1. Photoresist composition suitable for use at 10-165 nm comprising:
(a) a polymeric binder
(b) a photoactive compound
(c) a dissolution inhibitor, the dissolution inhibitor comprising at least
(i) two aromatic groups,
(ii) fluorine and
(iii) a blocked acid group which when unblocked has a pKa<12.
2. Photoresist composition according to claim 1 wherein the photoresist composition generally will contain:
(a) about 50 to about 99.5 wt % polymeric binder
(b) about 0 to about 10 wt % photoactive compound
(c) about 0.5 to about 50 wt % dissolution inhibitor relative to the total (a)+(b)+(c).
3. Photoresist composition according to claim 1 wherein the composition has an absorption coefficient of less than about 3 \u03bcm\u22121.
4. Photoresist composition according to claim 1 wherein the dissolution inhibitor, when used at 10 wt % in a polymeric binder adds about 0.8 \u03bcm\u22121 or less to the absorbance coefficient of the composition.
5. Photoresist composition according to claim 1 wherein the dissolution inhibitor has 2-5 aromatic atoms.
6. Photoresist according to claim 1 wherein the dissolution inhibitor has 2 or more fluorine atoms.
7. Photoresist according to claim 1 wherein the acid group is an hydroxyl group bound to an aromatic group, or a C(CF3)2OH bound to an aromatic ring.
8. Photoresist according to claim 1 wherein the acid group is at least partly blocked with a carbonate, acetal group, ortho ester, or tertiary alkyl group.
9. Photoresist according to claim 1 wherein the dissolution inhibitor comprises a bisphenol structure.
10. Compounds represented by formula 1.
in which n=1-4
at least on of R1\u2014R10 independently comprise a (blocked) acid group, the group when unblocked has a pKa<12,
the other R1\u2014R10 represent independently hydrogen, fluorine or hydrocarbonaceous substituents,
R11 is an aliphatic fluorinated group,
R12 represents hydrogen or an aliphatic group having 1-10 carbon atoms and 0-13 fluorine atoms,
and R11 and R12 are not both CF3.
11. Compound according to claim 10 wherein R11 preferably is a C2-C10 group, having 2-20 fluorine atoms.
12. Compound according to claim 10 wherein one of {R1\u2014R3, R9, R10} and one of R4\u2014R8, independently, are preferably hydroxy or C(CF3)2OH, any of these optionally protected with an acid labile protecting group.
13. Compound according to claim 10 wherein the other R1-R10 independently, are hydrogen.
14. Compound according to claim 10 wherein R12 preferably is hydrogen.
15. Process for forming an etched layer in a chip comprises, in order:
(A) forming a photoresist layer on a substrate wherein the photoresist layer is prepared from a photoresist composition comprising:
(a) a binder;
(b) a photoactive component; and
(c) the at least one dissolution inhibitor, the dissolution inhibitor comprising at least (i) two aromatic groups (ii) fluorine, and (iii) a (blocked) acid group which when unblocked has a pKa<12
(B) imagewise exposing a photoresist layer to form imaged and non-imaged areas,
(C) developing the exposed photoresist layer having imaged and non-imaged areas to form the relief image on the substrate
(D) etching the substrate to a predetermined depth
(E) removing the relief image from the substrate.
16. A process for the production of a chip by using immersion lithography, comprising the step of forming a photoresist layer on a substrate, wherein the photoresist layer is prepared from a photoresist composition comprising:
(a) a binder;
(b) a photoactive component;
(c) a fluor containing compound.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An attachable handle for a wire rope including a collar, comprising:
a wire rope attachment portion comprising a generally cylindrical duct passing through the wire rope attachment portion, the duct comprising a first end and a second end, the first end is comprised of a
first diameter larger than a diameter of a wire rope and the diameter of a collar being disposed around a length of the wire rope to permit passage of the length of wire rope through the first end of the duct, the collar diameter is greater than the wire rope diameter; and
the second end opposite the first end, the second end is comprising a second diameter larger than the wire rope diameter but smaller than the collar diameter to permit passage of the wire rope through the second end and to prevent passage of the length of wire rope containing the collar through the second end;
a slot running along at least a portion of a length of the duct, the slot is comprised of a width larger than the wire rope diameter but less than the collar diameter; and
a handle portion extending from the wire rope attachment portion,
wherein the wire rope attachment portion and the slot are configured to adjustably receive the wire rope.
