1. A method for determining characteristics of a plasma, comprising:
generating a first waveform from a first power source utilized to sustain a plasma;
obtaining information of the first waveform coupled to the plasma;
generating a second waveform from a low power diagnostic source that does not significantly change an operational characteristics of the plasma;
obtaining information of the second waveform coupled to the plasma, the first and second waveforms having different frequencies;
storing the information obtained from the first and second waveforms in a storage device; and
determining at least one characteristic of the plasma using the information obtained from the first and second waveforms.
2. The method of claim 1, wherein the step of determining further comprises:
determining an ion mass of the plasma.
3. The method of claim 2, wherein the step of determining the ion mass further comprises:
determining distribution of ion mass species within the plasma.
4. The method of claim 1, wherein the step of determining further comprises:
determining asymmetry of the plasma.
5. The method of claim 1, wherein the step of determining further comprises:
determining electron temperature of the plasma.
6. The method of claim 1, wherein the step of determining further comprises:
determining electron-molecule collision frequency within the plasma.
7. The method of claim 1, wherein the step of determining further comprises:
analyzing the plasma using a frequency dependent impedance model of the plasma.
8. A method for determining characteristics of a plasma, comprising:
generating a first waveform from a first power source utilized to sustain a plasma at a first frequency;
generating a second waveform from a low power diagnostic source that does not significantly change an operational characteristics of the plasma at a second frequency;
obtaining metrics associated with the waveforms of the plasma at the two different frequencies;
storing the metrics in a storage device; and
determining at least one characteristic of the plasma utilizing the metrics, wherein the at least one characteristic of the plasma is selected from the group consisting of an ion mass of the plasma, a distribution of ion mass species within the plasma, an asymmetry of the plasma, an electron temperature of the plasma and an electron-molecule collision frequency within the plasma.
9. The method of claim 8, wherein the step of obtaining metrics of the plasma further comprises:
obtaining current and voltage information of RF waveforms coupled to the plasma.
10. The method of claim 8, wherein the step of obtaining metrics of the plasma further comprises:
measuring metrics of waveforms provided by a plurality of RF power sources utilized to sustain the plasma.
11. The method of claim 8, wherein the step of determining further comprises:
determining at least one of an ion mass of the plasma, a distribution of ion mass species within the plasma, an asymmetry of the plasma, an electron temperature of the plasma or an electron-molecule collision frequency within the plasma.
12. The method of claim 8, wherein the step of determining further comprises:
determining a distribution between chlorine (Cl) species within the plasma.
13. A method for determining characteristics of a plasma, comprising:
generating a first waveform from a first power source utilized to sustain a plasma at a first frequency;
generating a second waveform from a low power diagnostic source that does not significantly change an operational characteristics of the plasma at a second frequency;
analyzing the waveforms coupled to the plasma at the two different frequencies to obtain plasma information;
storing the plasma information in a storage device; and
determining an ion mass of the plasma from the plasma information.
14. The method of claim 13, wherein the step of determining further comprises:
determining an electron-molecule collision frequency within the plasma from the plasma information.
15. The method of claim 13, wherein the step of analyzing further comprises:
analyzing metrics of waveforms provided by a plurality of RF power sources utilized to sustain the plasma.
16. The method of claim 13, wherein the step of determining further comprises:
determining a distribution between diatomic species within the plasma.
17. The method of claim 13, wherein the step of determining further comprises:
determining a distribution between process gas fragments within the plasma.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for execution on a server for serving presence information, the method for providing dynamically loaded speech recognition parameters to a speech recognition engine, comprising:
storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met;
receiving notice that a speech recognition session has been initiated between a user and the speech recognition engine;
executing the at least one rule;
selecting a first set of speech recognition parameters responsive to executing the at least one rule; and
providing to the speech recognition engine the first set of speech recognition parameters for performing speech recognition of the user.
2. The method of claim 1, wherein the step of storing at least one rule comprises:
storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met, and wherein criteria includes at least one value for at least one of time of day, recognition accuracy of the speech recognition engine, and grammar usage of the speech recognition engine.
3. The method of claim 2, wherein the step of storing at least one rule further comprises:
storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met, and wherein speech recognition parameters include any one of grammars, weights, accuracy settings, thresholds, and sensitivity.
4. The method of claim 3, wherein the step of executing the at least one rule comprises:
reading metadata including at least one value for at least one of time of day, recognition accuracy of the speech recognition engine, and grammar usage of the speech recognition engine; and
determining that the metadata meets criteria of the at least one rule.
5. The method of claim 4, wherein the step of selecting a first set of speech recognition parameters comprises:
selecting a first set of speech recognition parameters identical to the speech recognition parameters specified by the then-portion of the at least one rule.
