1. A method, comprising:
performing a specified manufacturing process on a group of substrates in a plurality of equivalent process tools;
obtaining measurement data from some of said group of substrates processed by said plurality of process tools;
determining updated values of relative biases for each of said plurality of equivalent process tools on the basis of said measurement data and a current value of said relative biases, said relative biases indicating a deviation of a process output of said manufacturing process between a respective two of said plurality of equivalent process tools;
weighting said relative biases on the basis of an age of said measurement data; and
controlling said manufacturing process on the basis of said weighted relative biases.
2. The method of claim 1, further comprising determining an uncertainty of each of said relative biases and weighting said relative biases on the basis of said uncertainties.
3. The method of claim 2, wherein determining said updated values of said relative biases comprises using an exponentially weighted moving average (EWMA).
4. The method of claim 1, further comprising determining each relative bias on the basis of a plurality of equivalent relative biases.
5. The method of claim 4, wherein determining each relative bias on the basis of a plurality of equivalent relative biases comprises determining a weighted sum of said equivalent relative biases.
6. The method of claim 5, further comprising determining a mean bias for each of said plurality of process tools on the basis of relative biases related to a respected one of said plurality of process tools and determined by said weighted sum of said equivalent relative biases.
7. The method of claim 6, further comprising determining a deviation for each relative bias on the basis of said mean biases and said weighted sum of equivalent relative biases.
8. The method of claim 7, further comprising determining a consensus mean bias for each of said plurality of process tools by using a weighted sum of said deviation associated with a respective one of said plurality of process tools.
9. The method of claim 8, wherein controlling said manufacturing process is performed on the basis of said consensus mean biases.
10. The method of claim 1, wherein weighting said relative biases on the basis of the age of said measurement data comprises using an exponential dependency.
11. The method of claim 1, wherein a number of said some substrates used for obtaining said measurement data is less than a number of said plurality of equivalent process tools.
12. The method of claim 1, wherein said plurality of equivalent process tools comprises one of post-exposure bake tools and chemical vapor deposition tools.
13. The method of claim 1, wherein controlling said manufacturing process comprises controlling at least a lithography tool.
14. A method, comprising:
controlling a manufacturing process on the basis of relative biases, each relative bias associated with a respective one of a plurality of equivalent process tools used in said manufacturing process; and
determining said relative biases on the basis of a weighting factor indicating an uncertainty of measurement data associated with a respective one of said relative biases.
15. The method of claim 14, further comprising weighting said relative biases on the basis of an age of measurement data associated with said relative biases.
16. The method of claim 14, further comprising determining each relative bias on the basis of a plurality of equivalent relative biases.
17. The method of claim 16, wherein determining each relative bias on the basis of a plurality of equivalent relative biases comprises determining a weighted sum of said equivalent relative biases.
18. The method of claim 17, further comprising determining a mean bias for each of said plurality of process tools on the basis of relative biases related to a respected one of said plurality of process tools and determined by said weighted sum of said equivalent relative biases.
19. The method of claim 18, further comprising determining a deviation for each relative bias on the basis of said mean biases and said weighted sum of equivalent relative biases.
20. The method of claim 19, further comprising determining a consensus mean bias for each of said plurality of process tools by using a weighted sum of said deviation associated with a respective one of said plurality of process tools.
21. A control system, comprising:
a model-based control section configured to determine at least one updated manipulated variable for a process tool of a process sequence on the basis of a model, a measurement data related to a process output associated with said process tool, a relative bias matrix and a weighting factor for operating on said relative bias matrix, said weighting factor indicating at least one of an age of said measurement data and an uncertainty thereof.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A seed of soybean variety D4311702 (ATCC Accession No. ______).
2. A plant of soybean variety D4311702 (ATCC Accession No. ______).
3. A plant part of the plant of claim 2.
4. The plant part of claim 3, further defined as pollen, an ovule or a cell.
5. A tissue culture of regenerable cells of soybean variety D4311702 (ATCC Accession No. ______).
6. The tissue culture of claim 5, wherein the regenerable cells are from embryos, meristematic cells, pollen, leaves, roots, root tips, anther, pistil, flower, seed, boll or stem.
