1. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
forming a first insulation film over a substrate including a first region and a second region such that said first insulation film covers said first region and said second region;
forming a first trench and a second trench in said first insulation film such that said first trench is located over said first region and said second trench is located over said second region of said substrate;
filling said first trench and said second trench by a first conductive film to form a first electrode in said first trench and a second electrode in said second trench;
forming a second insulation film over said interlayer insulation film so as to cover said first and second electrodes;
forming a third trench in said second insulation film so as to expose said second electrode;
forming a third electrode and a fourth electrode over said second insulation film simultaneously, wherein a capacitor element is formed by sandwiching said second insulation film between said third electrode and said first electrode and wherein said fourth electrode makes contact with said second electrode at said third trench;
forming a third insulation film over said second insulation film so as to cover said third and fourth electrodes; and
forming a fourth trench in said third insulation film, said step of forming said fourth trench being conducted while using said second insulation film as an etching stopper.
2. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
forming a first insulation film over a substrate;
forming a trench in said first insulation film;
filling said trench with a first conductive film to form a first electrode in said trench;
forming a second insulation film so as to cover said first electrode;
forming a second electrode over said second insulation film, such that a capacitor element is formed by sandwiching said second insulation film between said second electrode and said first electrode;
forming a third insulation film over said second insulation film so as to cover said first and second electrodes; and
forming a second trench in said third insulation film, said step of forming said second trench being conducted while using said second insulation film as an etching stopper.
3. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
forming a first insulation film over a substrate including a first region and a second region such that said first insulation film covers said first region and said second region;
forming a first trench and a second trench in said first insulation film such that said first trench is located over said first region and said second trench is located over said second region of said substrate;
filling said first trench and said second trench by a first conductive film to form a first electrode in said first trench and a second electrode in said second trench;
forming a second insulation film over said interlayer insulation film so as to cover said first and second electrodes;
forming a third electrode such that said second insulation film is sandwiched between said third electrode and said first electrode and such that said third electrode forms a capacitor element together with said first electrode and said second insulation film;
forming a third insulation film over said second insulation film so as to cover said third electrode; and
forming a third trench in said third insulation film so as to expose said second electrode, wherein said second insulation film acts as an etching stopper when said third trench is formed in said third insulation film.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of mounting an accessory base to a wall surface, the method comprising:
providing a mounting bracket comprising,
a body portion comprising at least a first major surface,
at least one angled retaining flange;
providing at least one sheet of double-faced adhesive with first and second oppositely-facing major adhesive surfaces;
attaching the first major surface of the sheet of adhesive to the first major surface of the mounting bracket;
attaching the second major surface of the sheet of adhesive to the wall surface;
providing an accessory base comprising,
an open-ended cavity adapted to receive the mounting bracket,
an interior surface located within the open-ended cavity,
an engaging member movably connected to the accessory base and arranged to protrude into the open-ended cavity and to engage the angled retaining flange of the mounting bracket;
positioning the accessory base such that the open-ended cavity receives the mounting bracket; and,
securing the accessory base and the mounting bracket to each other, wherein the securing process comprises:
engaging the engaging member with the mounting bracket such that it contacts the angled retaining flange of the mounting bracket and urges the mounting bracket and the accessory base toward each other, until the engaging member is in a fully engaged position such that at least a portion of the mounting bracket contacts at least a portion of the interior surface of the accessory base so as to prevent any further movement of the mounting bracket and the accessory base toward each other, such that the mounting bracket and the accessory base are secured together;
and wherein when the engaging member is in its fully engaged position, the mounting bracket is recessed within the open-ended cavity of the accessory base.
2. The method of claim 1 wherein the accessory base comprises a perimeter surface which at least partly bounds the open end of the cavity and wherein at least a part of the perimeter surface defines an imaginary plane extending across the open end of the cavity, and,
wherein when the engaging member is in its fully engaged position, the first major surface of the mounting bracket is located at a position that is, relative to the imaginary plane defined by the perimeter surface, between 0.1 mm toward the interior surface of the accessory base and about 1.0 mm toward the interior surface of the accessory base.
3. The method of claim 2 wherein when the accessory base and the mounting bracket are secured to each other, the perimeter surface of the accessory base and the wall surface are less than about 1.0 mm apart.
4. The method of claim 1 wherein the mounting bracket comprises at least one mounting bracket contact structure that contacts a portion of the interior surface of the accessory base upon the urging of the mounting bracket and accessory base toward each other.
5. The method of claim 1 wherein the accessory base comprises at least one accessory base contact structure that contacts a portion of the mounting bracket upon the urging of the mounting bracket and accessory base toward each other.
6. The method of claim 1 wherein the mounting bracket comprises at least one mounting bracket contact structure, wherein the accessory base comprises at least one accessory base contact structure, and wherein the mounting bracket contact structure and the accessory base contact structure contact each other upon the urging of the mounting bracket and accessory base toward each other.
7. The method of claim 6 wherein the mounting bracket contact structure and the accessory base contact structure each comprise an elongated structure with a long axis, and wherein the long axis of the mounting bracket contact structure and the long axis of the accessory base contact structure, are oriented substantially transversely to each other.
