1. A top emission organic light emitting display (OLED), comprising:
a substrate;
a reflective layer disposed on the substrate;
a first electrode disposed on the reflective layer, a contact surface between the reflective layer and the first electrode being a rough surface so as to reduce color shift with a wide viewing angle;
an organic layer disposed on the first electrode; and
a transparent second electrode disposed on the organic layer;
wherein, as a bias voltage is applied to the top emission OLED via the first electrode and the transparent second electrode, the organic layer emits radiation in multiple directions, the reflective layer reflects the radiation toward the transparent second electrode.
2. The top emission OLED of claim 1, wherein the reflective layer is made of a material selected from a group consisting of aluminum, silver and alloy thereof.
3. The top emission OLED of claim 1, wherein the organic layer is composed of a plurality of compound layers, the plurality of compound layers comprise an electronic layer, a hole transport layer and a light emitting layer.
4. The top emission OLED of claim 1, further comprising a switch disposed between the substrate and the reflective layer, wherein the switch is electrically coupled to the first electrode for controlling the radiation of the top emission OLED.
5. The top emission OLED of claim 4, wherein the switch is a thin film transistor.
6. The top emission OLED of claim 1, further comprising a cap layer disposed on the transparent second electrode.
7. A top emission organic light emitting display (OLED), comprising:
a substrate having a thin film transistor;
a planarization layer disposed on the substrate covering the thin film transistor;
a reflective layer disposed on the planarization layer;
a first electrode disposed on the reflective layer and electrically coupled to the thin film transistor, a contact surface between the reflective layer and the first electrode being a rough surface so as to reduce color shift with a wide viewing angle;
an organic layer disposed on the first electrode; and
a transparent second electrode disposed on the organic layer;
wherein, as a bias voltage is applied to the first electrode and the transparent second electrode, the organic layer emits radiation in all directions, the reflective layer reflects the radiation toward the transparent second electrode for increasing brightness of the top emission OLED.
8. The top emission OLED of claim 7, wherein the reflective layer is made of a material selected from a group consisting of aluminum, silver and alloy thereof.
9. The top emission OLED of claim 7, wherein the organic layer is composed of a plurality of compound layers, the plurality of compound layers comprise an electronic layer, a hole transport layer and a light emitting layer.
10. The top emission OLED of claim 7, further comprising a cap layer disposed on the transparent second electrode.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A specimen potential measuring method of measuring specimen potential of the specimen by a charged particle beam device, characterized in that
when specimen potential information obtained by a first specimen potential measuring device installed outside a specimen chamber to radiate the charged particle beam or specimen potential information beforehand obtained is equal to or more than a predetermined threshold value or more than the threshold value, specimen potential measurement is selectively conducted in the specimen chamber by use of a second specimen potential measuring device.
2. A specimen potential measuring method according to claim 1, characterized in that
when specimen potential information measured by the second specimen potential measuring device is equal to or more than a predetermined threshold value or more than the threshold value, difference between the specimen potential information measured by the second specimen potential measuring device and the specimen potential information measured by the first specimen potential measuring device or the specimen potential information beforehand obtained is set as quantity of offset.
3. A specimen potential measuring method according to claim 2, characterized in that
a value obtained by adding the quantity of offset to the specimen potential information obtained by the first specimen potential measuring device or beforehand obtained is set as potential for each radiation area on the specimen.
4. A specimen potential measuring method according to claim 1, characterized in that
a voltage to be applied to the specimen is controlled to cancel specimen potential measured by the first or second specimen potential measuring device or specimen potential beforehand obtained.
5. A charged particle beam device characterized by comprising a specimen chamber wherein a specimen onto which a charged particle beam device is radiated is mounted and a controller to adjust a voltage to be applied to the specimen, based on specimen potential information obtained outside the specimen chamber, wherein
the controller selectively measures specimen potential of the specimen in the specimen chamber when the specimen potential information obtained outside the specimen chamber is equal to or more than a predetermined threshold value or more than the threshold value.
6. A charged particle beam device according to claim 5, characterized in that
the specimen potential information obtained outside the specimen chamber is obtained by an electrometer disposed in a specimen replace chamber to introduce a specimen into the specimen chamber.
7. A charged particle beam device according to claim 5, characterized in that
when the specimen potential information obtained in the specimen chamber is equal to or more than a predetermined threshold value or more than the threshold value, the controller calculates difference between the specimen potential information obtained in the specimen chamber and the specimen potential information obtained outside the specimen chamber.
8. A charged particle beam device according to claim 7, characterized in that
the controller calculates a value by adding the difference to the specimen potential information obtained outside the specimen chamber.
9. A charged particle beam device according to claim 5, characterized in that
the controller adjusts a voltage to be applied to the specimen to cancel specimen potential obtained inside or outside the specimen chamber.
10. A specimen potential measuring method of measuring potential of a specimen outside a specimen chamber to radiate a charged particle beam device, characterized in that
potential measurement is conducted by use of a specimen potential measuring device between a specimen stage onto which the specimen is to be mounted and an electrode equal in potential to the specimen stage.
11. A specimen potential measuring method according to claim 10, characterized in that
distance between the specimen stage and the electrode is equal to distance between the specimen stage in the specimen chamber to radiate a charged particle beam and an electrode disposed over the specimen.
12. A specimen potential measuring method according to claim 10, characterized in that
when the potential measured is equal to or more than a predetermined threshold value or more than the threshold value, a voltage to be applied to the specimen stage is adjusted to cancel the potential measured.
13. A charged particle beam device characterized by comprising a specimen chamber wherein a specimen onto which a charged particle beam device is radiated is mounted and an electrometer to measure potential of the specimen outside the specimen chamber, wherein
the electrometer is arranged to measure, outside the specimen chamber, the specimen potential between a specimen stage onto which the specimen is mounted and an electrode disposed such that the specimen is sandwiched between the electrode and the specimen chamber.
14. A charged particle beam device according to claim 13, characterized in that
distance between the specimen stage and the electrode is equal to distance between the specimen stage in the specimen chamber to radiate a charged particle beam and an electrode disposed over the specimen.
15. A charged particle beam device according to claim 13, characterized by comprising
a controller to adjust, when the potential measured is equal to or more than a predetermined threshold value or more than the threshold value, a voltage to be applied to the specimen stage to cancel the potential measured.