1. A device for producing a single crystal composed of silicon by remelting silicon granules, comprising
a rotating silicon plate having a central opening and having a tubular silicon extension which encloses the opening and extends below the plate;
a first induction heating coil arranged above the plate for melting granules; and
a second induction heating coil arranged below the plate for crystallizing the molten granules, wherein the second induction heating coil has, on its side opposed to the silicon plate, a lower layer comprising a magnetically permeable material, and an upper layer in which there is at least one cooling channel for conducting a coolant.
2. The device of claim 1, wherein the lower layer comprises a ferromagnetic plastic.
3. The device of claim 1, wherein the upper layer comprises a metallic material.
4. The device of claim 2, wherein the upper layer comprises a metallic material.
5. The device of claim 1, wherein the second induction heating coil and the upper layer comprise silver or copper.
6. The device of claim 1, wherein the second induction heating coil has at least one cooling channel for conducting a coolant.
7. The device of claim 1, wherein the upper layer has a cutout at its edge in a region of an internal hole in the second induction heating coil and on an opposing side with respect to power supply lines of the second induction heating coil, and the second induction heating coil has at least one nozzle for cooling the tubular silicon extension and an adjoining region of the plate with a gas.
8. The device of claim 1, wherein the upper layer is blackened on the side lying opposite the silicon plate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for mounting a specimen on a specimen carrier for milling in an ex-situ lift-out (EXLO) milling process where \u201ccross-section\u201d specimens, plan view specimens, bulk specimens may be lifted-out for analysis, the method comprising:
positioning the specimen on a recessed surface within a specimen carrier top surface ex-situ so that a region to be milled is centered about a carrier opening formed through the specimen carrier;
wedging peripheral edges of the specimen against inwardly sloping side walls framing the recessed surface; and
mounting the specimen on the specimen carrier so that a path of a milling beam intersects the region to be milled and carrier opening.
2. The method of claim 1, wherein the specimen carrier is rotated to present a backside of the specimen positioned on the recessed surface to the milling beam.
3. The method of claim 1, wherein the specimen is rotated on the specimen carrier to present a backside of the specimen positioned on the recessed surface to the milling beam.
4. The method of claim 1, wherein the specimen is configured with an asymmetry cut so that an orientation of the specimen can be determined when the specimen is mounted in the specimen carrier.
5. The method of claim 4, wherein the asymmetry is defined by an asymmetric cut formed on a single side of the specimen.
6. The method of claim 4, wherein the asymmetric cut results in the specimen having a wedge shape.
7. The method of claim 6, wherein the wedge shape has profile with a right angle.
8. The method of claim 1, wherein the step of mounting the specimen on the carrier includes interposing a glue, adhesive or epoxy between the specimen and the recessed surface on the carrier.
9. The method of claim 4 wherein the asymmetry of the specimen is defined by a protective deposition layer.
10. A method for mounting a specimen on a specimen carrier for milling in an ex-situ lift-out (EXLO) milling process where \u201ccross-section\u201d specimens, plan view specimens, bulk specimens may be lifted-out for analysis, the method comprising:
positioning the specimen on a recessed surface within a specimen carrier top surface ex-situ so that a region to be milled is centered about a carrier opening formed through the specimen carrier; and
mounting the specimen on the specimen carrier so that a path of a milling beam intersects the region to be milled and carrier opening,
whereby mounting the specimen on the specimen carrier includes adhering peripheral edges of the specimen to the recessed surface on either side of the carrier opening so that a middle portion of the specimen spans across the carrier opening on the recessed surface.
11. The method of claim 10, wherein the specimen carrier is rotated to present a backside of the specimen positioned on the recessed surface to the milling beam.
12. The method of claim 10, further including the step of rotating the specimen carrier to present a backside of the specimen positioned on the recessed surface to the milling beam.
13. The method of claim 10, further including the step of forming an asymmetry cut on the specimen so that an orientation of the specimen can be determined when the specimen is mounted in the specimen carrier.
14. The method of claim 13, wherein the asymmetry is defined by an asymmetric cut formed on a single side of the specimen.
15. The method of claim 13, wherein the asymmetry of the specimen is defined by a protective deposition layer.
16. The method of claim 13, wherein the asymmetric cut results in the specimen having a wedge shape.
17. The method of claim 16, wherein the wedge shape has profile with a right angle.
18. The method of claim 10, wherein the step of adhering the specimen on the carrier includes interposing a glue, adhesive or epoxy between the specimen and the recessed surface on the carrier.
19. The method of claim 10, wherein the step of adhering the specimen on the carrier includes adhering solely via large surface tension forces.