1. A plasma processing apparatus comprising:
a processing chamber in which a target substrate is processed;
an application electrode;
a facing electrode positioned to face the application electrode in the processing chamber, a plasma generation space being formed between the application electrode and the facing electrode;
an RF power supply connected to the application electrode, an RF power being supplied from the RF power supply to the application electrode; and
wherein at least one of the application electrode and the facing electrode includes a base formed of a metal, a dielectric body inserted into the base, and a plurality of metal plate electrodes buried in the dielectric body,
wherein each of the metal plate electrodes are arranged on top of one another while being spaced from each other in the dielectric body,
wherein each of the metal plate electrodes have different-sized concentric openings with regard to a central portion of the dielectric body,
wherein a size of the concentric openings decreases in accordance with a distance of a respective metal plate electrode from the plasma generation space such that a concentric opening of a first metal plate electrode from the plurality of metal plate electrodes that is closer to the plasma generation space is larger than an opening of a second metal plate electrode from the plurality of metal plate electrodes located further away from the plasma generation space than the first metal plate electrode, and
wherein electric field intensity distribution of the RF power is controlled by controlling potentials of each of the metal plate electrodes.
2. The apparatus of claim 1, wherein each of the metal plate electrodes are formed of a same metal.
3. The apparatus of claim 1, wherein each of the metal plate electrodes have a sheet resistivity of about 2\u03a9\u25a1 or less.
4. The apparatus of claim 1, wherein at least a part of a surface of the dielectric body is exposed to the plasma generation space.
5. The apparatus of claim 1, wherein a surface of the dielectric body facing the plasma generation space is coated with a thermally sprayed layer.
6. The apparatus of claim 1, further comprising:
a plurality of gas introduction lines,
wherein an upper one of the application electrode and the facing electrode includes the dielectric body in which each of the metal plate electrodes are buried, and the gas introduction lines are extended through the upper electrode.
7. The apparatus of claim 6, wherein a gas diffusion portion is provided above the dielectric body of the upper electrode, the gas diffusion portion communicating with the gas introduction lines and serving to diffuse a gas.
8. The apparatus of claim 1, wherein a lower one of the application electrode and the facing electrode includes an electrostatic chuck mechanism in which a metal sheet member is provided, and the dielectric body in which each of the metal plate electrodes are buried, wherein each of the metal plate electrodes are located below the metal sheet member of the electrostatic chuck.
9. The apparatus of claim 1, wherein the dielectric body has a cylindrical shape.
10. The apparatus of claim 1, further comprising: a driving mechanism including a driving unit having a ground potential,
wherein the driving mechanism is configured to control a physical or electric connection between the driving unit and each of the metal plate electrodes by moving the driving unit to change a position of the driving unit relative to each of the metal plate electrodes such that the potentials of each of the metal plate electrodes are selectively controlled to the ground potential, and
wherein when the potentials are controlled to the ground potential, a capacitance component at a peripheral portion of the dielectric body becomes larger than that at a central portion of the dielectric body, thereby obtaining a uniform electric field intensity distribution without significantly lowering an electric field intensity at the peripheral portion of the dielectric body.
11. The apparatus of claim 10, wherein the driving unit includes a ring electrode, and the driving mechanism controls a physical or electric connection between the ring electrode and each of the metal plate electrodes by driving the ring electrode.
12. The apparatus of claim 10, wherein the driving mechanism controls the physical or electric connection between the driving unit and each of the metal plate electrodes by one of: (a) vertically moving the driving unit without rotating the driving unit, (b) rotationally and vertically moving the driving unit, or (c) rotating the driving unit without vertically moving the driving unit.
13. The apparatus of claim 12, wherein the driving unit is further configured to vertically move the driving unit without rotating the driving unit to control the physical or electric connection between the driving unit and each of the metal plate electrodes.
14. The apparatus of claim 12, wherein the driving unit is further configured to rotationally and vertically move the driving unit to control the physical or electric connection between the driving unit and each of the metal plate electrodes.
15. The apparatus of claim 12, wherein the driving unit is further configured to rotate the driving unit without vertically moving the driving unit to control the physical or electric connection between the driving unit and each of the metal plate electrodes.
16. The apparatus of claim 10, wherein said at least one of the application electrode and the facing electrode further includes a groove portion opened toward an opposite side of the plasma generation space, and wherein the driving mechanism is further configured to drive the driving unit in the groove portion.
