1. A polymer comprising recurring units of the general formula (1-1) or (1-2) and having a weight average molecular weight of 1,000 to 500,000,
40
wherein R1 to R3each are hydrogen, fluorine or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 40 carbon atoms, R4 is a single bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 40 carbon atoms, R5 is a single bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 40 carbon atoms, R6 is a single bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 40 carbon atoms, R7 is hydrogen or an acid labile group, R8 is a straight, branched or cyclic fluorinated alkyl group of 1 to 40 carbon atoms, the subscript a is 1 or 2, b is an integer of 0 to 4, and c is an integer of 0 to 4, satisfying 1abc4.
2. The polymer of claim 1 comprising recurring units of at least one type selected from the following formulae (1a) to (1d):
41
wherein R7 is as defined above, R9 to R24 each are hydrogen, fluorine or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 4 carbon atoms, and at least either one of R9 and R10, at least either one of R11 and R12, at least either one of R13 and R14, at least either one of R15 and R16, at least either one of R17 and R18, at least either one of R19 and R20, at least either one of R21 and R22, and at least either one of R23 and R24 respectively contain at least one fluorine atom.
3. The polymer of claim 1, further comprising recurring units of the following general formula (2):
42
wherein R25 is a methylene group, oxygen atom or sulfur atom, R26 to R29 each are hydrogen, fluorine, R30OR31, R30CO2R31 or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 40 carbon atoms, at least one of R26 to R29 contains R30OR31 or R30CO2R31, R30 is a single bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 40 carbon atoms, R31 is hydrogen, an acid labile group, an adhesive group or a straight, branched or cyclic fluorinated alkyl group of 1 to 40 carbon atoms which may contain a hydrophilic group such as hydroxyl, and d is 0 or 1.
4. The polymer of claim 3 wherein the recurring units of formula (2) have a structure represented by the following formula (2a) or (2b):
43
wherein R31 is as defined above, R32 to R35 each are hydrogen, fluorine or an alkyl or fluorinated alkyl group of 1 to 4 carbon atoms, at least either one of R32 and R33 and at least either one of R34 and R35 contain at least one fluorine atom.
5. The polymer of claim 1, further comprising recurring units of the following general formula (3):
44
wherein R36 to R38 each are hydrogen, fluorine or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 40 carbon atoms, R39 is a single bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 40 carbon atoms, R40 is hydrogen or an acid labile group, R41 is fluorine or a straight, branched or cyclic fluorinated alkyl group of 1 to 40 carbon atoms, e is 1 or 2, and f is an integer of 0 to 4, satisfying 1ef5.
6. The polymer of claim 5 wherein the recurring units of formula (3) have the following formula (3a) or (3b):
45
wherein R40 is as defined above, R42 to R47 each are hydrogen, fluorine or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 4 carbon atoms, at least either one of R42 and R43, at least either one of R44 and R45 and at least either one of R46 and R47 contain at least one fluorine atom.
7. The polymer of claim 1, further comprising recurring units of the following general formula (4):
46
wherein R48 to R50 each are hydrogen, fluorine or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 40 carbon atoms, and R51 is hydrogen, an acid labile group, an adhesive group or a straight, branched or cyclic fluorinated alkyl group of 1 to 40 carbon atoms which may contain a hydrophilic group such as hydroxyl.
8. The polymer of claim 7 wherein R51 is trifluoromethyl.
9. A resist composition comprising the polymer of claim 1.
10. A chemically amplified positive resist composition comprising
(A) the polymer of claim 1,
(B) an organic solvent, and
(C) a photoacid generator.
11. The resist composition of claim 10, further comprising (D) a basic compound.
12. The resist composition of claim 10, further comprising (E) a dissolution inhibitor.
13. A process for forming a resist pattern comprising the steps of:
applying the resist composition of claim 10 onto a substrate to form a coating,
heat treating the coating and then exposing it to high-energy radiation in a wavelength band of 100 to 180 nm or 1 to 30 nm through a photomask, and
optionally heat treating the exposed coating and developing it with a developer.
14. The pattern forming process of claim 13 wherein the high-energy radiation is an F2 laser beam, Ar2 laser beam or soft x-ray.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An image search apparatus capable of communicating with an image scanning apparatus, said image search apparatus comprising:
a storage portion capable of storing a plurality of registration images;
a common area extraction portion to compare the plurality of registration images stored in said storage portion, to detect an identical or similar image among the plurality of registration images, and to extract a common area including said image detected among the plurality of registration images;
a search area determination portion to determine a non-common area among the plurality of registration images excluding said common area, as a search area;
a search area information transmission portion to transmit search area information indicating a location of said search area in an image to said image scanning apparatus;
a comparison portion to compare a partial image being an image positioned in the location indicated by said search area information of a document image received from said image scanning apparatus with a reference image being an image positioned in said search area of each of the plurality of registration images stored in said storage portion;
a transmission request portion to request transmission of the document image if, as a result of comparison by said comparison portion, a registration image in which said reference image is identical or similar to said partial image does not exist in said plurality of registration images; and
a registration portion to, in response to a request by said transmission request portion, store the document image received from said image scanning apparatus as a registration image into said storage portion.
