What is claimed is:
1. A stage device comprising:
a stage main body that moves on a base, a movable part disposed on the stage main body;
a support that is vibrationally isolated from the base, a stationary part that is supported by the support, the movable part moving relative to the stationary part;
a detector that detects a size of a gap between the movable part and the stationary part; and
an actuator that adjusts a relative positional relationship between the movable part and the stationary part based on the detected gap size.
2. The stage device of claim 1, wherein the detector is disposed on the movable part.
3. The stage device of claim 2, wherein the actuator moves the stationary part in order to adjust the relative positional relationship between the stationary part and the movable part.
4. The stage device of claim 3, wherein the stage main body has a mounting surface on which an object is mounted; and the actuator moves the stationary part in a direction perpendicular to the mounting surface of the stage main body.
5. The stage device of claim 4, wherein the actuator comprises:
a motor that rotates a drive shaft;
a moving part that has a sloped surface with respect to a direction in which the actuator moves the stationary part, the moving part being movable in a direction perpendicular to the direction in which the actuator moves the stationary part and being coupled to the drive shaft so as to be driven in the perpendicular direction by the motor;
a roller disposed on the stationary part and that moves on the sloped surface of the moving part; and
a controller that controls the motor based on the gap size detected by the detector.
6. The stage device of claim 5, wherein the controller performs feedback-control by using a sensed rotational amount of the motor.
7. The stage device of claim 1, wherein the actuator moves the stationary part in order to adjust the relative positional relationship between the stationary part and the movable part.
8. The stage device of claim 7, wherein the stage main body has a mounting surface on which an object is mounted; and the actuator moves the stationary part in a direction perpendicular to the mounting surface of the stage main body.
9. The stage device of claim 8, wherein the actuator comprises:
a motor that rotates a drive shaft;
a moving part that has a sloped surface with respect to a direction in which the actuator moves the stationary part, the moving part being movable in a direction perpendicular to the direction in which the actuator moves the stationary part and being coupled to the drive shaft so as to be driven in the perpendicular direction by the motor;
a roller disposed on the stationary part and that moves on the sloped surface of the moving part; and
a controller that controls the motor based on the gap size detected by the detector.
10. The stage device of claim 9, wherein the controller performs feedback-control by using a sensed rotational amount of the motor.
11. The stage device of claim 1, wherein:
the stage main body moves in a plurality of moving directions, including the relative moving direction; and
the detector includes a plurality of sensors arranged corresponding to the plurality of moving directions.
12. The stage device of claim 1, wherein the movable part and the stationary part are movable and stationary parts of a linear motor that drives the stage main body with respect to the base.
13. An exposure apparatus in which a pattern of a mask held by a mask stage is exposed onto a substrate held by a substrate stage, wherein the stage device of claim 1 is used as at least one of the mask stage and the substrate stage.
14. The exposure apparatus of claim 13, further comprising:
a projection optical system that projects the pattern on the mask onto the substrate;
wherein the projection optical system, the mask stage, and the substrate stage are integrally supported by a common frame.
15. A method of manufacturing a device including a lithography process that performs exposure using the exposure apparatus of claim 13.
16. A stage device comprising:
a stage main body that moves in a plane that is parallel to a surface of a base, a movable part disposed on the stage main body;
a reaction frame that is vibrationally isolated from the base, the reaction frame receiving a reaction force that is generated due to a movement of the stage main body in the plane, a stationary part that is supported by the reaction frame, the movable part moving relative to the stationary part;
a detector that detects a size of a gap between the movable part and the stationary part; and
an actuator that adjusts a relative positional relationship between the movable part and the stationary part based on the detected gap size.
17. The stage device of claim 16, wherein the detector is disposed on the movable part.
18. The stage device of claim 17, wherein the actuator moves the stationary part in order to adjust the relative positional relationship between the stationary part and the movable part.
19. The stage device of claim 18, wherein the actuator moves the stationary part relative to the reaction frame.
20. The stage device of claim 18, wherein the actuator moves the stationary part in a direction perpendicular to the surface of the base.
21. The stage device of claim 20, wherein the actuator comprises:
a motor that rotates a drive shaft;
a moving part that has a sloped surface with respect to a direction in which the actuator moves the stationary part, the moving part being movable in a direction perpendicular to the direction in which the actuator moves the stationary part and being coupled to the drive shaft so as to be driven in the perpendicular direction by the motor;
a roller disposed on the stationary part and that moves on the sloped surface of the moving part; and
a controller that controls the motor based on the gap size detected by the detector.
22. The stage device of claim 21, wherein the controller performs feedback-control by using a sensed rotational amount of the motor.
23. The stage device of claim 16, wherein the actuator moves the stationary part in order to adjust the relative positional relationship between the stationary part and the movable part.
24. The stage device of claim 23, wherein the actuator moves the stationary part in a direction perpendicular to the surface of the base.
25. The stage device of claim 23, wherein the actuator moves the stationary part relative to the reaction frame.
26. The stage device of claim 16, wherein:
the stage main body moves in a plurality of moving directions within the plane, including the relative moving direction; and
the detector includes a plurality of sensors arranged corresponding to the plurality of moving directions.
27. The stage device of claim 16, wherein the movable part and the stationary part are movable and stationary parts of a linear motor that drives the stage main body with respect to the base.