2. The attachable handle of claim 1, wherein the slot extends along an entire length of the duct from the first end to the second end to allow insertion of the wire rope into the duct through the slot while preventing passage of the length of wire rope containing the collar through the slot.
3. The attachable handle of claim 1, wherein a substantially concentric alignment exists between the duct and the wire rope when the attachable handle is attached to the wire rope.
4. The attachable handle of claim 1, wherein the handle portion extends from a side of the wire rope attachment portion comprising the first end of the duct.
5. The attachable handle of claim 1, wherein the handle portion further comprises a loop.
6. The attachable handle of claim 1, wherein the slot running along at least a portion of the duct comprises a first slot, and
wherein the wire rope attachment portion further comprises a second slot running along at least a portion of the length of the duct opposite the first slot, the second slot comprises a width larger than the diameter of the collar.
7. The attachable handle of claim 6, wherein the first slot extends from the second end of the duct along the portion of the length of the duct, and
wherein the second slot extends from the first end of the duct along a portion of the length of the duct.
8. The attachable handle of claim 6, wherein the first slot comprises an enlarged area disposed between the first end and the second end of the duct, the first slot includes a size sufficient to accommodate passage of the collar.
9. The attachable handle of claim 6, wherein the first slot comprises an enlarged area disposed between the first end and the second end of the duct, and
wherein the enlarged area comprises a circle including a diameter larger than the collar diameter.
10. The attachable handle of claim 1, wherein the attachable handle is comprised of a metal material.
11. An attachable handle for a wire rope including a collar, comprising:
a wire rope attachment portion comprising a duct passing through the wire rope attachment portion, the duct comprising a first end and a second end, the first end is comprised of a
first diameter larger than a diameter of the wire rope and a diameter of the collar disposed around a length of the wire rope to permit passage of the length of wire rope through the first end of the duct, the collar diameter is greater than the wire rope diameter; and
the second end opposite the first end, the second end is comprised of a second diameter larger than the wire rope diameter but smaller than the collar diameter, the second end permits passage of the wire rope through the second end and prevents passage of the length of wire rope containing the collar through the second end;
a first slot running along at least a portion of a length of the duct, the slot is comprised of a width larger than the wire rope diameter but less than the collar diameter;
a second slot running along at least a portion of the length of the duct opposite the first slot, the second slot is comprised of a width larger than the collar diameter; and
a handle portion extending from the wire rope attachment portion,
wherein the duct is a generally cylindrical shaped duct.
12. The attachable handle of claim 11, wherein the wire rope attachment portion and the handle portion comprise a unitary structure.
13. The attachable handle of claim 11, wherein the handle portion further comprises a loop.
14. The attachable handle of claim 11, wherein the first slot extends from the second end of the duct along the portion of the length of the duct and the second slot extends from the first end of the duct along a portion of the length of the duct.
15. The attachable handle of claim 11, wherein the first slot comprises an enlarged area disposed between the first end and the second end of the duct, the first slot includes a size sufficient to accommodate passage of the collar.
16. The attachable handle of claim 15, wherein the enlarged area comprises a circle including a diameter larger then the collar diameter.
17. The attachable handle of claim 11, wherein the first slot and the second slot are substantially parallel to each other.
18. The attachable handle of claim 11, wherein a substantially concentric alignment exists between the duct and the wire rope when the attachable handle is attached to the wire rope.
19. The attachable handle of claim 11, wherein the handle portion extends from a side of the wire rope attachment portion at the first end.
20. An attachable latch for a rope, comprising:
a rope attachment portion comprising a duct passing through the attachment portion,
the duct is comprised of a first end and a second end, the first end is comprised of a first diameter larger than a diameter of the rope and a diameter of a collar disposed around a length of the rope, where the first end permits passage of the length of the rope through the first end of the duct and the collar diameter is greater than the rope diameter; and
the second end is opposite the first end where the second end comprises a second diameter larger than the rope diameter but smaller than the collar diameter;
at least one slot running along at least a portion of a length of the duct, said at least one slot is comprised of a width larger than the diameter of the rope but less than the collar diameter; and
a handle portion extending from the rope attachment portion,
wherein the rope attachment portion and said at least one slot are configured to adjustably receive the rope.