1. A photomask comprising:
a transparent substrate;
a plurality of opaque patterns formed on a front surface of the transparent substrate, defining a floodlighting portion for forming patterns; and
a plurality of phase gratings formed on a back surface of the transparent substrate, adapted to allow off-axis illumination (OAI) of incident light beyond a OAI limit of exposure equipment, to allow use in a outmost region of an aperture and to allow modified illumination having a shape suitable for a layout of the opaque patterns,
wherein the plurality of phase gratings shift a phase of the incident light by a phase greater than zero and less than 180\xb0.
2. The photomask of claim 1, wherein the plurality of phase gratings have aligned edges and are rectangular patterns arranged in a mosaic shape.
3. The photomask of claim 2, wherein the phase gratings phase-shift incident light by 90\xb0.
4. The photomask of claim 1, wherein the plurality of phase gratings form an alternating line & space pattern.
5. The photomask of claim 1, wherein the opaque patterns are patterns for forming a dynamic random access memory (DRAM).
6. The photomask of claim 1, wherein the phase gratings are formed together with the transparent substrate as one body.
7. The photomask of claim 6, wherein the back surface of the transparent substrate is etched, and thereby the phase gratings are formed.
8. The photomask of claim 6, wherein a material layer having a phase difference that is formed on the back surface of the transparent substrate is etched, and thereby the phase gratings are formed.
9. The photomask of claim 8, wherein the material layer is a spin on glass (SOG) layer.
10. A method of fabricating a photomask, the method comprising:
forming a plurality of opaque patterns, for defining a floodlighting portion for forming patterns, on a front surface of a transparent substrate; and
forming a plurality of phase gratings together with the transparent substrate as one body, on a back surface of the transparent substrate, adapted to allow off-axis illumination (OAI) of incident light beyond an OAI limit of exposure equipment, to allow use in an outmost region of an aperture, and to allow modified illumination having a shape suitable the layout of the opaque patterns,
wherein the plurality of phase gratings phase shift the incident light by a phase greater than zero and less than 180\xb0.
11. The method of claim 10, wherein the step of forming a plurality of phase gratings comprises:
coating resist on a back surface of the transparent substrate;
exposing and developing the resist and forming resist patterns for desired phase gratings;
etching the back surface of the transparent substrate using the resist patterns as an etching mask; and
removing the resist patterns.
12. The method of claim 11, further comprising processing hexamethyldisilazane (HMDS) on the back surface of the transparent substrate before the step of coating resist.
13. The method of claim 11, further comprising forming a charging protection layer on the back surface of the transparent substrate before the step of coating resist, wherein the step of forming resist patterns is performed using e-beam exposure equipment.
14. The method of claim 11, further comprising:
forming a chrome layer on the back surface of the transparent substrate, before the step of coating resist; and
etching the chrome layer using the resist patterns as an etching mask to form chrome patterns,
wherein the step of etching the back surface of the transparent substrate is performed using the chrome patterns and the resist patterns as an etching mask, and the chrome patterns are removed in the step of removing the resist patterns.
15. The method of claim 14, wherein the step of forming resist patterns is performed using e-beam exposure equipment.
16. The method of claim 11, wherein the step of etching the back surface of the transparent substrate is performed using dry etching and wet etching together.
17. The method of claim 11, wherein the step of etching the back surface of the transparent substrate is divided into a plurality of steps, an etch rate is calculated in each step and the calculated etch rate is applied in a subsequent step.
18. The method of claim 11, wherein the step of forming resist patterns is performed using laser exposure equipment.
19. The method of claim 10, wherein the step of forming the phase gratings comprises:
forming a spin on glass (SOG) layer on the back surface of the transparent substrate;
coating resist on the SOG layer;
exposing and developing the resist and forming resist patterns for desired phase gratings; and
etching the SOG layer using the resist patterns as an etching mask; and removing the resist patterns.
20. The method of claim 19, further comprising processing hexamethyldisilazane (HMDS) on the SOG layer before the step of coating resist.
21. The method of claim 19, wherein the step of forming resist patterns is performed using laser exposure equipment.
22. The method of claim 19, further comprising forming a charging protection layer on the SOG layer before the step of coating resist, wherein the step of forming resist patterns is performed using e-beam exposure equipment.
