1. A semiconductor device with a capacitor and a fuse, comprising:
a semiconductor substrate having a capacitor region and a fuse region defined therein;
a insulating layer over the semiconductor substrate;
a storage node hole formed in the insulating layer;
a barrier metal in the storage node hole;
a dielectric layer formed on the barrier metal and the insulating layer;
a lower metal layer for a plate electrode filling the storage node hole such that it is flush with the dielectric layer;
an upper metal layer for the plate electrode on the dielectric layer and lower metal layer for the plate electrode; and
a fuse metal layer formed of the same material as that of the upper metal layer for the plate electrode on the dielectric layer in the fuse region.
2. The semiconductor device according to claim 1, wherein the lower metal layer for the plate electrode comprises a titanium nitride layer deposited by chemical vapor deposition.
3. The semiconductor device according to claim 1, wherein the upper metal layer for the plate electrode and the fuse metal layer comprise a titanium nitride layer deposited by physical vapor deposition.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A zoom lens comprising, in order from an object side to an image side:
a first lens unit having positive refractive power;
a second lens unit having negative refractive power; and
a rear lens group having a plurality of lens units at least one of which has positive refractive power,
wherein the distance between the first lens unit and the second lens unit is greater at a telephoto end as compared to at a wide angle end,
wherein the first lens unit includes a positive lens and a negative lens,
wherein the rear lens group includes a lens unit R comprising a positive lens and a negative lens, the lens unit R having the highest zoom ratio among the lens units included in the rear lens group,
and wherein the Conditional Expressions
5.0<\u03bdd1n<27.0
5.0<\u03bddRn<27.0
\u03b8gF1n<2.381\xd710\u22124\xb7\u03bdd1n2\u22121.448\xd710\u22122\xb7\u03bdd1n+0.8223
\u03b8gFRn<2.381\xd710\u22124\xb7\u03bddRn2\u22121.448\xd710\u22122\xb7\u03bddRn+0.8223
\u22120.00150<(\u03b8gF1n\u2212\u03b8gF1p)(\u03bdd1n\u2212\u03bdd1p)
\u22120.00150<(\u03b8gFRn\u2212\u03b8gFRp)(\u03bddRn\u2212\u03bddRp)
are satisfied, where
of the positive lenses included in the first lens unit,
\u03bdd1p represents the Abbe number of the material of the positive lens of which the Abbe number of the lens material is the greatest, and
\u03b8gF1p represents the partial dispersion ratio thereof,
of the negative lenses included in the first lens unit,
\u03bdd1n represents the Abbe number of the material of the negative lens of which the Abbe number of the lens material is the smallest, and
\u03b8gF1n represents the partial dispersion ratio thereof,
of the positive lenses included in the lens unit R,
\u03bddRp represents the Abbe number of the material of the positive lens of which the Abbe number of the lens material is the greatest, and
\u03b8gFRp represents the partial dispersion ratio thereof, and
of the negative lenses included in the lens unit R,
\u03bddRn represents the Abbe number of the material of the negative lens of which the Abbe number of the lens material is the smallest, and
\u03b8gFRn represents the partial dispersion ratio thereof.
2. The zoom lens according to claim 1,
wherein the Conditional Expression
0.10<f1ft<0.70
is satisfied, where f1 represents the focal length of the first lens unit, and ft represents the focal length of the zoom lens at the telephoto end.
3. The zoom lens according to claim 1,
wherein the Conditional Expression
\u22120.200<f2ft<\u22120.010
is satisfied, where f2 represents the focal length of the second lens unit, and ft represents the focal length of the zoom lens at the telephoto end.
4. The zoom lens according to claim 1,
wherein the Conditional Expression
0.020<fRft<0.300
is satisfied, where fR represents the focal length of the lens unit R, and ft represents the focal length of the zoom lens at the telephoto end.
5. The zoom lens according to claim 1,
wherein the Conditional Expression
\u22124.00<f1nf1<\u22121.00
is satisfied, where fin represents the focal length of the negative lens of which the lens material has the smallest Abbe number of the negative lenses included in the first lens unit, and f1 represents the focal length of the first lens unit.