7. A soybean plant regenerated from the tissue culture of claim 5, wherein the regenerated soybean plant expresses all of the physiological and morphological characteristics of the soybean variety D4311702 (ATCC Accession No. ______).
8. A method of producing soybean seed, comprising crossing a plant of soybean variety D4311702 (ATCC Accession No. ______) with itself or a second soybean plant.
9. The method of claim 8, further defined as a method of preparing hybrid soybean seed, comprising crossing a plant of soybean variety D4311702 (ATCC Accession No. ______) a second, distinct soybean plant.
10. An F1 hybrid seed produced by the method of claim 9.
11. A method of producing a plant of soybean variety D4311702 (ATCC Accession No. ______) comprising an added desired trait, the method comprising introducing a transgene conferring the desired trait into a plant of soybean variety D4311702.
12. The method of claim 11, wherein the desired trait is selected from the group consisting of male sterility, herbicide tolerance, insect or pest resistance, disease resistance, modified fatty acid metabolism, modified carbohydrate metabolism and modified soybean fiber characteristics.
13. The method of claim 12, wherein the desired trait is herbicide tolerance and the tolerance is conferred to an herbicide selected from the group consisting of glyphosate, sulfonylurea, imidazalinone, dicamba, glufosinate, phenoxy proprionic acid, cycloshexone, triazine, benzonitrile and broxynil.
14. The method of claim 11, wherein the desired trait is insect resistance and the transgene encodes a Bacillus thuringiensis (Bt) endotoxin.
15. A plant produced by the method of claim 11.
16. A method of introducing a single locus conversion into soybean variety D4311702 comprising:
(a) crossing a plant of variety D4311702 (ATCC Accession No. ______) with a second plant comprising a desired single locus to produce F1 progeny plants;
(b) selecting F1 progeny plants that have the single locus to produce selected F1 progeny plants;
(c) crossing the selected progeny plants with at least a first plant of variety D4311702 to produce backcross progeny plants;
(d) selecting backcross progeny plants that have the single locus and physiological and morphological characteristics of soybean variety D4311702 to produce selected backcross progeny plants; and
(e) repeating steps (c) and (d) one or more times in succession to produce selected second or higher backcross progeny plants that comprise the single locus and the physiological and morphological characteristics of soybean variety D4311702 when grown in the same environmental conditions.
17. The method of claim 16, wherein the single locus confers a trait selected from the group consisting of male sterility; herbicide tolerance; insect or pest resistance; disease resistance; modified fatty acid metabolism; modified carbohydrate metabolism; and modified soybean fiber characteristics.
18. The method of claim 17, wherein the trait is tolerance to an herbicide selected from the group consisting of glyphosate, sulfonylurea, imidazalinone, dicamba, glufosinate, phenoxy proprionic acid, cycloshexone, triazine, benzonitrile and broxynil.
19. The method of claim 17, wherein the trait is insect resistance and the insect resistance is conferred by a transgene encoding a Bacillus thuringiensis endotoxin.
20. A plant of soybean variety D4311702 (ATCC Accession No. ______), further defined as comprising a single locus conversion.
21. A method of producing an inbred soybean plant derived from the soybean variety D4311702, the method comprising the steps of:
(a) preparing a progeny plant derived from soybean variety D4311702 (ATCC Accession No. ______) by crossing a plant of the soybean variety D4311702 with a soybean plant of a second variety;
(b) crossing the progeny plant with itself or a second plant to produce a seed of a progeny plant of a subsequent generation;
(c) growing a progeny plant of a subsequent generation from said seed and crossing the progeny plant of a subsequent generation with itself or a second plant; and
(d) repeating steps (b) and (c) for an additional 3-10 generations with sufficient inbreeding to produce an inbred soybean plant derived from the soybean variety D4311702.
22. A method of producing a commodity plant product comprising obtaining the plant of claim 2 or a part thereof and producing said commodity plant product therefrom.
23. The method of claim 22, wherein the commodity plant product is protein concentrate, protein isolate, soybean hulls, meal, flour or oil.