What is claimed is:
1. A method for fabricating a film bulk acoustic resonator (FBAR) device having air gap, comprising steps of:
forming a sacrificial layer on a substrate;
forming a photoresist pattern on a portion of an upper surface of the sacrificial layer;
forming a sacrificial pattern by etching the sacrificaial layer by using the photoresist pattern as an etching mask;
depositing an insulating material on the substrate;
forming a membrane supporting layer on sides of the sacrificial pattern by eliminating the insulating material and the photoresist pattern on the sacrificial pattern so that the sacrificial pattern and the insulating material have the same height;
forming a membrane layer on the sacrificial pattern and the menbrane supporting layer;
forming a first electrode on the membrane layer;
forming a piezoelectric layer on the first electrode;
forming a second electrode on the piezoelectric layer; and
removing the sacrificial pattern to form the air gap.
2. The method according to claim 1, wherein said step of forming a sacrificial pattern includes the step of over-etching the sacrificial layer so that sides of the sacrificial pattern have an undercut structure.
3. The method according to claim 2, wherein the step of over-etching the sacrificial layer further comprise the step of controlling the width of the undercut structure after the step of over-etching the sacrificial layter.
4. The method according to claim 3, wherein the step of controlling the width of the undercut structure is performed by using reactive ion etching (RIE) process.
5. The method according to claim 3, further comprising the step of controlling edge profile of the photoresist pattern by using hard-baking process for 1-10 min, at 130-200 C. on a hot plate, after the step of forming a photoresist pattern.
6. The method according to claim 2, wherein the width of the undercut is approximately 0.2-3 m.
7. The method according to claim 1, wherein the thickness of the sacrificial pattern is approximately 0.5-5 m.
8. The method according to claim 1, the step of removing the sacrificial pattern to forming air gap includes the steps of:
forming at least one via hole to expose the sacrificial pattern out of FBAR device; and
wet-etching the sacrificial pattern through said at least one via hole.
9. The method according to claim 8, the step of wet-etching the sacrificial layer includes the step of wet-etching the sacrificial pattern with HNO3 as an etchant.
10. The method according to claim 8, wherein said at least one via hole is formed in at least one corner of the sacrificial pattern.
11. A method according to claim 1, the sacrificial layer comprises a material selected from the group consisting of Al, Cu, NiFe and ZnO.
12. A method according to claim 1, the insulating material includes a material selected from the group consisting of SiO2, SiN and Al2O3.
13. A method according to claim 1, the piezoelectric layer includes AlN or ZnO.
14. A film bulk acoustic resonator (FBAR) device, comprising:
a substrate having a first area and a second area surrounding the first area;
a membrane supporting layer formed on the second area of the substrate so as to form an air gap on the first area of the substrate;
a membrane layer on the membrane supporting layer and the air gap;
a first electrode on a portion of the membrane layer;
a piezoelectric layer on a portion of the first electrode; and
a second layer on a portion of the first electrode
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A therapeutic male prosthesis device for simulating natural sensations, the device comprising:
a unitary prosthetic body comprising an outer surface and an inner cavity integral with the unitary body, the inner cavity sized and adapted to receive a penis, the outer surface configured and shaped to resemble the look and feel of an erect penis; and
a simulation unit comprising a sensor, a microprocessor, and stimulation material, at least a part of the simulation unit positioned between and proximal to the unitary body outer surface and the unitary body inner cavity, the sensor integrated with the prosthesis for sensing a movement, pressure andor force of the prosthesis in an activity approximating sexual sensations; the sensor configured to generate signals based upon such movement, pressure andor force in an activity approximating sexual sensations, the microprocessor configured for receiving signals from the sensor, the microprocessor adapted to generate a signal intended to represent a sensation in an activity approximating sexual sensations; and the stimulation material covering at least a portion of the surface of the inner cavity for receiving the signal representing a sensation on a penis.
2. A male prosthesis device in accordance with claim 1, further comprising stimulation material covering at least portion of the outer surface of the unitary body, and configured to receive the signal representing a sensation for providing sexual sensations to a cavity.
3. A male prosthesis device in accordance with claim 1, further comprising a bag.
4. A male prosthesis device in accordance with claim 1, further comprising a battery.
5. A male prosthesis device in accordance with claim 1, further comprising a controller configured to control intensity of the sensation.
6. A male prosthesis device in accordance with claim 5, further comprising a communication channel between the controller and the microprocessor.
7. A male prosthesis device in accordance with claim 6, wherein the communication channel between the controller and the microprocessor is wireless.
8. A male prosthesis device in accordance with claim 1, wherein the unitary prosthetic body is configured to sense an insertion sensation of the unitary prosthetic body in a cavity and generate a sensation further along the inner cavity with the stimulation material simulating the insertion sensation.
9. A method of simulating sexual sensations between a penis and a cavity, comprising:
inserting a penis in a unitary prosthetic body comprising an outer surface and an inner cavity integral with the unitary body, the inner cavity sized and adapted to receive a penis, the outer surface configured and shaped to resemble the look and feel of an erect penis; the unitary prosthetic body further comprising a simulation unit comprising a sensor, a microprocessor, and stimulation material, at least a part of the simulation unit positioned between and proximal to the unitary body outer surface and the unitary body inner cavity, the sensor integrated with the prosthesis for sensing a movement, pressure andor force of the prosthesis in an activity approximating sexual sensations; the sensor configured to generate signals based upon such movement, pressure andor force in an activity approximating sexual sensations, the microprocessor configured for receiving signals from the sensor, the microprocessor adapted to generate a signal intended to represent a sensation in an activity approximating sexual sensations; and the stimulation material covering at least a portion of the surface of the inner cavity for receiving the signal representing a sensation on a penis;
inserting the unitary prosthetic body in a cavity; and
simulating sexual sensation by activating said stimulation material with said signal.