8. The method of claim 1 wherein the engaging of the engaging member comprises moving the engaging member such that it protrudes further into the open-ended cavity in a direction substantially parallel to the first major surface of the mounting bracket.
9. The method of claim 1 wherein the double-faced adhesive sheet comprises a sheet of stretch release adhesive comprising at least one pull tab, and wherein when the mounting bracket and the accessory base are secured together and the mounting bracket is attached to a wall surface, the accessory base substantially conceals the mounting bracket and the at least one pull tab.
10. An assembly mountable to a wall surface, comprising:
a mounting bracket comprising,
a body portion comprising at least a first major surface,
at least one angled retaining flange;
a sheet of double-faced adhesive adhesively bonded to the first major surface of the mounting bracket and arranged to adhesively bond the mounting bracket to a wall surface; and,
an accessory base comprising,
an open-ended cavity adapted to receive the mounting bracket,
an interior surface located within the open-ended cavity,
an engaging member movably connected to the accessory base and arranged to protrude into the open-ended cavity and to engage the angled retaining flange of the mounting bracket;
wherein the engaging member is movable at least between a retracted position allowing the mounting bracket to be removed from the open-ended cavity, and a fully engaged position securing the mounting bracket and the accessory base together,
and further wherein when the engaging member is in its fully engaged position, the mounting bracket is recessed within the open-ended cavity of the accessory base.
11. The assembly of claim 10 wherein the accessory base comprises a perimeter surface which at least partly bounds the open end of the cavity and wherein at least a part of the perimeter surface defines an imaginary plane extending across the open end of the cavity, and,
wherein when the engaging member is in its fully engaged position, the first major surface of the mounting bracket is located at a position that is, relative to the imaginary plane defined by the perimeter surface, between 0.1 mm toward the interior surface of the accessory base and about 1.0 mm toward the interior surface of the accessory base.
12. The assembly of claim 10 wherein the mounting bracket comprises at least one mounting bracket contact structure that contacts a portion of the interior surface of the accessory base upon the moving of the engaging member to a fully engaged position.
13. The assembly of claim 10 wherein the accessory base comprises at least one accessory base contact structure that contacts a portion of the mounting bracket upon the moving of the engaging member to a fully engaged position.
14. The assembly of claim 10 wherein the mounting bracket comprises at least one mounting bracket contact structure, wherein the accessory base comprises at least one accessory base contact structure, and wherein the mounting bracket contact structure and the accessory base contact structure are configured to contact each other upon the moving of the engaging member to a fully engaged position.
15. The assembly of claim 14 wherein the mounting bracket contact structure and the accessory base contact structure each comprise an elongated structure with a long axis, and wherein the long axis of the mounting bracket contact structure and the long axis of the accessory base contact structure are oriented substantially transversely to each other.
16. The assembly of claim 10 wherein the mounting bracket has a long axis and a short axis and the accessory base has a long axis and a short axis, and wherein the mounting bracket and the accessory base are configured such that the when the open-ended cavity receives the mounting bracket, the long axes of the mounting bracket and the accessory base are substantially aligned, and wherein the engaging member is configured to protrude into the open-ended cavity in a direction substantially parallel to the short axis of the accessory base.
17. The assembly of claim 10 wherein the double-faced adhesive sheet comprises a stretch-releasing adhesive.
18. The assembly of claim 10 wherein the mounting bracket, the accessory base, and the engaging member are comprised of metal.
19. An assembly mountable to a wall surface, comprising:
a mounting bracket comprising,
a body portion comprising at least a first major surface,
at least one angled retaining flange;
a sheet of double-faced adhesive having a thickness, the double-faced adhesive sheet being adhesively bonded to the first major surface of the mounting bracket and arranged to adhesively bond the mounting bracket to a wall surface; and,
an accessory base comprising,
an open-ended cavity adapted to receive the mounting bracket,
an interior surface located within the open-ended cavity,
a perimeter surface which at least partly bounds the open end of the cavity and wherein at least a part of the perimeter surface defines an imaginary plane extending across the open end of the cavity,
an engaging member movably connected to the accessory base and arranged to protrude into the open-ended cavity and to engage the angled retaining flange of the mounting bracket;
wherein the engaging member is movable at least between a retracted position allowing the mounting bracket to be removed from the open-ended cavity, and a fully engaged position securing the mounting bracket and the accessory base together,
and further wherein when the engaging member is in its fully engaged position, the first major surface of the mounting bracket is located at a position that is, relative to the imaginary plane defined by the perimeter surface, recessed toward the interior surface of the accessory base a distance that is about 10% to about 90% of the thickness of the double-faced adhesive sheet.
20. The assembly of claim 19 wherein when the engaging member is in its fully engaged position, the first major surface of the mounting bracket is located at a position that is, relative to the imaginary plane defined by the perimeter surface, recessed toward the interior surface of the accessory base a distance that is about half the thickness of the double-faced adhesive sheet.