28. An exposure apparatus in which a pattern of a mask held by a mask stage is exposed onto a substrate held by a substrate stage, wherein the stage device of claim 16 is used as at least one of the mask stage and the substrate stage.
29. The exposure apparatus of claim 28, further comprising:
a projection optical system that projects the pattern on the mask onto the substrate;
wherein the projection optical system, the mask stage, and the substrate stage are integrally supported by a common frame that is vibrationally isolated from the reaction frame.
30. A method of manufacturing a device including a lithography process that performs exposure using the exposure apparatus of claim 28.
31. A method of operating a stage device in which a stage main body having a movable part moves on a base, and a support that is vibrationally isolated from the base has a stationary part supported by the support, the movable part moving relative to the stationary part, the method comprising:
detecting a size of a gap between the movable part and the stationary part; and
adjusting a relative positional relationship between the movable part and the stationary part based on the detected gap size.
32. The method of claim 31, wherein the gap size is detected by a detector that is disposed on the movable part.
33. The method of claim 32, wherein the adjusting step includes moving the stationary part in order to adjust the relative positional relationship between the stationary part and the movable part.
34. The method of claim 33, wherein the stage main body has a mounting surface on which an object is mounted; and the adjusting step includes moving the stationary part in a direction perpendicular to the mounting surface of the stage main body.
35. The method of claim 34, wherein the adjusting step includes controlling a motor that causes the movement of the stationary part to occur, and motor is controlled by performing feedback-control based upon a sensed rotational amount of the motor.
36. The method of claim 31, wherein the adjusting step includes moving the stationary part in order to adjust the relative positional relationship between the stationary part and the movable part.
37. The method of claim 36, wherein the stage main body has a mounting surface on which an object is mounted; and the adjusting step moves the stationary part in a direction perpendicular to the mounting surface of the stage main body.
38. The method of claim 36, wherein the adjusting step includes controlling a motor that causes the movement of the stationary part to occur, and motor is controlled by performing feedback-control based upon a sensed rotational amount of the motor.
39. The method of claim 31, wherein:
the stage main body moves in a plurality of moving directions, including the relative moving direction; and
the detecting step includes detecting the size of the gap with a plurality of detectors arranged corresponding to the plurality of moving directions.
40. The method of claim 31, wherein the movable part and the stationary part are movable and stationary parts of a linear motor that drives the stage main body with respect to the base.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A cylinder head gasket for an internal combustion engine adapted to be positioned between a cylinder head and an engine block for seating at least one combustion cylinder, said gasket comprising:
a main gasket body having first and second main surfaces and at least one cylinder opening corresponding to the combustion cylinder of the engine;
a wire sealing ring disposed in said at least one combustion opening;
metal armoring ensheathing said wire sealing ring, said armoring comprising an annular body of metal formed separately from said main gasket body and which is generally U-shaped in cross section, said armoring having a first annular flange portion projecting radially outwardly beyond said cylinder opening in overlying relation to said first main surface, a curved portion wrapped about said wire sealing ring, and a radially outwardly directed second annular flange portion extending beneath said wire sealing ring opposite said first flange portion and terminating short of said cylinder opening of said main gasket body adjacent said second surface of said main gasket body; and
a plurality of circumferentially spaced lock tabs projecting radially outwardly of said second leg in overlapping relation to said main gasket body.
2. The gasket of claim 1, including a plurality of circumferentially spaced edge slots formed in said main gasket body communicating with said at least one cylinder opening in circumferentially offset relation to said locking tabs.
3. The gasket of claim 2 wherein said slots extend through to said first and second main surfaces of said main gasket body.
4. The gasket of claim 3 wherein said spacing of said slots relative to one another corresponds to said spacing of said locking tabs relative to one another.
5. The gasket of claim 4 wherein said slots are sized to receive said tabs, enabling said tabs to be aligned with and extended through said slots from said first main side of said main gasket body and thereafter rotated with said sheathing into said underlying relation to said second main surface in said circumferentially offset relation to said slots.
6. The gasket of claim 1 wherein at least one of said locking tabs is elastically biased against said second main surface.
7. The gasket of claim 6 wherein said at least one tab underlies said first annular leg portion.
8. The gasket of claim 1 wherein said notch is covered on said first main surface of said main gasket body by said first annular flange portion of said metal armoring.
9. The gasket of claim 1 wherein said metal armoring has a yield strength of at least 100,000 psi.
10. A method of fabricating a cylinder head gasket for an internal combustion engine adapted to be positioned between a cylinder head and an engine block for sealing at least one combustion cylinder, said method comprising:
preparing a main gasket body having first and second main surfaces and at least one cylinder opening corresponding to the at least one combustion cylinder of the engine;
forming a plurality of circumferentially spaced notches in the main gasket body communicating with and extending radially outwardly of the at least one cylinder opening in the main gasket body;
providing a metal sealing ring forming a metal arming about the metal sealing ring for lining the at least one cylinder opening having an annular body with a generally U-shaped cross section including a first annular flange portion, a second annular flange portion opposite the first annular flange portion and an annular curved portion joining the first and second flange portions;
forming the second annular flange portion to include a plurality of lock tabs projecting radially outwardly from the second annular flange away from the curved portion; and
aligning the lock tabs of the second annular flange with the notches of the main gasket body and extending the lock tabs through the notches from the first main surface to the second main surface, and rotating the metal armoring to move the lock tabs out of alignment with the notches to lock the metal armoring and metal sealing ring in engagement with the main gasket body.