1. An organic light-emitting display apparatus comprising:
a substrate having an active area and a dead area;
a plurality of thin film transistors in the active area of the substrate;
a plurality of pixel electrodes in the active area of the substrate and electrically connected to corresponding ones of the plurality of thin film transistors;
an opposing electrode in the active area and the dead area of the substrate corresponding at least to the plurality of pixel electrodes;
an electrode power supply line in the dead area of the substrate and having a surface contacting the opposing electrode to supply power to the opposing electrode; and
a test line in the dead area of the substrate, the test line separated from the electrode power supply line and contacting the opposing electrode.
2. The organic light-emitting display apparatus of claim 1, wherein the electrode power supply line is on a same layer as one of sourcedrain electrodes or a gate electrode of each of the plurality of thin film transistors.
3. The organic light-emitting display apparatus of claim 2, wherein the electrode power supply line has a same layer structure and comprises same material as the one of the sourcedrain electrodes or the gate electrode of each of the plurality of thin film transistors.
4. The organic light-emitting display apparatus of claim 1, wherein the test line is on a same layer as one of sourcedrain electrodes or a gate electrode of each of the plurality of thin film transistors.
5. The organic light-emitting display apparatus of claim 4, wherein the test line has a same layer structure and comprises a same material as the one of the sourcedrain electrodes or the gate electrode of each of the plurality of thin film transistors.
6. The organic light-emitting display apparatus of claim 1, wherein the electrode power supply line is on a same layer as one of sourcedrain electrodes or a gate electrode of each of the plurality of thin film transistors, and the test line is on a same layer as the other one of the sourcedrain electrodes or the gate electrode of each of the plurality of thin film transistors.
7. The organic light-emitting display apparatus of claim 1, further comprising:
an interlayer insulating film interposed between sourcedrain electrodes and a gate electrode of each of the plurality of thin film transistors and arranged over the active area and the dead area of the substrate; and
an external interlayer insulating film in the dead area of the substrate to be separated from the interlayer insulating film and comprising a same material and a same layer structure as the interlayer insulating film,
wherein the electrode power supply line is positioned closer to the active area of the substrate and corresponding to a space between the interlayer insulating film and the external interlayer insulating film, and the test line is positioned farther away from the active area of the substrate and corresponding to the space between the interlayer insulating film and the external interlayer insulating film.
8. The organic light-emitting display apparatus of claim 7, wherein the opposing electrode contacts an end surface of the interlayer insulating film facing the external interlayer insulating film, and wherein the opposing electrode contacts an end surface of the external interlayer insulating film facing the interlayer insulating film.
9. An organic light-emitting display apparatus comprising:
a substrate having an active area and a dead area;
a plurality of thin film transistors in the active area of the substrate;
a plurality of pixel electrodes in the active area of the substrate and electrically connected to corresponding ones of the plurality of thin film transistors;
an opposing electrode in the active area and the dead area of the substrate corresponding at least to the plurality of pixel electrodes;
a connection portion in the dead area of the substrate and having a surface contacting the opposing electrode;
an electrode power supply line contacting the connection portion and configured to supply power to the opposing electrode via the connection portion; and
a test line in the dead area of the substrate, the test line separated from the electrode power supply line and the connection portion and contacting the opposing electrode.
10. The organic light-emitting display apparatus of claim 9, wherein the electrode power supply line is on a same layer as a gate electrode of each of the plurality of thin film transistors.
11. The organic light-emitting display apparatus of claim 10, wherein the electrode power supply line has a same layer structure and comprises a same material as the gate electrode of each of the plurality of thin film transistors.
12. The organic light-emitting display apparatus of claim 10, wherein the connection portion and the test line are on a same layer as sourcedrain electrodes of each of the plurality of thin film transistors.
13. The organic light-emitting display apparatus of claim 12, wherein the connection portion and the test line have a same layer structure and comprise a same material as the sourcedrain electrodes of each of the plurality of thin film transistors.
14. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
preparing a substrate having an active area and a dead area;
forming a plurality of thin film transistors in the active area of the substrate, an electrode power supply line in the dead area of the substrate and having a first test terminal, and a test line in the dead area of the substrate separated from the electrode power supply line and having a second test terminal;
forming a plurality of pixel electrodes in the active area of the substrate to be electrically connected to corresponding ones of the plurality of thin film transistors; and
forming an opposing electrode in the active area and the dead area of the substrate corresponding at least to the plurality of pixel electrodes and having a surface contacting the electrode power supply line and contacting the test line.
15. The method of claim 14, wherein, the electrode power supply line has a same layer structure and comprises a same material as one of sourcedrain electrodes or a gate electrode of each of the plurality of thin film transistors, the electrode being formed on the same layer as the electrode power supply line, and the test line has a same layer structure and comprises a same material as the other one of the sourcedrain electrodes or the gate electrode of each of the plurality of thin film transistors, the other electrode being formed on the same layer as the test line.
