1. A method of fabricating a CMOS image sensor, comprising:
forming a shallow trench isolation layer on a semiconductor substrate to define an active area and peri area;
forming a photodiode on the semiconductor substrate in the active area and peri area, wherein a length of the photodiode formed in the active area to contact with the shallow trench isolation layer is shorter than a length of a photodiode formed in the peri area to contact with the shallow trench isolation layer; and
annealing the semiconductor substrate in the presence of deuterium, to remove dangling bonds from an interface between the semiconductor substrate and the shallow trench isolation layer.
2. The method of claim 1, wherein the annealing step is carried out in the presence of nitrogen.
3. The method of claim 2, wherein a composition ratio of deuterium to nitrogen is 2:8.
4. The method of claim 2, wherein the deuterium having a concentration of about 10 to 25%.
5. The method of claim 1, wherein the annealing step is carried out for 30 minutes at 400\xb0 C.
6. The method of claim 1, wherein the photodiode has a triangular shape.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A yoke assembly for a stator of a starter motor, comprising:
a cylindrical yoke having an inner peripheral wall;
a plurality of subassemblies including magnet springs and auxiliary poles, with each of the magnet springs and each of the auxiliary poles being assembled to each other in advance after which the subassemblies are fixedly secured to the inner peripheral wall of the yoke at circumferentially and equidistantly spaced positions thereof; and
a plurality of stator elements, each composed of a main pole made of a permanent magnet, which are fixedly secured to the inner peripheral wall of the yoke and each of which is fixedly retained with adjacent magnet springs;
wherein each of the magnet springs includes a back plate, fixedly secured to the inner peripheral wall of the cylindrical yoke, and side plates radially extending from the back plate toward the center of the cylindrical yoke, with the back plate and the side plates formed in a nearly U-shape in cross section and opening toward the center of the cylindrical yoke, wherein each of the auxiliary poles is supported with one of the side plates and held in contact with the main pole on a side increasing magnetic fluxes.
2. The yoke assembly for a stator of a starter motor according to claim 1, wherein:
each of the subassemblies is unitized such that one of each auxiliary pole and each magnet spring has a concaved portion and the other has a convexed portion with the concaved portion and the convexed portion being held in mating engagement with each other.
3. The yoke assembly for a stator of a starter motor according to claim 1, wherein:
each of the subassemblies is unitized such that each of the auxiliary poles has a protrusion formed by embossing and each of the magnet springs has a mating hole formed by punching with the protrusion and the mating hole being held in mating engagement with each other.
4. The yoke assembly for a stator of a starter motor according to claim 3, wherein:
the inner peripheral wall of the cylindrical yoke has bulging portions formed at equidistantly spaced positions;
each of the auxiliary poles is fixedly secured to an outside wall of one of the side plates of each magnet spring in direct contact with the main pole with the protrusion having a height nearly equal to a thickness of the side plate; and
the back plate of each magnet spring has a fixture hole held in mating engagement with each of the bulging portions such that the magnet spring is positioned;
wherein each of the bulging portions is plastically deformed to cause the back plate to be fixedly secured to the yoke.
5. The yoke assembly for a stator of a starter motor according to claim 3, wherein:
the auxiliary pole is fixedly secured to an outside wall of one of the side plates of each magnet spring in direct contact with the main pole with the protrusion having a height nearly equal to a thickness of the side plate; and
each of the magnet springs internally has a mounting chamber, accommodating therein a pole-to-pole magnet, which has an opening portion opened toward the center of the yoke, and a holding section to hold the pole-to-pole magnet in the mounting chamber so as to allow the same to close the opening portion.
6. The yoke assembly for a stator of a starter motor according to claim 1, wherein:
each of the magnet springs has axial end portions formed with claw portions held in abutting engagement with axial end faces of the main pole to fixedly retain the same.
7. The yoke assembly for a stator of a starter motor according to claim 5, wherein:
each of the magnet springs has axial end portions formed with ledge segments, respectively, which are held in axial end faces of the pole-to-pole magnet to fixedly retain the same in an axial direction of the yoke.
8. A starter motor including a stator incorporating the yoke assembly defined in claim 1.