6. The zoom lens according to claim 1,
wherein the Conditional Expression
\u22123.00<fRnfR<\u22121.00
is satisfied, where fRn represents the focal length of the negative lens of which the lens material has the smallest Abbe number of the negative lenses included in the lens unit R, and fR represents the focal length of the lens unit R.
7. The zoom lens according to claim 1,
wherein the Conditional Expression
\u221210.00<M1fw<\u22121.00
is satisfied, where fw represents the focal length of the zoom lens at the wide angle end, and M1 represents the amount of movement on the optical axis of the first lens unit, when zooming from the wide angle end to the telephoto end.
8. The zoom lens according to claim 1,
wherein the Conditional Expression
\u22124.00<M2fw<3.00
is satisfied, where fw represents the focal length of the zoom lens at the wide angle end, and M2 represents the amount of movement on the optical axis of the second lens unit, when zooming from the wide angle end to the telephoto end.
9. The zoom lens according to claim 1,
wherein the Conditional Expression
\u22128.00<MRfw<\u22121.00
is satisfied, where fw represents the focal length of the zoom lens at the wide angle end, and MR represents the amount of movement on the optical axis of the lens unit R, when zooming from the wide angle end to the telephoto end.
10. The zoom lens according to claim 1,
wherein the rear unit consists of a third lens unit having positive refractive power, and a fourth lens unit having positive refractive power.
11. The zoom lens according to claim 1,
wherein the rear unit consists of a third lens unit having positive refractive power, a fourth lens unit having negative refractive power, and a fifth lens unit having positive refractive power.
12. The zoom lens according to claim 1,
wherein the rear unit consists of a third lens unit having negative refractive power, a fourth lens unit having positive refractive power, a fifth lens unit having negative refractive power, and a sixth lens unit having positive refractive power.
13. An image pickup apparatus comprising:
a zoom lens; and
an image sensor configured to receive an image formed by the zoom lens,
wherein the zoom lens comprises, in order from an object side to an image side:
a first lens unit having positive refractive power,
a second lens unit having negative refractive power, and
a rear lens group having a plurality of lens units at least one of which has positive refractive power,
wherein the distance between the first lens unit and the second lens unit is greater at a telephoto end as compared to at a wide angle end,
wherein the first lens unit includes a positive lens and a negative lens,
wherein the rear lens group includes a lens unit R comprising a positive lens and a negative lens, the lens unit R having the highest zoom ratio among the lens units included in the rear lens group,
and wherein the Conditional Expressions
5.0<\u03bdd1n<27.0
5.0<\u03bddRn<27.0
\u03b8gF1n<2.381\xd710\u22124\xb7\u03bdd1n2\u22121.448\xd710\u22122\xb7\u03bdd1n+0.8223
\u03b8gFRn<2.381\xd710\u22124\xb7\u03bddRn2\u22121.448\xd710\u22122\xb7\u03bddRn+0.8223
\u22120.00150<(\u03b8gF1n\u2212\u03b8gF1p)(\u03bdd1n\u2212\u03bdd1p)
\u22120.00150<(\u03b8gFRn\u2212\u03b8gFRp)(\u03bddRn\u2212\u03bddRp)
are satisfied, where
of the positive lenses included in the first lens unit,
\u03bdd1p represents the Abbe number of the material of the positive lens of which the Abbe number of the lens material is the greatest, and
\u03b8gF1p represents the partial dispersion ratio thereof,
of the negative lenses included in the first lens unit,
\u03bdd1n represents the Abbe number of the material of the negative lens of which the Abbe number of the lens material is the smallest, and
\u03b8gF1n represents the partial dispersion ratio thereof,
of the positive lenses included in the lens unit R,
\u03bddRp represents the Abbe number of the material of the positive lens of which the Abbe number of the lens material is the greatest, and
\u03b8gFRp represents the partial dispersion ratio thereof, and
of the negative lenses included in the lens unit R,
\u03bddRn represents the Abbe number of the material of the negative lens of which the Abbe number of the lens material is the smallest, and
\u03b8gFRn represents the partial dispersion ratio thereof.