17. An electrode for use in a plasma processing apparatus which generates a plasma of a gas by an RF power supplied to the electrode and performs a plasma process on a target substrate by using the generated plasma, and the electrode serves as one of an application electrode and a facing electrode that face each other and between which a plasma generation space is formed, the electrode comprising:
a base formed of a metal; and
a dielectric body inserted into the base; and
a plurality of metal plate electrodes being buried in the dielectric body, and
wherein each of the metal plate electrodes are arranged on top of one another while being spaced from each other in the dielectric body,
wherein each of the metal plate electrodes respectively have different-sized openings that are concentric with regard to a central portion of the dielectric body,
wherein a size of the concentric openings decreases in accordance with a distance of a respective metal plate electrode from the plasma generation space such that a concentric opening of a first metal plate electrode from the plurality of metal plate electrodes that is closer to the plasma generation space is larger than an opening of a second metal plate electrode from the plurality of metal plate electrodes located further away from the plasma generation space than the first metal plate electrode, and
wherein electric field intensity distribution of the RF power is controlled by controlling potentials of each of the metal plate electrodes.
18. The electrode of claim 17, wherein each of the metal plate electrodes is configured to make a physical or electric connection with a driving unit having a ground potential by moving the driving unit to change a position of the driving unit relative to each of the metal plate electrodes such that the potentials of each of the metal plate electrodes are selectively controlled to the ground potential, and
wherein when the potentials are controlled to the ground potential, a capacitance component at a peripheral portion of the dielectric body becomes larger than that at a central portion of the dielectric body, thereby obtaining a uniform electric field intensity distribution without significantly lowering an electric field intensity at the peripheral portion of the dielectric body.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of displaying a stereoscopic image in a display device having a display panel including a plurality of pixel rows, the method comprising:
sequentially writing black data to a portion of the pixel rows during a portion of a first frame period;
sequentially writing left eye image data to the pixel rows during the remaining portion of the first frame period and during a second frame period;
driving the pixel rows to simultaneously emit light during a first emission period corresponding to the second frame period;
sequentially writing the black data to the portion of the pixel rows during a portion of a third frame period;
sequentially writing right eye image data to the pixel rows during the remaining portion of the third frame period and during a fourth frame period; and
driving the pixel rows to simultaneously emit light during a second emission period corresponding to the fourth frame period.
2. The method of claim 1, wherein each of the portions of the first and third frame periods corresponds to an emission end delay period.
3. The method of claim 1, wherein each frame period is divided into first through N-th sub-frame periods, where N is an integer greater than 1 and wherein the portion of the first frame period is a portion of the first sub-frame period of the first frame period.
4. The method of claim 3, wherein the sequentially writing the left eye image data to the pixel rows during the remaining portion of the first frame period and during the second frame period includes:
sequentially writing the left eye image data to the remaining portion of the pixel rows during the remaining portion of the first sub-frame period of the first frame period;
sequentially writing the left eye image data to the pixel rows during the second through N-th sub-frame periods of the first frame period; and
sequentially writing the left eye image data to the pixel rows during the first through N-th sub-frame periods of the second frame period.
5. The method of claim 1, wherein the black data, the left eye image data and the right eye image data are written to the pixel rows via a progressive emission with simultaneous scan (PESS) method.
6. The method of claim 1, further comprising:
applying first and second power supply voltages having a first voltage difference to the pixel rows i) during a first non-emission period corresponding to the first frame period and ii) during a second non-emission period corresponding to the third frame period such that the pixel rows do not emit light; and
applying the first and second power supply voltages having a second voltage difference greater than the first voltage difference to the pixel rows i) during the first emission period and ii) during the second emission period such that the pixel rows emit light.
7. The method of claim 6, wherein the first power supply voltage is a high power supply voltage, wherein the second power supply voltage is a low power supply voltage, and wherein the method further comprises:
raising the low power supply voltage rises to a high voltage level at a start time of the first non-emission period;
lowering the lower power supply voltage to a low voltage level at a start time of the first emission period;
raising the lower power supply voltage to the high voltage level at a start time of the second non-emission period; and
lowering the lower power supply voltage to the low voltage level at a start time of the second emission period.
8. The method of claim 7, wherein each of the portions of the first and third frame periods corresponds to a rising time during which the low power supply voltage rises from the low voltage level to the high voltage level.