2. The image search apparatus according to claim 1, wherein said common area extraction portion extracts, as a common area, an area having a prescribed feature element common among the plurality of registration images.
3. The image search apparatus according to claim 1, further comprising a search result transmission portion to, if, as a result of comparison by said comparison portion, a registration image in which said partial image is identical or similar to said reference image exists in said plurality of registration images, transmit the registration image to said image scanning apparatus.
4. An image search system including an image search apparatus and an image scanning apparatus,
said image search apparatus comprising:
a storage portion capable of storing a plurality of registration images;
a common area extraction portion to compare the plurality of registration images stored in said storage portion, to detect an identical or similar image among the plurality of registration images, and to extract a common area including said image detected among the plurality of registration images;
a search area determination portion to determine a non-common area among the plurality of registration images excluding said common area, as a search area;
a search area information transmission portion to transmit search area information indicating a location of said search area in an image to said image scanning apparatus;
a comparison portion to compare a partial image being an image positioned in the location indicated by said search area information of a document image received from said image scanning apparatus with a reference image being an image positioned in said search area of each of the plurality of registration images stored in said storage portion;
a transmission request portion to request transmission of the document image if, as a result of comparison by said comparison portion, a registration image in which said reference image is identical or similar to said partial image does not exist in said plurality of registration images; and
a registration portion to, in response to a request by said transmission request portion, store the document image received from said image scanning apparatus as a registration image into said storage portion,
said image scanning apparatus comprising:
a document scanning portion to output a document image obtained by scanning a document;
a partial image transmission portion to transmit a partial image obtained by cutting out a search area part defined by search area information received from said image search apparatus, from said output document image; and
a document image transmission portion to transmit said document image to said image search apparatus if a transmission request is received from said image search apparatus in response to transmission of said partial image.
5. The image search system according to claim 4, wherein said common area extraction portion extracts, as a common area, an area having a prescribed feature element common among the plurality of registration images.
6. The image search system according to claim 4, further comprising a search result transmission portion to, if, as a result of comparison by said comparison portion, a registration image in which said partial image is identical or similar to said reference image exists in said plurality of registration images, transmit the registration image to said image scanning apparatus.
7. A database creation method executed in an image search apparatus capable of communicating with an image scanning apparatus,
said image search apparatus including a storage portion capable of storing a plurality of registration images,
said database creation method comprising the steps of:
comparing the plurality of registration images stored in said storage portion, detecting an identical or similar image among the plurality of registration images, and extracting a common area including said image detected among the plurality of registration images;
determining a non-common area among the plurality of registration images excluding said common area, as a search area;
transmitting search area information indicating a location of said search area in an image to said image scanning apparatus in response to a request from said image scanning apparatus;
comparing a partial image being an image positioned in the location indicated by said search area information of a document image received from said image scanning apparatus with a reference image being an image positioned in said search area of each of the plurality of registration images stored in said storage portion;
requesting transmission of the document image from said image scanning apparatus if as a result of comparison in said step of comparing, a registration image in which said reference image is identical or similar to said partial image does not exist in said plurality of registration images; and
storing the document image received from said image scanning apparatus as a registration image into said storage portion in response to a request in said step of requesting transmission.
8. The database creation method according to claim 7, wherein said step of extracting a common area includes the step of extracting, as a common area, an area having a prescribed feature element common among the plurality of registration images.
9. The database creation method according to claim 7, further comprising the step of, if, as a result of comparison in said step of comparing, a registration image in which said partial image is identical or similar to said reference image exists in said plurality of registration images, transmitting the registration image to said image scanning apparatus.
10. A non-transitory computer-readable recording medium encoded with a database creation program performed by a computer, said computer being configured to control an image search apparatus capable of communicating with an image scanning apparatus, said image search apparatus including a storage portion capable of storing a plurality of registration images, said program causing said computer to execute processing comprising the steps of:
comparing the plurality of registration images stored in said storage portion, detecting an identical or similar image among the plurality of registration images, and extracting a common area including said image detected among the plurality of registration images;
determining a non-common area among the plurality of registration images excluding said common area, as a search area;
transmitting search area information indicating a location of said search area in an image to said image scanning apparatus in response to a request from said image scanning apparatus;
comparing a partial image being an image positioned in the location indicated by said search area information of a document image received from said image scanning apparatus with a reference image being an image positioned in said search area of each of the plurality of registration images stored in said storage portion;
requesting transmission of the document image from said image scanning apparatus if, as a result of comparison in said step of comparing, a registration image in which said reference image is identical or similar to said partial image does not exist in said plurality of registration images; and
storing the document image received from said image scanning apparatus as a registration image into said storage portion in response to a request in said step of requesting transmission.
11. The non-transitory computer-readable recording medium encoded with a database creation program according to claim 10, wherein said step of extracting a common area includes the step of extracting, as a common area, an area having a prescribed feature element common among the plurality of registration images.
12. The non-transitory computer-readable recording medium encoded with a database creation program according to claim 10, said program further comprising the step of, if, as a result of comparison in said step of comparing, a registration image in which said partial image is identical or similar to said reference image exists in said plurality of registration images, transmitting the registration image to said image scanning apparatus.