1. An image mask assembly, the image mask assembly comprising:
a. a transparent backer plate;
b. a glass substrate coupled to the backer plate by at least one spacer, wherein the transparent backer plate, the glass substrate, and the at least one spacer define a cavity therein; and
c. a patterned mask disposed on a surface of the glass substrate distal from the transparent backer plate.
2. The image mask assembly according to claim 1, wherein the backer plate is a fused silica backer plate.
3. The image mask assembly according to claim 1, wherein the backer plate has a transmission of at least 80%cm.
4. The image mask assembly according to claim 1, wherein the backer plate has a coefficient of thermal expansion of less than about 95\xd710\u22127 cmcm\xb7\xb0 C.
5. The image mask assembly according to claim 1, wherein the glass substrate is formed from a meltable glass.
6. The image mask assembly according to claim 1, wherein the glass substrate has a thickness of up to about 2 mm.
7. The image mask assembly according to claim 1, wherein the glass substrate is rectangular in shape and has a diagonal of at least 300 mm.
8. The image mask assembly according to claim 1, wherein the surface of the glass substrate on which the patterned mask is disposed has a roughness of up to about 5 \u212b Ra.
9. The image mask assembly according to claim 8, wherein the surface of the glass substrate on which the patterned mask is disposed is unpolished.
10. The image mask assembly according to claim 1, wherein the at least one spacer comprises a pressure seal.
11. The image mask according to claim 10, wherein the image mask assembly has a focal plane that is changeable by adjusting a pressure of a fluid within the cavity.
12. The image mask assembly according to claim 1, further including at least one of a polymer film and a liquid disposed in the cavity between at least a portion of the transparent backer plate and the glass substrate.
13. The image mask assembly according to claim 1, wherein the at least one spacer comprises a glass frit joining the glass substrate to the transparent backer plate.
14. The image mask assembly according to claim 1, wherein the patterned mask is patterned to write at least one feature on a mother glass.
15. The image mask assembly according to claim 1, wherein the glass substrate is formed from fused silica.
16. A method of writing a pattern on a glass sheet, the glass sheet having a thickness of less than about 2 mm, the method comprising the steps of:
a. providing the glass sheet, the glass sheet having a surface onto which a photoresist layer is deposited;
b. providing a radiation source;
c. providing an image mask assembly, the image mask assembly comprising a transparent backer plate, a glass substrate having a thickness of up to 2 mm and coupled to the backer plate by at least one spacer, wherein the transparent backer plate, the glass substrate, and the at least one spacer define a cavity therein and a patterned mask deposited on a surface of the glass substrate, wherein the image mask assembly is disposed between the radiation source and the glass sheet such that the image mask and photoresist layer face each other; and
d. irradiating a portion of the photoresist through the image mask to write a pattern on the photoresist.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A laser build up method on a surface of an object, comprising:
providing powder on or near the object;
providing the powder only locally on the upper outer surface of the object; and
densifying the powder.
2. The method according to claim 1, wherein the powder is only locally densified.
3. The method according to claim 1, further comprising putting the object into a powder bed.
4. The method according to claim 1, wherein the object is put directly or indirectly into vibration.
5. The method according to claim 1, wherein a powder supply is used to provide powder on the object.
6. The method according to claim 1,
wherein the object includes several surfaces with different heights on one side of the object,
wherein the object comprises non-planar upper surfaces, and
wherein only the lower surface of the object is built up.
7. The method according to claim 1, wherein the object is only locally densified.
8. The method according to claim 1, wherein a laser is used to densify the powder.
9. The method according to claim 9, wherein the laser is used to melt the powder.
10. The method according to claim 1, wherein a tool is moved over a powder layer to machine the powder layer.
11. The method according to claim 10, wherein the tool is moved over the powder layer to get a uniform thickness of the powder layer.
12. A laser build up method on a surface of an object, comprising:
providing powder on or near the object;
putting the object directly or indirectly into vibration, so that powder is filled on the surface of the object; and
densifying the powder.
13. The method as claimed in claim 12, further comprising putting the object into a powder bed.
14. The method as claimed in claim 12, wherein the powder is only locally densified.
15. The method according to claim 12, wherein a powder supply is used to provide powder on the object.
16. The method according to claim 12,
wherein the object includes several surfaces with different heights on one side of the object,
wherein the object comprises non-planar upper surfaces, and
wherein only the lower surface of the object is built up.
17. The method according to claim 12, wherein the object is only locally densified.
18. The method according to claim 17, wherein a laser is used to melt the powder.
19. The method according to claim 12, wherein a tool is moved over a powder layer to machine the powder layer in order to get a uniform thickness of the powder layer.
20. An apparatus used for a laser build up method on an object, comprising:
a powder supplier or a container for a powder bed;
a laser; and
means for vibrating the object.