23. The method of claim 19, further comprising:
forming a chrome layer on the SOG layer before the step of coating resist; and etching the chrome layer using the resist patterns as an etching mask and forming chrome patterns;
wherein the step of etching the SOG layer is performed using the chrome patterns and the resist patterns as an etching mask, and the chrome patterns are removed in the step of removing the resist patterns.
24. The method of claim 23, wherein the step of forming resist patterns is performed using e-beam exposure equipment.
25. The method of claim 19, wherein the step of etching the SOG layer is performed using dry etching and wet etching together.
26. The method of claim 19, wherein the step of etching the SOG layer is divided into a plurality of steps, an etch rate is calculated in each step and the calculated etch rate is applied in a subsequent step.
27. The method of claim 10, wherein the plurality of phase gratings have aligned edges and are rectangular patterns arranged in a mosaic shape.
28. The method of claim 27, wherein the phase gratings phase-shift incident light by 90\xb0.
29. The method of claim 10, wherein the plurality of phase gratings form an alternating line & space pattern.
30. The method of claim 10, wherein the opaque patterns are patterns for forming a dynamic random access memory (DRAM).
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A cooking hob with rotary blade driving means, comprising:
a continuous glass or glass ceramic support plate provided with a treatment area; and
rotary blade driving means comprising a lower magnetic coupling member rotatably arranged in said treatment area below the support plate and a drive motor operatively connected for rotating said lower magnetic coupling member;
the cooking hob including activationdeactivation means for substantially activating and deactivating the magnetic field exerted by the lower magnetic coupling member through the support plate, wherein said activationdeactivation means comprise:
position changing means for moving the lower magnetic coupling member between an operative position, in which the lower magnetic coupling member is close enough to the support plate to magnetically transmit torque to an upper magnetic coupling member connected to rotary blades installed in a cooking vessel located on the treatment area of the support plate, and an inoperative position, in which the lower magnetic coupling member is far enough from the support plate so as to be free from transmitting said torque;
wherein the support plate is supported on a base structure, and said position changing means comprise:
a moving support on which the lower magnetic coupling member, said drive motor, and transmission means for transmitting movement from the drive motor to the lower magnetic coupling member are installed;
spindles rotatably supported on the base structure and coupled to corresponding nuts fixed to said moving support; and
a position changing motor operatively connected for rotating said spindles, thereby moving said moving support with respect to said base structure.
2. The cooking hob according to claim 1, characterized in that the support plate is supported on the base structure by weighing means including a weight transducer connected to the base structure and to the support plate.
3. The cooking hob according to claim 1, characterized in that the support plate is fixed to an intermediate support on which the lower magnetic coupling member is supported, and said intermediate support is supported on the base structure by weighing means including a weight transducer connected to the base structure and to the intermediate support.
4. The cooking hob according to claim 1, characterized in that the cooking hob comprises heating means located in relation to said treatment area below said support plate.
5. The cooking hob according to claim 4, characterized in that said heating means comprise an induction heating device arranged around the lower magnetic coupling member at a distance from the support plate and an electronic induction circuit for powering up said induction heating device.
6. The cooking hob according to claim 4, characterized in that the cooking hob comprises a control panel connected to an electronic supply and control circuit for controlling said rotary blade driving means andor said position changing means andor said heating means, and in that said electronic supply and control circuit includes a signal receiver configured and arranged for receiving a signal sent from a signal emitter installed in said cooking vessel, the electronic supply and control circuit being configured for enabling or disabling the operation of said rotary blade driving means andor of said position changing means andor of said heating means according to said signal received from said signal emitter.
7. The cooking hob according to claim 1, characterized in that each of the spindles has a cog pulley fixed thereto, and a cog belt is installed on said cog pulleys forcing the spindles to rotate in unison.
8. The cooking hob according to claim 1, characterized in that one of the spindles further has a gear wheel fixed thereto, said gear wheel meshing with a worm screw fixed to an output shaft of said position changing motor.
