What is claimed is:
1. A processing chamber comprising a stage, an upper chamber, a lower chamber which is connectable to and separable from the upper chamber, and an exhaust path, wherein the exhaust path has a separator with an exhaust port which is connectable to and separable from a connector of an exhaust duct, and the separator is configured so as to be able to move along with the lower chamber.
2. The processing chamber according to claim 1, wherein the connector has an elastic member which is extendable in the moving direction of the lower chamber.
3. The processing chamber according to claim 2, wherein the elastic member is a bellows which is extendable in the moving direction of the lower chamber.
4. The processing chamber according to claim 2, wherein the elastic member is a rubber for vacuum seal.
5. The processing chamber according to claim 1, wherein the connector has an elastic member which is extendable in the moving direction of the lower chamber and a flange to be in close contact via an sealant with a separation surface of the separator.
6. The processing chamber according to claim 5, wherein the sealant is a seal ring, and the diameter of the seal ring is larger than that of the effective diameter of the bellows.
7. The processing chamber according to claim 1, wherein a separation surface of the lower chamber at a portion for putting an article into and out of the processing chamber is at approximate the same level as an article placing surface of the stage.
8. The processing chamber according to claim 1, wherein a separation surface of the separator is at approximate the same level as an article placing surface of the stage.
9. The processing chamber according to claim 1, wherein a flow path inside the separator communicates with the lower chamber through an opening formed at a location lower than an article placing surface of the stage.
10. The processing chamber according to claims 1, 7, 8 and 9, wherein the separator is separated from the connector of the exhaust duct when separating the upper chamber and the lower chamber from each other and is connected to the connector of the exhaust duct when connecting the upper chamber and the lower chamber to each other.
11. A method of producing a semiconductor device, comprising the steps of:
providing the processing chamber as set forth in claim 1;
providing an wafer; and
placing the wafer in the processing chamber and processing the wafer.
12. The method according to claim 11, wherein the processing of the wafer comprises the step of ashing a resin formed on the wafer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An ice-making device comprising:
a duct through which ice is dispensed;
a duct-covering part configured to open and close the duct;
a first sensor part disposed at one of the duct and the duct-covering part and configured to sense whether the duct-covering part is positioned to close the duct;
a driving part configured to provide force that moves the duct-covering part to selectively open and close the duct;
a second sensor part configured to sense an operation current of the driving part when the driving part is providing force in attempting to move the duct-covering part to close the duct;
a memory configured to store current information, the current information including a first preset reference current that is greater than a second current sensed by the second sensor part during an abnormal load; and
a control part that is configured to:
determine whether the operation current of the driving part sensed by the second sensor part when the driving part is providing force in attempting to move the duct-covering part to close the duct is greater than the first preset reference current, and
control the driving part to move the duct-covering part to open the duct in response to a determination that the operation current of the driving part sensed by the second sensor part when the driving part is providing force in attempting to move the duct-covering part to close the duct is greater than the first preset reference current.
2. The ice-making device according to claim 1, wherein the control part is configured to control the driving part to move the duct-covering part to repeatedly open and attempt to close the duct until the operation current of the driving part sensed by the second sensor part reaches a third current that is greater than the first preset reference current.
3. The ice-making device according to claim 2, further comprising a warning part configured to output a warning to a user,
wherein the control part is configured to determine whether the operation of opening and closing the duct has been repeated because the operation current is greater than the first preset reference current a preset number of times and control the warning part to output the warning to the user in response to a determination that the operation of opening and closing the duct has been repeated the preset number of times.
4. The ice-making device according to claim 2, wherein the first preset reference current is equal to or greater than a fourth current sensed at the second sensor part when the duct-covering part is in an initial operation.
5. The ice-making device according to claim 1, wherein the first sensor part is disposed at the duct.
6. The ice-making device according to claim 1, wherein the first sensor part is disposed at the duct-covering part.
7. The ice-making device according to claim 1, wherein the first sensor part includes a first component disposed at the duct-covering part and a second component disposed at the duct.
8. The ice-making device according to claim 7, wherein the first component and the second component are components of a hall sensor that constitutes the first sensor part.
9. The ice-making device according to claim 1, wherein the second current comprises a load operation current sensed by the second sensor part when a foreign substance is caught between the duct and the duct-covering part.
10. The ice-making device according to claim 1, wherein the load operation current is a load operation current sensed by the second sensor part when ice is caught between the duct and the duct-covering part.
11. The ice-making device according to claim 1, wherein the driving part is configured to apply a starting current during initial driving of the duct-covering part in attempting to move the duct-covering part to close the duct and, after the initial driving, apply a normal operation current in attempting to move the duct-covering part to close the duct, the normal operation current being less than the starting current.
12. The ice-making device according to claim 11, wherein the first preset reference current is greater than the normal operation current and the starting current.
13. The ice-making device according to claim 1, wherein the control part is configured to control the driving part to move the duct-covering part to repeatedly open and attempt to close the duct until the first sensor part senses that the duct-covering part is positioned to close the duct.
14. The ice-making device according to claim 13, wherein the control part is configured to gradually reduce an operation time of the duct-covering part as a repeated number of opening and closing operations of the duct-covering part increases.
15. The ice-making device according to claim 1, wherein the control part is configured to reduce an operation time of the duct-covering part when repeatedly opening and attempting to close the duct-covering part.
16. The ice-making device according to claim 15, wherein the control part is configured to gradually reduce the operation time of the duct-covering part as a number of repeated opening and attempts to close the duct-covering part increases.
17. The ice-making device according to claim 1, wherein, in attempting to close the duct, the first sensor part senses that the duct-covering part is not positioned to close the duct and, at that point, the second sensor part senses the operation current of the driving part.
18. The ice-making device according to claim 1, wherein, in attempting to close the duct, the first sensor part senses that the duct-covering part is not positioned to close the duct and, at that point, the second sensor part senses an abnormal operation current of the driving part that meets the first preset reference current.