1. A storage apparatus comprising a processor:
the processor
calculates an upper limit of an inputoutput processing amount, which is determined based on priority levels set to a plurality of storage devices, for each of the storage devices;
schedules an execution sequence of processes relating to inputoutput requests received from information processing apparatuses, based on processing amounts relating to the inputoutput requests and the calculated upper limits;
executes the processes relating to the inputoutput requests in the scheduled execution sequence;
determines, for each of the storage devices, whether or not a processing amount relating to the inputoutput requests for the each of the storage devices exceeds a processing bandwidth of the each of the storage devices for a first predetermined time; and
changes the upper limit for the each of the storage devices in a predetermined bandwidth accommodation unit in a case where the processing amount relating to the inputoutput requests for the each of the storage devices is determined to exceed the processing bandwidth of the each of the storage devices.
2. The storage apparatus according to claim 1, the processor determines, for the each of the storage devices, whether or not the processing amount relating to the inputoutput requests for the each of the storage devices is below the processing bandwidth of the each of the storage devices for a second predetermined time, and
in a case where a processing amount relating to the inputoutput requests for a first storage device among the plurality of the storage devices is determined to exceed the processing bandwidth of the first storage device for the first predetermined time, and a processing amount relating to the inputoutput requests for a second storage device among the plurality of the storage devices is determined to be below the processing bandwidth of the second storage device for the second predetermined time, the processor performs bandwidth accommodation from the second storage device to the first storage device in the predetermined bandwidth accommodation unit by changing the upper limits in the predetermined bandwidth accommodation unit.
3. The storage apparatus according to claim 2, wherein the processor performs the bandwidth accommodation from the second storage device to the first storage device in the predetermined bandwidth accommodation unit by changing the upper limits such that a value corresponding to the predetermined bandwidth accommodation unit is added to the upper limit calculated for the first storage device, and such that the value corresponding to the predetermined bandwidth accommodation unit is subtracted from the upper limit calculated for the second storage device.
4. The storage apparatus according to claim 3, wherein the value corresponding to the predetermined bandwidth accommodation unit is equal to or less than a minimum interval of the inputoutput processing amount that is determined based on the priority levels.
5. The storage apparatus according to claim 2, the processor acquires, for the each of the storage devices, a processing standby amount of the inputoutput requests for the each of the storage devices at an interval shorter than the first predetermined time and acquire a minimum of the processing standby amounts acquired within the first predetermined time as a minimum standby amount, and
the processor determines that the processing amount relating to the inputoutput requests for the first storage device exceeds the processing bandwidth of the first storage device for the first predetermined time in a case where the acquired minimum standby amount for the first storage device is non-zero.
6. The storage apparatus according to claim 5, wherein the processor acquires, as the minimum standby amount, a minimum standby unit number acquired by converting the minimum standby amount into the predetermined bandwidth accommodation unit.
7. The storage apparatus according to claim 2, the processor acquires, for each of the storage devices, a residual processing amount of the processing amount relating to the inputoutput requests for the each of the storage devices with respect to the processing bandwidth of the each of the storage devices at an interval shorter than the second predetermined time and acquire a minimum of the residual processing amounts acquired within the second predetermined time as a minimum residual amount, and
the processor determines that the processing amount relating to the inputoutput requests for the second storage device is below the processing bandwidth of the second storage device for the second predetermined time in a case where the acquired minimum residual amount is non-zero.
8. The storage apparatus according to claim 7, wherein the processor acquires, as the minimum residual amount, a minimum residual unit number acquired by converting the minimum residual amount into the predetermined bandwidth accommodation unit.
9. The storage apparatus according to claim 2, the processor
determines, for each of the storage devices, whether or not the each of the storage devices is the second storage device performing the bandwidth accommodation for one or more of the first storage devices and is a accommodation restoration target for which processing standby for the inputoutput requests for the each of the storage devices occurs; and
the processor returns, in a case where the each of the storage devices is determined as the accommodation restoration target, a processing amount accommodated to the other storage devices by the storage device that is the accommodation restoration target from the one or more of the first storage devices to the storage device that is the accommodation restoration target.
10. The storage apparatus according to claim 9, wherein the processor returns the processing amount from the one or more of the first storage devices to the storage device that is the accommodation restoration target such that residual amounts of the processing amounts accommodated to the one or more of the first storage devices are equal or approximately equal.
11. The storage apparatus according to claim 1, the processor determines, for each of the storage devices, whether or not the processing amount relating to the inputoutput requests for the each of the storage devices is a multiple of a predetermined number or more of the processing bandwidth of the each of the storage devices; and
the processor performs, in a case where the processing amount relating to the inputoutput requests for each of the storage devices is determined to be the multiple of the predetermined number or more of the processing bandwidth of the each of the storage devices, bandwidth accommodation to the each of the storage devices from the storage device having a bandwidth to spare over the processing amount relating to the inputoutput requests for the each of the storage devices.
