1. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
providing an ionic liquid;
dissolving a precursor in the ionic liquid; and
passing a stream of gas through the ionic liquid.
2. The method of claim 1, further comprising heating the ionic liquid to a temperature equal to about a volatilization point of the precursor.
3. The method of claim 1, further comprising transporting vaporized precursor molecules from the ionic liquid to a process chamber.
4. The method of claim 1, wherein the ionic liquid is of the formula:
13
wherein R1 is alkyl and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof.
5. The method of claim 4, wherein R1 is an alkyl having a carbon chain comprising from about 1 carbon atom to about 30 carbon atoms.
6. The method of claim 4, wherein Ri is selected from a group consisting essentially of methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, sec-butyl groups, tert-butyl groups, isobutyl groups, and pentyl groups.
7. The method of claim 1, wherein the ionic liquid is of the formula:
14
wherein R1 and R2 are alkyls and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof.
8. The method of claim 7, wherein R1 is an alkyl having a carbon chain comprising from about 1 carbon atom to about 30 carbon atoms.
9. The method of claim 7, wherein R1 and R2 are independently selected from a group consisting essentially of alkyls, methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, sec-butyl groups, tert-butyl groups, isobutyl groups, and pentyl groups.
10. The method of claim 1, wherein the ionic liquid satisfies the formula:
15
wherein R1, R2, R3, R4 are alkyls and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof.
11. The method of claim 10, wherein R1 is an alkyl having a carbon chain comprising from about 1 carbon atom to about 30 carbon atoms.
12. The method of claim 10, wherein R1, R2, R3, and R4 are independently selected from a group consisting essentially of alkyls, methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, sec-butyl groups, tert-butyl groups, isobutyl groups, pentyl groups, and mixtures thereof.
13. The method of claim 1, wherein the ionic liquid satisfies the formula:
16
wherein R1, R2, and R3are alkyls and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof.
14. The method of claim 13, wherein R1, R2, and R3 are independently selected from a group consisting essentially of alkyls having carbon chains comprising from about 1 carbon atom to about 30 carbon atoms.
15. The method of claim 14, wherein R1, R2, and R3 are independently selected from a group consisting of alkyls, methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, sec-butyl groups, tert-butyl groups, isobutyl groups, and pentyl groups.
16. The method of claim 1, wherein the ionic liquid satisfies the formula:
17
wherein n is from about 1 to about 10 and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof.
17. The method of claim 1, wherein the ionic liquid satisfies the formula:
18
wherein R1, R2, R3, R4 are alkyls and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof.
18. The method of claim 17, wherein R1 is an alkyl having a carbon chain comprising from about 1 carbon atom to about 30 carbon atoms.
19. The method of claim 17, wherein R1, R2, R3, and R4 are independently selected from a group consisting essentially of alkyls, methyl groups, ethyl groups, propyl groups, isopropyl groups, n-butyl groups, sec-butyl groups, tert-butyl groups, isobutyl groups, pentyl groups, and mixtures thereof.
20. A method for vapor deposition of a thin film on a substrate, the method comprising:
providing an ionic liquid including one or more precursors;
heating the ionic liquid;
transporting the precursor in the vapor phase from the ionic liquid to a substrate; and
depositing the precursor on the substrate.
21. The method of claim 20, wherein the precursor is dissolved in the ionic liquid.
22. The method of claim 20, wherein the vapor-phase precursor is distilled from the ionic liquid and transported to the substrate by a carrier gas.
23. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
dissolving a precursor in a solvent that satisfies the formula:
19
wherein R1 is an alkyl and Y is selected from a group consisting essentially of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof; and
bubbling a stream of gas through the solution containing the precursor to distill precursor molecules in the vapor phase from the solution.
24. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
dissolving a precursor in a solvent that satisfies the formula:
20
wherein R1 and R2 are alkyl and Y is selected from the group consisting of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof; and
bubbling a stream of gas through the solution containing the precursor to distill precursor molecules in the vapor phase from the solution.
25. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
dissolving a precursor in a solvent that satisfies the formula:
21
wherein R1, R2, R3, R4 are alkyl and Y is selected from the group consisting of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof; and
bubbling a stream of gas through the solution containing the precursor to distill precursor molecules in the vapor phase from the solution.
26. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
dissolving a precursor in a solvent satisfying the formula:
22
wherein R1, R2, and R3 are alkyl and Y is selected from the group consisting of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6-, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof; and
bubbling a stream of gas through the solution containing the precursor to distill precursor molecules in the vapor phase from the solution.
27. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
dissolving a precursor in a solvent that satisfies the formula:
23
wherein R1, R2, R3, R4 are alkyl and Y is selected from the group consisting of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof; and
bubbling a stream of gas through the solution containing the precursor to distill precursor molecules in the vapor phase from the solution.
28. A method for vaporizing reactants for vapor deposition of a thin film on a substrate, comprising:
dissolving a precursor in a solvent that satisfies the formula:
24
wherein n is from 1 to 10 and Y is selected from the group consisting of halides, sulfates, nitrates, acetates, nitrites, tetrafluoroborates, tetrachloroborates, hexafluorophosphates, SbF6, chloroaluminates, bromoaluminates, chlorocuprates, heteropolyanions, trifluoromethanesulfonates, and mixtures thereof; and
bubbling a stream of gas through the solution containing the precursor to distill precursor molecules in the vapor phase from the solution.
29. An apparatus for vaporizing and transporting precursor molecules to a deposition chamber for deposition of a thin film on a substrate, the apparatus comprising:
a vessel containing an ionic liquid;
a carrier gas source in fluid communication with the vessel; and
a deposition chamber in fluid communication with the carrier gas source.
30. An apparatus for vaporizing and transporting precursor molecules to a deposition chamber for deposition of a thin film on a substrate, the apparatus comprising:
a vessel containing an ionic liquid having a precursor dissolved therein;
a bubbler device for bubbling a carrier gas source through the vessel; and
a gas line for transporting carrier gas and vaporized precursor molecules from the vessel to the deposition chamber.
31. An apparatus for vaporizing and transporting precursor molecules to a deposition chamber for deposition of a thin film on a substrate, the apparatus comprising:
an ionic liquid source;
a carrier gas source in fluid communication with the ionic liquid source; and
a deposition chamber in fluid communication with the carrier gas source.
32. An apparatus for vaporizing and transporting precursor molecules to a deposition chamber for deposition of a thin film on a substrate, the apparatus comprising:
an ionic liquid source;
a carrier gas source;
a bubbler device for delivering the carrier gas source to the ionic liquid source; and
a deposition chamber in fluid communication with the ionic liquid source to receive vaporized molecules from the ionic liquid source.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An amphiphilic siloxane-containing vinylic monomer, comprising: one sole ethylenically unsaturated group (Q), one sole bulky siloxane-containing group BSi, and one hydrophilic linkage (hL) between Q and BSi, wherein the amphiphilic siloxane-containing vinylic monomer is represented by formula (I)
Q-X1-hL-X2-BSi\u2003\u2003(I)
In which:
Q is an ethylenically unsaturated group of formula (II)
in which
R12 is hydrogen or C1-C4 alkyl,
