1. A catadioptric projection objective for microlithography for imaging an object field in an object plane onto an image field in an image plane, comprising:
a first partial objective imaging the object field onto a first real intermediate image,
a second partial objective imaging the first intermediate image onto a second real intermediate image, wherein the second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens,
a third partial objective imaging the second intermediate image onto the image field, and
a first folding mirror deflecting the radiation from the object plane toward the concave mirror and a second folding mirror deflecting the radiation from the concave mirror toward the image plane,
wherein at least one surface of a lens of the second partial objective has an antireflection coating having a reflectivity of less than 0.2% for an operating wavelength of between 150 nm and 250 nm and for an angle-of-incidence range of between 0\xb0 and 30\xb0.
2. The catadioptric projection objective according to claim 1,
wherein the antireflection coating comprises at least six layers composed alternately of material having a high refractive index and material having a low refractive index.
3. The catadioptric projection objective according to claim 2,
wherein the material having a low refractive index is a dielectric material selected from the group consisting of: magnesium fluoride, aluminum fluoride, sodium fluoride, lithium fluoride, calcium fluoride, barium fluoride, strontium fluoride, cryolite, chiolite, and combinations thereof.
4. The catadioptric projection objective according to claim 2,
wherein the material having a high refractive index is a dielectric material selected from the group consisting of: neodymium fluoride, lanthanum fluoride, gadolinium fluoride, dysprosium fluoride, aluminum oxide, lead fluoride, yttrium fluoride, and combinations thereof.
5. The catadioptric projection objective according to claim 1,
wherein the at least one surface has a deviation from the marginal ray concentricity of less than 20\xb0.
6. A catadioptric projection objective for microlithography for imaging an object field in an object plane onto an image field in an image plane, comprising:
a first partial objective imaging the object field onto a first real intermediate image,
a second partial objective imaging the first intermediate image onto a second real intermediate image wherein the second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens,
a third partial objective imaging the second intermediate image onto the image field, and
a first folding mirror deflecting the radiation from the object plane toward the concave mirror and a second folding mirror deflecting the radiation from the concave mirror toward the image plane,
wherein all the surfaces of the lenses of the second partial objective are configured such that the deviation from the marginal ray concentricity is greater than or equal to 20\xb0.
7. The catadioptric projection objective according to claim 6,
wherein the second partial objective has exactly one lens.
8. The catadioptric projection objective according to claim 7,
wherein both lens surfaces of the lens are aspherical.
9. A catadioptric projection objective for microlithography for imaging an object field in an object plane onto an image field in an image plane, comprising;
a first partial objective imaging the object field onto a first real intermediate image,
a second partial objective imaging the first intermediate image onto a second real intermediate image, wherein the second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens,
a third partial objective imaging the second intermediate image onto the image field, and
a first folding mirror deflecting the radiation from the object plane toward the concave mirror and a second folding mirror deflecting the radiation from the concave mirror toward the image plane,
wherein the lenses of the second partial objective have lens surfaces having antireflection coatings,
wherein at least one of (i) the lens surfaces and (ii) the antireflection coatings are configured such that, in the center of the image of a square object, the intensity is less than 1.1% in comparison with the maximum intensity within the image field, and
wherein the object field:
has an edge length of between 0.8 mm and 1.2 mm,
is arranged within the homogeneously illuminated object field,
is not luminous itself, and
is imaged with a pupil filling factor of between \u03c3=0.2 and \u03c3=0.3 into the image plane.
10. A catadioptric projection objective for microlithography for imaging an object field in an object plane onto an image field in an image plane, comprising:
a first partial objective imaging the object field onto a first real intermediate image,
a second partial objective imaging the first intermediate image onto a second real intermediate image wherein the second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens,
a third partial objective imaging the second intermediate image onto the image field, and
a first folding mirror deflecting the radiation from the object plane toward the concave mirror and a second folding mirror deflecting the radiation from the concave mirror toward the image plane,
wherein lenses of the second partial objective have lens surfaces having antireflection coatings,
wherein at least one of (i) the lens surfaces and (ii) the antireflection coatings are configured such that, within the image field, the maximum difference between the stray light intensity for a pupil filling factor of between \u03c3=0.2 and \u03c3=0.3 and the stray light intensity for a pupil filling factor of between \u03c3=0.8 and \u03c3=1.0 in the image plane is less than 0.3%.
11. The catadioptric projection objective according to claim 1, wherein the second partial objective has an absolute value of the imaging scale of between 0.8 and 1.25.
12. The catadioptric projection objective according to claim 1, wherein the concave mirror is arranged in the region of a pupil plane.
13. The catadioptric projection objective according to claim 1, wherein the second intermediate image is arranged in the region of the second folding mirror.
14. A projection exposure apparatus for microlithography comprising an illumination system and the catadioptric projection objective according to claim 1.
15. The catadioptric projection objective according to claim 6, wherein the second partial objective has an absolute value of the imaging scale of between 0.8 and 1.25.
16. The catadioptric projection objective according to claim 6, wherein the concave mirror is arranged in the region of a pupil plane.
17. The catadioptric projection objective according to claim 6, wherein the second intermediate image is arranged in the region of the second folding mirror.
18. A projection exposure apparatus for microlithography comprising an illumination system and the catadioptric projection objective according to claim 6.
19. The catadioptric projection objective according to claim 9, wherein the second partial objective has an absolute value of the imaging scale of between 0.8 and 1.25.
