rotational movement about a fulcrum in a direction generally parallel to the first axis, a second lever extending in a direction perpendicular to the second axis for rotational movement about a fulcrum in a direction generally parallel to second axis, a first coupling link which is rigid along the first axis and flexible along the second axis connecting the proof mass to the first lever at a point near the fulcrum, a second coupling link which is rigid along the first axis and flexible along the second axis connecting the first detection electrode to the first lever at a point removed from the fulcrum, a first coupling link which is rigid along the second axis and flexible along the first axis connecting the proof mass to the second lever at a point near the fulcrum, and a second coupling link which is rigid along the second axis and flexible along the first axis connecting the second detection electrode to the second lever at a point removed from the fulcrum.
23. The accelerometer of claim 22 wherein the detection electrodes are interleaved between fixed electrodes.
24. The accelerometer of claim 22 wherein the first detection electrode is suspended above the substrate by flexible beams which extend in a direction perpendicular to the first axis, and the second detection electrode is suspended above the substrate by flexible beams which extend in a direction perpendicular to the second axis.
25. A micromachined accelerometer for detecting acceleration along a first axis parallel to a substrate and a second axis perpendicular to the substrate, comprising: a pair of frames mounted on the substrate for torsional movement about axes perpendicular to the substrate in response to acceleration along the first axis, a pair of generally planar proof masses mounted on the frames for torsional movement with the frames and for rotational movement about axes parallel to the substrate in response to acceleration along the second axis, sensing capacitors having input electrodes extending from the frames and interleaved with fixed electrodes mounted on the substrate for detecting torsional movement of the proof masses and frames, and detection electrodes mounted on the substrate beneath the proof masses for detecting the rotational movement of the proof masses.
26. The accelerometer of claim 25 wherein the frames and the sensing capacitors are located entirely within the lateral confines of the proof masses.
27. The accelerometer of claim 25 wherein the proof masses are configured to create a mass imbalance about the axes of rotation.
28. The accelerometer of claim 27 wherein upper portions of the proof masses are removed on one side of the axes of rotation in order to enhance the mass imbalance.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system for allocating a resource to workloads comprising:
at least one processor configured to:
assign workloads corresponding share quantities of the resource, wherein the share quantity of at least one of the workloads is a hard share quantity, and each share quantity other than a hard share quantity is a soft share quantity;
allocate the resource to currently active workloads in a current interval based on share quantities of previously active workloads in a preceding predefined interval by determining for each of said previously active workloads a portion of the resource to which the previously active workload is entitled in the current interval based on the share quantity of that previously active workload relative to the share quantities of other previously active workloads in the preceding predefined interval; and
in response to the availability of additional resource amounts of the resource in the current interval, allocating the additional resource amounts to at least one of the currently active workloads assigned a soft share quantity in the current interval.
2. The system of claim 1, wherein the resource is processor time.
3. The system of claim 2, wherein a workload is active in an interval when the workload has a processor utilization that exceeds a minimum threshold for said interval, and said processor utilization for said interval is an average of processor utilization for one or more sub-intervals of said interval.
4. The system of claim 1, wherein said allocating said resource to said currently active workloads recurs according to a regular schedule.
5. The system of claim 1, wherein said portion of the resource to which a previously active workload was entitled is proportional to said hard share quantity of said previously active workload divided by a sum of said hard share quantity and said soft share quantity of said other previously active workloads in said preceding predefined interval.
6. The system of claim 1, wherein a portion of the resource to which one or more previously active workloads was entitled is determined for one or more previously inactive workloads in said preceding predefined interval based on a hard share quantity assigned to one or more other previously inactive workloads in the preceding predefined interval.
7. The system of claim 1, wherein said portion of the resource to which a previously active workloads was entitled may not exceed a predetermined limit.
8. The system of claim 1, wherein: at least one workload is a member of a class of workloads, and allocating said resource to said workload comprises determining a maximum resource allocation for the workload based on a resource entitlement of the class and a hard share quantity indicating a maximum allocation of the resource entitlement of the class to the workload.
9. A computer program product comprising:
a non-transitory computer readable storage medium having computer readable program code embodied therewith for execution on a first processing system, the computer readable program code comprising computer readable program code configured to:
assign workloads corresponding share quantities of the resource, wherein the share quantity of at least one of the workloads is a hard share quantity, and each share quantity other than a hard share quantity is a soft share quantity;
allocate the resource to currently active workloads in a current interval based on share quantities of previously active workloads in a preceding predefined interval by determining for each of said previously active workloads a portion of the resource to which the previously active workload is entitled in the current interval based on the share quantity of that previously active workload relative to the share quantities of other previously active workloads in the preceding predefined interval; and
in response to the availability of additional resource amounts of the resource in the current interval, allocating the additional resource amounts to at least one of the currently active workloads assigned a soft share quantity in the current interval.
10. The computer program product of claim 9, wherein the resource is processor time.
11. The computer program product of claim 10, wherein a workload is active in an interval when the workload has a processor utilization that exceeds a minimum threshold for said interval, and said processor utilization for said interval is an average of processor utilization for one or more sub-intervals of said interval.
12. The computer program product of claim 9, wherein said allocating said resource to said currently active workloads recurs according to a regular schedule.
13. The computer program product of claim 9, wherein said portion of the resource to which a previously active workload was entitled is proportional to said hard share quantity of said previously active workload divided by a sum of said hard share quantity and said soft share quantity of said other previously active workloads in said preceding predefined interval.
14. The computer program product of claim 9, wherein a maximum resource allocation is determined for one or more previously inactive workloads in said preceding predefined interval based on a hard share quantity assigned to said one or more other previously inactive workloads.
15. The computer program product of claim 9, wherein said portion of the resource to which a previously active workloads was entitled may not exceed a predetermined limit.
16. The computer program product of claim 9, wherein: at least one workload is a member of a class of workloads, and allocating said resource to said workload comprises determining a maximum resource allocation for the workload based on a resource entitlement of the class and a hard share quantity indicating a maximum allocation of the resource entitlement of the class to the workload.