Z1 is a linear or branched C1-C12 alkylene radical, \u2014O\u2014, or \u2014NH\u2014,
Z2 is a direct bond or a linear or branched C1-C12 alkylene radical,
A is \u2014O\u2014 or \u2014NH\u2014,
q1 and q2 independent of each other are an integer of 0 or 1;
X1 and X2 independent of each other are a direct bond or a cross linkage of formula (III)
\u2014X3\u2014R\u20321\u2014X4-E-X5\u2014R\u20322\u2014X6\u2014\u2003\u2003(III)
in which
X3, X4, X5, and X6 independent of one other are a linkage selected from the group consisting of a direct bond, \u2014O\u2014, \u2014NR\u2032\u2014, \u2014CO\u2014NR\u2032\u2014, \u2014NR\u2032\u2014CO\u2014, \u2014NR\u2032\u2014CO\u2014NH\u2014, \u2014NH\u2014CO\u2014NR\u2032\u2014, \u2014O\u2014CO\u2014NH\u2014, \u2014NH\u2014CO\u2014O\u2014, \u2014S\u2014CO\u2014NH\u2014, \u2014O\u2014CO\u2014, \u2014CO\u2014O\u2014, \u2014S\u2014, and \u2014NH\u2014CO\u2014S\u2014 in which R\u2032 is H or C1-C4 alkyl,
E is a linear or branched alkylene, cycloalkane diradical or arene diradical with up to 40 carbon atoms,
R\u20321 and R\u20322 independent of each other is a direct bond, a linear or branched C1-C10 alkylene divalent radical, or a divalent radical of \u2014R\u20323\u2014X4-E-X5\u2014R\u20324\u2014 in which E, X4 and X5 are as defined above and R\u20323 and R\u20324 independent of each other are a direct bond or a linear or branched C1-C10 alkylene radical;
hL is a hydrophilic oligomeric segment selected from the group consisting of (1) polyoxazoline (\u2014(N(COR\u2033)C2H4\u2014 in which R\u2033 is H, methyl or ethyl) which is obtained in a ring-opening polymerization of oxazoline, (2) a polypeptide segment composed of at least one amino acid selected from the group consisting of asparagine, glutamine, alanine, glycine, and combinations thereof, and (3) a hydrophilic polymer segment composed of hydrophilic monomeric units derived from at least one hydrophilic vinylic monomer selected from the group consisting of (meth)acrylamide, N,N-dimethyl(meth)acrylamide, dimethylaminoethyl(meth)acrylate, dimethylaminoethyl(meth)acrylamide, N-vinyl-2-pyrrolidone, N-vinyl-N-methyl isopropylamide, N-vinyl-N-methyl acetamide, N-vinyl formamide, N-vinyl acetamide, N-vinyl isopropylamide, N-vinyl-N-methyl acetamide, N-methyl-3-methylene-2-pyrrolidone, 1-ethyl-3-methylene-2-pyrrolidone, 1-methyl-5-methylene-2-pyrrolidone, 1-ethyl-5-methylene-2-pyrrolidone, 5-methyl-3-methylene-2-pyrrolidone, 5-ethyl-3-methylene-2-pyrrolidone, 1-n-propyl-3-methylene-2-pyrrolidone, 1-n-propyl-5-methylene-2-pyrrolidone, 1-isopropyl-3-methylene-2-pyrrolidone, 1-isopropyl-5-methylene-2-pyrrolidone, 1-n-butyl-3-methylene-2-pyrrolidone, 1-tert-butyl-3-methylene-2-pyrrolidone, and mixtures thereof;
BSi is a monovalent radical of formula (1A) or (1B)
in which
Y is a C1-C6 alkylene radical or a C1-C6 substituted alkylene radical containing one or more hydroxyl groups,
B1 and B2 independent of each other are C1-C6 alkyl, phenyl, or benzyl,
T is a C1-C12 alkyl or an alkoxyalkyl radical having 3 to 8 carbon atoms,
m is an integer of 0 to 3,
p is an integer of 1 to 6,
r is an integer of 2 to 20,
A1, A2 and A3 independent of each other are C1-C6 alkyl, phenyl, benzyl, or a radical of formula (2)
\u2003in which B3, B4 and B5 independent of each other are C1-C6 alkyl, phenyl, or benzyl, provided that at least two of A1, A2 and A3 are radicals of formula (2).
2. The amphiphilic siloxane-containing vinylic monomer of claim 1, wherein Q is
in which R12 is hydrogen or methyl and Z2 is a direct bond or a linear or branched C1-C12 alkylene divalent radical.
3. The amphiphilic siloxane-containing vinylic monomer of claim 2, wherein BSi is a monovalent radical of formula (1A) in which A1, A2 and A3 is a radical of formula (2).
4. The amphiphilic siloxane-containing vinylic monomer of claim 2, wherein BSi is a monovalent radical of formula (1B) in which B1 and B2 independent of each other are C1-C6 alkyl.