20. The catadioptric projection objective according to claim 9, wherein the concave mirror is arranged in the region of a pupil plane.
21. The catadioptric projection objective according to claim 9, wherein the second intermediate image is arranged in the region of the second folding mirror.
22. A projection exposure apparatus for microlithography comprising an illumination system and the catadioptric projection objective according to claim 9.
23. The catadioptric projection objective according to claim 10, wherein the second partial objective has an absolute value of the imaging scale of between 0.8 and 1.25.
24. The catadioptric projection objective according to claim 10, wherein the concave mirror is arranged in the region of a pupil plane.
25. The catadioptric projection objective according to claim 10, wherein the second intermediate image is arranged in the region of the second folding mirror.
26. A projection exposure apparatus for microlithography comprising an illumination system and the catadioptric projection objective according to claim 10.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. An apparatus for preparing a dialysate concentrate for use in performing a dialysis procedure, comprising:
a vessel;
a liquid inlet port to the vessel;
a powder ingredient port to the vessel;
an automatically controllable valve for starting and stopping water flow through the inlet port to the vessel;
a first sensing device for detecting when liquid admitted to the vessel has risen to a predetermined lower liquid level therein;
a second sensing device for detecting when the liquid in the vessel has reached a predetermined upper liquid level;
a controller responsive to a selected one of the sensing devices for closing the automatically controllable valve when the selected one of the sensing devices detects that the liquid has reached the lower or upper liquid levels, respectively; and
a switch for selecting to which of the sensing devices the controller is responsive.
2. The apparatus of claim 1 further comprising a fluid outlet at or near the bottom of the vessel; a recirculation port near the top of the vessel, a pump, and conduit for recirculating fluid from the fluid outlet to the recirculation port.
3. The apparatus of claim 1, wherein the vessel is made of plastic.
4. The apparatus of claim 1, wherein the vessel is made of high density polyethylene.
5. The apparatus of claim 1 further comprising a fluid outlet at or near the bottom of the vessel, a pump, a filter housing for containing a filter, and conduit for pumping dialysate concentrate from the fluid outlet of the vessel through the filter housing.
6. The apparatus of claim 1 further including an agitator inside said vessel and a control for actuating said agitator when the liquid within the vessel exceeds said lower liquid level.
7. A method for preparing a dialysate concentrate for use in performing a dialysis procedure, comprising the steps of:
providing an apparatus including a vessel, an agitator, a liquid inlet port to the vessel, an automatically controllable valve for controlling water flow through the inlet port into the vessel, a first sensing device for detecting when the liquid in the vessel has reached a predetermined lower liquid level, a second sensing device for detecting when the liquid in the vessel has reached a predetermined upper liquid level, a controller responsive to a selected one of the sensing devices for closing the automatically controllable valve when the selected one of the sensing devices detects that the liquid in the vessel has reached the lower or upper liquid levels respectively, and a switch for selecting to which of the sensing devices the controller is responsive;
connecting a source of water to the inlet port;
filling the vessel to the predetermined lower liquid level by using the switch to make the controller responsive to the first sensing device, opening the automatically controllable valve, and allowing the first sensing device to detect when the predetermined lower liquid level has been reached and in response signal the controller to close the automatically controllable valve;
adding a predetermined amount of powder andor liquid to the vessel;
operating the agitator for a period of time to cause the added powder andor liquid to dissolve into andor mix with the water in the vessel to form a generally homogenous solution;
filling the vessel to a predetermined upper liquid level by using the switch to make the controller responsive to the second sensing device by opening the automatically controllable valve; and
allowing the second sensing device to detect when the predetermined upper liquid level has been reached and in response signal the controller to close the automatically controllable valve.
8. The method of claim 7, wherein the step of adding a predetermined amount of powder andor liquid to the vessel comprises adding a pre-measured amount of dry ingredients and a pre-measured amount of acid in liquid form.
9. The method of claim 8, wherein the acid is an acetic acid solution.
10. The method of claim 9, wherein the pre-measured dry ingredients include sodium chloride, potassium chloride, calcium chloride, magnesium chloride and dextrose.
11. A method of preparing a dialysate concentrate for use in performing a dialysis procedure, comprising the steps of:
mixing a predetermined amount of water with a pre-measured amount of dry ingredients and a pre-measured amount of liquid which comprises an acid solution.
12. The method of claim 11, wherein the pre-measured dry ingredients are supplied as a kit in which each such ingredient is present in a particular amount correlated with the amount of the other dry ingredients so supplied.
13. The method of claim 12, wherein the package includes sodium chloride, potassium chloride, calcium chloride, magnesium chloride and dextrose.
14. The method of claim 11, wherein the acid solution is an acetic acid solution.
15. The method of claim 14, wherein the acid solution is separately packaged in a pre-measured amount which is related to the amounts of said dry ingredients supplied in said kit.
16. The method of claim 8, wherein the acid solution is added to the contents of said vessel before at least some of the dry ingredients.
17. The method of claim 8, including the step of recirculating the liquid in said vessel from one location therein to another location therein to facilitate mixing of the said powder andor solution with the water in said vessel.
18. The method of claim 17, wherein said step of recirculating said liquid comprises pumping the liquid from a lower level of said vessel to a higher level thereof.
19. The method of claim 18, wherein said step of recirculating is carried on at least partially during the operation of said agitator.
20. The method of claim 7, wherein the step of adding a predetermined amount of powder andor liquid to the vessel is carried out manually at least in part.