1. An antenna coil comprising:
a flat magnetic core;
a flexible substrate wound around the magnetic core and including a conductor on a surface of the flexible substrate;
a first coil portion defined by the conductor and having a coil axis parallel or substantially parallel with a main surface of the magnetic core;
a second coil portion defined by the conductor and having a coil axis parallel or substantially parallel with the main surface of the magnetic core, the second coil portion being connected to the first coil portion;
a first coil connection defined by the conductor and defining a portion of the first coil portion; and
a second coil connection defined by the conductor and defining a portion of the second coil portion; wherein
the flexible substrate includes a conductor-free portion where the conductor is not formed, the conductor-free portion being disposed between the first coil portion and the second coil portion; and
the first coil connection and the second coil connection are arranged to be connected to a wiring pattern on an external circuit board so as to selectively connect the first coil portion to the second coil portion in series or in parallel.
2. The antenna coil according to claim 1, wherein the first coil portion includes a first coil and a third coil, and the second coil portion includes a second coil connected to the first coil and a fourth coil connected to the third coil.
3. The antenna coil according to claim 2, wherein a connecting conductor that connects inner ends of the first and second coils or inner ends of the third and fourth coils is defined by the conductor.
4. The antenna coil according to claim 2, wherein the first coil and the third coil are alternately arranged in the first coil portion, and the second coil and the fourth coil are alternately arranged in the second coil portion.
5. The antenna coil according to claim 1, wherein the flexible substrate includes a projection, wherein each of the first and second coil connections is located at the projection.
6. The antenna coil according to claim 1, wherein the magnetic core includes a first core piece and a second core piece, and the first coil portion is arranged around the first core piece, and the second coil portion is arranged around the second core piece.
7. The antenna coil according to claim 1, wherein the magnetic core is bent at an end thereof in a direction in which the first coil portion and the second coil portion are aligned.
8. An antenna device comprising:
a board;
an antenna coil according to claim 1 mounted to the board; and
a circuit board having a wiring pattern to be connected to each of the coil connection of the first coil portion and the coil connection of the second coil portion; wherein
the antenna device is arranged such that the antenna coil is mounted to the circuit board in such a way that a main surface of the antenna coil and a main surface of the circuit board are parallel or substantially parallel with each other.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A ceramic sprayed member comprising a substrate and a ceramic sprayed coating thereon having a surface from which splats have been removed.
2. The ceramic sprayed member of claim 1 wherein the ceramic is selected from the group consisting of alumina, YAG, zirconia, yttrium oxide, scandium oxide, lanthanoid oxides, yttrium fluoride, scandium fluoride, lanthanoid fluorides, and composite compounds comprising at least one of the foregoing.
3. The ceramic sprayed member of claim 1 which is disposed within a plasma processing apparatus.
4. A method for preparing a ceramic sprayed member, comprising spraying a ceramic material onto a substrate to form a sprayed coating, and removing splats from a surface of the sprayed coating.
5. The method of claim 4 wherein the ceramic material is selected from the group consisting of alumina, YAG, zirconia, yttrium oxide, scandium oxide, lanthanoid oxides, yttrium fluoride, scandium fluoride, lanthanoid fluorides, and composite compounds comprising at least one of the foregoing.
6. The method of claim 4 wherein the step of removing splats includes blasting a medium having an abrasive embedded in a rubber or resin matrix to the surface of the sprayed coating.
7. The method of claim 6 wherein the abrasive is selected from the group consisting of alumina, silicon carbide, silica, ceria and diamond.
8. The method of claim 6 wherein the step of removing splats further includes washing the blasted surface of the sprayed coating, the washing step being selected from the group consisting of jet water washing, chemical liquid washing, deionized water ultrasonic washing, dry ice washing, and a combination thereof.
9. The method of claim 4 wherein the substrate subject to ceramic spraying is a member to be disposed within a plasma processing apparatus.
10. An abrasive medium for use with ceramic sprayed members, comprising an abrasive embedded in a rubber or resin matrix, the abrasive being selected from the group consisting of alumina, silicon carbide, silica, ceria and diamond.