1. A method for producing a semiconductor structure, comprising the steps of:
providing a substrate;
forming, on said substrate, a dielectric layer comprising at least one metal oxide;
forming a nitrided layer from said dielectric layer; said nitrided layer comprising either at least one metal nitride corresponding to said metal oxide or a metal oxynitride;
removing said nitrided layer selectively with respect to said dielectric layer in a predetermined etching medium.
2. The method of claim 1, further comprising masking partially said dielectric layer and forming said nitrided layer by converting an unmasked region of said dielectric layer in a nitrogen-containing atmosphere.
3. The method of claim 1, further comprising the steps of:
masking partially said nitrided layer by means of a mask;
forming said dielectric layer by converting an unmasked region of said nitrided layer in an oxygen-containing atmosphere; and
removing said mask.
4. The method of claim 1, wherein removing said nitrided layer is carried out in at least one of SC12, phosphoric acid, or hydrofluoric acid.
5. The method of claim 1, wherein said metal oxide is selected from the following group: Al2O3, HfO, TiO2, Ta3O5, ZrO, ScO and rare earth oxides.
6. The method of claim 1, wherein said metal nitride is selected from the following group: AlN, HfN and SiN.
7. The method of claim 1, wherein said metal oxynitride is selected from the following group: Al\u2014O\u2014N, Hf\u2014O\u2014N, Ti\u2014O\u2014N, Ta\u2014O\u2014N, Zr\u2014O\u2014N, Sc\u2014O\u2014N and rare earth oxides.
8. The method of claim 2, wherein said converting takes place at a temperature between 700\xb0 C. and 1200\xb0 C.
9. The method of claim 2, wherein said converting takes place at a temperature between 950\xb0 C. and 1050\xb0 C.
10. The method of claim 1, wherein the step of forming said nitrided layer is effected by a plasma process utilizing nitrogen radicals.
11. The method of claim 1, comprising the steps of:
providing said dielectric layer as a capacitor dielectric on walls of a trench;
partially filling said trench with a conducting filling as an inner capacitor electrode; and
converting said dielectric layer above a top side of said conducting filling into said nitrided layer in a nitrogen-containing atmosphere; said conducting filling serving as a mask for a part of said dielectric layer which is located below said top side of said conducting filling.
12. The method of claim 1, comprising:
providing said dielectric layer as a gate dielectric on said substrate;
providing and patterning a gate on said dielectric layer; and
converting said dielectric layer next to said gate into said nitrided layer in a nitrogen-containing atmosphere; said gate serving as a mask for a part of said dielectric layer which is located beneath said gate.
13. The method of claim 1, comprising applying a further dielectric layer to said substrate prior to forming a metal oxide layer.
14. The method of claim 3, comprising forming PMOS transistors in a masked region and forming NMOS transistors in said unmasked region.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. In a distributed computer network where a host computer communicates with at least one remote computer and an image of the host computer’s desktop is shared with said at least one remote computer, said host computer and at least one remote computer each operating in a multiple-window graphic user interface environment and running an application sharing program, a method of sharing an image of the host computer desktop comprising the steps of:
at the host computer, identifying displayed elements of the host computer desktop associated with both the application sharing program and control tools of said multiple-window graphic user interface environment;
transmitting image data representing the image of the host computer desktop from the host computer to said at least one remote computer; and
at the at least one remote computer, upon receipt of the image data automatically displaying a visually modified image of the host computer desktop in full screen, said visually modified image of the host computer desktop being a replica of said host computer desktop and further comprising visual demarcations overlying at least one of the identified displayed elements of the host computer desktop, said visual demarcations constituting a visual cue to a viewer that the full screen modified image of the host computer desktop displayed by the at least one remote computer is not a local desktop of said at least one remote computer.
2. The method of claim 1 wherein said identified displayed elements comprise windows of said application sharing program and at least one of task and scroll bars of said multiple-window graphic user interface environment.
3. The method of claim 1 wherein said identified displayed elements comprise windows of said application sharing program and both task and scroll bars of said multiple-window graphic user interface environment.
4. The method of claim 2 wherein said visual demarcations comprise hatching.
5. The method of claim 4 wherein said visual demarcations further comprise labeling.
6. The method of claim 2 wherein the image of said host computer desktop is visually modified prior to transmission of said image data to said at least one remote computer.
7. The method of claim 2 wherein the image of said host computer desktop image is visually modified after transmission of said image data to said at least one remote computer.
8. The method of claim 3 wherein said visual demarcations comprise hatching.
9. The method of claim 8 wherein said visual demarcations further comprise labeling.
10. The method of claim 3 wherein the image of said host computer desktop is visually modified prior to transmission of said image data to said at least one remote computer.
11. The method of claim 3 wherein the image of said host computer desktop is visually modified after transmission of said image data to said at least one remote computer.
12. The method of claim 6 wherein said visual demarcations comprise hatching.
13. The method of claim 7 wherein said visual demarcations comprise hatching.
14. The method of claim 1 wherein the image of said host computer desktop is visually modified prior to transmission of said image data to said at least one remote computer.
15. The method of claim 1 wherein the image of said host computer desktop is visually modified after transmission of said image data to said at least one remote computer.
16. The method of claim 14 wherein said visual demarcations comprise hatching.
17. The method of claim 15 wherein said visual demarcations comprise hatching.
18. The method of claim 1 wherein visual demarcations overlie each of the identified displayed elements of the host computer desktop.
19. The method of claim 18 wherein said visual demarcations comprise hatching.
20. The method of claim 18 wherein the image of said host computer desktop is visually modified prior to transmission of said image data to said at least one remote computer.
21. The method of claim 18 wherein the image of said host computer desktop is visually modified after transmission of said image data to said at least one remote computer.
22. The method of claim 20 wherein said visual demarcations comprise hatching.
23. The method of claim 21 wherein said visual demarcations comprise hatching.
24. The method of claim 18 wherein said identified displayed elements comprise windows of said application sharing program and at least one of task and scroll bars of said multiple-window graphic user interface environment.
25. The method of claim 18 wherein said identified displayed elements comprise windows of said application sharing program and both task and scroll bars of said multiple-window graphic user interface environment.
26. The method of claim 24 wherein the image of said host computer desktop is visually modified prior to transmission of said image data to said at least one remote computer.
27. The method of claim 26 wherein said visual demarcations comprise hatching.
28. The method of claim 25 wherein the image of said host computer desktop is visually modified after transmission of said image data to said at least one remote computer.
29. The method of claim 28 wherein said visual demarcations comprise hatching.