1. A termination resistance adjusting circuit comprising:
a first termination resistor circuit that has a variable resistance;
a second termination resistor circuit that has a variable resistance, and is connected in parallel with the first termination resistor circuit;
a resistor circuit for adjustment that adjusts the resistances of the first and second termination resistor circuits;
a first amplifier circuit that receives a first voltage and a second voltage, equalizes the first and second voltages, and outputs a resistance adjusting signal to the first and second termination resistor circuits, the first voltage being determined by the resistor circuit for adjustment, and the second voltage being determined by a reference resistor connected externally;
a first terminal connected to the first termination resistor circuit;
a second terminal connected to the second termination resistor circuit; and
a second amplifier circuit that receives a voltage based on a common voltage of a differential signal, and one of the first and second voltages, and equalizes the voltage based on the common voltage and the one of the first and second voltages, the differential signal being supplied to the first and second terminals.
2. The termination resistor circuit according to claim 1, wherein
each of the resistor circuit for adjustment, the first termination resistor circuit, and the second termination resistor circuit comprises a transistor, and
the resistance adjusting signal is input to a control terminal of the each transistor.
3. The termination resistance adjusting circuit according to claim 2, wherein each of the resistor circuit for adjustment, the first termination resistor circuit, and the second termination resistor circuit comprises a plurality of transistors.
4. The termination resistance adjusting circuit according to claim 2, wherein the each transistor has same size.
5. The termination resistance adjusting circuit according to claim 2, wherein the each transistor operates in a linear region.
6. The termination resistance adjusting circuit according to claim 2, wherein each of the resistor circuit for adjustment, the first termination resistor circuit, and the second termination resistor circuit comprises a fixed resistor.
7. The termination resistance adjusting circuit according to claim 1, wherein the resistances of the first and second termination resistor circuits match at a timing in which a value of the differential signal matches.
8. The termination resistance adjusting circuit according to claim 1, further comprising:
a first current source transistor that is connected in series with the reference resistor; and
a second current source transistor that is connected in series with the resistor circuit for adjustment,
wherein an output signal of the second amplifier circuit is input to control terminals of the first and second current source transistors.
9. The termination resistance adjusting circuit according to claim 8, wherein the first and second current source transistors have same size.
10. The termination resistance adjusting circuit according to claim 8, wherein the first and second current source transistors operate in a saturation region.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A plasma generator comprising:
a. several first electrodes extending from a common bed;
b. a second electrode member having several gas passages defined therein which open onto an outlet surface defined on the second electrode member,
wherein the first electrodes are situated within the gas passages.
2. The plasma generator of claim 1 further comprising an insulating layer interposed between the second electrode member and the first electrodes.
3. The plasma generator of claim 2 wherein the insulating layer is also provided between the second electrode member and the common bed of the first electrodes.
4. The plasma generator of claim 1 wherein each of the first electrodes extends from a base at the common bed to a tip spaced away from the common bed, and wherein at least the tip is covered by insulating material.
5. The plasma generator of claim 1 wherein the second electrode member is spaced from the first electrodes and their common bed.
6. The plasma generator of claim 1 further comprising:
a. a gas supply communicating with the gas passages of the second electrode member, and
b. a porous barrier interposed between the gas supply and the gas passages.
7. The plasma generator of claim 1 wherein the gas passages open onto a plenum space defined between the second electrode member and the common bed of the first electrodes.
8. The plasma generator of claim 7 wherein the plenum space has a porous barrier therein, the porous barrier being situated between the second electrode member and the common bed of the first electrodes.
9. The plasma generator of claim 8 further comprising a gas supply opening onto the plenum space, and wherein the opening is on the side of the porous barrier opposite the second electrode member.
10. The plasma generator of claim 1 wherein the second electrode member has an enclosed heatingcooling passage defined therein.
11. The plasma generator of claim 1 wherein the outlet surface of the second electrode member is surrounded by a ledge, whereby situating the ledge adjacent a workpiece defines a chamber between the outlet surface and the workpiece, the chamber being bounded by the outlet surface, the ledge, and the workpiece.
12. The plasma generator of claim 1 further comprising positioning means for adjusting the location of a workpiece with respect to the outlet surface of the second electrode.
13. A plasma generator comprising:
a. several first electrodes extending from a common bed;
b. several second electrodes, each second electrode having:
i. a gas passage defined therein which opens onto an outlet surface on the second electrode, and
ii. one of the first electrodes situated within its gas passage, this first electrode being spaced from the second electrode;
wherein the outlet surfaces of the second electrodes are adjacently arrayed along a common surface, whereby plasma generated in gas between the first and second electrodes may be ejected from the gas passages onto an article adjacent the common surface.
14. The plasma generator of claim 13 wherein the second electrodes are integrally formed within a common second electrode member, whereupon the common surface is defined.
15. The plasma generator of claim 14 further comprising a insulating layer interposed between the first and second electrodes
16. The plasma generator of claim 15 wherein the insulating layer is also provided between the common second electrode member of the second electrodes and the common bed of the first electrodes.
17. The plasma generator of claim 14 wherein the gas passages of the second electrodes extend between the common second electrode member of the second electrodes and the common bed of the first electrodes.
18. The plasma generator of claim 13 wherein the common surface is bounded by a ledge, whereby situating the ledge adjacent a workpiece defines a chamber between the common surface, the ledge, and the workpiece.
19. The plasma generator of claim 13 further comprising:
a. a gas supply communicating with the gas passages of the second electrodes, and
b. a porous barrier interposed between the gas supply and the gas passages.
20. The plasma generator of claim 13 further comprising positioning means for adjusting the location of a workpiece relative to the common surface whereupon the outlet surfaces of the second electrodes are arrayed.
21. A plasma generator comprising:
a. several elongated first electrodes, each extending from a base to a tip;
b. a second electrode member having several second electrodes defined therein, each second electrode being defined by a gas passage extending from an outlet surface on the second electrode member to an inlet surface on the second electrode member,
wherein each first electrode is situated within the gas passage of one of the second electrodes.
22. The plasma generator of claim 21 wherein an insulating layer is interposed between each first electrode and the second electrode member.
23. The plasma generator of claim 21 wherein the first electrodes have their bases extend from a common bed, the common bed being situated adjacent the inlet surface of the second electrode member.
24. The plasma generator of claim 23 further comprising a insulating layer between the first and second electrodes, and also between the inlet surface of the second electrode member and the common bed of the first electrodes.
25. The plasma generator of claim 21 wherein the outlet surface of the second electrode member is bounded by a ledge, whereby situating the ledge adjacent a workpiece defines a chamber bounded by the outlet surface, the ledge, and the workpiece.
26. The plasma generator of claim 21 further comprising positioning means for adjusting the location of a workpiece relative to the outlet surface of the second electrode member.