1. A modular light unit for illuminating a hazardous underwater environment, comprising:
a housing having a front portion and a back shell portion, the front portion including a light transmissive window;
a layered lighting assembly enclosed within the housing, the layered lighting assembly comprising:
a printed circuit board comprising a dielectric layer affixed to a thermally-conductive metal base and having a lower surface, wherein a plurality of electrically-conductive traces is formed on an upper surface of the dielectric layer;
a plurality of LEDs in electrical communication with the plurality of electrically-conductive traces and in thermal communication with the lower surface of the printed circuit board, wherein the plurality of LEDs are arranged in an array pattern;
a thermally-conductive material disposed between and in close contact with the lower surface of the printed circuit board and an inner surface of the back shell portion;
a reflector array disposed over an upper surface of the printed circuit board, the reflector array having a pattern corresponding to the array pattern of the LEDs, wherein the reflector array has a reflector corresponding to each LED of the plurality of LEDs; and
a water-tight connector in electrical communication with the electrically-conductive traces for releasable connection to an electrical cable for providing power to drive the plurality of LEDs.
2. The modular light fixture of claim 1, further comprising a quick-release mechanical fastener attached to the housing for releasably attaching the modular light unit to a support structure installed within the hazardous underwater environment.
3. The modular light unit of claim 1, wherein the housing is formed from stainless steel.
4. The modular light unit of claim 1, further comprising a yoke pivotably attached to the housing, wherein the yoke comprises a quick-release connector for attachment to a support structure mounted within the hazardous underwater environment.
5. The modular light unit of claim 1, wherein the water-tight connector is a wet-mateable connector.
6. A modular light unit for illuminating a hazardous underwater environment, comprising:
a housing having a front portion and a back shell portion, the front portion including a light transmissive window;
a frame pivotably attached to the housing, wherein the frame comprises a quick-release connector for attachment to a support structure mounted within the hazardous underwater environment;
a layered lighting assembly enclosed within the housing, the layered lighting assembly comprising:
a printed circuit board comprising a dielectric layer affixed to a thermally-conductive metal base and having a lower surface, wherein a plurality of electrically-conductive traces is formed on an upper surface of the dielectric layer;
a plurality of LEDs in electrical communication with the plurality of electrically-conductive traces and in thermal communication with the lower surface of the printed circuit board, wherein the plurality of LEDs are arranged in an array pattern;
a thermally-conductive material disposed between and in close contact with the lower surface of the printed circuit board and an inner surface of the back shell portion; and
a water-tight connector in electrical communication with the electrically-conductive traces for releasable connection to an electrical cable associated with the support structure for providing power to drive the plurality of LEDs.
7. The modular light unit of claim 6, wherein the housing is formed from stainless steel.
8. The modular light unit of claim 6, wherein the layered lighting assembly further comprises a reflector array disposed over an upper surface of the printed circuit board, the reflector array having a pattern corresponding to the array pattern of the LEDs, wherein the reflector array has a reflector corresponding to each LED of the plurality of LEDs.
9. The modular light unit of claim 6, wherein the water-tight connector is a wet-mateable connector.
10. A rapid-changeout light assembly for attachment to and removal from a support structure disposed within a hazardous underwater environment, comprising:
a housing having a front portion and a back shell portion, the front portion including a light transmissive window;
a frame pivotably attached to the housing, wherein the frame comprises a quick-release connector for attachment to the support structure;
a layered lighting assembly enclosed within the housing, the layered lighting assembly comprising:
a metal core printed circuit board having a plurality of electrically-conductive traces is formed on an upper surface thereof and a base comprising a thermally-conductive metal;
an array of LEDs in electrical communication with the plurality of electrically-conductive traces and in thermal communication with the base;
a thermally-conductive material abutting the base on a first side and an inner surface of the back shell portion on a second side;
a reflector array disposed over an upper surface of the printed circuit board, the reflector array corresponding to the array of the LEDs so that the reflector array has a reflector corresponding to each LED of the array of LEDs and
a water-tight connector in electrical communication with the electrically-conductive traces for releasable connection to an electrical cable associated with the support structure for providing power to drive the plurality of LEDs.
