1. An apparatus comprising:
a column charged particle beam tool;
a laser source;
a beam splitter optically coupled with the laser source;
a quarter-waveplate optically coupled with the laser source;
a photo-detector optically coupled with the beam splitter;
a frame grabber electrically coupled with the photo-detector;
at least one scan mirror optically coupled with the beam splitter;
a scanning lens optically coupled with the at least one scan mirror and an objective lens;
at least one beam scanner configured to move the at least one scan mirror to alter an optical path of light from the laser source through an optical port in the column of the column charged particle beam tool and scan the light over an area of a sample; and
a scanning controller electrically coupled with the at least one beam scanner, the scanning controller configured to control the movement of the at least one scan mirror via the at least one beam scanner.
2. The apparatus of claim 1, the at least one scan mirror comprising a horizontal scan mirror optically coupled with a vertical scan mirror.
3. The apparatus of claim 1, further comprising a scanning lens optically coupled with the at least one scan mirror and the objective lens.
4. The apparatus of claim 3, further comprising an alignment mirror optically coupled with the scanning lens and the objective lens.
5. The apparatus of claim 4, further comprising a spatial filter optically coupled with the beam splitter and the photo-detector.
6. The apparatus of claim 5, the spatial filter comprising:
a collimation lens optically coupled with a fiber and the beam splitter;
the fiber optically coupled with the laser source;
a focusing lens optically coupled with the beam splitter and the photo-detector; and
a pinhole structure optically coupled with the focusing lens and the photo-detector.
7. The apparatus of claim 1, wherein the photo-detector is a photodiode or a photo multiplier.
8. The apparatus of claim 1, wherein the beam scanner is a galvanometric scanner, an acousto-optic scanner, or a rotating polygon.
9. The apparatus of claim 1, further comprising:
a fiber coupling lens optically-coupled with the laser source;
a first end of an optical fiber optically coupled with the fiber coupling lens; and
a collimating lens optically coupled with a second end of the optical fiber and the beam splitter.
10. The apparatus of claim 1, wherein light from the laser source is adapted to image an area of an integrated circuit optically coupled with the charged particle beam tool.
11. The apparatus of claim 1, wherein light from the laser source is adapted to heat an area of an integrated circuit optically coupled with the charged particle beam tool.
12. An apparatus for inspecting a sample, comprising:
a dual column having a charged particle beam path and an optical path therein;
a laser source situated outside the dual column;
an optical coupling assembly coupling a laser beam from the laser source to the optical path;
an imager receiving reflections of the laser beam from the sample; and
a scanner operable in an imaging mode and in a static mode, whereby during the imaging mode the scanner scans the laser beam so as to image an area of the sample and during the static mode the scanner holds the laser beam statically over a particular location of the sample.
13. The apparatus of claim 12, wherein the scanner comprises one of galvanometric scanner, acousto-optic scanner or rotating polygon.
14. The apparatus of claim 12, wherein the scanner, the imager, and the optical coupling assembly form a confocal scanning microscope.
15. The apparatus of claim 12, wherein the imager forms a pixel-by-pixel image of the area of the sample via multiple scan lines.
16. The apparatus of claim 12, wherein the imager comprises a single element photo detector.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A coin sorting apparatus comprising:
a main body;
a coin sorting unit disposed in an upper portion of the main body to sort coins by type and drops the sorted coins;
a transport unit disposed in a lower portion of the main body;
a casing tube transported by the transport unit;
a coin tube formed of transparent plastic, the coin tube being placed within the casing tube, and a top portion of the coin tube protruding from the casing tube and being open so that coins dropped from the coin sorting unit are received and stacked in the coin tube; and
a pressing unit disposed in a front portion of the main body to move up and down so as to press and bend inwardly a top portion of the coin tube in which coins are received and stacked.
2. The coin sorting apparatus according to claim 1, wherein the pressing unit comprises:
a driving part;
a moving part coupled to the driving part to be moved up and down by the driving part; and
a pressing part disposed under the moving part to thermally press and bend an open top portion of the coin tube as the moving part moves down.
3. The coin sorting apparatus according to claim 2, wherein the driving part comprises:
a motor;
a pinion rotated by the motor; and
a rack engaged with the pinion to move up and down through the rotation of the pinion.
4. The coin sorting apparatus according to claim 1, wherein the coin sorting unit comprises a first sensor for detecting the number of coins dropped into the coin tube, and the pressing unit comprises a second sensor for detecting a received state of the coins received and stacked in the coin tube.