1. A maintenance unit which maintains a liquid ejecting head in which nozzles for ejecting liquid onto an ejection target member are formed, the maintenance unit comprising:
a cap holder that has a cap member capable of abutting against the liquid ejecting head so as to surround the nozzles;
a pair of guide pins that are inserted into the cap holder and guide the cap holder in a movable manner in an approachingseparating direction in which the cap member approaches and is separated from the liquid ejecting head;
an engagement portion that is capable of being engaged with the cap holder in the approachingseparating direction; and
a displacement operating portion that displaces the engagement portion between a restricting position at which the engagement portion restricts drawing of the cap holder out of the guide pins and an allowing position at which the engagement portion is not engaged with the cap holder in the approachingseparating direction and allows the cap holder to be drawn out of the guide pins,
wherein the engagement portion is provided at a position at which at least a part of the engagement portion overlaps with the pair of guide pins to be inserted into the cap holder in a direction in which the guide pins are aligned.
2. The maintenance unit according to claim 1, further comprising a head maintenance portion that maintains the liquid ejecting head by discharging the liquid from the nozzles,
wherein the displacement operating portion is provided at a position separated from the head maintenance portion relative to the engagement portion.
3. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
the maintenance unit according to claim 2.
4. The maintenance unit according to claim 1,
wherein the cap holder is provided with guide holes into which the guide pins are inserted, and
the guide holes are through-holes penetrating the cap holder.
5. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
the maintenance unit according to claim 4.
6. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
the maintenance unit according to claim 1.
7. The liquid ejecting apparatus according to claim 6, further comprising:
a discharge portion that discharges the ejection target member onto which the liquid has been ejected,
wherein the displacement operating portion is located at a downstream side in a discharge direction in which the ejection target member is discharged in the maintenance unit.
8. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
a maintenance unit that maintains a liquid ejecting head in which nozzles for ejecting liquid onto an ejection target member are formed, the maintenance unit comprising:
a cap holder that has a cap member capable of abutting against the liquid ejecting head so as to surround the nozzles;
a guide pin that is inserted into the cap holder and guide the cap holder in a movable manner in an approachingseparating direction in which the cap member approaches and is separated from the liquid ejecting head;
an engagement portion that is capable of being engaged with the cap holder in the approachingseparating direction; and
a displacement operating portion that displaces the engagement portion between a restricting position at which the engagement portion restricts drawing of the cap holder out of the guide pins and an allowing position at which the engagement portion is not engaged with the cap holder in the approachingseparating direction and allows the cap holder to be drawn out of the guide pins,
wherein the displacement operating portion is located at a downstream side in a discharge direction in which the ejection target member is discharged relatively in the maintenance unit.
9. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
a maintenance unit that maintains a liquid ejecting head in which nozzles for ejecting liquid onto an ejection target member are formed, the maintenance unit comprising:
a cap holder that has a cap member capable of abutting against the liquid ejecting head so as to surround the nozzles;
a guide pin that is inserted into the cap holder and guide the cap holder in a movable manner in an approachingseparating direction in which the cap member approaches and is separated from the liquid ejecting head;
an engagement portion that is capable of being engaged with the cap holder in the approachingseparating direction; and
a displacement operating portion that displaces the engagement portion between a restricting position at which the engagement portion restricts drawing of the cap holder out of the guide pins and an allowing position at which the engagement portion is not engaged with the cap holder in the approachingseparating direction and allows the cap holder to be drawn out of the guide pins,
wherein the displacement operating portion is located at an upstream side in a discharge direction in which the ejection target member is discharged relatively in the maintenance unit.
10. A maintenance unit which maintains a liquid ejecting head in which nozzles for ejecting liquid onto an ejection target member are formed, the maintenance unit comprising:
a cap holder that has a cap member capable of abutting against the liquid ejecting head so as to surround the nozzles;
a pair of guide pins that are inserted into the cap holder and guide the cap holder in a movable manner in an approachingseparating direction in which the cap member approaches and is separated from the liquid ejecting head, the guide pins being disposed in the approachingseparating direction;
an engagement portion that is capable of being engaged with the cap holder in the approachingseparating direction; and
a displacement operating portion that displaces the engagement portion between a restricting position at which the engagement portion restricts drawing of the cap holder out of the guide pins and an allowing position at which the engagement portion is not engaged with the cap holder in the approachingseparating direction and allows the cap holder to be drawn out of the guide pins.
