What is claimed is:
1. A combination of viscosity-standardized edible solutions for evaluating human subjects for dysphagia, the combination comprising:
(a) a first edible solution having a known viscosity of less than about 30 cp;
(b) a second edible composition having a known viscosity of between about 150 cp and about 350 cp at about 23 C.; and
(c) a third edible composition having a known viscosity of between about 2,000 cp and about 4,000 cp at about 23 C.
2. The combination according to claim 1, wherein the second edible composition has a viscosity of between about 200 cp and about 300 cp, and the third edible composition has a viscosity of between about 2,500 cp and 3,500 cp.
3. The combination according to claim 1, wherein the first edible composition has a viscosity of about 25 cp, the second edible composition has a viscosity of about 270 cp, and the third edible composition has a viscosity of about 2,800 cp.
4. The combination according to claim 1, wherein the first, second, and third edible compositions comprise an imaging agent.
5. The combination according to claim 4, wherein the imaging agent is a radio-opaque imaging agent.
6. The combination according to claim 5, wherein the radio-opaque imaging agent is a barium-containing compound.
7. The combination according to claim 5, wherein the radio-opaque imaging agent is barium sulfate.
8. In a composition for radiographic imaging of swallowing in humans, the composition comprising a vehicle and a radio-opaque imaging agent, the improvement comprising at least one standardized edible solution of defined viscosity, the solution comprising an edible solution having a known viscosity of between about 15 and about 4,000 cp at about 23 C.
9. The improvement according to claim 8, comprising two standardized solutions of defined viscosity, the solutions comprising::
(a) a first edible composition having a known viscosity of between about 150 cp and about 350 cp at about 23 C.; and
(b) a second edible composition having a known viscosity of between about 2,000 cp and about 4,000 cp at about 23 C.
10. The improvement according to claim 9, wherein the first edible composition has a viscosity of between about 200 cp and about 300 cp, and the second edible composition has a viscosity of between about 2,500 cp and 3,500 cp.
11. The improvement according to claim 10, wherein the first edible composition has a viscosity of about 270 cp, and the second edible composition has a viscosity of about 2,800 cp.
12. The improvement according to claim 8 comprising three standardized solutions of defined viscosity, the solutions comprising::
(a) a first edible composition having a known viscosity of between about 150 cp and about 350 cp at about 23 C.;
(b) a second edible composition having a known viscosity of between about 2,000 cp and about 4,000 cp at about 23 C.; and
(c) a third edible composition having a known viscosity of less than about 30 cp at about 23 C.
13. The improvement according to claim 12, wherein the first edible composition has a viscosity of between about 200 cp and about 300 cp, and the second edible composition has a viscosity of between about 2,500 cp and 3,500 cp.
14. The improvement according to claim 12, wherein the first edible composition has a viscosity of about 270 cp, the second edible composition has a viscosity of about 2,800 cp, and the third edible composition has a viscosity of about 25 cp.
15. A method for evaluating a human subject for dysphagia, the method comprising:
(a) providing at least one standardized edible solution comprising an edible composition having a known viscosity of between about 15 cp and about 4,000 cp at about 23 C.: and
(b) evaluating swallowing in the subject for indications of dysphagia when the subject swallows the edible composition.
16. The method according to claim 15, wherein in step (a) is provided:
i a first edible composition having a known viscosity of between about 150 cp and about 350 cp at about 23 C.; and
ii a second edible composition having a known viscosity of between about 2,000 cp and about 4,000 cp at about 23 C.; and
in step (b), evaluating swallowing in the subject for indications of dysphagia when the subject swallows the first edible composition; and further comprising
(c) evaluating swallowing in the subject for indications of dysphagia when the subject swallows the second edible composition.
17. The method according to claim 16, wherein in step (a) a first edible composition having a viscosity of between about 200 cp and about 300 cp, and a second edible composition has a viscosity of between about 2,500 cp and 3,500 cp are provided.
18. The method according to claim 16, wherein in step (a) a first edible composition having a viscosity of about 270 cp, and a second edible composition having a viscosity of about 2,800 cp are provided.
19. The method according to claim 16, wherein in step (a) is further provided a third edible composition having a viscosity of less than about 30 cp at 23 C., and further comprising (d) evaluating swallowing in the subject for indications of dysphagia when the subject swallows the third edible composition.
20. The method according to claim 19 wherein in step (a) the first, second, and third edible compositions comprise a radio-opaque imaging agent; and in steps (b), (c), and (d), swallowing is evaluated by radiography.
21. The method according to claim 16, wherein the edible composition comprises a non-pulpy fruit juice wherein viscosity of the fruit juice is modified by adding a thickening agent thereto.
22. The method according to claim 21, wherein the fruit juice is apple juice.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed as the invention is:
1. A condenser for a photolithography system wherein a mask image from a mask is projected onto a wafer through a camera having an entrance pupil, said condenser comprising:
a source of propagating radiation;
a first mirror illuminated by said radiation;
a mirror array illuminated by said radiation reflected from said first mirror, said mirror array including a plurality of micromirrors, each of said mirrors being selectively actuatable independently of each other; and
a second mirror illuminated by said radiation reflected from said array, said first mirror and said second mirror being disposed such that said source is imaged onto a plane of said mask and said mirror array is imaged into said pupil.
2. A condenser as set forth in claim 1 wherein each of said micromirrors is selectively tilted to provide a prescribed spatial coherence in the entrance pupil of the camera for all points in the image field at said entrance pupil.
3. A condenser as set forth in claim 1 wherein each of said micromirrors is selectively tilted such that intensity of said radiation is prescribed within the camera’s print area at said mask plane.