9. An assembly comprising a cooking hob with rotary blade driving means and cooking vessel with rotary blades, where said cooking hob comprises:
a continuous glass or glass ceramic support plate provided with a treatment area; and
rotary blade driving means comprising a lower magnetic coupling member rotatably arranged in said treatment area below the support plate and a drive motor operatively connected for rotating said lower magnetic coupling member, and where said cooking vessel comprises:
a vessel wall with a bottom and an upper opening;
a lid for closing said upper opening;
rotary blades installed inside said vessel wall; and
an upper magnetic coupling member connected to said rotary blades and arranged for facing and being located a short distance from an upper surface of said support plate when said cooking vessel is located thereon,
the cooking hob including activationdeactivation means for substantially activating and deactivating the magnetic field exerted by the lower magnetic coupling member through the support plate, wherein said activationdeactivation means comprise:
position changing means for moving the lower magnetic coupling member between an operative position, in which the lower magnetic coupling member is close enough to the support plate to magnetically transmit torque to an upper magnetic coupling member connected to rotary blades installed in a cooking vessel located on the treatment area of the support plate, and an inoperative position, in which the lower magnetic coupling member is far enough from the support plate so as to be free from transmitting said torque;
wherein the support plate is supported on a base structure, and said position changing means comprise:
a moving support on which the lower magnetic coupling member, said drive motor, and transmission means for transmitting movement from the drive motor to the lower magnetic coupling member are installed;
spindles rotatably supported on the base structure and coupled to corresponding nuts fixed to said moving support; and
a position changing motor operatively connected for rotating said spindles, thereby moving said moving support with respect to said base structure.
10. The assembly according to claim 9, characterized in that the cooking vessel comprises an electronic circuit in connection with a lid position detector configured and arranged for detecting if said lid is in a closed position, and in that said electronic circuit includes a signal emitter configured for wirelessly emitting a signal representative of said lid position detection, said signal being suitable for being received by a signal receiver located below the support plate.
11. The assembly according to claim 10, characterized in that the cooking vessel comprises a temperature detector configured and arranged for detecting a temperature in the cooking vessel, said temperature detector being in connection with said electronic circuit, and in that said signal emitter is configured for wirelessly emitting a signal representative of said temperature detection, said signal being suitable for being received by a signal receiver located below the support plate.
12. The assembly according to claim 11, characterized in that the cooking hob comprises a control panel connected to an electronic supply and control circuit for controlling said rotary blade driving means andor said activationdeactivation means andor heating means located in relation to said treatment area below said support plate, and in that said electronic supply and control circuit includes said signal receiver, which is configured and arranged for receiving said signal sent from said signal emitter, the electronic supply and control circuit being configured for enabling or disabling the operation of said rotary blade driving means andor of said activationdeactivation means andor of said heating means according to said signal received from said signal emitter.
13. The assembly according to claim 11, characterized in that the cooking hob comprises a wireless energy emitter installed below the support plate and the cooking vessel comprises a wireless energy receiver configured and arranged for receiving energy emitted by said wireless energy emitter, for converting said energy received into electric current, and for supplying said electric current to said electronic circuit and to said detectors.
14. The assembly according to claim 10, characterized in that the cooking hob comprises a control panel connected to an electronic supply and control circuit for controlling said rotary blade driving means andor said activationdeactivation means andor heating means located in relation to said treatment area below said support plate, and in that said electronic supply and control circuit includes said signal receiver, which is configured and arranged for receiving said signal sent from said signal emitter, the electronic supply and control circuit being configured for enabling or disabling the operation of said rotary blade driving means andor of said activationdeactivation means andor of said heating means according to said signal received from said signal emitter.
15. The assembly according to claim 10, characterized in that the cooking hob comprises a wireless energy emitter installed below the support plate and the cooking vessel comprises a wireless energy receiver configured and arranged for receiving energy emitted by said wireless energy emitter, for converting said energy received into electric current, and for supplying said electric current to said electronic circuit and to said detectors.
16. The cooking hob according to claim 9, characterized in that each of the spindles has a cog pulley fixed thereto, and a cog belt is installed on said cog pulleys forcing the spindles to rotate in unison.
17. The cooking hob according to claim 9, characterized in that one of the spindles further has a gear wheel fixed thereto, said gear wheel meshing with a worm screw fixed to an output shaft of said position changing motor.