11. The maintenance unit according to claim 10, wherein the guide pins are arranged to extend in a direction along the approachingseparating direction.
12. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
the maintenance unit according to claim 11.
13. A liquid ejecting apparatus comprising:
a liquid ejecting head that ejects liquid onto an ejection target member; and
the maintenance unit according to claim 10.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A method comprising:
introducing at least one metal precursor onto a substrate within a chamber;
introducing the focused ion beam to a substrate within the chamber;
forming at least one metal layer over a substrate by the focused ion beam; and
applying heat to the at least one layer.
2. The method of claim 1, wherein the at least one metal precursor contains one of cobalt, molybdenum, platinum, and tungsten and metal carbonyl.
3. The method of claim 1, further comprising:
removing one of carbon, oxygen, and gallium from the at least one layer.
4. The method of claim 1, further comprising:
forming at least two alloy layers.
5. The method of claim 4, further comprising:
removing one of a carbon and an oxygen from one of the at least two layers.
6. The method of claim 1, wherein applying heat is performed by one of a laser, local ion scan bombardment, and current forced through the at least one layer.
7. A method comprising:
introducing one of cobalt, molybdenum, platinum, and tungsten into a focused ion beam;
introducing into a chamber which includes a substrate a focused ion beam to the substrate;
forming at least one layer by the focused ion beam;
heating the at least one layer; and
removing one of a carbon, an oxygen, and a gallium from the at least one layer.
8. The method of claim 7, further comprising:
introducing at least two metals into the focused ion beam; and
introducing the focused ion beam into the processing chamber.
9. The method of claim 7, further comprising:
forming at least two alloy layers.
10. The method of claim 9, wherein at least one of the at least two layers is an alloy layer.
11. A system comprising:
a chamber configured to house a substrate for processing;
an energy source coupled to the chamber;
a system controller configured to control the introduction of at least one metal to a focused ion beam and to control the introduction of the focused ion beam from the energy source; and
a memory coupled to the controller comprising a computer-readable medium having a computer-readable program embodied therein for directing operation of the system, the computer-readable program comprising:
instructions for controlling the energy source and for introducing the metal into a focused ion beam which is introduced into the chamber over the substrate in which the metal from the focused ion beam forms at least one layer over the substrate; and
controlling the heat which is applied to the at least one layer.
12. The system of claim 11, wherein the metal is one of cobalt, metal carbonyl, molybdenum, platinum, and tungsten.
13. The system of claim 11, wherein introducing one of cobalt, metal carbonyl, molybdenum, platinum, and tungsten into the focused ion beam at a chamber pressure in the range of 105 to 107 torr and about room temperature.
14. The system of claim 11, wherein the FIB heats a discrete area on the layer.
15. The system of claim 14, wherein one of a carbon and an oxygen is removed from the layer.
16. The system of claim 11, wherein the instructions for controlling the introduction of at least two metals comprises instructions involving introducing the cobalt, metal carbonyl, molybdenum, platinum, and tungsten in a controllable ratio.
17. A machine-readable storage medium containing executable program instructions which when executed cause a digital processing system to perform a method comprising:
introducing one of cobalt, molybdenum, platinum, metal carbonyl, and tungsten into a focused ion beam;
introducing a focused ion beam to a substrate within a processing chamber;
forming a layer over a substrate; and
heating the layer.
18. The machine readable medium of claim 17, the method further comprising:
forming at least two layers over the substrate.
19. The machine readable medium of claim 18, the method further comprising:
heating at least one layer.
20. The machine readable medium of claim 19, the method further comprising:
removing one of a carbon and an oxygen from the layer.
21. The method of claim 17, the method further comprising:
forming more than two alloy layers over the substrate.