1. A method of forming a memory cell, the method comprising:
forming a first electrode;
forming an insulating material on the first electrode;
forming a via in the insulating material to expose a surface of the first electrode;
forming a heater material within the via using gas cluster ion beams;
forming a variable resistance material within the via; and
forming a second electrode on the variable resistance material and heater material.
2. The method of claim 1, wherein the heater material is formed on the surface of the first electrode and the variable resistance material is formed on the heater material.
3. The method of claim 2, wherein a portion of the heater material on the insulating material is removed.
4. The method of claim 1, wherein the variable resistance material is a phase-change material.
5. The method of claim 4, wherein the phase-change material is one of GexTey, GaSb, SbxTey, InSb, InSe, InxSbyTez, SnxSbyTez, GaxSeyTez, InSbGe, AgInSbTe, GeSnSbTe, TexGeySbzSk, and GeSbSeTe.
6. The method of claim 5, wherein the phase-change material has at least one of O, F, N, or C as impurity atoms.
7. The method of claim 1, wherein the variable resistance material is one of NiO, TiO, CuS, and SrTiO.
8. The method of claim 1, wherein the heater material has Ge as a primary atom and at least one of N, Sb, F, O, or Te as impurity atoms.
9. The method of claim 8, wherein the impurity atoms are from about 0.5 to about 15 atomic percent of the heater material.
10. The method of claim 8, wherein the impurity atoms are from about 5 to about 10 atomic percent of the heater material.
11. The method of claim 8, wherein the heater material includes nitrogen impurity atoms that has a gradient nitrogen level through the material thickness.
12. The method of claim 8, wherein nitrogen gas is used to control a concentration profile of nitrogen within the heater material.
13. The method of claim 1, wherein GeH4, N2, and one or more of He, Ar, O2, F2, N2O, methoxide and ethoxide gases are used to form the heater material.
14. The method of claim 13, wherein the heater material is formed from gases ionized at pressures in the range of from about 1500 to about 3000 PSI.
15. The method of claim 14, wherein the gases are ionized under vacuum.
16. A method of forming a phase-change material memory cell, the method comprising:
forming a first electrode;
forming an insulating material on the first electrode;
forming a via in the insulating material to expose a surface of the first electrode;
forming a heater material comprising GeN within the via using gas cluster ion beams;
forming a phase-change material within the via; and
forming a second electrode on the phase change material and heater material.
17. The method of claim 16, wherein the heater material is formed on the surface of the first electrode and the phase-change material is formed on the heater material.
18. The method of claim 16, wherein GeH4, N2, and one or more of He, Ar, O2, F2, N2O, methoxide and ethoxide gases are used to form the heater material.
19. The method of claim 18, further comprising scanning a gas over the via in a combination of passes which comprises a mix of GeH4, N2 and one or more of He, Ar, O2, F2, N2O, methoxide or ethoxide gases.
20. The method of claim 16, wherein the phase-change material is one of GexTey, GaSb, SbxTey, InSb, InSe, InxSbyTez, SnxSbyTez, GaxSeyTez, InSbGe, AgInSbTe, GeSnSbTe, TexGeySbzSk, and GeSbSeTe.
21. The method of claim 20, wherein the phase-change material has at least one of O, F, N, or C as impurity atoms.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sterilizing device having a distal end and a proximate end for sterilizing a fluid by UV-radiation, the sterilizing device comprising:
at least one UV-lamp for emitting UV-radiation that is located between the distal end and the proximate end,
a lamp tag that is one of attached to and incorporated in the at least one UV-lamp and comprises information regarding the UV-lamp, as
the lamp tag is interconnected with at least one of a lamp sensor unit and a control unit;
a first gap is arranged between an inner and an outer tube and a second gap is arranged between a jacket pipe and the outer tube, the first gap defines a first flow path that interconnects a first main connection piece of a first flange and a first intakeoutlet and a second gap defines a second flow path that interconnects a second main connection piece of a second flange and a second intakeoutlet,
wherein the at least one UV-lamp is received within the inner tube and a third gap is arranged between a glass cylinder of the UV-lamp and the inner tube,
the sterilizing device comprises a tank,
the first main connection piece of the first flange, the first gap, and the first inletoutlet allow an exchange of water between the tank and the first main connection piece,
the first intakeoutlet couples the first flow path with the tank and the second intakeoutlet couples the second flow path with the tank, and
the first intakeoutlet and the second intakeoutlet are both located adjacent each other at the distal end of the sterilizing device and the first main connection piece and the second main connection piece are both located adjacent each other at the proximal end of the sterilizing device, and the first flow path being independent of the second flow path.
