What is claimed is:
1. An automation system including a control device for controlling a processing device and at least one sensor arrangement for transmitting sensor data provided by a sensor from the processing device to the control device, wherein the sensor arrangement contains a radio transmitter for providing wireless transmission of the sensor data to a radio receiver interconnected with the control device.
2. The automation system according to claim 1, wherein the radio transmitter of the processing device and the radio receiver of the control device are each a radio transceiver, and the radio transceiver of the control device transmits sensor control data to the radio transceiver of the processing device.
3. The automation system according to claim 1, wherein the radio receiver receives sensor data from a plurality of sensors.
4. The automation system according to claim 1, wherein the radio receiver is associated with a radio module that receives sensor data from a plurality of sensors and is connected directly to the control device.
5. The automation system according to claim 1, wherein the radio receiver is associated with a radio module that receives sensor data from a plurality of sensors and is connected to the control device.
6. The automation system according to claim 5, wherein the radio receiver is connected to the control device via a data bus.
7. The automation system according to claim 6, wherein a central data bus radio module is connected between the radio module and the data bus.
8. The automation system according to claim 1, wherein a data protocol for the data transmitted from the radio transmitter to the radio receiver provides a first data area associated with sensor identification data and a second data area associated with the transmitted sensor data.
9. The automation system according to claim 2, wherein a data protocol for the control data transmitted from the radio transceiver of the control device to the radio transceiver of the processing device provides a first data area associated with sensor identification data and a second data area associated with the control data.
10. The automation system according to claim 1, wherein the sensor data consists of binary signals.
11. The automation system according to claim 9, wherein the control data consists of binary signals.
12. The automation system according to claim 2, wherein energy providing the sensor with an operating current is transferred by electromagnetic emission from the control device to the sensor via the radio transceiver of the processing device.
13. An automation system comprising:
a control device;
a processing device controlled by the control device; and
a sensor arrangement comprising a sensor that obtains sensor data from the processing device;
wherein the sensor arrangement wirelessly transmits the sensor data from the processing device to the control device.
14. The automation system according to claim 13, wherein the processing device has a plurality of sensor arrangements.
15. The automation system according to claim 14, further comprising a data bus connecting the plurality of sensor arrangements with the control device.
16. The automation system according to claim 15, further comprising a central data bus radio module connecting the plurality of sensor arrangements with the data bus.
17. A sensor arrangement for an automation system having a control device for controlling a processing device, wherein the sensor arrangement has a sensor and a radio transmitter interconnected with the processing device for transmitting sensor data to a radio receiver interconnected with the control device.
18. The sensor arrangement according to claim 16, wherein the radio transmitter is a transceiver configured to receive activation data for activating the sensor from a transceiver of the control device that transmits to the transceiver of the processing device.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for fabricating an electronic device, the method comprising:
forming a stacked structure over a substrate, the stacked structure including a first inter-layer dielectric layer, a first anti-oxidation layer, a horizontal electrode, and a second anti-oxidation layer, which are vertically stacked;
forming a plurality of first openings that expose the substrate by penetrating through the stacked structure;
forming a material layer including oxygen vacancies on sidewalls of the first openings;
forming a plurality of vertical electrodes to fill the first openings; and
causing a portion in the material layer to react with oxygen ions migrated from the first inter-layer dielectric layer.
2. The method according to claim 1, wherein the material layer includes a transition metal oxide.
3. The method according to claim 1, wherein the portion in the material layer includes at least some of the oxygen vacancies.
4. The method according to claim 3, wherein the first anti-oxidation layer and the second anti-oxidation layer include a nitride.
5. The method according to claim 4, wherein the causing comprises performing a thermal treatment on a structure resulting from the forming of the plurality of vertical electrodes.
6. The method according to claim 1, further comprising:
forming an isolation layer to penetrate through the stacked structure between two adjacent vertical electrodes, wherein the two adjacent vertical electrodes and the isolation layer are spaced apart from one another.
7. The method according to claim 6, further comprising:
forming a second inter-layer dielectric layer over the isolation layer and the stacked structure divided by the plurality of vertical electrodes;
forming a plurality of contacts over the plurality of vertical electrodes to be coupled with the vertical electrodes; and
forming a plurality of conductive lines over the second inter-layer dielectric layer and the contacts.