9. The method of claim 6, wherein the first power supply voltage is a high power supply voltage, wherein the second power supply voltage is a low power supply voltage, and wherein the method further comprises:
lowering the high power supply voltage to a low voltage level at a start time of the first non-emission period;
raising the high power supply voltage to a high voltage level at a start time of the first emission period;
lowering the high power supply voltage to the low voltage level at a start time of the second non-emission period; and
raising the high power supply voltage to the high voltage level at a start time of the second emission period.
10. The method of claim 9, wherein each of the portions of the first and third frame periods corresponds to a falling time during which the high power supply voltage falls from the high voltage level to the low voltage level.
11. The method of claim 1, further comprising:
applying an emission control signal having a first voltage level to the pixel rows i) during a first non-emission period corresponding to the first frame period and ii) during a second non-emission period corresponding to the third frame period such that the pixel rows do not emit light; and
applying the emission control signal having a second voltage level to the pixel rows i) during the first emission period and ii) during the second emission period such that the pixel rows emit light.
12. The method of claim 11, wherein each of the portions of the first and third frame periods corresponds to a transition time during which the emission control signal transitions from the second voltage level to the first voltage level.
13. The method of claim 1, wherein the display panel includes an upper display panel having upper pixel rows of the pixel rows and a lower display panel having lower pixel rows of the pixel rows and wherein the upper display panel and the lower display panel are respectively driven by different data drivers.
14. The method of claim 13, wherein the black data, the left eye image data and the right eye image data are sequentially written to the upper pixel rows in a first direction from the top to the bottom of the upper display panel and wherein the black data, the left eye image data and the right eye image data are sequentially written to the lower pixel rows in the first direction from the top to the bottom of the lower display panel.
15. The method of claim 13, wherein the black data, the left eye image data and the right eye image data are sequentially written to the upper pixel rows in a first direction from the top to the bottom of the upper display panel and wherein the black data, the left eye image data and the right eye image data are sequentially written to the lower pixel rows in a second direction from the bottom to the top of the lower display panel.
16. A display device, comprising:
a display panel including a plurality of pixel rows; and
a driving unit configured to:
sequentially write black data to a portion of the pixel rows during a portion of a first frame period;
sequentially write left eye image data to the pixel rows during the remaining portion of the first frame period and during a second frame period;
drive the pixel rows to simultaneously emit light during a first emission period corresponding to the second frame period;
sequentially write the black data to the portion of the pixel rows during a portion of a third frame period;
sequentially write right eye image data to the pixel rows during the remaining portion of the third frame period and during a fourth frame period; and
drive the pixel rows to simultaneously emit light during a second emission period corresponding to the fourth frame period.
17. The display device of claim 16, wherein each of the portions of the first and third frame periods corresponds to an emission end delay period.
18. The display device of claim 16, wherein the driving unit includes:
a power supply configured to:
apply first and second power supply voltages having a first voltage difference to the pixel rows i) during a first non-emission period corresponding to the first frame period and ii) during a second non-emission period corresponding to the third frame period such that the pixel rows do not emit light; and
apply the first and second power supply voltages having a second voltage difference greater than the first voltage difference to the pixel rows i) during the first emission period and ii) during the second emission period such that the pixel rows emit light,
wherein each of the portions of the first and third frame periods corresponds to a transition time of at least one of the first and second power supply voltages.
19. The display device of claim 16, wherein the driving unit includes:
an emission controller configured to:
apply an emission control signal having a first voltage level to the pixel rows i) during a first non-emission period corresponding to the first frame period and ii) during a second non-emission period corresponding to the third frame period such that the pixel rows do not emit light; and
apply the emission control signal having a second voltage level to the pixel rows i) during the first emission period and ii) during the second emission period such that the pixel rows emit light,
wherein each of the portions of the first and third frame periods corresponds to a transition time during which the emission control signal transitions from the second voltage level to the first voltage level.
20. The display device of claim 16, wherein the display panel includes an upper display panel having upper pixel rows of the pixel rows and a lower display panel having lower pixel rows of the pixel rows, wherein the driving unit includes two data drivers respectively configured to drive the upper display panel and the lower display panel, wherein the black data, the left eye image data and the right eye image data are sequentially written to the upper pixel rows in a first direction from the top to the bottom of the upper display panel, and wherein the black data, the left eye image data and the right eye image data are sequentially written to the lower pixel rows in a second direction from the bottom to the top of the lower display panel.