5. The amphiphilic siloxane-containing vinylic monomer of claim 2, wherein hL in formula (I) is an oligomeric polyoxazoline segment.
6. The amphiphilic siloxane-containing vinylic monomer of claim 2, wherein hL in formula (I) is an oligomeric polypeptide segment composed of at least one amino acid selected from the group consisting of asparagine, glutamine, alanine, glycine, and combinations thereof.
7. The amphiphilic siloxane-containing vinylic monomer of claim 2, wherein hL in formula (I) is a hydrophilic polymer segment composed of monomeric units derived from at least one hydrophilic vinylic monomer selected from the group consisting of (meth)acrylamide, N,N-dimethyl(meth)acrylamide, dimethylaminoethyl(meth)acrylate, dimethylaminoethyl(meth)acrylamide, N-vinyl-2-pyrrolidone, N-vinyl-N-methyl isopropylamide, N-vinyl-N-methyl acetamide, N-vinyl formamide, N-vinyl acetamide, N-vinyl isopropylamide, N-vinyl-N-methyl acetamide, N-methyl-3-methylene-2-pyrrolidone, 1-ethyl-3-methylene-2-pyrrolidone, 1-methyl-5-methylene-2-pyrrolidone, 1-ethyl-5-methylene-2-pyrrolidone, 5-methyl-3-methylene-2-pyrrolidone, 5-ethyl-3-methylene-2-pyrrolidone, 1-n-propyl-3-methylene-2-pyrrolidone, 1-n-propyl-5-methylene-2-pyrrolidone, 1-isopropyl-3-methylene-2-pyrrolidone, 1-isopropyl-5-methylene-2-pyrrolidone, 1-n-butyl-3-methylene-2-pyrrolidone, 1-tert-butyl-3-methylene-2-pyrrolidone, and mixtures thereof.
8. The amphiphilic siloxane-containing vinylic monomer of claim 7, wherein hL in formula (I) is a hydrophilic polymer segment composed of monomeric units derived from at least one hydrophilic vinylic monomer selected from the group consisting of (meth)acrylamide, N,N-dimethyl(meth)acrylamide, dimethylaminoethyl(meth)acrylate, dimethylaminoethyl(meth)acrylamide, N-vinyl-2-pyrrolidone, N-vinyl-N-methyl acetamide, N-vinyl acetamide, N-methyl-3-methylene-2-pyrrolidone, 1-methyl-5-methylene-2-pyrrolidone, 5-methyl-3-methylene-2-pyrrolidone, and mixtures thereof.
9. The amphiphilic siloxane-containing vinylic monomer of claim 2, wherein the amphiphilic siloxane-containing vinylic monomer has a water solubility or dispersibility of at least about 5% by weight in water.
10. A polymer comprising monomeric units derived from an amphiphilic siloxane-containing vinylic monomer of claim 1.
11. The polymer of claim 10, wherein the polymer is an actinically-crosslinkable silicone-containing prepolymer which further comprises: (1) crosslinking units derived from at least one polysiloxane-containing crosslinker andor polysiloxane units derived from a polysiloxane-containing vinylic monomer; (2) hydrophilic units derived from at least one hydrophilic vinylic monomer; (3) polymerizable units derived from a chain transfer agent having a first reactive functional group other than thiol group andor a vinylic monomer having a second reactive functional group other than ethylenically-unsaturated group, wherein the polymerizable units each comprise an ethylenically unsaturated group covalently attached to one polymerizable unit through the first or second reactive functional group; (4) optionally non-silicone crosslinking units derived from at least one non-silicone crosslinker; and (5) optionally UV-absorbing units derived from a UV-absorbing vinylic monomer, wherein the prepolymer is capable of being actinically crosslinked, in the absence of one or more vinylic monomers, to form a silicone hydrogel contact lens having a water content of from about 20% to about 75% by weight when fully hydrated, and an oxygen permeability (Dk) of at least about 40 barrers.