16. The method of claim 14, wherein, one of sourcedrain electrodes or a gate electrode of each of the thin film transistors, the electrode power supply line, and the test line are formed on a same layer, have a same layer structure, and comprise a same material.
17. The method of claim 14, further comprising connecting a constant current source to the first test terminal and the second test terminal, and measuring a first voltage of the first test terminal and a second voltage of the second test terminal, to measure a contact resistance between the electrode power supply line and the opposing electrode.
18. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
preparing a substrate having an active area and a dead area;
forming a plurality of thin film transistors in the active area of the substrate, an electrode power supply line in the dead area of the substrate and having a first test terminal, a connection portion contacting the electrode power supply line, and a test line in the dead area of the substrate separated from the electrode power supply line and the connection portion and having a second test terminal;
forming a plurality of pixel electrodes in the active area of the substrate to be electrically connected to corresponding ones of the plurality of thin film transistors; and
forming an opposing electrode in the active area and the dead area of the substrate corresponding at least to the plurality of pixel electrodes and having a surface contacting the connection portion and contacting the test line.
19. The method of claim 18, wherein a gate electrode of each of the plurality of thin film transistors and the electrode power supply line are formed on a same layer, have a same layer structure, and comprise a same material, while sourcedrain electrodes of each of the plurality of thin film transistors and the connection portion are formed on a same layer, have a same layer structure, and comprise a same material, and wherein the test line is formed on the same layer, has the same layer structure, and comprises the same material as one of the electrode power supply line or the connection portion.
20. The method of claim 18, further comprising connecting a constant current source to the first test terminal and the second test terminal, and measuring a first voltage of the first test terminal and a second voltage of the second test terminal, to measure a contact resistance between the connection portion and the opposing electrode.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A liquid processing apparatus comprising:
at least one processing unit configured to perform a liquid process by supplying a chemical liquid to a substrate;
a reservoir configured to store the chemical liquid;
a supply line configured to supply the collected chemical liquid to the at least one processing unit;
a collecting line configured to collect the chemical liquid supplied to the at least one processing unit to return the chemical liquid back to the reservoir; and
a gas supply unit configured to supply an inert gas into the collecting line,
wherein the gas supply unit includes a gas supply pipe connected with the collecting line, and the inert gas is supplied to the chemical liquid in the collecting line thereby reducing an amount of oxygen to be dissolved in the chemical liquid in the collecting line, such that corrosion of wirings formed on the substrate by recirculated chemical liquid is suppressed.
2. The liquid processing apparatus of claim 1, further comprising:
a switching valve provided at a portion of the collecting line and configured to selectively connect the collecting line and a liquid drain line configured to drain a waste liquid to an outside,
wherein the gas supply unit is provided at a more downstream side of the collecting line than the switching valve.
3. The liquid processing apparatus of claim 1,
wherein an upstream end portion of the supply line and a downstream end portion of the collecting line are connect to the reservoir.
4. The liquid processing apparatus of claim 3,
wherein the reservoir comprises:
a main body having a ceiling; and
a partition plate configured to partition a space between the chemical liquid stored in the main body and the ceiling.
5. The liquid processing apparatus of claim 4,
wherein the downstream end portion of the collecting line communicates with a first space of the space partitioned by the partition plate, and
the upstream end portion of the supply line communicates with the chemical liquid under a second space of the space partitioned by the partition plate.
6. The liquid processing apparatus of claim 5,
wherein a downstream end portion of the supply line is connected to the reservoir, and
the downstream end portion of the supply line is provided within the chemical liquid under the first space.
7. The liquid processing apparatus of claim 4,
wherein the reservoir comprises:
a first exhaust opening that communicates with the first space of the space partitioned by the partition plate; and
a second exhaust opening that communicates with the second space of the space partitioned by the partition plate.
8. The liquid processing apparatus of claim 1, further comprising:
a degassing unit configured to remove oxygen dissolved in the chemical liquid by supplying an inert gas into the chemical liquid within the supply line.
9. The liquid processing apparatus of claim 8, further comprising:
a constant pressure valve that is provided at a more downstream side of the supply line than the at least one processing unit and configured to constantly maintain an internal pressure of the supply line,
wherein the degassing unit is provided at a more downstream side of the supply line than the constant pressure valve.
10. The liquid processing apparatus of claim 2,
wherein the at least one processing unit is plural in number, and
the collecting line comprises:
multiple branch lines that are branched and connected to the processing units, respectively; and
a main line that is connected to the branch lines, and
the gas supply unit is provided at a more downstream of the main line than the switching valve provided at a branch line connected at the most upstream side of the main line.
11. The liquid processing apparatus of claim 10,
wherein the gas supply unit is provided at the main line between the switching valve provided at the branch line connected at the most upstream side of the main line and a switching valve provided at a branch line connected at a downstream side next to the branch line.
12. The liquid processing apparatus of claim 1,
wherein the gas supply unit supplies the inert gas from multiple positions along a flow direction of the collecting line.
13. The liquid processing apparatus of claim 1,
wherein the gas supply unit supplies the inert gas into the collecting line via the chemical liquid.