1. A method of manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode on a surface of a semiconductor substrate;
forming a resist mask covering both end faces of the gate electrode in a gate width direction intersecting a gate length direction;
forming a low-concentration impurity layer in the surface of the semiconductor substrate so as to overlap with the gate electrode at both sides of the gate electrode by implanting impurity ions into the semiconductor substrate in an implantation direction having a gate length direction component and a gate width direction component;
forming a sidewall covering a side surface of the gate electrode; and
forming a high-concentration impurity layer in the surface of the semiconductor substrate so as to be apart from the gate electrode at both sides of the gate electrode by implanting impurity ions using the gate electrode and the side wall as a mask,
wherein the resist mask has a covering thickness sufficient to prevent a penetration into a region immediately under the gate electrode of impurity ions implanted in an implantation direction having the gate width direction component at the step of forming the low-concentration impurity layer.
2. The manufacturing method of claim 1, wherein
at the step of forming the low-concentration impurity layer, the impurity ions are implanted at a predetermined tilt angle with respect to the surface of the semiconductor substrate.
3. A method of manufacturing a semiconductor device including a plurality of semiconductor elements each having a gate length direction different from one another, the method comprising the steps of:
forming a plurality of gate electrodes corresponding respectively to the plurality of semiconductor elements on a surface of a semiconductor substrate;
forming a resist mask covering both end faces of each of the plurality of gate electrodes in a gate width direction intersecting the gate length direction;
forming a low-concentration impurity layer in the surface of the semiconductor substrate so as to overlap with each of the plurality of gate electrodes at both sides of the each of the plurality of gate electrodes by implanting impurity ions into the semiconductor substrate in an implantation direction having a gate length direction component and a gate width direction component;
forming a sidewall covering a side surface of each of the plurality of gate electrodes; and
forming a high-concentration impurity layer in the surface of the semiconductor substrate so as to be apart from each of the plurality of gate electrodes at both sides of the each of the plurality of gate electrodes by implanting impurity ions using the plurality of gate electrodes and the side walls as a mask,
wherein the resist mask has a covering thickness sufficient to prevent a penetration into a region immediately under the gate electrode of impurity ions implanted in an implantation direction having the gate width direction component at the step of forming the low-concentration impurity layer.
4. The manufacturing method of claim 3, wherein
the semiconductor device includes as the semiconductor elements an n-type MOSFET and a p-type MOSFET, wherein
the step of forming a low-concentration impurity layer includes a step of forming a resist mask covering either one of the n-type MOSFET and the p-type MOSFET, and wherein
the resist mask covering both end faces of each of the gate electrodes and the resist mask covering either one of the n-type MOSFET and the p-type MOSFET are formed at the same step.
5. The manufacturing method of claim 3, wherein
at the step of forming the low-concentration impurity layer, the impurity ions are implanted at a predetermined tilt angle with respect to the surface of the semiconductor substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1-51. (canceled)
52. A data transmitting apparatus comprising transmitting portion for multiplexing and transmitting video data andor sound data, and
either audio-visual environment control data for one or more peripheral device in an audio-visual environment space where the video data andor the sound data is reproduced or identification information for identifying the audio-visual environment control data,
wherein the audio-visual environment control data includes a control designation value for the peripheral device, and producer preference information indicating an error permission range for the control designation value.
53. The data transmitting apparatus as defined in claim 52, wherein
the producer preference information includes permission type information for allowing to control the peripheral device only using the control designation value.
54. The data transmitting apparatus as defined in claim 52, wherein
the producer preference information includes permission type information for allowing to control the peripheral device using a value under the control designation value.
55. The data transmitting apparatus as defined in claim 52, wherein
the producer preference information includes permission type information for allowing to control the peripheral device using a value over the control designation value.
56. The data transmitting apparatus as defined in claim 52, wherein
the producer preference information includes permission type information for allowing to control the peripheral device using a value within a predetermined range including the control designation value.
57. The data transmitting apparatus as defined in claim 54, wherein
the producer preference information includes proximity permission range information indicating a range in which the value is allowed in a ratio to the control designation value.
58. The data transmitting apparatus as defined in claim 55, wherein
the producer preference information includes proximity permission range information indicating a range in which the value is allowed in a ratio to the control designation value.
59. The data transmitting apparatus as defined in claim 56, wherein
the producer preference information includes proximity permission range information indicating a range in which the value is allowed in a ratio to the control designation value.
60. The data transmitting apparatus as defined in claim 52, wherein
the control designation value is represented by a quantized value.
61. The data transmitting apparatus as defined in claim 52, wherein
the audio-visual environment control data is lighting control data for one or more lighting device in the audio-visual environment space.
62. A data receiving apparatus comprising receiving portion for receiving multiplexed data including video data andor sound data, and
either audio-visual environment control data for one or more peripheral device in an audio-visual environment space where the video data andor the sound data is reproduced or identification information for identifying the audio-visual environment control data,
wherein the audio-visual environment control data includes a control designation value for the peripheral device, and producer preference information indicating an error permission range for the control designation value.
63. The data receiving apparatus as defined in claim 62, wherein
the producer preference information includes permission type information for allowing to control the peripheral device only with the control designation value.
64. The data receiving apparatus as defined in claim 62, wherein
the producer preference information includes permission type information for allowing to control the peripheral device using a value under the control designation value.
65. The data receiving apparatus as defined in claim 62, wherein
the producer preference information includes permission type information for allowing to control the peripheral device using a value over the control designation value.
66. The data receiving apparatus as defined in claim 62, wherein
the producer preference information includes permission type information for allowing to control the peripheral device using a value within a predetermined range including the control designation value.
67. The data receiving apparatus as defined in claim 64, wherein
the producer preference information includes proximity permission range information indicating a range in which the value is allowed in a ratio to the control designation value.
68. The data receiving apparatus as defined in claim 65, wherein
the producer preference information includes proximity permission range information indicating a range in which the value is allowed in a ratio to the control designation value.
69. The data receiving apparatus as defined in claim 66, wherein
the producer preference information includes proximity permission range information indicating a range in which the value is allowed in a ratio to the control designation value.
70. The data receiving apparatus as defined in claim 62, wherein
the control designation value is represented by a quantized value.
71. The data receiving apparatus as defined in claim 62, wherein
the audio-visual environment control data is lighting control data for one or more lighting device in the audio-visual environment space.
72. A data transmitting method for multiplexing and transmitting video data andor sound data, and
either audio-visual environment control data for one or more peripheral device in an audio-visual environment space where the video data andor the sound data is reproduced or identification information for identifying the audio-visual environment control data,
wherein the audio-visual environment control data includes a control designation value for the peripheral device, and producer preference information indicating an error permission range for the control designation value.
73. A data receiving method for receiving multiplexed data including video data andor sound data, and
either audio-visual environment control data for one or more peripheral device in an audio-visual environment space where the video data andor the sound data is reproduced or identification information for identifying the audio-visual environment control data,
wherein the audio-visual environment control data includes a control designation value for the peripheral device, and producer preference information indicating an error permission range for the control designation value.
74. An audio-visual environment controlling method for receiving multiplexed data including video data andor sound data, and
either audio-visual environment control data for one or more peripheral device in an audio-visual environment space where the video data andor the sound data is reproduced or identification information for identifying the audio-visual environment control data,
wherein the audio-visual environment control data includes a control designation value for the peripheral device, and producer preference information indicating an error permission range for the control designation value.