1. An image processor comprising:
a data input device which receives color image data; and
an image corrector which corrects the color image data received by said data input device to maximize an overlapping quantity of histograms of the image data on a plurality of colors.
2. An image processor comprising:
a data input device which receives color image data;
a histogram generator which calculates histograms of a plurality of colors on the color image data received by said data input device; and
an image corrector which corrects color deviation of image to maximize an overlapping quantity of the histograms.
3. An image processor comprising:
a data input device which receives color image data;
a color fog detector which detects color fog on the color image data received by said data input device and determines a color of the color fog; and
a calculator which decreases the image data of the color on which color fog is detected by said color fog detector.
4. A computer readable storage medium storing a program comprising the steps of:
receiving color image data; and
correcting the color image data to maximize an overlapping quantity of histograms of the image data on a plurality of colors.
5. A computer readable storage medium storing a program comprising the steps of:
receiving color image data;
calculating histograms of a plurality of colors on the color image data; and
correcting color deviation of image to maximize an overlapping quantity of the histograms.
6. A computer readable storage medium storing a program comprising the steps of:
receiving color image data;
detecting color fog on the color image data and determines a color of the color fog; and
decreasing the image data of the color on which color fog is detected.
7. An image processor comprising:
a color fog detector which detects color fog in an input color image data; and
a display device which displays a dolor of the color fog detected by said color fog detector.
8. The image processor according to claim 7, wherein said display device displays a color patch of the color of the color fog.
9. The image processor according to claim 7, further comprising an image corrector which corrects the image data according to a result of color fog detection by said color fog detector, wherein said display device displays an image corrected by said image corrector as well as the color of the color fog.
10. The image processor according to claim 7, further comprising an image corrector which corrects the image according to a result of color fog detection by said color fog detector, and an input device with which a user instructs to correct the image data by said image corrector according to a color fog detection result of said color fog detector or not.
11. A computer readable storage medium storing a program comprising the steps of:
detecting color fog in an input image data; and
displaying a dolor of the detected color fog.
12. The storage medium according to claim 11, wherein the program further comprises a step of instructing by a user to correct the image data according to a color fog detection result or not.
13. An image processor comprising:
a color fog corrector which corrects color fog of input image; and
a contrast corrector which corrects contrast on the image corrected by said color fog corrector.
14. A computer readable storage medium storing a program comprising the steps of:
correcting color fog of input image; and
correcting contrast on the image corrected on color fog.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of determining line widths, the method comprising:
measuring spectral responses of first and second sections of a measurement mark, each section comprising primary and secondary lines, the primary lines being arranged at a first pitch in alternating order with the secondary lines and the secondary lines being spaced from the primary lines at a first distance, wherein a first primary width of the primary lines of the first section differs from a second primary width of the primary lines of the second section; and
determining, from a combination of the spectral responses, the sign of a difference between a target and an actual width of the primary lines or the secondary lines.
2. The method of claim 1, wherein the second primary width is equal to a first secondary width of the secondary lines of the first section.
3. The method of claim 1, wherein the primary lines are formed directly via lithography and the secondary lines are formed via a pitch fragmentation method.
4. The method of claim 1, wherein the sign of the difference is determined from a characteristic value of a differential spectrum obtained by comparison of the spectral responses of the first and second sections and a predetermined relationship between the sign of the difference and the characteristic value.
5. The method of claim 4, further comprising:
determining the absolute value of the difference between target and actual widths of one of the primary and the secondary lines from the characteristic value of the differential spectrum and a predetermined relationship between the absolute value of the difference and the characteristic value.
6. A method of determining line widths, the method comprising:
measuring spectral responses of first, second, third and fourth sections of a measurement mark, each section comprising primary lines and secondary lines, the primary lines being arranged at a first pitch and in alternating order with the secondary lines, the secondary lines being spaced apart from the primary lines at a first distance, wherein the widths of the primary lines of the first and second sections differ by twice a first offset symmetric to a first reference width and the widths of the primary lines of the third and fourth sections differ by twice a second offset symmetric to a second reference width;
determining a first characteristic value from a combination of the spectral responses of the first and second sections and determining a second characteristic value from the spectral responses of the third and fourth sections; and
determining, from the first and second characteristic values, the sign of a difference between a target and an actual width of the primary or secondary lines.
7. The method of claim 6, wherein the primary lines are formed directly via lithography and the secondary lines are formed via a pitch fragmentation method.
8. The method of claim 6, wherein the characteristic values are determined from differential spectra obtained by comparison of the respective spectral responses.
9. The method of claim 6, further comprising:
determining the absolute value of the difference between target and actual widths of one of the primary and the secondary lines from the characteristic values and the first and second amount.