12. The storage apparatus according to claim 1, wherein each of the plurality of storage devices is one of a plurality of logical units acquired by logically dividing one or more physical storage devices.
13. A method of controlling a storage apparatus causing the storage apparatus to perform:
calculating an upper limit of an inputoutput processing amount, which is determined based on priority levels set to a plurality of storage devices, for each of the storage devices;
scheduling an execution sequence of processes relating to inputoutput requests received from information processing apparatuses, based on processing amounts relating to the inputoutput requests and the calculated upper limits;
executing the processes relating to the inputoutput requests in the scheduled execution sequence;
determining, for each of the storage devices, whether or not a processing amount relating to the inputoutput requests for the each of the storage devices exceeds a processing bandwidth of the each of the storage devices for a first predetermined time; and
changing the upper limit for the each of the storage devices in a predetermined bandwidth accommodation unit in a case where the processing amount relating to the inputoutput requests for the each of the storage devices is determined to exceed the processing bandwidth of the each of the storage devices.
14. The method of controlling the storage apparatus according to claim 13, wherein the storage apparatus is caused to further perform:
determining, for the each of the storage devices, whether or not the processing amount relating to the inputoutput requests for the each of the storage devices is below the processing bandwidth of the each of the storage devices for a second predetermined time; and
performing bandwidth accommodation, in a case where a processing amount relating to the inputoutput requests for a first storage device among the plurality of the storage devices is determined to exceed the processing bandwidth of the first storage device for the first predetermined time, and a processing amount relating to the inputoutput requests for a second storage device among the plurality of the storage devices is determined to be below the processing bandwidth of the second storage device for the second predetermined time, from the second storage device to the first storage device in the predetermined bandwidth accommodation unit by changing the upper limits in the predetermined bandwidth accommodation unit.
15. The method of controlling the storage apparatus according to claim 14, wherein the storage apparatus is caused to further perform the bandwidth accommodation from the second storage device to the first storage device in the predetermined bandwidth accommodation unit by changing the upper limits such that a value corresponding to the predetermined bandwidth accommodation unit is added to the upper limit calculated for the first storage device, and such that the value corresponding to the predetermined bandwidth accommodation unit is subtracted from the upper limit calculated for the second storage device.
16. The method of controlling the storage apparatus according to claim 15, wherein the value corresponding to the predetermined bandwidth accommodation unit is equal to or less than a minimum interval of the inputoutput processing amount that is determined based on the priority levels.
17. A non-transitory computer-readable recording medium having stored therein a storage apparatus control program for causing a computer included in the storage apparatus to execute a process comprising:
calculating an upper limit of an inputoutput processing amount, which is determined based on priority levels set to a plurality of storage devices, for each of the storage devices;
scheduling an execution sequence of processes relating to inputoutput requests received from information processing apparatuses, based on processing amounts relating to the inputoutput requests and the calculated upper limits;
executing the processes relating to the inputoutput requests in the scheduled execution sequence;
determining, for each of the storage devices, whether or not a processing amount relating to the inputoutput requests for the each of the storage devices exceeds a processing bandwidth of the each of the storage devices for a first predetermined time; and
changing the upper limit for the each of the storage devices in a predetermined bandwidth accommodation unit in a case where the processing amount relating to the inputoutput requests for the each of the storage devices is determined to exceed the processing bandwidth of the each of the storage devices.
18. The non-transitory computer-readable recording medium having stored therein a storage apparatus control program according to claim 17, wherein the process further comprising:
determining, for the each of the storage devices, whether or not the processing amount relating to the inputoutput requests for the each of the storage devices is below the processing bandwidth of the each of the storage devices for a second predetermined time; and
performing bandwidth accommodation, in a case where a processing amount relating to the inputoutput requests for a first storage device among the plurality of the storage devices is determined to exceed the processing bandwidth of the first storage device for the first predetermined time, and a processing amount relating to the inputoutput requests for a second storage device among the plurality of the storage devices is determined to be below the processing bandwidth of the second storage device for the second predetermined time, from the second storage device to the first storage device in the predetermined bandwidth accommodation unit by changing the upper limits in the predetermined bandwidth accommodation unit.
19. The non-transitory computer-readable recording medium having stored therein a storage apparatus control program according to claim 18, wherein the process further comprises performing the bandwidth accommodation from the second storage device to the first storage device in the predetermined bandwidth accommodation unit by changing the upper limits such that a value corresponding to the predetermined bandwidth accommodation unit is added to the upper limit calculated for the first storage device, and such that the value corresponding to the predetermined bandwidth accommodation unit is subtracted from the upper limit calculated for the second storage device.