6. A method for execution on a server for serving presence information, the method for providing dynamically loaded speech recognition parameters to a speech recognition engine, comprising:
storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met;
storing periodically updated metadata about a plurality of speech recognition engines;
selecting a first speech recognition engine based on most recently stored metadata;
receiving notice that a speech recognition session has been initiated between a user and the first speech recognition engine;
executing the at least one rule;
selecting a first set of speech recognition parameters responsive to executing the at least one rule; and
providing to the first speech recognition engine the first set of speech recognition parameters for performing speech recognition of the user.
7. The method of claim 6, wherein the step of storing at least one rule comprises:
storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met, and wherein criteria includes at least one value for at least one of time of day, recognition accuracy of a speech recognition engine, and grammar usage of a speech recognition engine.
8. The method of claim 7, wherein the step of storing at least one rule further comprises:
storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met, and wherein speech recognition parameters include any one of grammars, weights, accuracy settings, thresholds, and sensitivity.
9. The method of claim 8, wherein the step of storing periodically updated metadata comprises:
storing periodically updated metadata about a plurality of speech recognition engines, including any one of load data, supported grammars, availability, health, supported languages and acoustic model characteristics.
10. The method of claim 9, wherein the step of executing the at least one rule comprises:
reading metadata including at least one value for at least one of time of day, recognition accuracy of the first speech recognition engine, and grammar usage of the first speech recognition engine; and
determining that the metadata meets criteria of the at least one rule.
11. The method of claim 10, wherein the step of selecting a first set of speech recognition parameters comprises:
selecting a first set of speech recognition parameters identical to the speech recognition parameters specified by the then-portion of the at least one rule.
12. A computer system comprising a server for serving presence information, the server for providing dynamically loaded speech recognition parameters to a speech recognition engine, comprising:
a repository for storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met; and
a processor configured for:
receiving notice that a speech recognition session has been initiated between a user and the speech recognition engine;
executing the at least one rule;
selecting a first set of speech recognition parameters responsive to executing the at least one rule; and
providing to the speech recognition engine the first set of speech recognition parameters for performing speech recognition of the user.
13. The computer system of claim 12, wherein criteria includes at least one value for at least one of time of day, recognition accuracy of the speech recognition engine, and grammar usage of the speech recognition engine.
14. The computer system of claim 13, wherein speech recognition parameters include any one of grammars, weights, accuracy settings, thresholds, and sensitivity.
15. The computer system of claim 12, further comprising:
a load balancing server for distributing speech recognition sessions among a plurality of speech recognition engines based on availability of the speech recognition engines.
16. A computer program product comprising a computer usable medium on a server for serving presence information, the computer usable medium embodying computer usable program code for providing dynamically loaded speech recognition parameters to a speech recognition engine, comprising:
computer usable program code for storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met;
computer usable program code for receiving notice that a speech recognition session has been initiated between a user and the speech recognition engine;
computer usable program code for executing the at least one rule;
computer usable program code for selecting a first set of speech recognition parameters responsive to executing the at least one rule; and
computer usable program code for providing to the speech recognition engine the first set of speech recognition parameters for performing speech recognition of the user.
17. The computer program product of claim 16, wherein the computer usable program code for storing at least one rule comprises:
computer usable program code for storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met, and wherein criteria includes at least one value for at least one of time of day, recognition accuracy of the speech recognition engine, and grammar usage of the speech recognition engine.
18. The computer program product of claim 17, wherein the computer usable program code for storing at least one rule further comprises:
computer usable program code for storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met, and wherein speech recognition parameters include any one of grammars, weights, accuracy settings, thresholds, and sensitivity.
19. A computer program product comprising a computer usable medium on a server for serving presence information, the computer usable medium embodying computer usable program code for providing dynamically loaded speech recognition parameters to a speech recognition engine, comprising:
computer usable program code for storing at least one rule for selecting speech recognition parameters, wherein a rule comprises an if-portion including criteria and a then-portion specifying speech recognition parameters that must be used when the criteria is met;
computer usable program code for storing periodically updated metadata about a plurality of speech recognition engines;
computer usable program code for selecting a first speech recognition engine based on most recently stored metadata;
computer usable program code for receiving notice that a speech recognition session has been initiated between a user and the first speech recognition engine;
computer usable program code for executing the at least one rule;
computer usable program code for selecting a first set of speech recognition parameters responsive to executing the at least one rule; and
computer usable program code for providing to the first speech recognition engine the first set of speech recognition parameters for performing speech recognition of the user.