10. The method of claim 6, further comprising:
determining, from the sign of the difference between the widths of the primary and the secondary lines, a sign of the difference between target and actual widths of further lines formed outside the measurement mark.
11. The method of claim 6, further comprising:
forwarding the sign of the difference between the widths of the primary and the secondary lines into a model; and
determining absolute values of the difference between the target and actual widths via the model and a fitting algorithm.
12. The method of claim 6, wherein the characteristic values are determined based on differential spectra that are obtained through subtracting the spectral responses of the first and second section and the spectral responses of the third and fourth section or vice versa.
13. The method of claim 6, wherein the characteristic values are determined based on differential spectra that are obtained through subtracting the intensities of the respective spectral responses at a predetermined number of predefined discrete frequencies.
14. An integrated circuit, comprising:
a measurement mark, including:
first and second sections comprising primary and secondary lines arranged at a first distance to each other, the primary lines being regularly arranged at a first pitch and in alternating order with the secondary lines;
wherein a width of the primary lines of the first section is approximately equal to a width of the secondary lines of the second section.
15. An integrated circuit, comprising:
a measurement mark, including:
first, second, third and fourth sections, each section comprising primary and secondary lines, the primary lines being arranged at a first pitch and in alternating order with the secondary lines and the secondary lines being spaced at a first distance from the primary lines;
wherein widths of the primary lines of the first and second sections differ by twice a first offset symmetric to a first reference width and widths of the primary lines of the third and fourth sections differ by twice a second offset symmetric to a second reference width, the second reference width being different than the first reference width.
16. The integrated circuit of claim 15, further comprising:
further primary and further secondary lines arranged in alternating order, wherein the further primary lines are arranged at a regular pitch and have a width that differs from the width of the other primary lines.
17. The integrated circuit of claim 15, wherein the sections are arranged along a line.
18. The integrated circuit of claim 15, wherein neighboring ones of the sections adjoin.
19. A measurement apparatus, comprising:
an analyzer unit configured to determine spectral responses and to output spectral data relating to the spectral responses; and
a calculator unit connected to the analyzer unit, the calculator unit being configured to determine a sign of a difference between target and actual widths of lines by comparing at least first and second spectrums corresponding to first and second sections of a sample, each section comprising primary and secondary lines, the primary lines being arranged at a first pitch and in alternating order with the secondary lines and the secondary lines being spaced apart at a first distance from the primary lines, wherein a width of the primary lines of the first section is different than a width of the primary lines of the second section.
20. The measurement apparatus of claim 19, wherein the calculator unit is further configured:
to determine a first characteristic value by comparison of the first and second spectra; and
to determine, from a predefined relationship between the first characteristic value and the difference between target and actual widths of one of the primary and the secondary lines, the absolute value of the difference between target and actual widths of one of the primary and the secondary lines.
21. The measurement apparatus of claim 19, wherein the calculator unit is further configured:
to determine a first characteristic value by comparison of the first and second spectra and a second characteristic value by comparison of a third and a forth spectrum corresponding to a third and a forth section; and
to determine, from the first and second characteristic values, the absolute value of the difference between target and actual widths of one of the primary and the secondary lines.
22. A computer program product, comprising:
a computer storage medium; and
a program code mechanism embedded in the computer storage medium, the program code mechanism, comprising:
a calculator code device configured to determine the sign of a difference between a target and an actual width of a primary or secondary line of a first or second measurement mark section from a first spectral response of the first measurement mark section and a second spectral response of the second measurement mark section, wherein:
the first measurement mark section comprises first primary and first secondary lines, the first primary lines having a first width and being arranged at a first pitch and in alternating order with the first secondary lines and the first secondary lines being spaced apart from the first primary lines at a first distance; and
the second measurement mark section comprises second primary and second secondary lines, the second primary lines having a second width being different than the first width and being arranged at the first pitch and in alternating order with the second secondary lines being spaced apart from the second primary lines at the first distance.
23. The computer program product of claim 22, further comprising:
a data storage mechanism configured to store calibration information that links a characteristic value of the spectra of the sections of the measurement mark with the value of the width aberration.
24. The computer program product of claim 23, wherein the calculator code device is further configured to determine, from the calibration information and a respective characteristic value of the spectra of the sections of the measurement mark, the absolute value of the width aberration.
25. The computer program product of claim 22, wherein the calculator code device is further configured:
to determine a first characteristic value by comparison of the first and second spectra and a second characteristic value by comparison of a third and a forth spectrum assigned to a third and a forth section; and
to determine, from the first and second characteristic values, the absolute value of the width aberration.