20. The non-transitory computer-readable recording medium having stored therein a storage apparatus control program according to claim 19, wherein the value corresponding to the predetermined bandwidth accommodation unit is equal to or less than a minimum interval of the inputoutput processing amount that is determined based on the priority levels.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An ion beam source, comprising:
a magnetic field unit including a first side facing a target object to be treated and a second side, the first side opened and the second side closed, the first side including a plurality of magnetic pole portions arranged at predetermined intervals with an N-pole and an S-pole alternatively or with same magnetic poles and configured to form a closed loop of plasma electrons; and
an electrode unit arranged at a lower end of the closed loop, wherein
the ion beam source is configured
to rotate the plasma electrons within a process chamber along the closed loop,
to generate plasma ions from an internal gas within the process chamber, and
to provide the plasma ions to the target object.
2. The ion beam source according to claim 1, wherein intensities of magnetic fields generated at the magnetic pole portions are equivalent at points where the closed loop is formed.
3. The ion beam source according to claim 2, wherein
the magnetic field unit includes magnetic portions at lower ends of the respective magnetic pole portions, and
the magnetic portion at the lower end of the magnetic pole portion on an edge has a cross-sectional area equal to half of that of the magnetic portion located at the lower end of each of other magnetic pole portions.
4. The ion beam source according to claim 1, wherein the magnetic field unit is configured to control concentration, divergence, or parallel movement of the plasma ions by adjusting at least one of thickness, inclination, or opening width of the magnetic pole portion adjacent to the first side.
5. The ion beam source according to claim 1, further comprising an insulating fixing portion filled between an inner surface of the magnetic field unit and an outer surface of the electrode unit excluding a space of the closed loop, the insulating fixing portion being configured to fix the electrode unit to the magnetic field unit.
6. The ion beam source according to claim 5, wherein the insulating fixing portion includes a concavo-convex portion on an opening surface that faces the first side.
7. The ion beam source according to claim 1, wherein the magnetic pole portion includes a gas inlet portion configured to inject an ionization adjusting gas into the process chamber.
8. The ion beam source according to claim 7, wherein the gas inlet portion includes
a gas inflow portion configured to inflow the ionization adjusting gas from outside,
a gas channel portion communicated with the gas inflow portion and formed inside along a longitudinal direction, and
a gas diverging portion communicated with the gas channel portion and to the direction of the closed loop, and having a slit shape.
9. The ion beam source according to claim 1, wherein
the magnetic field unit is center-bent, and
both sides of magnetic field unit are inclined forward or backward.
10. The ion beam source according to claim 1, wherein the electrode unit includes
a reaction gas inflow portion communicated with outside, and
a reaction gas ejection portion communicated with the reaction gas inflow portion and the first side.
11. The ion beam source according to claim 10, wherein the reaction gas ejection portion includes a plurality of through-holes spaced at predetermined intervals or connected cut-out slits.
12. The ion beam source according to claim 1, wherein the magnetic pole portions are configured to form a plurality of closed loops.
13. The ion beam source according to claim 12, wherein the ion beam source is configured to control energy of an emitted ion beam by supplying different levels of power to each electrode unit that forms each of the closed loops.
14. An ion beam source, comprising:
a magnetic field unit including a first side facing a target object to be treated and a second side, the first side opened and the second side closed, the first side including a plurality of magnetic pole portions arranged at predetermined intervals with an N-pole and an S-pole alternatively or with same magnetic poles and configured to form a closed loop of plasma electrons; and
an electrode unit arranged at a lower end of the closed loop, wherein
the ion beam source is configured
to rotate the plasma electrons within a process chamber along the closed loop,
to generate plasma ions from an internal gas within the process chamber, and
to provide the plasma ions to the target object, and
intensities of magnetic fields generated at the magnetic pole portions are equivalent at points where the closed loop is formed.
15. The ion beam source according to claim 14, wherein the magnetic pole portions are configured to form a plurality of closed loops.
16. The ion beam source according to claim 15, wherein the ion beam source is configured to control energy of an emitted ion beam by supplying different levels of power to each electrode unit that forms each of the closed loops.
17. An ion beam source, comprising:
a magnetic field unit including a first side facing a target object to be treated and a second side, the first side opened and the second side closed, the first side including a plurality of magnetic pole portions arranged at predetermined intervals with an N-pole and an S-pole alternatively or with same magnetic poles and configured to form a closed loop of plasma electrons; and
an electrode unit arranged at a lower end of the closed loop, wherein
the ion beam source is configured
to rotate the plasma electrons within a process chamber along the closed loop,
to generate plasma ions from an internal gas within the process chamber, and
to provide the plasma ions to the target object,
the magnetic field unit is center-bent, and
both sides of magnetic field unit are inclined forward or backward.
18. The ion beam source according to claim 17, wherein the magnetic pole portions are configured to form a plurality of closed loops.
19. The ion beam source according to claim 18, wherein the ion beam source is configured to control energy of an emitted ion beam by supplying different levels of power to each electrode unit that forms each of the closed loops.