11. The rapid-changeout light assembly of claim 10, wherein the housing is formed from stainless steel.
12. The modular light unit of claim 10, wherein the water-tight connector is a wet-mateable connector.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A photolithography apparatus comprising:
an illumination system for conditioning radiation from a light source, the illumination system comprising a three-pore illumination shaper, wherein at least one of the three pores is defined by a first edge of the shaper extending along a first axis and an opposing second edge of the shaper extending along a second axis, the first edge being connected to the second edge by a first plurality of edges of the shaper extending along the first axis and a second plurality of edges of the shaper extending along the second axis, the first axis being substantially perpendicular to the second axis;
a reticle comprising at least a portion of a pattern to be imaged onto a substrate, wherein a three-pore illumination pattern provided by the illumination system is projected through the reticle; and
a projection lens disposed between the reticle and the substrate.
2. The apparatus of claim 1 wherein the illumination system further comprises an optical integrator and a condenser lens.
3. The apparatus of claim 1 wherein the light source comprises a laser.
4. The apparatus of claim 1 wherein the three-pore illumination shaper forms a pattern to be imaged on the substrate that includes a high-density pattern.
5. The apparatus of claim 1 wherein the three pores includes a central pore for facilitating capture of isolated features of the pattern to be imaged on the substrate.
6. The apparatus of claim 5 wherein the three pores includes a pair of pores disposed on opposite sides of the central pore for facilitating capture of dense pitch features of the pattern to be imaged on the substrate.
7. The apparatus of claim 6 wherein the pair of pores are positioned so as to maximize the first order diffraction energy captured during exposure.
8. The method of claim 1 wherein the UV light source comprises a laser.
9. A method of forming a pattern on a substrate, the method comprising:
shaping radiation from an ultraviolet light source to provide a three-pore illumination pattern; and
projecting the three-pore illumination pattern onto a substrate via a reticle comprising at least a portion of a pattern to be imaged on the substrate,
wherein shaping radiation from the ultraviolet light source to provide the three-pore illumination pattern includes using a three-pore illumination shaper, and
wherein at least one of the three pores is defined by a first edge of the shaper extending along a first axis and an opposing second edge of the shaper extending along a second axis, the first edge being connected to the second edge by a first plurality of edges of the shaper extending along the first axis and a second plurality of edges of the shaper extending along the second axis, the first axis being substantially perpendicular to the second axis.
10. The method of claim 9 wherein the pattern to be imaged on the substrate comprises a high-density pattern.
11. The method of claim 9 wherein the three-pore illumination pattern comprises a central pore for facilitating capture of isolated features of the pattern to be imaged on the substrate.
12. The method of claim 11 wherein the three-pore illumination pattern comprises a pair of pores disposed on opposite sides of the central pore for facilitating capture of dense pitch features of the pattern to be imaged on the substrate.
13. The method of claim 12 wherein the pair of pores are positioned so as to maximize the first order diffraction energy captured during exposure of the substrate.
14. A photolithography apparatus comprising:
a mechanism for securing a substrate;
a radiation source;
a mechanism for securing a reticle including a pattern;
a projection lens disposed between the reticle and the substrate; and
a multi-pore illumination device disposed between the radiation source and the substrate, wherein a first pore of the multi-pore illumination device enhances contrast of an isolated feature of the pattern, and a second pore of the multi-pore illumination device enhances contrast of a dense feature of the pattern, the second pore defined by a first edge of the multi-pore illumination device extending along a first axis and an opposing second edge of the multi-pore illumination device extending along a second axis, the first edge being connected to the second edge by a first plurality of edges of the multi-pore illumination device extending along the first axis and a second plurality of edges of the multi-pore illumination device extending along the second axis, the first axis being substantially perpendicular to the second axis.
15. The apparatus of claim 14 wherein the multi-pore illumination device is a three-pore shaper and the first pore is centrally located relative to the other two pores.
16. The apparatus of claim 14 wherein the second pore works with a third pore of the three-pore shaper to enhance contrast of the dense feature and wherein the second and third pores are arranged on opposite sides of the first pore.
17. The apparatus of claim 16 wherein the second and third pores are positioned so as to maximize the first order diffraction energy captured during exposure.
18. The apparatus of claim 14 wherein the radiation source comprises a UV radiation source.
19. The apparatus of claim 14 wherein the radiation source comprises a laser.