4. A condenser as set forth in claim 1 wherein each of said micromirrors is selectively actuatable within a tilt angle range in 2 dimensions.
5. A condenser as set forth in claim 4 wherein said tilt angle is referenced to either side of a normally coplanar position.
6. A condenser as set forth in claim 1 wherein each of said mirrors is selectively actuatable to one of a plurality of discrete positions.
7. A condenser as set forth in claim 1 wherein said first mirror has an elliptical cross-section.
8. A condenser as set forth in claim 7 wherein said elliptical cross-section is substantially a collimating mirror.
9. A condenser as set forth in claim 1 wherein said first mirror includes a plurality of aspherical mirror segments wherein segments are each an off-axis section of an elliptical mirror.
10. A condenser as set forth in claim 1 wherein said second mirror is an off-axis section of an elliptical mirror.
11. A condenser as set forth in claim 1 wherein said micromirrors are substantially rectangular.
12. A condenser as set forth in claim 11 wherein each of said micromirrors has a major dimension of between 1 mm and 4 mm.
13. A condenser as set forth in claim 11 wherein adjacent micromirrors of the array of said micromirrors are separated by no more than substantially 15 m.
14. A condenser as set forth in claim 11 wherein each of said micromirrors has a tilt range between substantially 2 mr and 40 mr.
15. A condenser as set forth in claim 11 wherein each of said micromirrors deviates from a flatness by less than substantially 200 nm.
16. A condenser as set forth in claim 11 wherein each of said micromirrors has a micro-roughness of less than substantially 2 .
17. A condenser as set forth in claim 1 wherein the number of said micromirrors is between substantially 200 and 1000.
18. A condenser as set forth in claim 17 wherein said mirror array includes a plurality of sections.
19. A condenser as set forth in claim 18 wherein the number of said sections is four.
20. A condenser as set forth in claim 1 wherein said micromirrors are substantially hexagonal.
21. A condenser as set forth in claim 1 wherein said first mirror and said source are separated by a distance substantially equal to 150 mm.
22. A condenser as set forth in claim 1 wherein said first mirror and said mirror array are separated by substantially 440 mm.
23. A condenser as set forth in claim 1 wherein said mirror array and said third mirror are separated by substantially 1150 mm.
24. A condenser as set forth in claim 1 wherein said third mirror and said mask are separated by substantially 155 mm.
25. A condenser as set forth in claim 1 wherein a back focus between said mask and said entrance pupil is substantially 450 mm.
26. A photolithography system wherein an image of a mask is projected onto a wafer comprising:
a source of propagating EUV radiation;
a first mirror illuminated by said radiation;
a mirror array illuminated by said radiation reflected from said first mirror, said mirror array including a plurality of micromirrors, each of said mirrors being selectively actuatable independently of each other;
a second mirror illuminated by said radiation reflected from said array; and
a camera operable in a wavelength of said radiation and having an entrance pupil, said first mirror and said second mirror being disposed such that said source is imaged onto a plane of said mask and said mirror array is imaged into said pupil.
27. A condenser as set forth in claim 26 wherein each of said micromirrors is selectively tilted to provide a prescribed coherence of said radiation at all points in the image field at said entrance pupil.
28. A condenser as set forth in claim 26 wherein each of said micromirrors is selectively tilted such that intensity of said radiation is uniform at said mask plane.
29. A condenser as set forth in claim 26 wherein each of said micromirrors is selectively actuatable within a tilt angle range.
30. A condenser as set forth in claim 29 wherein said tilt angle is referenced to either side of a normally coplanar position.
31. A condenser as set forth in claim 26 wherein each of said mirrors is selectively actuatable to one of a plurality of discrete positions.
32. A condenser as set forth in claim 26 wherein said first mirror has an elliptical cross-section.
33. A condenser as set forth in claim 32 wherein said elliptical cross-section is substantially a collimating mirror.
34. A condenser as set forth in claim 26 wherein said first mirror includes a plurality of aspherical mirror segments wherein segments are each an off-axis section of an elliptical mirror.
35. A condenser as set forth in claim 26 wherein said second mirror is an off-axis section of an elliptical mirror.
36. A condenser as set forth in claim 26 wherein said micromirrors are substantially rectangular.
37. A condenser as set forth in claim 36 wherein each of said micromirrors has a major dimension of between 1 mm and 4 mm.
38. A condenser as set forth in claim 36 wherein each of said micromirrors are separated by no more than substantially 15 m.
39. A condenser as set forth in claim 36 wherein each of said micromirrors has a tilt range between substantially 2 mr and 40 mr.
40. A condenser as set forth in claim 36 wherein each of said micromirrors deviates from a flatness by less than substantially 200 nm.
41. A condenser as set forth in claim 36 wherein each of said micromirrors has a micro-roughness of less than substantially 2 .
42. A condenser as set forth in claim 26 wherein a number of said micromirrors is between substantially 200 and 1000.
43. A condenser as set forth in claim 42 wherein said mirror array includes a plurality of sections.
44. A condenser as set forth in claim 43 wherein the number of said sections is four.
45. A condenser as set forth in claim 26 wherein said micromirrors are substantially hexagonal.
46. A condenser as set forth in claim 26 wherein said first mirror and said source are separated by a distance substantially equal to substantially 150 mm.
47. A condenser as set forth in claim 26 wherein said first mirror and said mirror array are separated by substantially 440 mm.
48. A condenser as set forth in claim 26 wherein said mirror array and said third mirror are separated by substantially 1150 mm.
49. A condenser as set forth in claim 26 wherein said third mirror and said mask are separated by substantially 155 mm.
50. A condenser as set forth in claim 26 wherein a back focus between said mask and said entrance pupil is substantially 450 mm.