2. The sterilizing device according to claim 1, wherein the sterilizing device is provided with a fluid quality monitoring sensor, the fluid quality monitoring sensor is either mounted on the first main connection piece or the first flange.
3. The sterilizing device according to claim 1, wherein the sterilizing device further comprises an additional ultrasonic reactor provided for destroying at least one of contaminants, bacteria and microbes.
4. The sterilizing device according to claim 3, wherein the additional ultrasonic reactor is located outside of the outer tube, and is either attached to an outer surface of the outer tube or inline to the outer tube.
5. The sterilizing device according to claim 3, wherein the additional ultrasonic reactor is located inside of the outer tube.
6. The sterilizing device according to claim 3, wherein the additional ultrasonic reactor has one of a ring shape, a cylindrical shape and a conical shape.
7. The sterilizing device according to claim 1, wherein the lamp tag comprises at least one sensor for measuring at least one of a surface temperature of the UV-lamp and a working life of the UV-lamp.
8. The sterilizing device according to claim 1, wherein the lamp tag comprises a memory for storing information about at least one of a specification, a condition of the UV-lamp and wear of the UV-lamp, and the lamp sensor unit is located within the inner tube radially between the UV-lamp and the inner tube.
9. The sterilizing device according claim 1, wherein the lamp tag is an RFID-tag wirelessly interconnected with the control unit and comprises identification information of the UV-lamp such that the control unit recognizes the identification of the UV-lamp so as to inhibit insertion of an incompatible lamp into the device.
10. The sterilizing device according to claim 1, wherein the inner tube is made of a material transparent to UV-radiation, a vortex unit is arranged around the inner tube which forms a helical flow of the fluid around the inner tube.
11. The sterilizing device according to claim 1, wherein the first flange comprises an interface flange for interconnection of at least one of a filter unit, a valve gate, a sensor unit and a water meter.
12. The sterilizing device according to claim 1, wherein the first flange comprises a mechanical fluid treatment system for decomposition of organic and chemical contamination.
13. The sterilizing device according to claim 1, wherein at least one of the first flange and the second flange comprises at least one of an exchangeable vortex and conveyer unit.
14. The sterilizing device according to claim 1, wherein at least one of the first flange and the second flange comprises a flow measuring unit for measuring a volume of fluid passing through the sterilizing device.
15. The sterilizing device according to claim 14, wherein the flow measuring unit comprises first and second coils arranged opposite to each other and first and second electrodes arranged opposite to each other and perpendicular to the first and the second coils.
16. The sterilizing device according to claim 1, wherein at least one of the first flange, the second flange, the inner tube and the outer tube comprise a pressure sensor.
17. The sterilizing device according to claim 1, wherein a sensor unit is arranged at one side of the first gap for measuring at least one of an intensity of UV-radiation passing through the fluid and a temperature of the fluid.
18. The sterilizing device according to claim 1, wherein a lamp sensor unit is arranged between the UV-lamp and the inner tube and comprises at least one of a lamp temperature sensor for measuring a temperature of the at least one UV-lamp, a fluid temperature sensor for measuring at least one of a temperature of the fluid in the gap, and a velocity sensor for measuring velocity of the fluid in the gap.
19. The sterilizing device according to claim 1, wherein the outer tube is clamped between the first flange and the second flange interconnected by tie rods.
20. The sterilizing device according to claim 1, wherein the sterilizing device comprises a coil to induce a time-varying magnetic field in the fluid passing through the sterilizing device to at least one of eliminate mineral scale, control microbiological populations, and control corrosion.
21. The sterilizing device according to claim 20, wherein the coil is arranged concentrically to one of the inner and the outer tubes.
22. The sterilizing device according to claim 1, wherein the lamp tag comprises at least one sensor for measuring the surface temperature of the UV-lamp.
23. The sterilization device according to claim 22, comprising a cooling unit for the UV-lamp which is controlled by the control unit and adapted to control the UV-lamp depending upon the measured temperature.
24. The sterilization device according to claim 23, wherein the cooling unit is adapt to compute the operating life time of the UV-lamp on a basis of the measured temperature.
25. The sterilization device according to claim 23, wherein the cooling unit is adapt to compute the operating life time of the UV-lamp on a basis of the measured temperature and information about the UV-lamp stored in the lamp tag.
26. The sterilization device according to claim 1, wherein the glass cylinder is a replacable bulb of the UV-lamp.