12. The prepolymer of claim 11, wherein the prepolymer has a water solubility or dispersibility of at least about 5% by weight in water, wherein the crosslinking units are derived from at least one hydrophilized polysiloxane-containing crosslinker andor at least one non-silicone hydrophilic crosslinker.
13. A soft contact lens comprising a polymer of claim 10, wherein the contact lens has a water content of from about 20% to about 75% by weight when fully hydrated, an oxygen permeability (Dk) of at least about 40 barrers, and an elastic modulus of from about 0.1 MPa to about 2.0 MPa.
14. A soft contact lens comprising a silicone hydrogel material obtained by curing a lens-forming material in a mold, wherein the lens-forming formulation comprises at least one actinically-crosslinkable silicone-containing prepolymer of claim 11, wherein the contact lens has a water content of from about 20% to about 75% by weight when fully hydrated, an oxygen permeability (Dk) of at least about 40 barrers, and an elastic modulus of from about 0.1 MPa to about 2.0 MPa.
15. A method for making silicone hydrogel contact lenses, comprising the steps of:
introducing a lens-forming formulation into a mold for making contact lenses, wherein the lens-forming formulation comprises (a) a solvent selected from the group consisting of water, 1,2-propylene glycol, dipropylene glycol, tripropylene glycol, propylene glycol methyl ether, dipropylene glycol methyl ether, tripropylene glycol methyl ether, a polyethyleneglycol having a molecular weight of about 400 Daltons or less, and mixtures thereof, (b) at least one amphiphilic siloxane-containing vinylic monomer of claim 1, and (c) at least one component selected from the group consisting of a hydrophilic vinylic monomer, a hydrophilized polysiloxane-containing crosslinker, a hydrophilic crosslinker, a photoinitiator, a thermal initiator, a UV-absorbing vinylic monomer, a visibility tinting agent, an antimicrobial agent, a bioactive agent, a leachable lubricant, a leachable tear-stabilizing agent, and mixtures thereof; polymerizing the lens-forming formulation in the mold to form a silicone hydrogel contact lens, wherein the formed silicone hydrogel contact lens has a water content of from about 20% to about 75% by weight when fully hydrated, an oxygen permeability (Dk) of at least about 40 barrers, and an elastic modulus of from about 0.1 MPa to about 2.0 MPa.
16. The method of claim 15, further comprising the step of extracting the molded silicone hydrogel contact lens with water or an aqueous solution.
17. The method of claim 16, wherein the mold is a reusable mold and the lens-forming composition is cured actinically under a spatial limitation of actinic radiation to form the silicone hydrogel contact lens.
18. A method for making silicone hydrogel contact lenses, comprising the steps of:
introducing a lens-forming formulation into a mold for making contact lenses, wherein the lens-forming formulation comprises (a) a solvent selected from the group consisting of water, 1,2-propylene glycol, dipropylene glycol, tripropylene glycol, propylene glycol methyl ether, dipropylene glycol methyl ether, tripropylene glycol methyl ether, a polyethyleneglycol having a molecular weight of about 400 Daltons or less, and mixtures thereof, (b) at least one actinically-crosslinkable silicone containing prepolymer of claim 11, and (c) at least one component selected from the group consisting of a hydrophilic vinylic monomer, a hydrophilized polysiloxane-containing crosslinker, a hydrophilic crosslinker, a photoinitiator, a thermal initiator, a UV-absorbing vinylic monomer, a visibility tinting agent, an antimicrobial agent, a bioactive agent, a leachable lubricant, a leachable tear-stabilizing agent, and mixtures thereof; polymerizing the lens-forming formulation in the mold to form a silicone hydrogel contact lens, wherein the formed silicone hydrogel contact lens has a water content of from about 20% to about 75% by weight when fully hydrated, an oxygen permeability (Dk) of at least about 40 barrers, and an elastic modulus of from about 0.1 MPa to about 2.0 MPa.
19. The method of claim 18, further comprising the step of extracting the molded silicone hydrogel contact lens with water or an aqueous solution.
20. The method of claim 19, wherein the mold is a reusable mold and the lens-forming composition is cured actinically under a spatial limitation of actinic radiation to form the silicone hydrogel contact lens.